CN100587939C - Clamper for cleaning and degumming silicon chip - Google Patents
Clamper for cleaning and degumming silicon chip Download PDFInfo
- Publication number
- CN100587939C CN100587939C CN200810234365A CN200810234365A CN100587939C CN 100587939 C CN100587939 C CN 100587939C CN 200810234365 A CN200810234365 A CN 200810234365A CN 200810234365 A CN200810234365 A CN 200810234365A CN 100587939 C CN100587939 C CN 100587939C
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- China
- Prior art keywords
- guide rod
- sticking machine
- plate
- demarcation strip
- position limiting
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention relates to a cleaning and degumming clamp used during the process for producing a solar electric silicon wafer. The cleaning and degumming clamp comprises two lateral plates, and a pairof upper guide poles, a pair of partition plate guide poles and a pair of lower guide poles which are arranged between two lateral plates. Partition plates are clamped and hung on the partition plateguide poles. The cleaning and degumming clamp is characterized in that two pair of machine bonding plate fixing clamps and at least a pair of machine bonding plate position limiting clamps are sheathed on the upper guide poles in a slide way; the machine bonding plate fixing clamps are provided with bolts which clamp pins on a machine bonding plate; the machine bonding plate position limiting clamps are provided with adjusting collets which resist against two sides of the machine bonding plate; the adjusting collets are connected with the machine bonding plate position limiting clamps by screwthread; and the machine bonding plate position limiting clamps are provided with the bolts which fix the machine bonding plate position limiting clamps on the upper guide poles. A silicon wafer cleaning and degumming clamp disclosed by the invention can be fit for the different types of the machine bonding plates, is convenient to use and operate with labor saving and reduces the cost investmenton clamp; in addition, a cleaned and degummed silicon wafer is upright on the lower guide poles and is not slipped and bumped easily to broke the silicon wafer, and the invention improves the good yield of the cleaned and degummed silicon wafer.
Description
Technical field
The present invention relates to a kind of anchor clamps, especially relate to a kind of clamper for cleaning and degumming in solar-electricity silicon chip production process is used.
Background technology
In the production process of silicon chip of solar cell, silicon rod, needs to make silicon chip break away from glass plate through cleaning and degumming silicon chip machine cleaning and degumming by on the glass plate that is adhesive in sticking machine plate after cutting into silicon chip.Have the anchor clamps that in the cleaning and degumming silicon chip process, use now, as Fig. 1, shown in Figure 2, clamper for cleaning and degumming silicon chip by lower clamp 1 ' and link 2 ' two parts form, lower clamp 1 ' by two side plates 101 ' between the device each a pair of top guide bar 102 ', demarcation strip guide rod 103 ' and lower guide rod 104 ' formation, be stained with the sticking machine plate 3 of well cutting silicon chip ' by bearing pin hang over top guide bar 102 ' on, link 2 ' structure takes the shape of the letter U, two ends be provided with handle 201 ' and when cleaning lifting usefulness hole 202 ', link 2 ' by screw 203 ' with lower clamp 1 ' be installed together, and link 2 ' on the sticking machine plate 3 of screw 203 ' be connected and fixed ', make sticking machine plate 3 ' maintain static, folder hang over demarcation strip guide rod 103 ' on demarcation strip 105 ' be inserted in the gap between the silicon chip, the silicon chip behind the cleaning and degumming drop to lower guide rod 104 ' on.Because lower clamp 1 ' and link 2 ' be two independent sectors, must install with bolt during each the use and connect, the sticking machine plate 3 of different model ' need use different model lower clamp 1 ' and connecting plate 2 ', therefore need to use the lower clamp and the connecting plate of a plurality of models, use inconvenient, operation is wasted time and energy, and the cost that drops on anchor clamps is higher.In addition, though clamper for cleaning and degumming silicon chip be provided with demarcation strip 105 ', but the silicon chip after can't fixedly coming unstuck effectively, generally demarcation strip 105 ' meeting produces slippage after being subjected to silicon chip gravity, if all demarcation strips 105 ' after stressed are all to a direction slippage, the silicon chip that comes unstuck after cleaning more easily slips in anchor clamps, collides, thereby makes the silicon chip fragmentation, and the yields of silicon chip is lower behind the cleaning and degumming.
Summary of the invention
The applicant has carried out research and has improved at above-mentioned problem, and a kind of clamper for cleaning and degumming silicon chip is provided, it goes for the sticking machine plate of different model, use and easy to operate, be reduced in the cost input on the anchor clamps, and can improve the yields of silicon chip behind the cleaning and degumming.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of clamper for cleaning and degumming silicon chip, comprise biside plate and device each a pair of top guide bar between biside plate, demarcation strip guide rod and lower guide rod, the demarcation strip guide rod is arranged between top guide bar and the lower guide rod, folder hangs with demarcation strip on the demarcation strip guide rod, described top guide bar upper sliding sleeve has two pairs of sticking machine plate geometrical clamps and at least one pair of sticking machine plate position limiting clamp, sticking machine plate geometrical clamp is provided with the screw that clamps sticking machine plate upper pin, sticking machine plate position limiting clamp is provided with the adjusting chuck that props up sticking machine plate both sides, the adjustable clamp head thread is connected on the sticking machine plate position limiting clamp, regulate chuck and can adjust extension elongation adapting to the sticking machine plate of different model, sticking machine plate position limiting clamp is provided with sticking machine plate position limiting clamp is fixed on screw on the top guide bar; The both sides of described each side plate are provided with hook, are connected with handle between the hook.
Further: returning apparatus has a pair of plate holder guide rod between the described biside plate, the plate holder guide rod is arranged between demarcation strip guide rod and the lower guide rod, on the plate holder guide rod respectively sliding sleeve the separation plate holder that equates with demarcation strip quantity is arranged, described separation plate holder is provided with the stria at clamping demarcation strip two ends, and is provided with the demarcation strip clamping is fixed on screw on the plate holder guide rod; At described demarcation strip guide rod and lower guide rod upper sliding sleeve two postive stop baffles are arranged, described postive stop baffle is provided with postive stop baffle is fixed on screw on the demarcation strip guide rod.
Technique effect of the present invention is: clamper for cleaning and degumming silicon chip disclosed by the invention is provided with movably sticking machine plate geometrical clamp and sticking machine plate position limiting clamp and can be screwed in a certain position in top guide bar, the adjustable whole extension elongation of adjusting chuck on the sticking machine plate position limiting clamp, like this can be according to the sticking machine plate of different model, adjust sticking machine plate geometrical clamp and sticking machine plate position limiting clamp position, therefore, a kind of clamper for cleaning and degumming silicon chip goes for the sticking machine plate of different model, use and easy to operate is reduced in the cost input on the anchor clamps.In addition, it is spacing for the silicon chip down that drops after cleaning to separate plate holder and postive stop baffle, and the silicon chip behind the cleaning and degumming is stood upright on the lower guide rod, is difficult for slipping, collides and make the silicon chip fragmentation, the yields of silicon chip behind the raising cleaning and degumming.
Description of drawings
Fig. 1 is a clamper for cleaning and degumming silicon chip structural representation in the prior art.
Fig. 2 is the left view of Fig. 1.
Fig. 3 is a structural representation of the present invention.
Fig. 4 is the vertical view of Fig. 3.
Fig. 5 is the left view of Fig. 3.
Fig. 6 is the structural representation of sticking machine plate geometrical clamp.
Fig. 7 is the left view of Fig. 6.
Fig. 8 is the vertical view of Fig. 6.
Fig. 9 is the structural representation of sticking machine plate position limiting clamp.
Figure 10 is the right view of Fig. 9.
Figure 11 is the vertical view of Fig. 9.
Figure 12 is for separating the structural representation of plate holder.
Figure 13 is the left view of Figure 12.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail.
Shown in Fig. 3,4,5, the present invention includes biside plate 1 and each a pair of top guide bar 2, demarcation strip guide rod 3 and the lower guide rod 4 of device between biside plate 1, folder hangs with four demarcation strips 7 on demarcation strip guide rod 3, the both sides of side plate 1 are provided with hook 5, be connected with handle 6 between the hook 5, hook 5 is as the whole anchor clamps of lifting in the cleaning and degumming machine, the handle that handle 6 is used during as a dead lift.Top guide bar 2 upper sliding sleeves have two pairs of sticking machine plate geometrical clamps 8 and two pairs of sticking machine plate position limiting clamps 9, sticking machine plate geometrical clamp 8 and sticking machine plate position limiting clamp 9 can slide on top guide bar 2, sticking machine plate geometrical clamp 8 is provided with the screw 801 that clamps sticking machine plate 13 upper pins 1301, screw 801 can be fixed on some positions (sticking machine plate geometrical clamp 8 structures such as Fig. 6, Fig. 7, Fig. 8) on the top guide bar 2 with gluing machine plate geometrical clamp 8 and sticking machine plate 13 upper pins 1301, so just can adapt to different model and big or small sticking machine plate 13.Sticking machine plate position limiting clamp 9 is provided with the adjusting chuck 901 that props up sticking machine plate 13 both sides, regulating chuck 901 is threaded on the sticking machine plate position limiting clamp 9 (as Fig. 9, Figure 10, Figure 11), can adjust the extension elongation of adjustable clamp head 901 like this, the sticking machine plate 13 that so both can adapt to different model and width, can strengthen fixed effect again to sticking machine plate 13, at the sticking machine plate of different length, sticking machine plate 13 can more effectively be fixed in the position that sticking machine plate position limiting clamp 9 suitably is set.Sticking machine plate position limiting clamp 9 is provided with sticking machine plate position limiting clamp 9 is fixed on screw 902 on the top guide bar 2, and screw 902 can be fixed on some positions on the top guide bar 2 with gluing machine plate position limiting clamp 9.Returning apparatus has a pair of plate holder guide rod 10 between the biside plate 1, on the plate holder guide rod 10 respectively sliding sleeve the separation plate holder 12 that equates with demarcation strip 7 quantity is arranged, in the present embodiment, each sliding sleeve has four demarcation strips 7 on two plate holder guide rods 10, separating plate holder 12 can slide on plate holder guide rod 10 or rotate, separate the stria 1202 (as Figure 12, Figure 13) that plate holder 12 is provided with clamping demarcation strip two ends, separate plate holder 12 and be provided with and be fixed on screw 1201 on the plate holder guide rod 10 with separating plate holder 12, screw 1201 can be fixed on a certain position on the plate holder guide rod 10 with separating plate holder 12.At demarcation strip guide rod 3 and lower guide rod 4 upper sliding sleeves two postive stop baffles 11 are arranged, postive stop baffle 11 is provided with postive stop baffle 11 is fixed on screw 1101 on the demarcation strip guide rod 3, and screw 1101 can be fixed on postive stop baffle 11 a certain position on the demarcation strip guide rod 3.
When the sticking machine plate 13 of the silicon chip that will be stained with well cutting is packed clamper for cleaning and degumming silicon chip of the present invention into, at first will glue machine plate geometrical clamp 8 and glue machine plate position limiting clamp 9 and move to suitable position, the bearing pin 1301 of sticking machine plate 13 is hung on the top guide bar 2, move sticking machine plate geometrical clamp 8 and be fastened on the top guide bar 2 with the bearing pin 1301 that screw 801 will glue machine plate 13; To glue machine plate position limiting clamp 9 with screw 902 and be fixed on position suitable on the top guide bar 2, adjust the adjusting chuck 901 on the sticking machine plate position limiting clamp 9, and make and regulate the both sides that chuck 901 is against sticking machine plate 13, so just fix the position of sticking machine plate 13.Mobile postive stop baffle 11 also is fixed on postive stop baffle 11 on the demarcation strip guide rod 3 with screw 1101 to the two ends of sticking machine plate 13; In the gap between the demarcation strip 7 insertion silicon chips, demarcation strip 7 folders hang on the demarcation strip guide rod 3, four demarcation strips 7 are separated silicon chip equably, rotate the separation plate holder 12 of both sides, the two ends of demarcation strip 7 are inserted respectively in the stria 1202 of separating plate holder 12 in both sides, and fix with screw 1201 and to separate plate holder 12, so just finish the installation of gluing machine plate 13, can lift clamper for cleaning and degumming silicon chip and enter cleaning and degumming in the cleaning and degumming machine.
Above-mentioned sticking machine plate 13 and on silicon chip be not member of the present invention.
Claims (3)
1. clamper for cleaning and degumming silicon chip, comprise biside plate and device each a pair of top guide bar between biside plate, demarcation strip guide rod and lower guide rod, the demarcation strip guide rod is arranged between top guide bar and the lower guide rod, folder hangs with demarcation strip on the demarcation strip guide rod, it is characterized in that: described top guide bar upper sliding sleeve has two pairs of sticking machine plate geometrical clamps and at least one pair of sticking machine plate position limiting clamp, sticking machine plate geometrical clamp is provided with the screw that clamps sticking machine plate upper pin, sticking machine plate position limiting clamp is provided with the adjusting chuck that props up sticking machine plate both sides, the adjustable clamp head thread is connected on the sticking machine plate position limiting clamp, regulate chuck and can adjust extension elongation adapting to the sticking machine plate of different model, sticking machine plate position limiting clamp is provided with sticking machine plate position limiting clamp is fixed on screw on the top guide bar; The both sides of described each side plate are provided with hook, are connected with handle between the hook.
2. according to the described clamper for cleaning and degumming silicon chip of claim 1, it is characterized in that: returning apparatus has a pair of plate holder guide rod between the described biside plate, the plate holder guide rod is arranged between demarcation strip guide rod and the lower guide rod, on the plate holder guide rod respectively sliding sleeve the separation plate holder that equates with demarcation strip quantity is arranged, described separation plate holder is provided with the stria at clamping demarcation strip two ends, and is provided with the demarcation strip clamping is fixed on screw on the plate holder guide rod.
3. according to claim 1 or 2 described clamper for cleaning and degumming silicon chip, it is characterized in that: at described demarcation strip guide rod and lower guide rod upper sliding sleeve two postive stop baffles are arranged, described postive stop baffle is provided with postive stop baffle is fixed on screw on the demarcation strip guide rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810234365A CN100587939C (en) | 2008-11-19 | 2008-11-19 | Clamper for cleaning and degumming silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810234365A CN100587939C (en) | 2008-11-19 | 2008-11-19 | Clamper for cleaning and degumming silicon chip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101409253A CN101409253A (en) | 2009-04-15 |
| CN100587939C true CN100587939C (en) | 2010-02-03 |
Family
ID=40572174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810234365A Expired - Fee Related CN100587939C (en) | 2008-11-19 | 2008-11-19 | Clamper for cleaning and degumming silicon chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100587939C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102394254A (en) * | 2011-10-13 | 2012-03-28 | 新余吉阳新能源有限公司 | Crystal silicon solar battery dry etching clamp |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101474832B (en) * | 2009-01-24 | 2015-03-18 | 无锡市奥曼特科技有限公司 | Structure for placing improved silicon rod clamper |
| CN101879756B (en) * | 2010-04-01 | 2012-08-22 | 浙江硅宏电子科技有限公司 | Silicon wafer stripping machine |
| CN101898391B (en) * | 2010-08-19 | 2012-05-02 | 英利能源（中国）有限公司 | Silicon briquette degumming system and degumming method |
| CN102366753B (en) * | 2011-10-10 | 2012-11-14 | 江苏港星方能超声洗净科技有限公司 | Clamping device for cleaning organosilicon optical conductors |
| CN102881624B (en) * | 2012-10-11 | 2015-03-04 | 苏州罗博特科自动化设备有限公司 | Stably-running variable-pitch clamp for reversing silicon wafers |
| CN102867772B (en) * | 2012-10-11 | 2015-03-04 | 苏州罗博特科自动化设备有限公司 | Pitch-variable clamp for wafer replacing |
| CN105304538A (en) * | 2015-11-24 | 2016-02-03 | 山东华光光电子有限公司 | 2-inch chip photoresist peeling basket |
| CN105974747B (en) * | 2016-06-17 | 2019-01-22 | 中国电子科技集团公司第十研究所 | Thin film circuit tile puddle development synchronous fixture |
| CN107546166A (en) * | 2017-09-29 | 2018-01-05 | 四川英发太阳能科技有限公司 | Etching automation blanking guider |
| CN108711547B (en) * | 2018-05-03 | 2020-09-29 | 浙江海顺新能源有限公司 | Silicon wafer degumming process |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1855416A (en) * | 2005-04-26 | 2006-11-01 | 大日本网目版制造株式会社 | Substrate processing device |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
-
2008
- 2008-11-19 CN CN200810234365A patent/CN100587939C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1855416A (en) * | 2005-04-26 | 2006-11-01 | 大日本网目版制造株式会社 | Substrate processing device |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102394254A (en) * | 2011-10-13 | 2012-03-28 | 新余吉阳新能源有限公司 | Crystal silicon solar battery dry etching clamp |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101409253A (en) | 2009-04-15 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100203 Termination date: 20191119 |