CN100538913C - 带有悬臂和光学共振器的传感器 - Google Patents

带有悬臂和光学共振器的传感器 Download PDF

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CN100538913C
CN100538913C CNB028294629A CN02829462A CN100538913C CN 100538913 C CN100538913 C CN 100538913C CN B028294629 A CNB028294629 A CN B028294629A CN 02829462 A CN02829462 A CN 02829462A CN 100538913 C CN100538913 C CN 100538913C
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P·L·T·M·弗雷德里克斯
H·J·于格
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Universitaet Basel
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Abstract

一种光学传感器，特别是用于扫描力显微镜的光学传感器，利用在悬臂(3)与透镜组件(10)的输出表面(12b)之间的光学共振器测量悬臂(3)的偏转。为了形成共振器，输出表面(12b)是凹的并且平行于共振器内光的波前。这种设计提供一种高稳定性的共振器并且使得能够把透镜组件(10)和悬臂(3)之间的距离保持得比较大。

Description

带有悬臂和光学共振器的传感器
技术领域
本发明涉及一种带有悬臂和光学共振器的传感器。
背景技术
具有悬臂和光学共振器的传感器例如用于扫描力显微术应用中，特别是用于原子力显微镜或者分子力显微镜或者其它类型的表面扫描力显微镜中，但是也用于以悬臂为基础的化学、物理或者生物传感器中。
在此种类型的装置中必须检测悬臂位置的小的改变，特别是由于偏转造成的悬臂位置的小的改变。
值得注意的是，这种传感器还可用于测量作为在悬臂上的光斑位置的函数的悬臂偏转量。因此可以测量出悬臂的不同弯曲模式。例如，这使得能够进行摩擦力测量(悬臂扭转)和各种振动方式的检测(纵向一次和高次谐波以及扭转振动方式)。
D.Rugar等在Rev.Sci.Instrum.59(11)，1988，pp2337ff中以及D.Rugar等在Appl.Phys.Lett.55(25)，1989，pp.2588ff和EP 398 085中描述了一种传感器头，其中光导纤维的端部被布置靠近悬臂。从纤维端部发射出的光从悬臂发生反射并且回到纤维内，在光导纤维中它与从纤维-空气界面反射的光发生干涉。干涉图案可以用于测定悬臂的位置。
在另一个公知的实施方式中，传感器头包括光学共振器，其第一镜布置在悬臂的表面上。在US 5 565 987和US 5 465 611中披露了具有光学共振器的传感器。如果共振器的精度足够高，它可以用于检测悬臂的即使非常精细的移动。
然而，已发现这种类型的共振器的稳定性差，并且严重依赖于悬臂和传感器的相对(笛卡尔的和角)位置，这影响该装置的可靠性。并且如果使用纤维，不得不使纤维非常接近悬臂且悬臂的强烈运动可能损坏纤维端部。
另外，在纤维与悬臂之间可能发生静电干涉和其它干涉，这会改变悬臂的机械性能。
发明内容
因此，本发明的主要目标是提供一种上述类型的传感器，所述传感器使得能够准确地检测悬臂运动。
这样，为了实现通过进行说明会变得更加明显的本发明的这些以及其它一些目标，提出一种传感器头，包括：悬臂，其中所述悬臂的位置取决于要测量的参数；形成在两个反射镜之间的光学共振器，其中第一镜布置在所述悬臂上并且其中所述共振器的长度取决于悬臂的位置，其特征在于，用于把光聚焦在悬臂上的透镜组件，所述透镜组件具有面对悬臂的输出表面，其中所述输出表面是凹的并且形成所述共振器的第二镜。
因此传感器的光学共振器的第二镜由透镜组件的凹的输出表面形成。为形成共振器镜，所述输出表面应当大体上平行于共振器中的光驻波的波前。
优选地，透镜组件包括具有凸的入射表面和凹的出射表面的输出透镜，后者形成透镜组件的出射表面。该透镜可以把平行的或者发散的光束转变成聚焦在悬臂上的会聚光束。
为了提高共振器的精度，输出表面优选地涂覆有反射涂层。
在本说明书和权利要求中，术语“透镜组件”被理解为包括单个透镜或者多个透镜。
附图说明
考虑到下面的对本发明的详细说明，将会更好地理解本发明并且使得以上提出的目的以外的目的变得清楚。这样的说明是结合附图进行的，其中：
图1示出了根据本发明的扫描显微镜的一部分，其各个部件示意性地示出并且不是按照比例进行绘图的。
具体实施方式
图1示出一种扫描显微镜，特别是原子力显微镜。所述原子力显微镜包括用于扫描表面2的尖端1。尖端1被附接到由扫描头4承载的悬臂3上。悬臂3的位置取决于表面2作用在尖端1上的力。该力造成悬臂3偏离其中性位置。
设置光学传感器用于检测该偏转量。光学传感器包括光源5，所述光源5发射具有足以运行以下所述的共振器的短暂相干性的光6。从光源5发出的光通过光束分离器7并且聚焦进入纤维8的第一端部8a。纤维8的TEM模式优选用于传输所述光。
光锥9从纤维8的第二端部8b引出。光锥9照射到透镜组件10上，所述透镜组件将其聚焦到悬臂3的顶部平面3a上。
透镜组件10被附接到扫描头4上。透镜组件10包括输入透镜11和输出透镜12，所述输入透镜11和输出透镜12将光导纤维8的第二端部8b光学投射到悬臂3上。
输入透镜11具有平的输入面11a和凸的输出面11b。所述输入透镜11接收来自光锥9的发散光，并且把其作为例如平行光束13投射到输出透镜12上。
输出透镜12具有凸的输入面12a和凹的输出面12b，后者是透镜组件10的输出表面。所述输出透镜12把光束13聚焦到悬臂3的表面3a上。
选择输出表面12b的曲率，使得该输出表面平行于从其中发出的光14的波前，即它不使经之穿过的光改变方向。输出表面12b优选局部涂覆有具有高反射性的涂层，并且悬臂3的顶表面3a例如也通过覆盖一种反射性的光学涂层而具有反射性，优选高反射性。结果是，在输出表面12b和悬臂3的顶表面3a之间形成光学共振器15。所述共振器具有低损耗(例如每个往返行程低于20％，优选地低于10％)。如本领域技术人员所公知，这种共振器反射回的光的量主要取决于共振器的长度。
从光学共振器15反射的光被聚焦回纤维8内并到达光束分离器7，在此它与入射光分离并且投射到光学检测器16上。如本领域技术人员所清楚的，由光学检测器15测量的信号取决于共振器15的长度并且因此取决于悬臂3位置，这使得可以测量悬臂3的位置并且特别是其偏转量或者其扭矩。
本发明的设计具有多种优点。例如，透镜组件10与悬臂3之间的距离可以是几个100微米，与使用纤维的常规传感器相比，这样降低了光学部件发生损坏的风险。另外，还减少了悬臂与光学部件之间的寄生干涉。
此外，具有一个弯曲的镜面(表面12b)和一个平的镜面(表面3a)的共振器15比具有两个平的镜面的共振器更加稳定。因为光聚焦在悬臂上并且因此远非平行，所以与使用两个平的镜面相比，所述共振器结构减少了谐振腔中的光损失。
共振器的较高的稳定性简化了装置的对准调整。特别是，对悬臂顶表面3a与透镜组件10之间夹角调节的要求不太高。
由于光线在输出表面12b处不改变方向，因此装置工作不需要独立于共振器15中存在的介质的重新调节。特别是，同样的***例如可被用于在空气、真空和流体，例如水或者生物缓冲液中的应用。
在以上所示的例子中，使用了两个均质的透镜11、12。还可以把两个透镜组合成单个透镜，然而，这种单个透镜需要具有强烈弯曲的输入表面以聚焦发散的入射光场9。因此，对于发散的入射光场9，透镜组件10优选具有至少两个透镜。
除了使用均质透镜以外，还可以使用具有梯度折射率的透镜或者均质透镜与具有梯度折射率的透镜的组合。然而，输出透镜的输出表面应当总是凹的并且平行于共振器15内的驻波的入射波前。在这一方面，“凹表面”被理解为表示在给定表面处透镜是凹的。
在图1所示的实施方式中，从共振器15反射的光被聚焦回纤维8内。然而，还可以把光束分离器7放置在纤维8与透镜组件10之间。
除了使用纤维以外，还可以把光源5直接置于透镜组件10之前。
优选地，进入透镜组件10的光具有以(1/exp(r))2进行衰减的强度特性分布，其中r表示到透镜组件10中心轴线的距离-如在使用纤维的TEM模式时产生的这种光束特性分布使得能够进行优化聚焦。
在此示出的光学传感器适用于测量具有极小尺寸(例如长度小于50微米和宽度小于10微米)的悬臂偏转量，并且可以用于各种扫描力显微镜应用或者以悬臂为基础的物理、化学或者生物传感器的偏转量，在此悬臂的位置取决于要测量的参数。
在此示出的光学透镜组件10可以安装在允许将光斑定位在悬臂的不同部分上的压电定位装置上。这使得能够测量悬臂的局部偏转量或扭矩，这样可以用于修正悬臂与光学组件之间距离的漂移，用以测量引起悬臂扭转的磨擦力，或者用于检测各种纵向和扭转的振荡模式。
优选地术语悬臂被用以表示经典的意思，表示在一端固定并且在第二端部处为柔性的杆，但是它还应被理解为包括在两个端部都固定的杆或者膜，其中心部分产生待进行测量的偏移量。
尽管已示出并说明了本发明的当前优选实施方式，还要清楚地认识到本发明不限于此，本发明可在所附权利要求的范围内进行其它不同的变型和进行实施。

Claims (12)

1.一种传感器，包括：
悬臂(3)，其中所述悬臂(3)的位置取决于要测量的参数，
形成在两个反射镜之间的光学共振器(15)，其中第一镜布置在所述悬臂(3)上并且其中所述共振器(15)的长度取决于悬臂(3)的位置，
其特征在于，用于把光聚焦在悬臂(3)上的透镜组件(10)，所述透镜组件(10)具有面对悬臂(3)的输出表面(12b)，其中所述输出表面(12b)是凹的并且形成所述共振器(15)的第二镜。
2.如权利要求1所述的传感器，其中所述输出表面(12b)基本上平行于所述共振器(15)内的光驻波的入射波前。
3.如权利要求1-2中任一项所述的传感器，其中所述透镜组件(10)包括具有凸的第一面(12a)和凹的第二面(12b)的输出透镜，其中所述第二面(12b)形成所述输出表面。
4.如权利要求3所述的传感器，其中所述透镜组件(10)包括用于把发散的入射光场(9)投射到所述输出透镜上的输入透镜(11)。
5.如权利要求1-2中任一项所述的传感器，进一步包括光导纤维(8)，其中所述透镜组件(10)把所述光导纤维(8)的端部(8b)投射到所述悬臂(3)上。
6.如权利要求1-2中任一项所述的传感器，其中所述输出表面(12b)上涂覆有反射涂层。
7.如权利要求1-2中任一项所述的传感器，其中所述悬臂(3)上涂覆有反射涂层。
8.如权利要求1-2中任一项所述的传感器，其中所述光不在输出表面(12b)处改变方向。
9.如权利要求1-2中任一项所述的传感器，其中所述悬臂(3)是在第一端部处固定并且在第二端部处可产生偏移的杆。
10.如权利要求1-2中任一项所述的传感器，其中所述共振器具有每往返行程低于20％的损耗。
11.如权利要求1-2中任一项所述的传感器，其中所述透镜组件被安装到用于把光斑定位到悬臂的不同部分上的定位装置上。
12.一种具有如前述权利要求中任一项所述的传感器的扫描力显微镜。
CNB028294629A 2002-08-14 2002-08-14 带有悬臂和光学共振器的传感器 Expired - Fee Related CN100538913C (zh)

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AU2002321721A1 (en) 2004-03-03
US20050264825A1 (en) 2005-12-01
EP1540661A1 (en) 2005-06-15
DE60211388T2 (de) 2007-02-08
DE60211388D1 (de) 2006-06-14
ATE326052T1 (de) 2006-06-15
JP3874358B2 (ja) 2007-01-31
WO2004017329A1 (en) 2004-02-26
US7319527B2 (en) 2008-01-15
JP2005535896A (ja) 2005-11-24

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