CN100587545C - Microscope device - Google Patents

Microscope device Download PDF

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Publication number
CN100587545C
CN100587545C CN200580034508A CN200580034508A CN100587545C CN 100587545 C CN100587545 C CN 100587545C CN 200580034508 A CN200580034508 A CN 200580034508A CN 200580034508 A CN200580034508 A CN 200580034508A CN 100587545 C CN100587545 C CN 100587545C
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base unit
microscope base
microscope
unit
bolt
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CN101040203A (en
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竹内淳
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Nikon Corp
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Nikon Corp
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Abstract

A microscope device has a stand unit with a vertical movement drive section for an objective lens and has a base unit with a vertical movement drive device for an XY stage. When the stand unit is joined to the base unit, the range of movement in the vertical direction of an objective lens drive section and the range of movement in the vertical direction of the stage drive section are set to be different from each other.

Description

Microscopic system
Technical field
The present invention relates to a kind of microscopic system.
Background technology
In the microscopic system of prior art (seeing references 1), perhaps drive object lens or driving objective table to regulate focusing to object plane.This drives stroke can not be observed corresponding to the length and the sample bigger than the trip of this microscopical size or this pilot unit.Make the installation site of used sub-objective table can keep this objective table by employing in the prior art, with adjustment structure along Z axle (up/down direction), or can observe the sample of its height greater than stroke by insert to promote adapter etc. in (in many cases, on microscopical microscope base zone) between this objective table and the object lens.
References 1: Japanese publication bulletin H6-186469 number.
Summary of the invention
But, when the sample greater than the microscope stroke is arranged on the objective table, must this sub-objective table be adjusted to the optimum position, or must insert this best corresponding to concrete sample and promote adapter.For this reason, the operation that must carry out when observing the sample that changes thickness in very wide thickness range is very complicated.
Modular microscopic system according to the present invention comprises the microscope base unit with the up/down driver element that is used for object lens, with base unit with the up/down driver element that is used for the X-Y objective table, wherein when microscope base unit and base unit interfixed, objective drive unit was different mutually along the moving range of up/down direction with the objective table driver element along the moving range of up/down direction.According to the present invention, can guarantee enough wide up/down stroke, with the sample that observation has the sample of big thickness and has little thickness, the therefore operability of improvement change sample and successfully observation sample.
Should be noted that the holding device that keeps object lens, keep the objective table device of sample and control motor-driven control device and can use maintenance equipment (means), objective table equipment, first appliance arrangement, second appliance arrangement and opertaing device replacement respectively.
Modular microscopic system according to a first aspect of the invention comprises: the microscope base unit, it comprises the mirror disk that changes that a plurality of object lens of realizing different magnifications are housed, have and be used for being set to first drive unit of this Z driving mechanism that changes mirror disk of optical axis direction in the face of the object lens of sample/move down and regulating first operating means the focusing of sample by this first drive unit of operation along described a plurality of object lens; And base unit, it comprises the objective table device that sample is placed on it, has the optical axis direction that is used for along these object lens/move down second drive unit of the Z driving mechanism of this objective table device, by operating second operating means of this second drive unit adjusting to the focusing of sample, and the lamp that is used for illuminating this sample by the illumination of transmission, wherein: this microscope base unit comprises: first connects the surface, and this microscope base unit is connected in this base unit in this first connection surface; Be connected the surface with second, when this microscope base unit used separately, second connected the surperficial device that is connected in outside this base unit; This microscope base unit is being connected in the structure that this base unit realizes by connect the surface via first of this microscope base unit, the moving range that this object lens up/down is moved by this first drive unit is different mutually with the moving range that this objective table device up/down is moved by this second drive unit; And focus can by this first operating means and this second operating means one of them and be adjusted on this sample; And this microscope base unit is being connected in the structure that the described device outside this base unit realizes by connect the surface via second of this microscope base unit, focus is adjusted on this sample via described first operating means.
Modular microscopic system according to a second aspect of the invention comprises: the mirror disk that changes that a plurality of object lens are housed; A microscope base unit in the first microscope base unit and the second microscope base unit, the first microscope base unit comprises first drive unit, this first drive unit has and is used for being set to optical axis direction in the face of the object lens of sample/move down the Z driving mechanism that this changes mirror disk along described a plurality of object lens, changes mirror disk and is fixed on the second microscope base unit; And base unit, it comprises the objective table device and second drive unit that sample is placed on it, this second drive unit has the optical axis direction that is used for along these object lens/move down the 2nd Z driving mechanism of this objective table device, wherein: connect the surface and be formed on this base unit place, the first microscope base unit is installed in this with a described microscope base unit in this second microscope base unit and is connected on the surface; By utilizing this base unit and this first microscope base unit to assemble first microscope, and by utilizing this base unit and this second microscope base unit to assemble second microscope different with first microscope; The described first microscope base unit and each microscope base unit in the described second microscope base unit have be connected with base unit first connect the surface and second connection that is designed to be connected with device outside this base unit surperficial, make that each the microscope base unit in the described first microscope base unit and the described second microscope base unit can use when described device outside this base unit is connected independently; And by this first microscope base unit is installed in the structure that realizes on this base unit, the moving range that this object lens up/down is moved by this first drive unit is different mutually with the moving range that this objective table device up/down is moved by this second drive unit.
Description of drawings
Fig. 1 illustrates first embodiment according to this obvious micromirror systems;
Fig. 2 illustrates second embodiment according to microscopic system of the present invention;
Fig. 3 provides AF control and the object lens carried out by controller by drive motor and moves the process flow diagram of control;
Fig. 4 is illustrated in the system diagram of the microscopic system of realizing in the third embodiment of the present invention;
Fig. 5 illustrates the 4th embodiment according to microscopic system of the present invention;
Fig. 6 illustrates the outboard profile of bolt;
Fig. 7 illustrates the top view of arm portion;
Fig. 8 illustrates the top view of microscope base unit;
Fig. 9 illustrates the 5th embodiment according to microscopic system of the present invention;
Figure 10 is illustrated in the finder of realizing in the sixth embodiment of the present invention; And
Figure 11 illustrates by being formed on the bolt hole of this microscope base unit.
Embodiment
First embodiment
Fig. 1 illustrates first embodiment according to microscopic system of the present invention that observes from the side.Suppose that X-axis extends perpendicular to picture, Y-axis is flatly extended on picture, the vertical extension on picture of Z axle.The lamp box 2 that is used for emissive lighting is connected in base unit 1.The light that originates from lamp box 2 that is used for emissive lighting by being installed in this base unit 1 intraoral illumination emission system's (not shown) and from following illumination sample 100.
Sample 100 is placed on the objective table 3, and because this objective table 3 moves along the X-Y direction, sample 100 also moves along the X-Y direction.This objective table 3 is installed on the sub-objective table 4 so that can move along X and Y direction.This sub-objective table 4 keeps so that can move along Z axle (with respect to this microscopical top/bottom direction) with respect to this base unit 1 via a Z driving mechanism 5.Therefore, objective table 3 also can move along the Z direction.This structure can move sample 100 with respect to object lens along the Z axle, be used for focal adjustment.
Objective table 3 drives along the X-Y direction via X-Y driving mechanism 17.User (by the people of microscopic examination sample) is by rotating the first vertical motion handle 7 operation the one Z driving mechanism 5 by hand so that move up or down this objective table 3, and operate this X-Y driving mechanism 17 with about or move forward and backward this objective table 3.
A plurality of object lens 6 with different magnifications are installed on the revolving nosepiece 8, so that given sample can be observed with desirable magnification.Be installed on the arm portion 9 this and change mirror disk 8 and remain on microscope base unit 11, so that can up/down move via holder part 10.This holder part 10 is installed in this microscope base unit 11 via the 2nd Z driving mechanism 18.Keep the holder part 10 of this arm portion 9 can move along Z axle (up/down) with respect to this microscope base unit 11 via the 2nd Z driving mechanism 18.
Therefore the user so that up/down moves this holder part 10, arm portion 9 and changes mirror disk 8, and can move this object lens 6 along the Z axle with respect to sample by rotating lever operated the 2nd Z driving mechanism 18 of second vertical motion by hand.
As mentioned above, this microscopic system of Shi Xianing comprises two Z axle elevating mechanisms in this embodiment, that is, be arranged on the Z driving mechanism 5 between sub-objective table 4 and the base unit 1, and be arranged on the 2nd Z driving mechanism 18 between this holder part 10 and this microscope base unit 11.Should be noted that pilot unit is converted to linear movement with rotatablely moving of vertical motion handle 7 and 12 via the mechanism such as rack and pinion, make object lens 6 and objective table 3 up/down move.
In this embodiment in the microscopic system of Shi Xianing, can and can be arranged to not overlapped along the mobile scope of Z axle (up/down) along the mobile scope of Z axle (up/down) by rotating these first vertical motion handle, 7 these objective tables 3 by these second vertical motion handle, 12 these object lens 6 of rotation.That is, the driving scope of the objective table 3 that is driven along Z axle (up/down) by the first vertical motion handle 7 and corresponding driving mechanism 5 is different with the driving scope of the object lens 6 that driven along Z axle (up/down) by the second vertical motion handle 12 and corresponding driving mechanism 18.
The episcopic illumination device 13 that is kept for the lamp box 14 of indirect illumination is installed in arm portion 9 so that from top illumination sample 100.Lens barrel 15 is installed in the top of this episcopic illumination device 13, so that make the user observe this sample enlarged image via the eyepiece 16 that is installed on this lens barrel 15.
Microscopic system in first embodiment that constitutes as mentioned above can be realized following operating effect.
(1) this microscopic system of realizing in first embodiment comprises two Z driving mechanisms, that is, be arranged on the Z driving mechanism 5 between sub-objective table 4 and the base unit 1 and be arranged on this holder part 10 and this microscope base unit 11 between the 2nd Z driving mechanism 18.Therefore the whole stroke of realizing in this microscope is the combination of these two pilot unit strokes.In other words, suppose with correlation technique in the stroke that is complementary of microscopical stroke realize via each of this two pilot units, range of observation is the twice of the microscope length of stroke in the correlation technique so continuously, and this makes can observe from approaching the various types of samples of sample to thick sample by shirtsleeve operation.
(2) to top a bit being elaborated, because both can drive objective table 3 and object lens 6 along Z axle (up/down) in different mutually scopes, in case of necessity, can be arranged between this objective table 3 and this object lens 6 with the stroke of this objective table 3 and the same big space of stroke combination of this object lens 6.As a result, no matter it has very little thickness or big thickness, can regulate the focusing to sample 100, as long as rotate this first vertical motion handle 7 and this second vertical motion handle 12.That is, different with the microscope of prior art, this microscopic system for example is reinstalled in the optimum position that is used for specific sample with sub-objective table, or inserts/remove the lifting adapter without any need for complicated operations when changing sample 100.
(3) when the focusing regulated sample 100, the user can select or up/down drives this objective table 3, and perhaps up/down drives this object lens 6.If probe, or various types of measurement mechanism is installed in this sample 100 places, and up/down moves these object lens 6 with convenient.On the other hand, if the user wishes eyes are remained on fixing position (positions of these observation eyes) so that less fatigue, so, can the up/down moving stage.In other words, can determine according to concrete environment of observation for driven parts of focusing.
Provide above-mentioned explanation though should be noted that structurally the example of the embodiment that adopts with reference to the present invention, in this example, when object lens 6 up/down moved, lens barrel 15 and eyepiece 16 also up/down moved, and the invention is not restricted to this example.In having the structure that is fixed in the episcopic illumination device 13 on this microscope base unit 11, wherein when vertical motion handle 12 rotates, object lens 6 and change mirror disk 8 independent up/down and move.This structure also makes the observation eyes can remain on fixing position.
In the above-described embodiments, different mutually and so the non-overlapping of driving scope of the driving scope of this objective table 3 that drives along Z axle (up/down) via the first vertical motion handle 7 and corresponding driving mechanism and these object lens 6 that drive along Z axle (up/down) via the second vertical motion handle 12 and corresponding driving mechanism.But the invention is not restricted to this example and these scopes can be partly overlapping.Yet, should be noted that these driving scopes must always comprise not overlapped part, and their not overlapped wide as far as possible scopes.
Second embodiment
Fig. 2 illustrates second embodiment according to microscopic system of the present invention.Same Reference numeral is given the parts that are similar to the microscopic system of realizing among first embodiment, it is elaborated not needing.The microscopic system of Shi Xianing comprises electrically driven (operated) vertical motion unit in a second embodiment, replaces the manual second vertical motion handle 12 used in first embodiment.Following explanation focuses on the difference with first embodiment.
Make holder part 10, arm portion 9, change motor 22 that mirror disk 8 and object lens 6 up/down move and pack in electrically driven (operated) microscope base unit 21.AF unit 23 is installed on the top of this episcopic illumination device 13.In addition, switch enclosure 25 is installed in the outside.Both all are electrically connected on the motor 22 and the AF unit 23 of controller (control device) 24 and are controlled by controller 24.Pass through to carry out all operations of specific this microscopic system of programmed control with this controller 24 of microcomputer and its peripheral circuit formation.This controller 24 comprises the driving circuit that is used for this motor 22.Though this controller 24 is arranged on the outside of this microscopic system in the diagram that Fig. 2 provides, this controller 24 can replace the inside that is installed in this base unit 1 or this electrically driven (operated) microscope base unit 21.
Via AF switch (not shown), be used for vertical motion switch that up/down moves object lens (not shown) etc. and be arranged on wherein switch enclosure 25, the instruction that is used for all kinds control can respond by the user gives this controller 24 in the operation issue that switch enclosure 25 carries out.For example, respond the operation of the AF switch that is undertaken by the user, corresponding operation signal is transferred to controller 24 from this switch enclosure 25, and this controller 24 is carried out AF (focusing automatically) control then.The operation of the object lens vertical motion switch that response is undertaken by the user, corresponding operation signal is transferred to controller 24 from this switch enclosure 25, and this controller 24 moves object lens by controlling this motor 22 then.
The AF unit comprises the built-in imaging device that is made of (not shown) such as CCD, and the information transmission of will focusing is given controller 24.According to transmitting focusing information from this AF unit, this controller 24 carries out AF control by sense of rotation, this rotation itself of controlling this motor 22 and the timing that this rotation is stopped to this microscopic system.Just, this controller 24 control in case automatically with focal adjustments on sample 100.
Be similar to the Z driving mechanism of in first embodiment, realizing for the 3rd Z driving mechanism 26, the three Z driving mechanisms 26 from the driving force that motor 22 produces via the gear transmission that realizes specific reduction gear ratio.Because the 3rd Z driving mechanism 26 that is made of rack and pinion mechanism etc. converts rotatablely moving of motor 22 to linear movement, this holder part 10 is driven by the 3rd Z driving mechanism 26 up/down.Should be noted that because object lens are driven by the motor 22 that is mainly used in AF control, can select the reduction gearing of particular type etc., can drive with point-device control to guarantee these object lens.
Fig. 3 provides by driving AF control and the object lens that this motor 22 carried out by controller 24 and moves the process flow diagram of control.At step S1, judge whether the object lens vertical motion switch in switch enclosure 25 is started.If judge that at step S1 these object lens vertically transport the moving switch of merit and started, then operation proceeding to step S6, and if judge that at step S1 this object lens vertical motion switch is not started, then operation proceeding to step S2.
At step S2, judge and whether start at the AF of switch enclosure 25 switch.If judge and to start at these object lens of step S2 AF switch, then operation proceeding to step S3, and if judge the not starting of these object lens AF switch at step S2, then operation turning back to step S1, with the said process that carries out that repeats.
At step S3, the focusing information (focusing signal) that input is provided by AF unit 23, this focusing information can represent, for example, and the contrast value of sample image.At step S4, judge according to focusing information whether focus regulates, that is, whether realized the focus coupling.For example, if express the peak value of contrast value, can judge that then focus regulates (focus coupling realize).
If regulate in step S4 judgement focus, this processing finishes.But if judge not adjusting of focus at step S4, then operation proceeding to step S5, and drive motor 22 is to move object lens very little amount.The direction of motor rotation is determined according to the sense of rotation before the motor and according to focus information.Therefore operation turns back to step S3 to repeat above-mentioned processing.
At step S6, drive motor 22 to be to move these object lens 6, and at object lens vertical motion switch, moving upward may be prescribed as mutual differently with moving downward, and object lens is moved according to the operation signal up/down from this vertical motion switch.In addition, provide this explanation, can adopt another kind of structure, wherein only keep pressing object lens are moved at this switch though the supposition object lens respond the end by being moved to its moving range of this switch.Therefore, handle contact.
Except the operating effect of this microscopic system in first embodiment, the microscopic system among Gou Zao second embodiment can be realized following effect as mentioned above.
(1) integrally realize focal adjustments by moving the object lens that drive via motor 22, and when objective table 3 needed to reduce very big amount, for example, when changing sample 100, this objective table 3 can move very big amount by the manual operation of being undertaken by the user.As a result, the operability of microscopic system is improved greatly.
Provide above-mentioned explanation though should be noted that the example of reference example, the present invention adopts a kind of structure in this example, and this structure comprises is arranged to replace the electricity of this second vertical motion handle 12 to drive the vertical motion unit, the invention is not restricted to this example.Be not this second vertical motion handle 12, but this first vertical motion handle 7 can electricity consumption drive the replacement of vertical motion unit.Alternatively, this first vertical motion handle 7 and the second vertical motion handle 12 both all can electricity consumption drive the vertical motion unit and replace.Though by the above-mentioned manual operation and the combination of motor operation, can not be implemented under the improvement of the operability situation below, but all use the confers similar advantages that can access in electrically driven (operated) microscopic system with reference to first embodiment explanation at object lens and objective table.
The 3rd embodiment
Fig. 4 is illustrated in the system diagram of the microscopic system of realizing in the third embodiment of the present invention.The microscopic system of realizing in the 3rd embodiment comprises three separate unit, that is, base unit 100, microscope base unit 200 and ocular unit 300, these three unit each can both independent attaching/detaching.In addition, each comprises a plurality of variant unit this base unit 100 and microscope base unit 200, and therefore, this base unit and microscope base unit can be used in any various combinations of single variant unit.As a result, as long as in combination, utilize specific variant unit, be easy to provide be similar to the microscopic system of realizing among the microscopic system in first embodiment, realized and second embodiment.Should be noted that same Reference numeral give with first embodiment and second embodiment in the same parts of microscopic system realized, be described in greater detail not needing.
Adopt a kind of structure that is similar in first embodiment at base unit 101, this base unit 101 has base unit 1, is used to transmit the lamp box 2 of illumination, transmission illuminator (not shown), objective table 3, sub-objective table 4, the one Z driving mechanism 5, the first vertical motion handles 7, X-Y driving mechanism 17 etc.Except base unit 102 was not used in the lamp box 2 or transmission illuminator (not shown) of transmission illumination, base unit 102 was similar to base unit 101.Base unit 103 has objective table 3, sub-objective table 31, X-Y driving mechanism 17 and base unit 1.Different with sub-objective table 4, sub-objective table 31 is fixed on the base unit 1.In other words, the objective table in base unit 103 3 can not up/down move.
201 adopt a kind of structure that is similar in first embodiment, this microscope base unit 201 to have object lens 6 in the microscope base unit, change mirror disk 8, arm portion 9, holder part 10, microscope base unit 11, the 2nd Z driving mechanism 18, the second vertical motion handle 12 etc.202 adopt the structure that is similar in a second embodiment in the microscope base unit, and this microscope base unit 202 comprises is arranged to replace the electricity of the second vertical motion handle 12 in microscope base unit 201 to drive vertical motion unit, electrically driven (operated) microscope base unit 21, motor 22, the 3rd Z driving mechanism 26 etc.In addition, though do not comprise in the diagram that Fig. 4 provides, this microscope base unit 202 comprises controller 24 and switch enclosure 25.Microscope base unit 203 has object lens 6, changes mirror disk 8, arm microscope base unit 32 etc.This arm microscope base unit 32 is unit of the one of combination arm portion and microscope base unit, and the arm portion of arm microscope base unit 32 is can not moving component.In other words, the object lens 6 in this microscope base unit 203 can not upward/downward movement.
This ocular unit 300 has the lamp box 14 that is used for indirect illumination, episcopic illumination device 13, lens barrel 15, eyepiece 16 and AF unit 23.Should be noted that in use with being connected of base unit and microscope base unit particular combinations in be used for indirect illumination lamp box 14, episcopic illumination device 13 and AF unit 23 can be removed when needing.
By utilizing specific unit to constitute microscopic system, the versatility of microscopic system is expanded widely in various combinations.For example, by utilizing base unit 101, microscope base unit 201 and ocular unit 300 constitute be similar to the microscopic system of realizing in first embodiment in the combination that does not have AF unit 23.In the combination with AF unit, by utilizing base unit 101, microscope base unit 202 and ocular unit 300, formation is similar to the microscopic system of realizing in a second embodiment.Also have, in the combination that does not have the AF unit, by utilizing base unit 101, microscope base unit 203 and ocular unit 300, can constitute the standard microscope system that makes objective table only use manual drives along X, Y and Z direction.
Should be noted that single unit interconnects via the web member such as screw or nuts and bolt (not shown).In addition, be arranged on base unit 1, microscope base unit 11, electricity such as the detent mechanism of surface in contact or register pin and drive microscope base unit 21 and arm microscope base unit 32, guaranteeing accurate location, the result, each unit can be easy to accurately be installed in correct position.
Also have, in the time of on episcopic illumination device 13 being installed in arm portion 9 or arm microscope base unit 32, this episcopic illumination device 13 is positioned with reference to reference marker and is fixing.But, when use comprises the base unit 101 that transmits illuminator, be not always to need to install this episcopic illumination device.In this case, can remove lamp box 14 and the episcopic illumination device 13 that is used for indirect illumination from ocular unit 300.
As previous explanation in a second embodiment, with by the combination of motor 22 electrically driven (operated) microscope base unit 202 in wish to utilize the ocular unit 300 that AF unit 23 is installed.
Obtain following operating effect in the 3rd embodiment, its combination by aforesaid discrete cell can constitute various microscopes.
(1) by utilizing specific unit to constitute the microscope of various combinations, this microscopical versatility is expanded widely.Therefore, can be easy to provide the various microscopes that satisfy user's hobby with low cost.In addition, provide more selection for the user.
(2) specifically, by utilizing various unit, can be easy to obtain the microscopic system in first embodiment and second embodiment such as GU Generic Unit.And the microscopic system 2 in first embodiment can re-construct into the microscopic system among second embodiment, and perhaps vice versa, and also is easy to obtain with low cost other microscope structure.
Do not comprise the base unit with electrically driven (operated) first vertical motion handle 7 though should be noted that the 3rd embodiment, this base unit can be used as a kind of variation and provides.
In the description of this embodiment, term " unit " is used in reference to each component unit.Alternatively, term " parts " can be used in reference to such component unit.Any one of these terms can be used in reference to the unit that physically is independent of other unit, and can make individually, pack, transportation etc.These unit can be with specific tectonic association to obtain various microscopic systems.
The 4th embodiment
Below the fourth embodiment of the present invention will be described.
As illustrated at previous reference the 3rd embodiment, below with reference to the 4th embodiment explanation, when constituting microscopic system with separate base unit 100, microscope base unit 200 and ocular unit 300, by they are accurately located, can be used for the method that individual unit is locked mutually.
Fig. 5 illustrates the 4th embodiment of the microscopic system according to the present invention with the form from the partial sectional view of microscopical side intercepting.Microscope among Fig. 5 does not have base unit 101, microscope base unit 203 and the ocular unit 300 of the AF unit among Fig. 4 to constitute by combination.Should be noted that the arm microscope base unit 32 usefulness divided portion in microscope base unit 203 constitute, i.e. arm portion 9 and microscope base unit 32A.Therefore, this microscope base unit 23A also can regard independently unit as.Should be noted that same Reference numeral gives the parts that are similar among first to the 3rd embodiment, these single parts are elaborated not needing.
The following describes in this microscopic system, how this base unit 1 and this microscope base unit 32A can be interconnected, and how this microscope base unit 32A and arm portion 9 can interconnect.
As shown in Figure 5, via a plurality of bolt 12B and a plurality of bolt 10B, this base unit 1 and microscope base unit 32 interfix, and this microscope base unit 32A interfixes with this arm portion 9.Fig. 6 illustrates the outboard profile that is used for arm portion 9 is connected in the bolt 10B of base unit 32A.Fig. 7 illustrates the top view of this arm portion 9, and Fig. 8 illustrates the top view of this microscope base unit 32A.
As shown in Figure 6, bolt 10B comprises head 10a and constitutes having the bar portion of cylindrical part 10b and the step bolt of male screw portion 10c.The hexagon hole 10d that the hexagon spanner can insert is formed on head 10a.Cylindrical part 10b is the screw portion that does not have threaded line, and when arm portion 9 and microscope base unit 32A interconnected, it played register pin.Therefore the external diameter of this cylindrical part 10b, forms ladder at screw portion greater than the external diameter of this male screw portion 10c.The zone that forms this ladder is called the basal surface 10e of this cylindrical part 10b.
Four bolt hole 9b-1,9b-2,9c and 9d are formed on this arm portion 9.Should be noted that above-mentioned each through hole 9b-1,9b-2,9c and 9d (along the Z axle), the pilot hole 9g that the head 10a of formation corresponding bolts 10B passes through.Cylindrical part 10b in order to ensure this bolt 10B inserts easily, and hole 9b-1,9b-2 form its internal diameter obviously greater than the external diameter of this cylindrical part 10b.These holes 9b-1,9b-2 are called bolt hole.
Hole 9c is a mating holes, is used for respect to mutual location this arm portion 9 and this microscope base unit 32A.This hole shape becomes the internal diameter that has slightly greater than the external diameter of this cylindrical part 10b, and is wherein and basically very close to each other so that the cylindrical part 10b of respective bolt 10B can be engaged in.That is, this mating holes 9c is configured to make the internal diameter of its internal diameter less than bolt hole 9b-1 and 9b-2.Hole 9d is an elongated hole, along minor axis (the up/down direction of Fig. 7, the direction of extending along X-axis) width of measuring is arranged to slightly the external diameter greater than the cylindrical part 10b of this bolt 10B, and be arranged to significantly external diameter greater than this cylindrical part 10b along major axis (left and right directions among Fig. 7, the direction of extending along Y-axis) length measured.Hope is along the major axis length measured of this elongated hole 9d external diameter less than the head 10a of this bolt 10B.
As shown in Figure 8, four through hole 11b-1,11b-2,11c and 11d are formed on the position of the upper surface of microscope base unit 32A corresponding to these bolts hole 9b-1,9b-2, this mating holes 9c and elongated hole 9d.Cylindrical part 10b in order to ensure this bolt 10B inserts easily, and this bolt hole 11b-1 and 11b-2 form its internal diameter obviously greater than the external diameter of this cylindrical part 10b.This mating holes 11c is used for respect to this arm portion 9 of mutual location and microscope base unit 32A, and forms its internal diameter slightly greater than the external diameter of this cylindrical part 10b, and is wherein very close to each other basically so that the cylindrical part 10b of this bolt 10B can be engaged in.That is, this mating holes 11c is configured to the internal diameter of its internal diameter less than this bolt hole 11b-1 and 11b-2.This elongated hole 11d is configured to along minor axis (the up/down direction among Fig. 8, the direction of extending along X-axis) width of measuring is arranged to slightly the external diameter greater than the cylindrical part 10b of this bolt 10B, and be arranged to obvious external diameter greater than this cylindrical part 10b along major axis (left and right directions among Fig. 8 is along the direction of Y-axis extension).
Wish that the internal diameter of the internal diameter of internal diameter, this mating holes 11c of this bolt hole 11b-1 and 11b-2 and this elongated hole 11d is substantially equal to be formed on the internal diameter of bolt hole 9b-1,9b-2, mating holes 9c and elongated hole 9d on this arm portion 9 respectively.
Below this bolt hole 11b-1 and 11b-2, this mating holes 11c and this elongated hole 11d (along the Z axle), the female screw part 11e of the male screw portion 10c interlocking of formation and this bolt 10B.At each bolt hole 11b-1,11b-2, mating holes 11c and this elongated hole 11d place, axially form corresponding female screw part 11e along the hole.Should be noted that the internal diameter of the internal diameter of this female thread portion 11e less than this bolt hole 11b-1 and 11b-2, this mating holes 11c and this elongated hole 11d.As a result, be formed on each hole of hole 11b-1 and 11b-2,11c and 11d corresponding to the basal surface of the basal surface 10e of the cylindrical part 10b of this bolt 10B.
Because the male screw portion 10c of this bolt 10B and the female screw 11e interlocking of this microscope base unit 32A, the basal surface of the head 10a of this bolt 10B contacts with the basal surface of the pilot hole 9g that is formed on this arm portion 9.As a result, the surface in contact of the surface in contact of this arm portion 9 (connect surface) 9a and this microscope base unit 32A (being connected surperficial) 11b compresses mutually, as shown in Figure 5, thereby this arm portion 9 is interconnected with this microscope base unit 32A.The degree of depth at bolt hole 11b-1,11b-2, mating holes 11c and the elongated hole 11d of microscope base unit 32A is set to so that at this moment produce the size of enough fastening forces between this arm portion 9 and this microscope base unit 32A.That is, if because this male screw portion 10c and female screw part 11e become interlocking, and the basal surface 10e of the cylindrical part 10b of this bolt 10B contacts with hole 11b-1,11b-2, hole 11c and the basal surface of hole 11d, enough big fastening force can not be realized.Therefore, the degree of depth in hole need be arranged so that this surface in contact 9a becomes mutually to compress with the surface in contact 11b of this microscope base unit 32A, and very little gap is formed between the basal surface of the basal surface 10e of cylindrical part 10b of this bolt 10B and individual single hole 11b-1 and 11b-2,11c and 11d.
The following describes this arm portion 9 and interconnective process of this microscope base unit 32A.Mating holes 9c on arm portion 9 is with after mating holes 11c on this microscope base unit 32A aligns, inserting bolt 10B.Secondly, elongated hole 9 and this elongated hole 11d alignment and inserting bolt 10B.Therefore, this arm portion 9 no longer moves on X-Y plane with respect to this microscope base unit 32A, and this makes it possible to accurately locate this arm portion 9 with respect to this microscope base unit.After with respect to this this arm portion of microscope base cell location, the hex wrench (not shown) is used for the male screw portion 10c of this bolt 10B is screwed into the female screw part 11e of this mating holes 11c and elongated hole 11d.
Then, this bolt 10B inserts opposed facing this bolt hole 9b-1,11b-1, and is screwed among this female screw part 11e with the male screw portion 10c of hex wrench with this bolt 10B.In addition, bolt 10B inserts opposed facing this bolt hole 9b-2,11b-2, and is screwed among this female screw part 11e with the male screw portion 10c of hex wrench with this bolt 10B.As a result, this arm portion 9 and this microscope base unit 32A become and interconnect, and wherein this arm portion 9 accurately is provided with respect to the position of this microscope base unit 32A.
By being similar to above-mentioned this arm portion 9 and the interconnective method of this microscope base unit 32A, base unit 1 and microscope base unit 32A interconnect.Therefore, its function is similar to the mating holes 11c of previous description respectively and the mating holes 11f of elongated hole 11d is formed on the surperficial 11a of this microscope base unit 32A that contacts with this base unit 1, as shown in Figure 5 with two bolt hole (not shown) that its function class is similar to bolt hole 11b-1 and 11b-2 with elongated hole 11h.Above-mentioned each hole (along the Z axle), the female screw part 11g of the male screw portion 12c interlocking of formation and bolt 12B.Its function is similar to mating holes 11c and the elongated hole 1b of mating holes 9c and elongated hole 9d respectively, with and function class two bolts hole being similar to bolt hole 9b-1 and 9b-2 be formed on the surperficial 1a of this base unit 1 that contacts with this microscope base unit 32A.
As bolt 10B, each comprises head 12a, cylindrical part 12b and male screw portion 12c bolt 12B.
Because the male screw portion 12c of bolt 12B and the female screw part 11g interlocking on this microscope base unit 32A, the basal surface of the head 12a of this bolt 12B contacts with the inside surface of this base unit 1.As a result, the surface in contact 11a of the surface in contact 1a of this base unit 1 and this microscope base unit 32A compresses mutually, thereby, this base unit 1 and this microscope base unit 32A are interconnected.The mating holes 11f on this microscope base unit 32A and the degree of depth of elongated hole 11h are arranged to so that at this moment produce enough fastening forces between this base unit 1 and this microscope base unit 32A.Promptly, when this male screw portion 12c and female screw part 11g become interlocking, if the basal surface of the cylindrical part 12b of this bolt 12B (corresponding to the basal surface 10e of the cylindrical part 10b of bolt 10B) contacts with the basal surface of hole 11f and 11h, can not obtain enough fastening forces.Therefore, the surface in contact 11a that the degree of depth in hole need be arranged so that at surface in contact 1a and this microscope base unit 32A becomes when compressing mutually, forms very little gap between the basal surface of the basal surface of the cylindrical part 12b of this bolt 12B and single hole 11f and 11h.The degree of depth of this bolt hole (not shown) is also by considering these factors selections.
By adopting said structure at base unit 1 and microscope base unit 32A, be similar to this arm portion 9 and the accurately interconnective mode of this microscope base unit 32A of previous explanation, this base unit 1 and microscope base unit 32A can interconnect, and wherein, its position is with respect to accurately being provided with mutually.
It should be noted that, when using aforesaid four bolt 10B and four bolt 12B, because needed fastening force difference, dissimilar bolts should be used to be used for arm portion 9 and the interconnective bolt 10B of microscope base unit 32A and be used for this base unit 1 and the interconnective bolt 12B of this microscope base unit 32A.Alternatively, the bolt of single type with different quantity be used for bolt 10B and and bolt 12B interconnecting this arm portion 9 needed different big or small fastening forces and when interconnecting this base unit 1 so that obtain with microscope base unit 32A with microscope base unit 32A.Shall also be noted that needs to form mating holes and elongated hole at least with at least two bolts two unit being interconnected, and connects this two unit in its position under with respect to situation about accurately being provided with mutually so that guarantee.
The 5th embodiment
The following describes the fifth embodiment of the present invention.
Fig. 9 illustrates the 5th embodiment of the microscopic system according to the present invention with the form from the partial sectional view of this microscopic system side intercepting.Do not have this microscope in this base unit 101, microscope base unit 201 and ocular unit 300 pie graphs 9 of the AF unit 23 among Fig. 4 by combination, be similar to the microscope of realizing among first embodiment.The microscope base unit 11 of this microscope base unit 201 is installed on holder part 10 removably via the second sub-driving mechanism 18, and arm portion 9 can be separated from each other with this holder part 10.In other words, this microscope base unit 11 and this holder part also can consider to constitute independently unit.Should be noted that identical Reference numeral give with first embodiment in the identical parts of microscopic system so that do not need to describe in detail these single parts.
The following describes in this microscopic system, how this base unit 1 and microscope base unit 11 can interconnect, and how this holder part 10 can interconnect with this arm portion 9.As shown in Figure 9, respectively via a plurality of bolt 12B and a plurality of bolt 10B, this base unit 1 and this microscope base unit 11 interfix, and this holder part 10 and arm portion 9 interfix.
Being equal to the mating holes 20f of the mating holes 11f of previous description and elongated hole 11h and elongated hole 20h and two bolt hole (not shown) is formed on the surperficial 20a with this base unit 1 contacted this microscope base unit 11, as shown in Figure 9.The female screw part 20g of the male screw portion 12c interlocking of above-mentioned each hole (along the Z axle) formation and bolt 12B.By bolt 12B being inserted being formed on the mating holes 1c on this base unit 1 and being formed among the mating holes 20f on this microscope base unit 11 of alignment mutually, and bolt 12B is inserted among the formation elongated hole 1d and elongated hole 20h of alignment mutually, this base unit 1 and microscope base unit 11 interconnect.As a result, this base unit 1 and microscope base unit 11 become with respect to accurately locating mutually.Therefore, the female screw part 20g interlocking on the male screw portion 12c of this bolt 12B and this microscope base unit 11, thereby this base unit 1 and microscope base unit 11 interconnected.Then, bolt 12B inserts in two groups of bolts hole, and this male screw portion 12c and corresponding female screw part 20g interlocking.
Be equal to the mating holes 11c of previous description and the mating holes 22c of elongated hole 11d and be formed on the upper surface 22a of this holder part 10 that contacts with this arm wall part 9, the female screw part 22e of the male screw portion 10c interlocking of each hole below (along the Z axle) formation and this bolt 10B with elongated hole 22d and two bolt hole (not shown).By bolt 10B has been inserted alignment mutually be formed on the arm portion 9 mating holes 9c be formed on this holder part 10 among the mating holes 22c, and bolt 10B has been inserted the elongated hole 9d and the elongated hole 22d of alignment mutually, and this holder part 10 and this arm portion 9 interconnect.This holder part 10 and this arm portion 9 become with respect to accurately locating mutually as a result.Therefore, the male screw portion 10c of this bolt 10B and the female screw part 22e interlocking on this support 10, thereby this holder part 10 and this arm portion 9 interconnected.Then, bolt 10B inserts in two groups of bolts hole and male screw portion 10c and corresponding female screw part 22e interlocking.
The 6th embodiment
The following describes the sixth embodiment of the present invention
Figure 10 is illustrated in the sixth embodiment of the present invention.As shown in figure 10, constitute the finder that the 6th embodiment is shown by connection ocular unit and microscope base unit and be used to observe large sample 32.In this finder, the microscope base unit 11 of this microscope base unit is installed on the L bracket 30 via the 2nd Z driving mechanism 18, so that can move along the Z axle, and this microscope base unit 11 also is connected in the transmitting device 31 of the transmitter that is bonded on sample 32.In Figure 10, same Reference numeral give with first to the 5th embodiment in same parts, and its detailed description is removed.
Microscopic system in previous the 5th embodiment that describes is by being interconnected to constitute this microscope base unit 11 and this base unit 1.Finder among the 6th embodiment is by being interconnected to constitute this microscope base unit 11 and transmitting device 31.Realize various apparatus structures for the microscope base unit 11 that makes this single formula can be used in, bolt hole is formed on a plurality of surfaces of this microscope base unit 11.
More particularly, mating holes 20f, elongated hole 20h and two bolt hole (not shown) are formed on the surperficial 20a, as shown in figure 11.The female screw 20g of the male screw portion 12c interlocking of above-mentioned each hole (along the Z axle) formation and bolt 12B.In addition, mating holes 25c, elongated hole 25d and two bolt hole (not shown) are formed on another surface of this microscope base unit 11.Form female screw 25e with the male screw portion 10c interlocking of bolt 10B for the left side (along Y-axis) in each hole.
In the 6th embodiment, this microscope base unit 11 and transmitting device 31 interconnect by mating holes 25c, elongated hole 25d and the bolt hole on the surperficial 25a that is formed on this microscope base unit 11.Therefore mating holes 31c, elongated hole 31d and two bolts hole are formed on the surperficial 31a of this transmitting device 31 in the position corresponding to mating holes 25c, elongated hole 25d and two bolts hole as shown in figure 10.
By bolt 10B having been inserted being formed on the mating holes 31c on the transmitting device 31 and being formed on mating holes 25c on the microscope base unit 11 of alignment mutually, and bolt 10B inserted elongated hole 31d and the elongated hole 25d that has alignd mutually, this microscope base unit 11 and transmitting device 31 interconnect.Therefore, this microscope base unit 11 and transmitting device 31 become with respect to accurately locating mutually.Female screw part 25e interlocking on the male screw portion 10c of this bolt 10B and this microscope base unit 11 then is so that be connected in this transmitting device 31 with this microscope base unit 11.In addition, bolt 10B inserts in two bolts hole, and the male screw portion 10c of this bolt 10B and female screw part 25e interlocking.
Form a plurality of bolt holes on a plurality of surperficial 20a that passes through in this microscope base unit 11 as mentioned above and each surface of 25a, can assemble the various types of finders and the various types of testing fixture that are used for observation sample at an easy rate, this microscopic system for example shown in Figure 9 and finder shown in Figure 10.In addition, by the mating holes, elongated hole and the bolt hole that form as mentioned above, a plurality of unit can be with respect to locating very reliably mutually and interfixing.
It should be noted that, be similar to the lip-deep a plurality of bolt holes that are formed on this microscope base unit 11 by formation, each surface that electricity in microscope base unit 32A shown in Figure 5 or microscope base unit 202 shown in Figure 4 drives a plurality of surfaces of microscope base unit 21 forms a plurality of bolts hole, this microscope base unit 32A, or electrically driven (operated) microscope base unit 21 also can be installed on the device that is different from this base unit 100, and for example transmitting device 31.
Though illustrate and described the present invention with respect to embodiment and its variation with reference to the accompanying drawings, but the invention is not restricted to these embodiment, and one skilled in the art will appreciate that not breaking away under spirit of the present invention, scope and the disclosed situation and can carry out various modifications in the form and details.
Be engaged in the content of first to file below that this is for reference:
Submitted on October 8th, 2004 Japanese patent application 2004-296042 number;
Submitted on Dec 22nd, 2004 Japanese patent application 2004-370929 number.

Claims (6)

1. modular microscopic system comprises:
The microscope base unit, it comprises the mirror disk that changes that a plurality of object lens of realizing different magnifications are housed, have and be used for being set to first drive unit of this Z driving mechanism that changes mirror disk of optical axis direction in the face of the object lens of sample/move down and regulating first operating means the focusing of sample by this first drive unit of operation along described a plurality of object lens; With
Base unit, it comprises the objective table device that sample is placed on it, has the optical axis direction that is used for along these object lens/move down second drive unit of the Z driving mechanism of this objective table device, by operating second operating means of this second drive unit adjusting to the focusing of sample, and the lamp that is used for illuminating by the illumination of transmission this sample, wherein:
This microscope base unit comprises: first connects the surface, and this microscope base unit is connected in this base unit in this first connection surface; Be connected the surface with second, second connects the surperficial device that is connected in outside this base unit, makes this microscope base unit be independent of this base unit and uses;
This microscope base unit is being connected in the structure that this base unit realizes by connect the surface via first of this microscope base unit, the moving range that this object lens up/down is moved by this first drive unit is different mutually with the moving range that this objective table device up/down is moved by this second drive unit; And focus can by this first operating means and this second operating means one of them and be adjusted on this sample; And
This microscope base unit is being connected in the structure that the described device outside this base unit realizes by connect the surface via second of this microscope base unit, focus is adjusted on this sample via described first operating means.
2. modular microscopic system comprises:
A microscope base unit in the first microscope base unit and the second microscope base unit, each microscope base unit in described first microscope base unit and the described second microscope base unit has the mirror disk that changes that a plurality of object lens are housed, the first microscope base unit comprises first drive unit, this first drive unit has and is used for being set to optical axis direction in the face of the object lens of sample/move down a Z driving mechanism that changes mirror disk of the described first microscope base unit along described a plurality of object lens of the described first microscope base unit, and the object lens in the described second microscope base unit can not up/down move; With
Base unit, it comprises the objective table device and second drive unit that sample is placed on it, this second drive unit has and is used for along being set to optical axis direction in the face of these object lens of sample/move down the 2nd Z driving mechanism of this objective table device, wherein:
Connect the surface and be formed on this base unit place, the first microscope base unit is installed in this with a described microscope base unit in this second microscope base unit and is connected on the surface;
By utilizing this base unit and this first microscope base unit to assemble first microscope, and by utilizing this base unit and this second microscope base unit to assemble second microscope different with first microscope;
The described first microscope base unit and each microscope base unit in the described second microscope base unit have be connected with base unit first connect the surface and be designed to be connected with device outside this base unit second connect surperficially, make that each the microscope base unit in the described first microscope base unit and the described second microscope base unit can be independent of this base unit use when described device outside this base unit is connected; And
By this first microscope base unit is installed in the structure that realizes on this base unit, make by this first drive unit that to be set to the moving range that this object lens up/down in the face of sample moves different mutually with the moving range that this objective table device up/down is moved by this second drive unit.
3. modular microscopic system as claimed in claim 2 also comprises:
Output is used the automatic focusing mechanism of signal when sample is focused automatically; With
The control device of the driving of control motor, wherein
This motor of being controlled its driving by this control device is included in one of them of this first drive unit and second drive unit at least, and
Except the signal that basis is provided by this automatic focusing mechanism, outside the rotation and the control that stops to focus automatically of controlling this motor, this control device also carries out Electric Machine Control, and under this control, the response external operation is controlled the rotation of motor and stopped.
4. modular microscopic system as claimed in claim 2, wherein:
Electrically driven (operated) microscope base unit of first drive unit that will have the manual microscope base unit of manually operated first drive unit or have an electricity operation is as the first microscope base unit.
5. as claim 2 or 4 described modular microscopic systems, wherein:
A plurality of screw holes and a plurality of first bolt holes that are communicated with these a plurality of screw holes separately are formed at this base unit;
With corresponding position, the position of these a plurality of first bolt holes, a plurality of second bolt holes are formed at this first microscope base unit and this second microscope base unit;
Be used for this base unit is inserted these a plurality of second bolt holes and these a plurality of first bolt holes with the bar of this first microscope base unit and one of them bolt that is connected of the second microscope base unit, and the threaded portion of this bolt and these a plurality of screw hole interlockings;
The internal diameter of these a plurality of first bolt holes and be equal to each other basically at the internal diameter of these a plurality of second bolt holes that form with corresponding position, the position of these a plurality of first bolt holes; And
The internal diameter of the internal diameter of first mating holes in described a plurality of first bolt hole and second mating holes in these a plurality of second bolt holes that form with corresponding position, the position of this first mating holes is designed to slightly the external diameter greater than the bar of this bolt.
6. modular microscopic system as claimed in claim 5, wherein:
In these a plurality of first bolt holes, the hole except that this first mating holes is an elongated hole, and in these a plurality of second bolt holes, also is elongated hole corresponding to the hole of this elongated hole.
CN200580034508A 2004-10-08 2005-10-07 Microscope device Active CN100587545C (en)

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US8711474B2 (en) * 2009-06-26 2014-04-29 Bio-Rad Laboratories, Inc. Modular microscope construction
CN103163714A (en) * 2011-12-09 2013-06-19 无锡华润上华科技有限公司 Microscope machine platform structure
CN103376542B (en) * 2012-04-25 2015-12-02 深圳欧菲光科技股份有限公司 Microscope
CN103091827B (en) * 2013-02-01 2015-09-09 沈阳博兴亚达科技有限公司 High definition identifies that comparison microscopes and vestige identify comparison method automatically automatically
JP2014153500A (en) * 2013-02-07 2014-08-25 Sony Corp Image acquisition device and stage control method
CN103454761B (en) * 2013-09-05 2016-08-17 怡高企业(中山)有限公司 One can microscope device capable of observing object to be tested at multiple angles
JP6196881B2 (en) * 2013-11-08 2017-09-13 オリンパス株式会社 Microscope system
CN103631011B (en) * 2013-12-17 2015-09-09 吉林大学 A kind of microscope is focused objective table device fast
CN104181685B (en) * 2014-07-29 2018-12-04 杭州卓腾信息技术有限公司 Based on microscopical digital slices autofocus and its method
JP6567045B2 (en) * 2014-10-06 2019-08-28 ライカ インストゥルメンツ (シンガポール) プライヴェット リミテッドLeica Instruments (Singapore) Pte. Ltd. A microscope with a manually or electrically movable stage
WO2016101092A1 (en) 2014-12-22 2016-06-30 杭州唐光科技有限公司 Digital microscope and focusing method thereof
CN110361858A (en) * 2018-08-21 2019-10-22 上海北昂医药科技股份有限公司 Three dimensional scanning platform

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