CN100578750C - Container transporting apparatus and container transporting system - Google Patents
Container transporting apparatus and container transporting system Download PDFInfo
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- CN100578750C CN100578750C CN200680017729A CN200680017729A CN100578750C CN 100578750 C CN100578750 C CN 100578750C CN 200680017729 A CN200680017729 A CN 200680017729A CN 200680017729 A CN200680017729 A CN 200680017729A CN 100578750 C CN100578750 C CN 100578750C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0093—Programme-controlled manipulators co-operating with conveyor means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0235—Containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
Provided are a container transporting apparatus and a container transporting system which can suitably transport containers corresponding to a process speed, arrangement configuration and the like of a processing apparatus. The container transporting system is provided for transporting the container which stores substrates inside, and is provided with a plurality of container transporting apparatuses. The container transporting apparatus is provided with a transporting robot having a lifting means for lifting the container being held and a linearly shifting means; and a placing table for placing at least one container.
Description
Technical field
The present invention relates to take in the conveyer of the container of substrate that conveyance under the high clean environment handles etc.
Background technology
Generally, substrates such as LCD or semiconductor wafer are afraid of dust, and it is manufactured on high clean environment is to carry out in the so-called clean room.In such manufacturing works, need form conveyance substrate between a plurality of processing unit that preceding matting, film form various processing such as operation, resist operation carrying out film, as this carrying device, use the container that is called FOUP (Front Opening Unified Pod).This container can be taken in 25 substrates on the shelf of inside, hang oneself down and resemble OHT (the Overhead Hoist Transfer) conveyance of travelling the monorail train by the automatic conveyance car that travels in factory (AGV (Automatic Guided Vehicle)) or being laid on track on the ceiling of factory.
Manage throughout the container mounting table is set in the device, the handing-over of this container mounting table and for example container between the AGV is undertaken by the manipulator that is provided with among processing unit or the AGV (loader and emptier).In addition, the container on the container mounting table uses well-known SCARA type manipulator to the conveyance of the substrate of each processing unit, is undertaken by each substrate.
As an example of in the past container carrying device, the container carrying device of record in the patent documentation 1 is for example arranged.With reference to Figure 11, the container carrying device of record in the patent documentation 1 is described below.This container carrying device is taken at loading between the container emptier A2 of the container loader A1 of container 110 of substrate and the container 110 that the substrate that disposes is taken in unloading, setting will be become by container loader A1 that empty container 110 moves, the container of lifting action is walked crosswise conveyance pedestal 111, thereby a plurality of containers 110 of energy load/unload need not be waited for AGV for the container handing-over and just can travel.
In recent years, wish in container, only to take in the substrate of necessary minority, reduce the stock by flowing to production line.At this moment, shorten based on processing time of processing unit, thus constitute the container carrying device on mounting container ground, the front of processing unit, thus can not produce the stand-by period, to the processing unit supplying substrate.Relative with it, in the processing unit of processing time length, accept a plurality of containers from AGV, can constitute the container carrying device in interim storage ground, thereby can make AGV work efficiently.
Patent documentation 1: the spy opens flat 8-167641 communique
; in the container carrying device of patent documentation 1; between container loader A1 and container emptier A2; substrate loaded with platform S1, buffer table SB, substrate unloading be arranged as 1 row with platform S2, the predetermined process device need be configured in substrate and load with platform S1 and substrate and unload the rear of using platform S2.Therefore, needs increase the interval between the adjacent processing unit etc., have big restriction in the configuration of each device.
In addition, for container loader A1 is arrived in the container conveyance, when perhaps using AGV, need make the AGV and the container carrying device synchronization action that in factory, can freely travel from container emptier A2 returnable, must the unified problem of controlling the whole devices relevant so exist with the container conveyance.AGV also need move between container loader A1 and container emptier A2 not only to container loader A1 or A2 conveyance of container emptier or returnable, and the moving range of AGV becomes wide region, is difficult to guarantee operator's safety zone.
On the other hand, when using OHT in the conveyance of container, OHT is installed in the ceiling portion of factory, the difficulty so this installation exercise or upkeep operation etc. become.In addition, the track of the drive part of OHT and the usefulness of travelling is set above processing unit etc., falls from top dust, the unfavorable condition that the cleannes of clean room descend so produce.And then the track of the usefulness of travelling is configuration circularly in factory, thus the layout changing in factory or set up etc. in, extremely difficulty is laid track again.
Have again, in container carrying device in the past, its configuration or structure are as mentioned above, be subjected to restricting significantly, so occur in the short processing unit of processing time and produce the stand-by period, also there is the problem of the delay that produces production process in the perhaps state of affairs that AGV waits as long for before long processing unit of processing time.
Summary of the invention
The present invention proposes in order to solve these problems, and its purpose is, provides a kind of processing speed or configuration structure etc. according to processing unit, rightly the container conveyer of conveyance container.
First form of container conveyer of the present invention is a kind of container conveyer, the container of substrate is taken in its conveyance inside between delivery position of stipulating and substrate board treatment, it is characterized in that: with the container carrying device as a component unit, described container carrying device comprises: carrying manipulator, the linear moving mechanism that it has the elevating mechanism of vertically lifting, move back and forth along a direction of level and can rise to the spinning movement mechanism of rotating after can the height of stacked 2 the above containers on the described mounting table; The mounting table of the above container of energy mounting, described linear moving mechanism has the arm body that keeps described container and rotate in vertical plane, by described arm body is rotated described container is moved forward and backward, described container carrying device is a plurality of in abutting connection with arranging on longitudinal direction or transverse direction, described carrying manipulator respectively can with described container at least conveyance to the described mounting table of the described container carrying device of adjacency, by making described a plurality of container carrying device synchronous, the described container of conveyance successively between the described container carrying device of adjacency, thus can be between described delivery position and described substrate board treatment the described container of conveyance.
Other forms of container conveyer of the present invention are characterised in that: described container temporarily is retained on the mounting table of described arbitrarily container carrying device, use other other described containers of described container carrying device conveyance, can replace the conveyance order of container thus.
Other forms of container conveyer of the present invention are characterised in that: the described carrying manipulator that uses described mounting table to upload to be equipped with the described container carrying device of 1 the above container, other described containers are risen and straight line moves and surpass described container, can replace the conveyance order of described container thus.
Other forms of container conveyer of the present invention are characterised in that: described carrying manipulator has elevating mechanism, this elevating mechanism can rise on described mounting table can stacked 2 the above containers height.
Other forms of container carrying device of the present invention are characterised in that: also have the motor that the either party that is used to make the described connecting elements that is connected with described gear rotates.
Other forms of container carrying device of the present invention are characterised in that: described elevating mechanism has the movable link of fixing described linear moving mechanism, by rotating the thread spindle that makes described movable link oscilaltion, makes the described container oscilaltion that is kept by described linear moving mechanism by described thread spindle is rotated.
Other forms of container carrying device of the present invention are characterised in that: also have the motor that is used to make described thread spindle rotation.
Other forms of container carrying device of the present invention are characterised in that: described elevating mechanism can be elevated to more than the height of described container.
Other forms of container carrying device of the present invention are characterised in that: also have the rotating mechanism that described container can be rotated in the horizontal direction.
Other forms of container carrying device of the present invention are characterised in that: have 1 described carrying manipulator and the described mounting table more than 2, described 1 carrying manipulator can be with described container conveyance to all described mounting tables.
First form of container conveyer of the present invention is characterised in that: in rectilinear direction or the direction vertical with described rectilinear direction, the container carrying device that adjoins each other a plurality of above-mentioned any forms are set, by the described carrying manipulator that is provided with in the described container carrying device, at least can be between the described container carrying device of adjacency the described container of conveyance.
Other forms of container conveyer of the present invention are characterised in that: described a plurality of container carrying device synchronization actions.
The invention effect
According to the present invention, can provide according to the processing speed of processing unit or configuration structure etc., the container conveyer of conveyance container rightly.Container conveyer of the present invention has can be at the carrying manipulator of vertical direction and horizontal direction conveyance container, so can be with the mounting table of tank capacity ground conveyance to adjacent device.
In addition, corresponding according to container conveyer of the present invention with the configuration structure of processing unit or processing speed etc., combination container carrying device neatly, thus can increase substantially the efficient of processing unit.In addition, also can be easily with the layout changing of production line or set up corresponding.
Description of drawings
Fig. 1 is the stereogram of an embodiment of expression container conveyer of the present invention.
Fig. 2 is the cutaway view of an embodiment of expression carrying manipulator.
Fig. 3 is the stereogram of other embodiment of expression carrying manipulator.
Fig. 4 is the cutaway view of rotation transfer mechanism of other embodiment of expression carrying manipulator.
Fig. 5 is the end view of the maintaining body of expression carrying manipulator.
Fig. 6 is the vertical view of an embodiment of expression container conveyer of the present invention.
Fig. 7 is the vertical view of other embodiment of expression container conveyer of the present invention.
Fig. 8 is the end view of the action of expression carrying manipulator.
Fig. 9 is the end view of the stacked container of expression by the state of carrying manipulator conveyance.
Figure 10 is the vertical view of other embodiment of expression container conveyer of the present invention.
Figure 11 is an end view of representing container carrying device in the past.
Among the figure:
1-container carrying device; The 2-carrying manipulator; The 3-container; The 4-mounting table; The 5-base board delivery device; The 7-processing unit; The 8-load port; The 9-objective table; The 10-elevating mechanism; The 11-framework; The directly moving guide of 12-; The 13-thread spindle; The 14-motor; The 15-movable link; The 16-the first arm; 17-second arm; 18-arm body; The 19-pulley; The 20-bearing; The 21-band; The 22-rotation axis; 23-container maintaining body; 24-first connecting elements; 25-second connecting elements; The 26-rotation transfer mechanism; The 28-framework; 29-the 3rd connecting elements; 30-the 4th connecting elements; 31-rotates fulcrum; The 32-gear; The framework of 33-maintaining body; The rotary actuator of 34-; The 35-rotating fulcrum; The 36-connecting elements; The 37-retaining member; 40-AGV; 100-container conveyer; The 110-container; The 111-container is walked crosswise the conveyance pedestal.
Embodiment
Container conveyer of the present invention can be applied to move in (clean room etc.) under high cleaning ambient and handle in the operation of article, below, using the conveyance electronic component is the example of the substrate of LCD, and container conveyer of the present invention is described.
Fig. 1 is the stereogram of expression container conveyer preferred embodiment of the present invention.Make up 8 container carrying devices 1 (1a～1h), constitute the container conveyer 100 of present embodiment.Each container carrying device 1 has carrying manipulator 2 (2a～2h) and be used for the mounting table 4 (4a～4h) of mounting container 3.
The substrate of taking in the configuration of the rear of container conveyer 100 is used for container 3 is to the base board delivery device 5 (5a, 5b) of various processing unit 7 conveyances.In base board delivery device 5, be provided with to have and be used for mounting by the objective table 9 of the container 3 of carrying manipulator 2 conveyances, with the unblank load port 8 (8a, 8b) of mechanism of (not shown) of the lid of container 3.In the container conveyer 100 of present embodiment, the place ahead at base board delivery device 5a, vertically (with respect to the direction at the right angle, front of base board delivery device 5) places container carrying device 1c～1e side by side, the place ahead of this external container carrying device 5b, vertically (with respect to the direction at the right angle, front of base board delivery device 5) places container carrying device 1f～1h side by side, and then in the place ahead of container carrying device 1c～1e, laterally file is placed container carrying device 1a, the place ahead of this external container carrying device 1f～1h, laterally file is placed container carrying device 1b.
By pressing described such dispensing containers carrying device 1a～1h, carrying manipulator 2a, 2b can make container 3 go up at mounting table 4a, 4b horizontal (length direction) and move, and carrying manipulator 2c～2h can make container 3 move between mounting table 4a, 4b and base board delivery device 5.Carrying manipulator 2a container 3 can be moved to carrying manipulator 2b～2e arranged side by side the position that can keep, same carrying manipulator 2b container 3 can be moved to carrying manipulator 2f～2h arranged side by side the position that can keep.
And then carrying manipulator 2a, 2b for example also can be used near the AGV conveyance container 3 that stops the end of each mounting table 4a, 4b.Therefore, carrying manipulator need not be set on AGV, thus the mounting table of AGV can be enlarged, can the conveyance more containers.
Below, use cutaway view shown in Figure 2, an in-built embodiment of carrying manipulator 2 is described.Carrying manipulator 2 is made of the elevating mechanism 10 and the arm body 18 on the next door that is arranged on mounting table 4.Elevating mechanism 10 is by straight moving guide 12, the motor 14a that is installed in the bottom of framework 11, the thread spindle 13 that is connected with motor 14a on the framework 11 that is installed in container carrying device 1, the movable link 15 of lifting work constitutes by the rotation of thread spindle 13.The rotation thread spindle 13 that becomes by motor 14a rotates, thus the structure of movable link 15 liftings.
In addition, arm body 18 has the first arm 16 and second arm 17, and an end of the first arm 16 is connected with motor 14b on being fixed on movable link 15.In addition, have with motor 14 concentric shapes be fixed on pulley 19a on the movable link 15.The pulley 19b that can rotate by bearing 20 is set near the other end of the first arm 16, between pulley 19a and pulley 19b, hangs band 21a.One end of second arm 17 is fixed on the rotation axis 22 (connecting portion) of pulley 19b, in the inside of second arm 17, with the first arm 16 pulley 19c, 19d and band 21b is set equally.Pulley 19c is installed in rotation on second arm 17, and near the pulley 19d of the other end that is installed in rotation on second arm 19 is fixed on the maintaining body 23.Maintaining body 23 can rotate with respect to second arm 17 by bearing 20 along with the rotation of pulley 19d.
In the arm body 18 of described structure, by the rotation of motor 14b, the first arm 16 rotations, meanwhile, band 21a makes pulley 19a to moving in the other direction, and thus, pulley 19b is to the direction rotation opposite with the rotation of motor 14b.The diameter of pulley 19b is set at half of diameter of pulley 19a, and pulley 19b is to 2 times of the rotation of opposite spin motor 14b.Thus, second arm 17 is to 2 times of the direction rotations opposite with the first arm 16.Connect pulley 19c, 19d and band 21b with same structure, container maintaining body 23 can be maintained level.
Use stereogram shown in Figure 3, below other embodiment of the arm body 18 that is provided with in the explanation carrying manipulator 2.On movable link 15, be rotatably mounted each end of first connecting elements 24 and second connecting elements 25 respectively.In addition, at the other end of first connecting elements 24 and second connecting elements 25 rotation transfer mechanism 26 (connecting portion) is installed.Framework 28 by connecting elements 24,25, movable link 15, rotation transfer mechanism 26 constitutes linkage, and by being installed in the work of the motor 14 on the movable link 15, first connecting elements 24 rotates, and also rotates with other members of its interlock.Equally, constitute linkage, rotate with 24 interlocks of first connecting elements by the 3rd connecting elements 29, the 4th connecting elements 30, rotation transfer mechanism 26, container maintaining body 23.
Fig. 4 is the cutaway view of the structure of expression rotation transfer mechanism 26 shown in Figure 3.Rotating fulcrum 31a～the 31d of connecting elements 24,25,29,30 is installed in rotation on the rotation transfer mechanism 26 by bearing 20.Front end at rotating fulcrum 31a and 31d has gear 32a, 32b, and both are fitted to each other, and the rotation that makes the connecting elements 24 of winning passes to the 4th connecting elements 30 with the identical speed of opposite direction of rotation.Thus, motor 14 is rotated, can make connecting elements 24,25 and connecting elements 29,30, thereupon, can make container maintaining body 23 move left and right on the drawing of Fig. 3 relatively to counter-rotation.
As mentioned above, carrying manipulator 2 is provided with the arm body 18 that can rotate in vertical plane, and container 3 is moved by linearity, carries out operation so the operator can easily avoid the moving range of arm body 18, can guarantee the safety zone of operation easily.
Below use Fig. 5 that an embodiment of the container maintaining body 23 that carrying manipulator 2 is set is described.For example, the container maintaining body 23 that is installed in the front end of second arm 17 is equipped with rotary actuator 34 (in the present embodiment on its framework 33, the air actuator that fulcrum relies on cylinder to rotate), on its rotating fulcrum 35, fixedly install the central portion of connecting elements 36.2 members connect rotationally and constitute connecting elements 36, connect the end of retaining member 37a, 37b rotationally at its two ends.This retaining member 37a, 37b are installed in rotation on the framework 33, by the work of rotary actuator 34, the part that is fixed on the framework 33 are rotated around fulcrum.Thus, the other end of retaining member 37a, 37b closer to each other or away from, thereby can keep container 3.
Below, the container conveyer of the present invention that constitutes about disposing a plurality of container carrying devices uses the suitably embodiment of dispensing containers carrying device of description of drawings.
Fig. 6 is that the vertical view with the embodiment of the same structure of container conveyer shown in Figure 1 100 is adopted in the configuration of container carrying device 1.Promptly, can container 3 be moved at horizontal (above-below direction among the figure), can be used in the container carrying device 1 that vertically disposes between container carrying device 1a, 1b and the base board delivery device 5, container 3 is moved between container carrying device 1a, 1b and base board delivery device 5.
Fig. 7 represents other embodiment of container conveyer of the present invention.In container conveyer shown in Figure 7, the mounting table of container carrying device 1 shown in Figure 64 can the whole containers 3 more than 2 of mountings, and in the present embodiment, have can only mounting one container carrying device 1k.In addition, with the end of container carrying device 1i, the 1j of container carrying device 1c disposed adjacent near, AGV40 stops, and can remain on the container 3x that AGV goes up mounting, to mounting table 4i, 4j conveyance.
The container carrying device 1j of present embodiment is provided with 3 carrying manipulators 2, and AGV40 also has the mounting table of a plurality of containers 3 of energy mounting in addition.Thus, use 3 carrying manipulators 2, between AGV40 and container carrying device 1i, 1j, can join a plurality of containers 3 simultaneously.Container carrying device 1 has carrying manipulator 2, so AGV40 need not be provided with carrying manipulator, the mounting table of a plurality of containers 3 of energy mounting can be set in AGV40.Have again, also can interim storage mounting table 4 ground of container carrying device 1 make inside become mini environments (higher clean environment).
Container carrying device 1 setting has the carrying manipulator 2 of elevating mechanism and linear moving mechanism, so during a plurality of container 3 of mounting, need not for example as shown in Figure 8, also can change the order of conveyance container 3 by the order conveyance container of arranging 3 on mounting table 4.In end view shown in Figure 8, be illustrated in 2 container 3a of mounting and 3b on the mounting table 4, compare with the container 3a of load port 8 one sides, container 3b is the order when the load port conveyance preferentially.
Fig. 8 (a) expression carrying manipulator 2 keeps the state on the top of container 3b.Fig. 8 (b) expression makes elevating mechanism 10 work, the state of hoisting container 3b.Fig. 8 (c) expression makes 18 work of arm body, container 3b is moved to the state of top of the objective table 9 of load port 8.Fig. 8 (d) expression makes elevating mechanism 10 work, container 3b is descended the state of mounting to the objective table 9.
As mentioned above owing to can change the order of conveyance container 3, so in the manufacturing process of substrate, can with after put into production the container 3 of line surpass container 3 priority treatment of line that put into production earlier, so can carry out various processing rapidly.
In addition, according to container carrying device 1, by using elevating mechanism and linear moving mechanism, for example as shown in Figure 9, can be on mounting table 4 a plurality of containers 3 of stacked mounting.Perhaps, also can be from the container 3 on top a plurality of containers 3 of the stacked mounting of conveyance in order.
Figure 10 represents other execution modes of container conveyer of the present invention.The container conveyer of present embodiment has carrying manipulator 2, is positioned at 2 mounting tables 4 of both sides across carrying manipulator 2.The carrying manipulator 2 of present embodiment also is provided with the rotating mechanism that container 3 can be rotated in the horizontal direction except elevating mechanism and linear moving mechanism.
In the embodiment shown in fig. 10, across the container conveyer, dispose 3 stylobate plate conveying devices 5 respectively in both sides.2 mounting tables 4 are relative with each 3 stylobate plate conveying device 5 respectively, have to join the length of container 3.By constituting container conveyer of the present invention like that by Figure 10, can be with 1 carrying manipulator 2 conveyance container 3 between 6 stylobate plate conveying devices 5 and mounting table 4.
As mentioned above, container conveyer of the present invention, by a plurality of container carrying devices that are made of mounting table and at least one carrying manipulator are set on the floor of clean room simultaneously, can be easily with the layout changing of production line or set up correspondingly, also can carry out upkeep operation easily.In addition, in container, take in a spot of substrate, when the production line, AGV is waited for a large amount of container flow, just the container conveyance can be arrived various processing unit.
Have again, in container conveyer of the present invention,, can easily reduce the generation of dust by the sealing moving part.
Have, an example of container conveyer of the present invention is represented in the record of present embodiment, is not limited thereto again.About the thin bilge construction of the container conveyer of present embodiment and detailed action etc., change can suit in the scope that does not break away from main idea of the present invention.
This specification is willing to 2005-193804 according to the spy of application on July 1st, 2005.Comprise its full content here.
Utilizability on the industry
The present invention can be applied to implement any thing mobile and that process easily under high cleaning ambient Product.
Claims (3)
1. container conveyer, the container of substrate is taken in its conveyance inside between the delivery position of regulation and substrate board treatment, it is characterized in that:
As a component unit, described container carrying device comprises with the container carrying device: the mounting table of the above container of energy mounting; Carrying manipulator, the linear moving mechanism that it has the elevating mechanism of vertically lifting, move back and forth along a direction of level and can rise to the spinning movement mechanism of rotating after can the height of stacked 2 the above containers on the described mounting table, described linear moving mechanism has the arm body that keeps described container and rotate in vertical plane, by described arm body is rotated described container is moved forward and backward
Described container carrying device is a plurality of in abutting connection with arranging on longitudinal direction or transverse direction,
Described carrying manipulator respectively can with described container at least conveyance to the described mounting table of the described container carrying device of adjacency,
By making described a plurality of container carrying device synchronous, the described container of conveyance successively between the described container carrying device of adjacency, thus can be between described delivery position and described substrate board treatment the described container of conveyance.
2. container conveyer according to claim 1 is characterized in that:
Described container temporarily is retained on the mounting table of described arbitrarily container carrying device, uses other other described containers of described container carrying device conveyance, can replace the conveyance order of container thus.
3. container conveyer according to claim 1 and 2 is characterized in that:
Use described mounting table to upload to be equipped with the described carrying manipulator of the described container carrying device of 1 the above container, other described container is risen and straight line moves and surpass described container, can replace the conveyance order of described container thus.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005193804 | 2005-07-01 | ||
| JP193804/2005 | 2005-07-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101180719A CN101180719A (en) | 2008-05-14 |
| CN100578750C true CN100578750C (en) | 2010-01-06 |
Family
ID=37604416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200680017729A Active CN100578750C (en) | 2005-07-01 | 2006-06-30 | Container transporting apparatus and container transporting system |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4615015B2 (en) |
| KR (1) | KR100991609B1 (en) |
| CN (1) | CN100578750C (en) |
| WO (1) | WO2007004551A1 (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8915692B2 (en) | 2008-02-21 | 2014-12-23 | Harvest Automation, Inc. | Adaptable container handling system |
| US9147173B2 (en) | 2011-10-31 | 2015-09-29 | Harvest Automation, Inc. | Methods and systems for automated transportation of items between variable endpoints |
| US8676425B2 (en) | 2011-11-02 | 2014-03-18 | Harvest Automation, Inc. | Methods and systems for maintenance and other processing of container-grown plants using autonomous mobile robots |
| US8937410B2 (en) | 2012-01-17 | 2015-01-20 | Harvest Automation, Inc. | Emergency stop method and system for autonomous mobile robots |
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| KR100991609B1 (en) | 2010-11-04 |
| KR20080016614A (en) | 2008-02-21 |
| JP4615015B2 (en) | 2011-01-19 |
| CN101180719A (en) | 2008-05-14 |
| JPWO2007004551A1 (en) | 2009-01-29 |
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