CN100566152C - 具有抑制体声波滤波器中通带波纹的装置的体声波谐振器 - Google Patents
具有抑制体声波滤波器中通带波纹的装置的体声波谐振器 Download PDFInfo
- Publication number
- CN100566152C CN100566152C CNB038216523A CN03821652A CN100566152C CN 100566152 C CN100566152 C CN 100566152C CN B038216523 A CNB038216523 A CN B038216523A CN 03821652 A CN03821652 A CN 03821652A CN 100566152 C CN100566152 C CN 100566152C
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- hearth electrode
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- piezoelectric layer
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- Expired - Fee Related
Links
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 3
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- 239000010937 tungsten Substances 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 2
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02047—Treatment of substrates
- H03H9/02055—Treatment of substrates of the surface including the back surface
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/0211—Means for compensation or elimination of undesirable effects of reflections
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02256348.0 | 2002-09-12 | ||
EP02256348 | 2002-09-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1682442A CN1682442A (zh) | 2005-10-12 |
CN100566152C true CN100566152C (zh) | 2009-12-02 |
Family
ID=31985135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038216523A Expired - Fee Related CN100566152C (zh) | 2002-09-12 | 2003-09-01 | 具有抑制体声波滤波器中通带波纹的装置的体声波谐振器 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20060043507A1 (zh) |
EP (1) | EP1540819A1 (zh) |
JP (1) | JP4541147B2 (zh) |
CN (1) | CN100566152C (zh) |
AU (1) | AU2003259512A1 (zh) |
WO (1) | WO2004025832A1 (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3987036B2 (ja) * | 2001-11-06 | 2007-10-03 | インフィネオン テクノロジーズ アクチエンゲゼルシャフト | フィルタ装置およびその製造方法 |
JP4693397B2 (ja) * | 2004-11-26 | 2011-06-01 | 京セラ株式会社 | 薄膜バルク音響波共振子およびフィルタならびに通信装置 |
US20070007854A1 (en) * | 2005-07-09 | 2007-01-11 | James Oakes | Ripple free tunable capacitor and method of operation and manufacture therefore |
JP4854501B2 (ja) * | 2006-12-26 | 2012-01-18 | 京セラ株式会社 | バルク音響波共振子及びフィルタ並びに通信装置 |
US7851333B2 (en) * | 2007-03-15 | 2010-12-14 | Infineon Technologies Ag | Apparatus comprising a device and method for producing it |
CN100547396C (zh) * | 2007-05-08 | 2009-10-07 | 中国科学院上海微***与信息技术研究所 | 一种应用于生物微质量检测的硅基压电薄膜传感器及制作方法 |
US20090053401A1 (en) * | 2007-08-24 | 2009-02-26 | Maxim Integrated Products, Inc. | Piezoelectric deposition for BAW resonators |
US8512800B2 (en) * | 2007-12-04 | 2013-08-20 | Triquint Semiconductor, Inc. | Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters |
US7768364B2 (en) * | 2008-06-09 | 2010-08-03 | Maxim Integrated Products, Inc. | Bulk acoustic resonators with multi-layer electrodes |
CN101924529B (zh) * | 2010-08-31 | 2012-10-10 | 庞慰 | 压电谐振器结构 |
US10090820B2 (en) * | 2015-07-31 | 2018-10-02 | Qorvo Us, Inc. | Stealth-dicing compatible devices and methods to prevent acoustic backside reflections on acoustic wave devices |
JP6699927B2 (ja) * | 2016-03-03 | 2020-05-27 | 株式会社ディスコ | Bawデバイス及びbawデバイスの製造方法 |
CN109474253A (zh) * | 2018-09-30 | 2019-03-15 | 天津大学 | 一种柔性基底薄膜体声波谐振器以及形成方法 |
KR20200069561A (ko) | 2018-12-07 | 2020-06-17 | 삼성전기주식회사 | 체적 음향 공진기 |
DE102019121804A1 (de) * | 2019-08-13 | 2021-02-18 | RF360 Europe GmbH | Mikroakustische Ultrahochfrequenzvorrichtung |
US20230058875A1 (en) * | 2021-08-18 | 2023-02-23 | RF360 Europe GmbH | Wideband-enabled electroacoustic device |
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US2374035A (en) * | 1943-04-22 | 1945-04-17 | Wyandotte Chemicals Corp | Manufacture of alkali metal silicates |
US3920586A (en) * | 1972-10-16 | 1975-11-18 | Procter & Gamble | Detergent compositions |
JPS5237953B2 (zh) * | 1973-12-14 | 1977-09-26 | ||
JPS51129129A (en) * | 1975-05-02 | 1976-11-10 | Kureha Chem Ind Co Ltd | Matrix switch |
CA1041186A (en) * | 1976-04-28 | 1978-10-24 | Henry K. Yee | Monolithic crystal filters |
CA1089544A (en) * | 1976-11-09 | 1980-11-11 | Sadao Takahashi | Elastic surface wave device |
GB2064256B (en) * | 1979-10-22 | 1983-11-23 | Secr Defence | Surface acoustic wave devices and system including such devices |
FR2531298B1 (fr) * | 1982-07-30 | 1986-06-27 | Thomson Csf | Transducteur du type demi-onde a element actif en polymere piezoelectrique |
JPS60150311A (ja) * | 1984-01-17 | 1985-08-08 | Murata Mfg Co Ltd | 圧電装置 |
JPS60126907A (ja) * | 1983-12-12 | 1985-07-06 | Nippon Telegr & Teleph Corp <Ntt> | 単一応答複合圧電振動素子 |
US4556814A (en) * | 1984-02-21 | 1985-12-03 | Ngk Spark Plug Co., Ltd. | Piezoelectric ultrasonic transducer with porous plastic housing |
US4598261A (en) * | 1985-05-24 | 1986-07-01 | The United States Of America As Represented By The Secretary Of The Army | Microwave saw monochromator |
NL8501908A (nl) * | 1985-07-03 | 1987-02-02 | Tno | Tastsensor. |
JPS63196106A (ja) * | 1987-02-10 | 1988-08-15 | Toshiba Corp | 弾性表面波フイルタ素子の製造方法 |
JPH01269310A (ja) * | 1988-04-21 | 1989-10-26 | Sony Corp | コード発生器及びコード検出器 |
US5009690A (en) * | 1990-03-09 | 1991-04-23 | The United States Of America As Represented By The United States Department Of Energy | Method of bonding single crystal quartz by field-assisted bonding |
US5079469A (en) * | 1990-10-15 | 1992-01-07 | The United State Of America As Represented By The United States Department Of Energy | Piezonuclear battery |
US5233261A (en) * | 1991-12-23 | 1993-08-03 | Leybold Inficon Inc. | Buffered quartz crystal |
JPH0746072A (ja) * | 1993-08-03 | 1995-02-14 | Matsushita Electric Ind Co Ltd | 水晶振動子の製造方法 |
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US6670866B2 (en) * | 2002-01-09 | 2003-12-30 | Nokia Corporation | Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers |
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US7362035B2 (en) * | 2005-09-22 | 2008-04-22 | The Penn State Research Foundation | Polymer bulk acoustic resonator |
CN101278479B (zh) * | 2005-09-30 | 2011-04-13 | Nxp股份有限公司 | 薄膜体声波(baw)谐振器或相关改进 |
-
2003
- 2003-09-01 WO PCT/IB2003/003993 patent/WO2004025832A1/en active Application Filing
- 2003-09-01 CN CNB038216523A patent/CN100566152C/zh not_active Expired - Fee Related
- 2003-09-01 EP EP03795172A patent/EP1540819A1/en not_active Withdrawn
- 2003-09-01 AU AU2003259512A patent/AU2003259512A1/en not_active Abandoned
- 2003-09-01 JP JP2004535788A patent/JP4541147B2/ja not_active Expired - Fee Related
- 2003-09-01 US US10/527,115 patent/US20060043507A1/en not_active Abandoned
-
2013
- 2013-12-11 US US14/103,791 patent/US20140097914A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20140097914A1 (en) | 2014-04-10 |
CN1682442A (zh) | 2005-10-12 |
WO2004025832A1 (en) | 2004-03-25 |
EP1540819A1 (en) | 2005-06-15 |
AU2003259512A8 (en) | 2004-04-30 |
JP4541147B2 (ja) | 2010-09-08 |
US20060043507A1 (en) | 2006-03-02 |
AU2003259512A1 (en) | 2004-04-30 |
WO2004025832A8 (en) | 2005-03-10 |
JP2005538643A (ja) | 2005-12-15 |
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Owner name: NXP CO., LTD. Free format text: FORMER OWNER: KONINKLIJKE PHILIPS ELECTRONICS N.V. Effective date: 20070810 |
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