CN100582745C - Single-side grooved surface plasma biochemical sensor - Google Patents
Single-side grooved surface plasma biochemical sensor Download PDFInfo
- Publication number
- CN100582745C CN100582745C CN200710099494A CN200710099494A CN100582745C CN 100582745 C CN100582745 C CN 100582745C CN 200710099494 A CN200710099494 A CN 200710099494A CN 200710099494 A CN200710099494 A CN 200710099494A CN 100582745 C CN100582745 C CN 100582745C
- Authority
- CN
- China
- Prior art keywords
- sample
- light
- surface plasma
- semi
- identing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 55
- 230000003287 optical effect Effects 0.000 claims abstract description 40
- 239000013307 optical fiber Substances 0.000 claims abstract description 23
- 239000000523 sample Substances 0.000 claims description 84
- 238000001228 spectrum Methods 0.000 claims description 43
- 238000005286 illumination Methods 0.000 claims description 19
- 239000002086 nanomaterial Substances 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 230000004807 localization Effects 0.000 claims description 12
- 229910052736 halogen Inorganic materials 0.000 claims description 10
- 150000002367 halogens Chemical class 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 10
- 239000012472 biological sample Substances 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 7
- 238000003306 harvesting Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 4
- 238000000985 reflectance spectrum Methods 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 230000003321 amplification Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 238000010521 absorption reaction Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000011896 sensitive detection Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 238000002164 ion-beam lithography Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
Images
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A biochemical sensor of surface plasma with single-face carved slot is composed of illuminator, optical fibre for transmitting light, sensing detection box, light beam arrangement system, the sample to be detected, nano raster substrate, optical system for detection, monochromator, photomultiplier, digital converter and computer. The sensor has high sensitivity, simple structure, convenient adjustment and use, and easy application and popularization.
Description
Technical field
The present invention is a kind of single surface identing surface plasma biochemical sensor, belongs to biochemical sensitive Detection Techniques field.
Background technology
Along with the progress that deeply reaches the nanostructured process technology of plasma optical research, metal Nano structure surface plasma volume property has obtained application.Can excite metal Nano structure surface free electron to produce resonance according to the electromagnetic field of having found, for certain incident light frequency range, light and the coupling of surperficial free electron produce resonance, strong near field localization and spectrum occurring selects to absorb, this resonance mode is very responsive to the variation of metal construction peripheral region medium refraction index, utilizes this specific character being applied aspect the biochemical sensitive detection.Not only according to the shape and the array of some particle, produce the sensor that can be applied to biochemistry detection by spectral characteristic analysis, and the nanometer grating structure has also been developed biochemical sensor at present localization and spectral absorption.But, the resonance curve full width at half maximum value very big (50-100nm) of these sensors, refractive index sensitivity is less, has only 10-30nm/RIU, makes quality factor have only 0.1-0.5, even littler, so sensing sensitivity is extremely low; But have as two-sided groove structure surface plasma biochemical sensor, although its quality factor has reached higher (〉=40),, need carry out the double-face nanometer level and aim at cutting etc. because manufacture difficulty is very big, be not easy to apply.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcomes above-mentioned the deficiencies in the prior art, a kind of sensing sensitivity and measuring accuracy height is provided, and simple in structure, the convenient single surface identing surface plasma biochemical sensor of making.
Technical solution of the present invention is: single surface identing surface plasma biochemical sensor is characterized in that: comprise luminaire, the nanometer grating substrate that passes light optical fiber, sensing detection case, illuminating bundle clearing system, sample, single notching, detection optical system, monochromator, photomultiplier, digital conversion and computing machine; Luminaire is connected with the sensing detection case by passing light optical fiber; Sample is coated with on the nanometer grating substrate that is placed on single notching, is sealed in the sensing detection case with illuminating bundle clearing system and detection optical system; The light of injecting in the sensing detection case is put the vertical illumination sample in order through the illuminating bundle clearing system, because sample is coated with on the nanometer grating substrate that is placed on single notching, surface plasma body resonant vibration and localization surface plasma body resonant vibration (LSPR) have been produced, the reflection back detects by detection optical system, inject again and be divided into monochromatic light in the monochromator, receive through photomultiplier, be converted to electric signal and amplification by the photomultiplier reception, carry out signal Processing and digital conversion by the number conversion, this digital signal is sent in the computing machine, relatively detect the reflectance spectrum curve of sample on the nanometer grating substrate by computing machine, determine the kind of biochemical samples.
Described luminaire is made up of lighting source and light harvesting condenser, lighting source is the light source of the continuous spectrum that sends of a Halogen lamp LED or xenon lamp, the light that sends converges on the incident end face that passes light optical fiber by light harvesting condenser optically focused, and enters biography light Optical Fiber Transmission thus to the optical fiber exit end.
Described sensing detection case comprises sensor measuring chamber and sample chamber two parts, sensor measuring chamber and sample chamber are separated by sensing detection separator for container with holes, the nanometer grating substrate of sample and single notching places in the sample chamber, it is indoor that illuminating bundle clearing system and detection optical system are positioned at sensor measuring, the vertical illumination of illuminating bundle clearing system is also put sample in order, and detection optical system detects the reflected light of the localization surface plasma body resonant vibration of sample generation.
Described illuminating bundle clearing system is by collimating mirror, optical filter, the polaroid of horizontal positioned are formed successively, pass the continuous spectrum of the optical fiber exit end ejaculation of light optical fiber, collimate through collimating mirror, optical filter filters, the polaroid polarizing, make it become the TM polarization parallel light that wavelength coverage is 400nm-960nm, vertically inject the semi-transparent semi-reflecting prism square in the detection optical system.
Described detection optical system is made up of semi-transparent semi-reflecting prism square and condenser, on sample and nanometer grating substrate in half light transmission directive sample chamber of semi-transparent semi-reflecting prism square, pass through the reflection of the semi-transparent semi-reflecting prism square of detection optical system from the next reflected light of sample, the back is with 90 ° of angle directive condensers, by condenser optically focused, will detect optical convergence on the beam incident surface of monochromator.The substrate slot that comprises upper rail and lower guideway seat is arranged in the sample chamber, and the lower guideway seat is installed on the sidewall of sample chamber, and the nanometer grating substrate of sample inserts by in the substrate slot that guide rail is formed up and down.
The nanometer grating substrate of described single notching is made up of substrate and nano structure membrane sheet, and substrate is the high refractive index transparent glass plies that is compressed on the nano structure membrane sheet, and its refractive index is 1.50-1.90; The nano structure membrane sheet is the diaphragm that is made of silver or gold copper-base alloy, and the thickness of diaphragm is 30-125nm, cycle gaussian-shape section nanometer grating structure such as is carved with at its upper surface, evenly scribbles sample at the optical grating construction position.
Described computer system comprises Heng Guangqiangdengyuan control, Halogen lamp LED, bus interface, A/D conversion, digital spectrum image buffer storage, photomultiplier power supply, photomultiplier and computing machine; Halogen lamp LED issues out the constant light of light intensity as illumination light by bus interface by Heng Guangqiangdengyuan control control under the instruction of computing machine, illumination is at the on-chip sample of the nanometer grating of single notching, computing machine is controlled by bus interface, the tested biological sample spectrum picture curve negotiating A/D that sends here from photomultiplier is converted to the digital spectrum image curve, and deposit in the digital spectrum image buffer storage, the species spectrum picture of waiting for and having stored compares, detect the substance classes of sample, principle is because sample is coated with and is placed on the single notching grating substrate that can produce surface plasma body resonant vibration and localization surface plasma body resonant vibration (LSPR), make the light of vertically injecting the illumination sample, localization appears and to part spectrum strong absorption, the detection light belt that reflects has part spectral absorption peak, by check and analysis systems such as monochromators, after obtaining various sample resonant reflection spectrum main peak curve sense light spectrograms (as 16-23), just can relatively determine the biochemical kind of sample.
The present invention compared with prior art has the following advantages:
(1) the present invention is owing to adopt above-mentioned structure, sample is coated with on the nanometer grating substrate that is placed on single scored surface, make not only peak value height of the resonance curve that detects, and peak of curve full width at half maximum value is very little, reach≤7nm, refractive index sensitivity is big, makes the quality factor height (〉=60) that reaches, so sensing sensitivity and measuring accuracy are very high.
(2) sensing metal nano grating substrate adopts single face gaussian-shape cutting cross-section structure, owing to be the metal grating structure of single face section, can conveniently make of beamwriter lithography or ion beam lithography method, need not carry out the superhigh precision of pros and cons nano graph and aim at.
(3) above-mentioned simple in structure, practical, the modular type of the present invention, adjustment is carried with easy to use, and low to environmental requirement, detection speed is fast, is easy to apply.
Description of drawings
Fig. 1 is an embodiment of the invention single surface identing surface plasma biochemical sensor general construction front elevation;
Fig. 2 is the vertical view of embodiment of the invention Fig. 1;
Fig. 3 is an embodiment of the invention nanometer grating substrate xoy plane local Gaussian shape profile;
Fig. 4 is that embodiment of the invention nanometer grating substrate B is to partial enlarged drawing;
Fig. 5 is the various sample resonant reflection spectrum main peak sensing combined light spectrograms of embodiment of the invention nanometer grating substrate groove depth 50nm;
Fig. 6 is the various sample resonant reflection spectrum main peak sensing combined light spectrograms of embodiment of the invention nanometer grating substrate groove depth 60nm;
Fig. 7 is a control system block diagram of the present invention;
Fig. 8 is a software control processing flow chart of the present invention.
Embodiment
As shown in Figure 1, 2, the present invention by luminaire 1, pass light optical fiber 2, sensing detection case 3, illuminating bundle clearing system 4, sample 6, single notching nanometer grating substrate 7, detection optical system 9, monochromator 10, photomultiplier 11, digital converter 12, computing machine 13, detect case lid 14 and sample chamber tegillum 15 is formed.Luminaire 1 is connected with sensing detection case 3 by passing light optical fiber 2, photomultiplier 11 is placed in the bright dipping termination of monochromator 10 and receives sensing detection light, and join by monochromator 10 bright dipping end with sensing detection case 3, detecting case lid 14 covers on sensing detection case 3, illuminating bundle clearing system 4 and detection optical system 9 are sealed in the sensor measuring chamber 301 in the sensing detection case 3, sample chamber tegillum 15 covers on sample chamber 302, enter with dust protection and veiling glare, the nanometer grating substrate 7 of sample 6 by single notching is inserted in the sample chamber 302 in the substrate slot 8.The light that is sent by luminaire 1 is by the incident end 201 of lighting fiber 2, import 2 transmission of light optical fiber into, penetrate from the exit facet of exit end 202, and inject in the sensing detection case 3, illuminating bundle clearing system 4 arrangement illuminations by inside are put in the sample 6 in the sample chamber, because sample 6 is coated with on the nanometer grating substrate 7 that is placed on single scored surface, surface plasma body resonant vibration and localization surface plasma body resonant vibration (LSPR) after above-mentioned illumination, have been produced, its resonant reflection (detection) light detects by detection optical system 9, inject then in the monochromator 10 and be divided into monochromatic light, receive by photomultiplier 11 again and be converted to electric signal and amplification, carry out signal Processing and digital conversion by digital converter 12, again digital signal is sent into computing machine 13, relatively detect the reflectance spectrum curve of sample 6 on the nanometer grating substrate 7 of single scored surface by computing machine 13, determine the kind of biochemical samples.
As shown in Figure 1, 2, luminaire 1 is made up of lighting source 101 and light harvesting condenser 102, lighting source 101 is light sources of the continuous spectrum that sends of a Halogen lamp LED, owing to be the Halogen lamp LED illumination, light source is more simple, and the light that light source 101 sends converges on the incident end face 201 that passes light optical fiber 2 by the optically focused of light harvesting condenser 102, and enter thus and pass light optical fiber 2 and be transferred to optical fiber exit end 202, therefore a large amount of heats that produced by lighting source can not import in the sensing detection case 3.
As shown in Figure 1, sensing detection case 3 comprises sensor measuring chamber 301 and sample chamber 302 two parts, sensor measuring chamber 301 and sample chamber 302 are separated by sensing detection separator for container 303 with holes, the nanometer grating substrate 7 of sample 6 and single notching places in the sample chamber 302, illuminating bundle clearing system 4 and detection optical system 9 are positioned at sensor measuring chamber 301,4 vertical illuminations of illuminating bundle clearing system are also put sample 6 in order, and detection optical system 9 detects the reflected light of the localization surface plasma body resonant vibration of sample 6 generations.
The substrate slot 8 that comprises upper rail 801 and lower guideway seat 802 is arranged in the sample chamber 302, lower guideway seat 802 is installed on the sidewall of sample chamber 302, the nanometer grating substrate 7 that scribbles the single notching of sample 6 can conveniently insert in the substrate slot 8, accepts the illumination light vertical illumination of sensor measuring chamber 301 intraoral illumination light beam rearrangement systems 4 ejaculations and the detection of detection optical system 9.
As shown in Figure 1, illuminating bundle clearing system 4 is by collimating mirror 401, optical filter 402, the polaroid 403 of horizontal positioned are formed successively, pass the continuous spectrum of optical fiber exit end 202 ejaculations of light optical fiber 2, through collimating mirror 401 collimations, optical filter 402 filters, polaroid 403 polarizings make it become the TM polarization parallel light that wavelength coverage is 400nm-960nm, vertically inject on the semi-transparent semi-reflecting prism square 5 in the detection optical system 9.
As shown in Figure 1, detection optical system 9 is made up of semi-transparent semi-reflecting prism square 5 and condenser 901, on the nanometer grating substrate 7 by sample in half light transmission directive sample chamber 302 of semi-transparent semi-reflecting prism square 56 and single notching, pass through the reflection of the semi-transparent semi-reflecting prism square 5 of detection optical system 9 from the reflected light of sample 6, the back is with 90 ° of angle directive condensers 901, by condenser 901 optically focused, will detect optical convergence on the beam incident surface of monochromator 10.Semi-transparent semi-reflecting prism square 5 by the inclined-plane 503 of first right-angle prism 501 and second right-angle prism 502 mutually gummed form, inclined-plane 503 is coated with the semi-transflective reflective film, half sees through ejaculation the polarized light of vertically injecting, the detection of reflected light that returns is by second right-angle prism 502, the 503 semi-transflective reflective faces reflection through the inclined-plane, reflected light is with 90 ° of angle horizontal sheaf condensers 901.
As shown in Figure 3, be embodiment of the invention nanometer grating substrate xoy plane local Gaussian shape profile.The nanometer grating substrate 7 of single notching is made up of substrate 701 and nano structure membrane sheet 702.Substrate 701 is one to be compressed on the high refractive index transparent glass plate on the nano structure membrane sheet 702, its refractive index is 1.50-1.90, nano structure membrane sheet 702 is diaphragms that are made of silver or gold copper-base alloy, the thickness of diaphragm is 30-125nm, cycle gaussian-shape 70201 section nanometer grating structures such as be carved with at its upper surface, evenly scribbling sample 6 at the optical grating construction position, is true origin with some gaussian-shape channel bottoms 0 wherein, and its upper surface comprises the gaussian-shape structure outline and is expressed as
In the following formula, Λ is the grating cycle, and H is a groove depth, and ω is Gauss's groove width (width when groove depth 1/e height), and t is that (t 〉=10nm), m is the grating number to the degree of depth of not carving.In the embodiment of the invention one, grating periods lambda=350-650nm, raster count m 〉=50, groove depth H=20-65nm does not carve degree of depth t=10-60nm, Gauss's groove width ω=25-80nm.
As shown in Figure 4, for embodiment of the invention nanometer grating substrate B to partial enlarged drawing.On nano structure membrane sheet 702, be carved with one group of gaussian-shape section grating nano structure 70201, on gaussian-shape section grating nano structural region, evenly scribble tested biological sample 6.
Various sample resonant reflection spectrum main peak curve sensing combined light spectrograms during as shown in Figure 5, for embodiment of the invention nanometer grating substrate groove depth 50nm.There is shown the tested biological sample 6 of one group of different refractivity, what obtain after testing composes main peak curve 16 as refractive index n=1.2 o'clock resonant reflection, refractive index n=1.3 o'clock resonant reflection spectrum main peak curve 17, refractive index n=1.4 o'clock resonant reflection spectrum main peak curve 18 and refractive index n=1.5 o'clock resonant reflection spectrum main peak curve 19.
Various sample resonant reflection spectrum main peak curve sensing combined light spectrograms during as shown in Figure 6, for embodiment of the invention nanometer grating substrate groove depth 60nm.There is shown the tested biological sample 6 of another group different refractivity, what obtain after testing composes main peak curve 20 as refractive index n=1.2 o'clock resonant reflection, refractive index n=1.3 o'clock resonant reflection spectrum main peak curve 21, refractive index n=1.4 o'clock resonant reflection spectrum main peak curve 22 and refractive index n=1.5 o'clock resonant reflection spectrum main peak curve 23.
From Fig. 5, shown in 6, be coated with on the nanometer grating substrate 7 that is placed on single notching owing to tested biological sample 6 among the present invention, make the light of vertically injecting the illumination sample, surface plasma body resonant vibration and localization surface plasma body resonant vibration (LSPR) have been produced, occur localization and with sample 6 corresponding spectrum strong absorption, the detection light belt that reflects has the spectral absorption peak, by monochromator 10 systems such as check and analysis such as grade, can obtain various sample 6 resonant reflection spectrum main peak curve sense light spectrograms, objectively, the resonant reflection spectrum main peak curve sense light spectrogram of different species (different refractive indexes) all has different half-breadth height, peak wavelength and reflectivity, therefore analyze the relatively difference of sense light spectrum peak curve map, can instead release different tested biological sample 6 kinds.
From Fig. 5, shown in 6, the main peak curve 16-23 size of resonant reflection spectrum is with the structure of grating and different change of refractive index of tested biological sample with the position, wherein main peak size and grating cycle, groove depth is relevant with Gauss's groove width, the position of main peak is with the grating cycle, groove depth, Gauss's groove width, and the increase of sample refractive index is moved to the long wave direction, the size of moving speed and peak value directly has influence on sensing sensitivity, when peak value moves big more dark more when narrow more with the sample variations in refractive index, quality factor are high more, sensing sensitivity is also high more, and the quality factor of sensor are represented with following formula:
In the formula, q is refractive index sensitivity, and FWHM is the full width at half maximum of optical grating reflection spectrum, and the full width at half maximum value of the embodiment of the invention reaches 7nm, and refractive index sensitivity reaches 400-450nm/RIU, makes sensing quality factor 〉=60, is better than other sensor greatly.
As shown in Figure 7, be control system block diagram of the present invention.Computer system 13 comprises Heng Guangqiangdengyuan control 1301, Halogen lamp LED 1305, bus interface 1302, A/D conversion 12, digital spectrum image buffer storage 1306, photomultiplier power supply 1304, photomultiplier 1303 and computing machine 1307.Halogen lamp LED 1305 issues out light intensity constant light as of the present invention illumination light by bus interface 1302 by Heng Guangqiangdengyuan control 1301 controls in the instruction of computing machine 1307, sample 6 on the nanometer grating substrate 7 of illumination single notching, computing machine 1307 is by the control of bus 1302 interfaces, the tested biological sample spectrum picture curve negotiating A/D conversion of sending here from photomultiplier 1,303 12 is converted to the digital spectrum image curve, and deposit in the digital spectrum image buffer storage 1306, the species spectrum picture of waiting for and having stored compares, and detects the substance classes of sample 6.
As shown in Figure 8, be software control processing flow chart of the present invention.Its principle is: testing begins, connect each power supply earlier, preset parameter, as sample 6 precision etc., then in substrate slot 8, insert the nanometer grating substrate 7 of the single notching that scribbles sample 6, computing machine 1307 instruction acquisitions are sent here by photomultiplier 1303 and are converted the digital spectrum image to through A/D then, deposit digital spectrum image buffer storage 1306 in, and extraction reflectance spectrum peak value wavelength, half-breadth height and reflectivity etc. are for information about, automatically compare for information about by the known species that has had in advance in computing machine 1307 and the machine, relatively whether more identical under certain accuracy requirement, as come to the same thing, 1307 kinds of exporting and showing this sample 6 of computing machine, inequality as the result, 1307 in computing machine shows the spectrum picture curve of sample 6 and has had close known image originally, species or newfound species by operating personnel's interpretation sample 6, extract peak wavelength simultaneously, information such as half-breadth height and reflectivity, deposit computing machine in, increase the known species that has had, take off by the nanometer grating substrate 7 of single face cutting, detection of end.
Claims (10)
1, single surface identing surface plasma biochemical sensor is characterized in that: comprise luminaire (1), the nanometer grating substrate (7) that passes light optical fiber (2), sensing detection case (3), illuminating bundle clearing system (4), sample (6), single cutting, detection optical system (9), monochromator (10), photomultiplier (11), digital conversion (10) and computing machine (13); Luminaire (1) is connected with sensing detection case (3) by passing light optical fiber (2); Sample (6) is coated with on the nanometer grating substrate (7) that is placed on single notching, is sealed in the sensing detection case (3) with illuminating bundle clearing system (4) and detection optical system (9); The light of injecting in the sensing detection case (3) is put vertical illumination sample (6) in order through illuminating bundle clearing system (4), because sample (6) is coated with on the nanometer grating substrate (7) that is placed on single notching, surface plasma body resonant vibration and localization surface plasma body resonant vibration have been produced, the reflection back is detected by detection optical system (9), inject again in the monochromator (10) and be divided into monochromatic light, receive through photomultiplier (11), be converted to electric signal and amplification by photomultiplier (11) reception, carry out signal Processing and digital conversion by number conversion (12), this digital signal is sent in the computing machine (13), the nanometer grating substrate (7) that relatively detects single notching by computing machine is gone up the reflectance spectrum curve of sample (6), determines the kind of biochemical samples.
2, single surface identing surface plasma biochemical sensor according to claim 1, it is characterized in that: described luminaire (1) is made up of lighting source (101) and light harvesting condenser (102), lighting source (101) is the light source of the continuous spectrum that sends of a Halogen lamp LED or xenon lamp, the light that sends is by light harvesting condenser (102) optically focused, converge on the incident end face (201) that passes light optical fiber (2), and enter thus and pass light optical fiber (2) and be transferred to optical fiber exit end (202).
3, single surface identing surface plasma biochemical sensor according to claim 1, it is characterized in that: described sensing detection case (3) comprises sensor measuring chamber (301) and sample chamber (302) two parts, sensor measuring chamber (301) and sample chamber (302) are separated by sensing detection separator for container (303) with holes, the nanometer grating substrate (7) of sample (6) and single notching places in the sample chamber (302), illuminating bundle clearing system (4) and detection optical system (9) are positioned at sensor measuring chamber (301), illuminating bundle clearing system (4) vertical illumination sample (6), detection optical system (9) detect the reflected light of the localization surface plasma body resonant vibration of sample (6) generation.
4, single surface identing surface plasma biochemical sensor according to claim 1, it is characterized in that: described illuminating bundle clearing system (4) is by the collimating mirror of horizontal positioned (401), optical filter (402), polaroid (403) are formed successively, pass the continuous spectrum of optical fiber exit end (202) ejaculation of light optical fiber (2), collimate through collimating mirror (401), optical filter (402) filters, polaroid (403) polarizing, make it become the TM polarization parallel light that wavelength coverage is 400nm-960nm, vertically inject the semi-transparent semi-reflecting prism square (5) in the detection optical system (9).
5, single surface identing surface plasma biochemical sensor according to claim 1, it is characterized in that: described detection optical system (9) is made up of semi-transparent semi-reflecting prism square (5) and condenser (901), on sample (6) in half light transmission directive sample chamber (302) of semi-transparent semi-reflecting prism square (5) and nanometer grating substrate (7), pass through the reflection of the semi-transparent semi-reflecting prism square (5) of detection optical system (9) from the next reflected light of sample (6), with 90 ° of angle directive condensers (901), by condenser (901) optically focused, will detect optical convergence on the beam incident surface of monochromator (10).
6, single surface identing surface plasma biochemical sensor according to claim 5, it is characterized in that: described semi-transparent semi-reflecting prism square (5) is formed by the mutual gummed in the inclined-plane (503) of first right-angle prism (501) and second right-angle prism (502), inclined-plane (503) is coated with the semi-transflective reflective film, half sees through ejaculation the polarized light of vertically injecting, the detection of reflected light that returns is by second right-angle prism (502), (503) semi-transflective reflective face reflection through the inclined-plane, reflected light is with 90 ° of angle horizontal sheaf condensers (901).
7, single surface identing surface plasma biochemical sensor according to claim 3, it is characterized in that: the substrate slot (8) that comprises upper rail (801) and lower guideway seat (802) is arranged in sample chamber (302), lower guideway seat (802) is installed on the sidewall of sample chamber (302), and the nanometer grating substrate (7) of sample (6) inserts by in the substrate slot (8) that guide rail is formed up and down.
8, according to claim 1 or 3 described single surface identing surface plasma biochemical sensors, it is characterized in that: the nanometer grating substrate (7) of described single notching is made up of substrate (701) and nano structure membrane sheet (702), substrate (701) is the high refractive index transparent glass plies that is compressed on the nano structure membrane sheet (702), and its refractive index is 1.50-1.90; Nano structure membrane sheet (702) is the diaphragm that is made of silver or gold copper-base alloy, and the thickness of diaphragm is 30-125nm, cycle gaussian-shape (70201) section nanometer grating structure such as is carved with at its upper surface, evenly scribbles sample (6) at the optical grating construction position.
9, single surface identing surface plasma biochemical sensor according to claim 8 is characterized in that: described cycle gaussian-shape (70201) structure outline that waits is expressed as
In the following formula, Λ is the grating cycle, and H is a groove depth, and ω is Gauss's groove width, and m is the grating number.
10, single surface identing surface plasma biochemical sensor according to claim 1 is characterized in that: described computing machine (13) comprises Heng Guangqiangdengyuan control (1301), Halogen lamp LED (1305), bus interface (1302), A/D conversion (12), digital spectrum image buffer storage (1306), photomultiplier power supply (1304), photomultiplier (1303) and computing machine (1307); Halogen lamp LED (1305) issues out the constant light of light intensity as illumination light by bus interface (1302) by Heng Guangqiangdengyuan control (1301) control under the instruction of computing machine (1307), the sample (6) of illumination on the nanometer grating substrate (7) of single notching, computing machine (1307) is by bus interface (1302) control, the tested biological sample spectrum picture curve negotiating A/D conversion of sending here from photomultiplier (1303) (12) is converted to the digital spectrum image curve, and deposit in the digital spectrum image buffer storage (1306), the species spectrum picture of waiting for and having stored compares, and detects the substance classes of sample (6).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710099494A CN100582745C (en) | 2007-05-23 | 2007-05-23 | Single-side grooved surface plasma biochemical sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710099494A CN100582745C (en) | 2007-05-23 | 2007-05-23 | Single-side grooved surface plasma biochemical sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101055249A CN101055249A (en) | 2007-10-17 |
CN100582745C true CN100582745C (en) | 2010-01-20 |
Family
ID=38795195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200710099494A Expired - Fee Related CN100582745C (en) | 2007-05-23 | 2007-05-23 | Single-side grooved surface plasma biochemical sensor |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100582745C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104568849B (en) * | 2014-12-24 | 2017-07-25 | 江西师范大学 | Three-dimensional sub-wavelength metal cavity structure spectrum multi-band light perfect absorption plasmon sensor and preparation method and application thereof |
CN106526337A (en) * | 2016-10-10 | 2017-03-22 | 南京航空航天大学 | Artificial surface plasmon-based polarization sensor |
CN110208220B (en) * | 2019-06-03 | 2021-11-23 | 天津大学 | Multi-core few-mode optical fiber local surface plasmon resonance sensor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6100991A (en) * | 1997-08-20 | 2000-08-08 | Imation Corp. | Near normal incidence optical assaying method and system having wavelength and angle sensitivity |
CN1564005A (en) * | 2004-03-15 | 2005-01-12 | 东南大学 | Integrated assayer for photoelectric performance |
-
2007
- 2007-05-23 CN CN200710099494A patent/CN100582745C/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6100991A (en) * | 1997-08-20 | 2000-08-08 | Imation Corp. | Near normal incidence optical assaying method and system having wavelength and angle sensitivity |
CN1564005A (en) * | 2004-03-15 | 2005-01-12 | 东南大学 | Integrated assayer for photoelectric performance |
Non-Patent Citations (1)
Title |
---|
Rich information format surface plasmon resonancebiosensorbased on array of diffraction gratings. Jakub Dostálek.Sensors and Actuators B,Vol.107 No.1. 2004 * |
Also Published As
Publication number | Publication date |
---|---|
CN101055249A (en) | 2007-10-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103376244B (en) | Surface plasma resonance chip and apply the sensor of this chip | |
CN102985804B (en) | There is the box of extensive designing for manufacturing | |
CN104215610B (en) | Plasma resonance chamber-based fiber surface plasma sensor | |
CN101865840A (en) | Surface plasmon resonance imaging sensing system | |
CN103616164A (en) | Reflectivity/transmittance comprehensive measurement method based on pulse laser light source | |
CN102183466A (en) | Time resolution elliptical polarization spectrum measuring system | |
CN103940796A (en) | Novel multi-angle and multi-mode quick switching circular optical illumination microscopic imaging system | |
CN102042961B (en) | Fiber reflecting type micro-nano system spectrophotometer and application thereof | |
CN102680452A (en) | Dual-detection biochemical sensing detector integrated with optofluidics | |
JP2969177B2 (en) | Analysis method | |
CN110398479A (en) | A kind of microspectrum measuring device and method based on optical chip substrate | |
CN102362146A (en) | Reflectance distribution curve modeling method, thickness measurement scheme and thickness measurement reflectometer using same | |
CN101995387A (en) | Multi-functional ultraviolet-visible spectrometer | |
CN100582745C (en) | Single-side grooved surface plasma biochemical sensor | |
CN201795862U (en) | Ultraviolet-visible and fluorescence combined spectrometer | |
CN212321444U (en) | Detection device combining surface enhanced Raman scattering with SPR sensing | |
CN112697714A (en) | Non-contact high-sensitivity optical sensing system and method for monitoring polymer curing process | |
CN105717076A (en) | Spectrum SPR imaging sensing system based on acousto-optic light filtration | |
CN209803447U (en) | optical system of multifunctional laser optical tweezers-optical knife micromanipulator | |
CN110736721A (en) | Glass plate refractive index uniformity detection device and detection method based on diffraction grating | |
CN104111243B (en) | A kind of ratio fluorescent measures system and method | |
CN113324954A (en) | Prism coupling surface plasmon resonance test system based on spectral imaging | |
WO2021242741A3 (en) | Method and system for quantitative three dimensional measurement of density, anisotropy, and orientation without label | |
CN102944537B (en) | A kind of detection system based on SPR and detection method thereof | |
CN101051025B (en) | Biochemical sensing detection device for surface plasma |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100120 Termination date: 20160523 |