CN1005792B - Driving device for definitive place of microtype table - Google Patents
Driving device for definitive place of microtype table Download PDFInfo
- Publication number
- CN1005792B CN1005792B CN85108845.7A CN85108845A CN1005792B CN 1005792 B CN1005792 B CN 1005792B CN 85108845 A CN85108845 A CN 85108845A CN 1005792 B CN1005792 B CN 1005792B
- Authority
- CN
- China
- Prior art keywords
- objective table
- current
- stage
- miniature
- driving circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Control Of Position Or Direction (AREA)
- Microscoopes, Condenser (AREA)
Abstract
To reduce current consumption, to obtain smooth motion, and to position accurately without any unnecessary oscillation by driving the extremely small stage with electromagnetic force, and feeding position information on the extremely small stage back to a driving circuit from a position sensor and controlling the direction and value of a current by the driving circuit. A magnet 2 is fitted to a yoke 3 to form a magnetic circuit, which is installed on a base 8 on the whole. Force F is the driving source for the extremely small stage, the moving stage of which is determined according to the direction of the current. The position sensor 6 feeds the position information on the stage 4 back to the driving circuit 7 at any time and the driving circuit 7 supplies the current (i) for generating the necessary force F while controlling the value and direction of the current. The extremely small stage 4 moves without any hysteresis because of the feedback system using the position sensor 6 and driving circuit 7 and the stage is positioned with accuracy of micron or submicron order.
Description
The present invention and the objective table that uses on device such as microscope, the especially miniature objective table drive unit of allocation really is relevant.
The general objective table of uses such as microscope all is to drive with stepping motor, determines that with umber of pulse or position ultramagnifier determines the position.But very little at objective table, the positional precision that determine and need to move stably under the situation in micron order or ultra micro meter level, with above-mentioned drive source driving objective table following shortcoming is just arranged:
1. compare with the size of objective table, drive system is excessive;
2. be difficult to make objective table to move reposefully;
When using stepping motor, send to irregular especially obvious;
3. can produce slight vibration.
The object of the present invention is to provide a kind of like this drive unit of determining miniature stage position, it can eliminate the shortcoming of prior art, the drive source that makes miniature objective table is the side of occupation of land not, current sinking is little, objective table can move reposefully, unnecessary vibration can be do not produced, and the position can be correctly determined.
The present invention is that the end with coil and magnetic loop is installed on the miniature objective table, the other end is installed on the base, drive above-mentioned miniature objective table with the electromagnetic force that this coil and electromagnetic circuit was produced, simultaneously, dependence is installed in the position transducer of miniature objective table a part, the positional information of miniature objective table fed back to drive the loop, flow to the direction of current and the current value of above-mentioned coil with this driving circuit controls, with this drive unit that is configured to definite miniature stage position of feature.
Fig. 1 is the front elevation of the embodiment of the invention, and Fig. 2 is the planimetric map of embodiment.Magnet 2 is installed on framework 3 is formed magnetic loop, whole device is installed on the base 8.1 of coil is installed on the miniature objective table 4, certainly, also can be installed in coil 1 on the base, and magnet 2 is installed on the miniature objective table.Coil 1 with the position relation of magnet 2 is: coil 1 passes through from two formed cracks of magnet.The number of turn of now supposing coil 1 is N, and the current value that passes through in the coil 1 is i, and coil 1 length (every) that is in the magnetic loop is 1, and the density of line of magnetic force that magnetic loop produces is B, specifies according to three and restrains, and power F should be:
F＝BLNi
The action direction of this power F is all vertical with the magnetic line of force and electric current.Be that power F is the drive source of miniature objective table 4, and the moving direction of miniature objective table is decided by direction of current.The 5th, the track that guides miniature objective table 4 to move, 6 are mounted in the position transducer on miniature objective table 4 a part, the 7th, control flows to the driving loop of the electric current of coil 1, promptly constantly transmit the positional information of miniature objective table 4, drive loop 7 and provide the current value i of necessary generation power F and the trend of Control current again according to the situation of miniature objective table 4 to driving loop 7 by position transducer 6.And miniature objective table drives each quarter such as the friction force of load, objective table 4 and the track 5 that also will consider miniature objective table 4 in the needed strength etc., could determine the size of current value i then.Rely on position transducer 6 and the feedback system that drives loop 7, not only eliminated the sluggishness of miniature objective table in moving, and the precision of definite position can also reach micron order or ultra micro meter level.The additional measure that reaction velocity when improving the objective table driving is arranged and prevent to vibrate in driving loop 7.Because this driving loop 7 can be configured in the place of leaving suitable distance such as miniature objective table 4 grades, thereby the drive system that can dwindle objective table 4.
The front elevation of the example under the situation of use location sensor not in Fig. 3 indication device.This is the example that an elastomeric objects that uses spring 60 grades replaces position transducer.Promptly in objective table drives sluggishness not taking place generally, do not need accurately to determine under the situation such as position, relies on the cooperation of the screen resilience of electromagnetic force and spring 60 to determine the activation point of miniature objective table 4.In this example, the installation site sensor though structure has become simply, does not need often to carry electric current to coil for making electromagnetic force and spring force balance, be difficult for determining on the problems such as accurate position and generation sluggishness, different with foregoing embodiment.
The present invention is made of above structure, can closely and simply combine variable in distance to miniature objective table and drive source within the micron-sized scope in the millimeter level, relies on position transducer, determines that the precision of position can reach micron order to the ultra micro meter level.Miniature objective table moves steadily, can not produce slight vibration.And translational speed is variable.The position of miniature objective table moves to behind the position of setting the electric current in the coil and makes almost and disappear, thereby power consumption seldom.
Fig. 1 is the front elevation of the embodiment of the invention; Fig. 2 is the planimetric map of embodiment; Fig. 3 represents the not device front elevation of the example of use location sensor.
The 1-coil
2-magnet
The 3-framework
The miniature objective table of 4-
The 5-track
The 6-position transducer
7-drives the loop
The 8-base
The 60-spring
Claims (1)
1, a kind of drive unit of determining miniature stage position, it is characterized by, one end of coil and magnetic loop is installed on the miniature objective table, the other end is installed on the base, drive above-mentioned miniature objective table with the electromagnetic force that this coil and electromagnetic circuit was produced, simultaneously, rely on the position transducer that is installed in miniature objective table a part, the positional information of miniature objective table is fed back to the driving loop, flow to the direction of current and the current value of above-mentioned coil with this driving circuit controls.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24654784A JPS61124915A (en) | 1984-11-21 | 1984-11-21 | Driving and positioning device for extremely small stage |
| JP246547 | 1984-11-21 | ||
| JP246547/84 | 1984-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85108845A CN85108845A (en) | 1986-11-05 |
| CN1005792B true CN1005792B (en) | 1989-11-15 |
Family
ID=17150032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85108845.7A Expired CN1005792B (en) | 1984-11-21 | 1985-11-20 | Driving device for definitive place of microtype table |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS61124915A (en) |
| CN (1) | CN1005792B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6369741B2 (en) * | 2014-01-31 | 2018-08-08 | 埼玉県 | Positioning mechanism |
| US20170108685A1 (en) * | 2015-10-16 | 2017-04-20 | Mikroscan Technologies, Inc. | Systems, media, methods, and apparatus for enhanced digital microscopy |
| CN116609332B (en) * | 2023-07-20 | 2023-10-13 | 佳木斯大学 | Novel tissue embryo pathological section panorama scanning system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254459A (en) * | 1975-10-29 | 1977-05-02 | Hitachi Ltd | Precisely and finely movable pedestal |
-
1984
- 1984-11-21 JP JP24654784A patent/JPS61124915A/en active Pending
-
1985
- 1985-11-20 CN CN85108845.7A patent/CN1005792B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61124915A (en) | 1986-06-12 |
| CN85108845A (en) | 1986-11-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C13 | Decision | ||
| GR02 | Examined patent application | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |