CN100538493C - The method and apparatus that is used for the corner interference modulations - Google Patents
The method and apparatus that is used for the corner interference modulations Download PDFInfo
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- CN100538493C CN100538493C CNB200510105062XA CN200510105062A CN100538493C CN 100538493 C CN100538493 C CN 100538493C CN B200510105062X A CNB200510105062X A CN B200510105062XA CN 200510105062 A CN200510105062 A CN 200510105062A CN 100538493 C CN100538493 C CN 100538493C
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Abstract
The invention describes a kind of display, wherein said display comprises the surface of arranging each other in non-zero angle.At least one described surface can comprise an interferometric modulator.Compensation to gamut can be provided by two or three surfaces that use is arranged with an angle each other, and described surface has similar interferometric modulator.The Several Methods of making this display has also been described.Bright more display can be provided by three surfaces that use is vertically aligned with each other, and wherein each described surface has a reflection different colours interference of light formula modulator.Additive color process or subtractive color process can be used to produce the light of particular color.
Description
Technical field
Technical field of the present invention relates to MEMS (micro electro mechanical system) (MEMS).
Background technology
MEMS (micro electro mechanical system) (MEMS) comprises micromechanical component, driver and electronic equipment.Micromechanical component can adopt deposition, etching or other several portions that can etch away substrate and/or institute's deposited material layer maybe can add several layers and make with the micromachined technology that forms electric and electromechanical assembly.One type MEMS device is called as interferometric modulator.Interferometric modulator can comprise the pair of conductive plate, and it is completely or partially transparent and/or reflexive that one of them or two can be, and can relative motion take place according to applying of a suitable electric signal.One of them plate can comprise a quiescent layer that is deposited on the substrate, and another plate can comprise a metal film that is suspended from this quiescent layer.Said apparatus is with a wide range of applications, and in this technology, utilizes and/or revises the characteristic of device of these types so that its characteristic can be used for improving existing product and makes still undeveloped at present new product will be rather useful.
Summary of the invention
System of the present invention, method and device respectively have some aspects, and arbitrary single aspect all can not determine the attribute that it is desired separately.Now its more outstanding characteristic is made brief description, and not delimit the scope of the invention.Considering this argumentation, especially after having read the part that is entitled as " embodiment ", people can understand how feature of the present invention provides because other display device.
In one embodiment, one display driver is provided, it comprises a transparent substantially substrate, and described substrate comprises: the surface of the surface of at least one first substantially flat and one second substantially flat, and described second surface becomes first non-zero angle with respect to described first surface; At least one first reflecting element, it is positioned on the described first surface, and wherein said first reflecting element has response one first signal and first reflectivity that changes: and at least one second reflecting element, it is positioned on the described second surface.
Another embodiment provides a kind of display, and it comprises the member that is used for light conducting substantially, is used for catoptrical first member, but the reflectivity response signal of first reflecting member and changing wherein.Be incident on light on the conductive members to become a non-zero angle to be reflected with normal angle with respect to described conductive members.Described display further comprises and is used for catoptrical second member.
Another embodiment provides a kind of method of Show Color, and it comprises light from first surface reflection to second surface; With with light reflection to the observer, wherein said first surface comprises first optical element of the described light of a modulation.
Another embodiment provides a kind of method of making display device, and it comprises: form first and second surfaces on one or more substrates; On first surface, form first electrode; Dielectric layer on first electrode; Deposition of sacrificial layer on dielectric layer; On sacrifice layer, form flexible layer; Remove sacrifice layer to form interference cavity between flexible layer and dielectric layer, wherein said flexible layer can move with respect to dielectric layer based on first signal; And on second surface to become non-zero angle to form a reflecting element with respect to first surface.Can use this method to make display device.
Description of drawings
Fig. 1 is an isogonism view, it shows the part of an embodiment of an interferometric modulator display, wherein one of one first interferometric modulator removable reflection horizon is positioned at an off-position, and a removable reflection horizon of one second interferometric modulator is positioned at an excited target position.
Fig. 2 is a system block diagram, and it has shown an embodiment of the electronic installation of having incorporated one 3 * 3 interferometric modulator displays into.
Fig. 3 is the removable mirror position of an exemplary embodiments of interferometric modulator shown in Figure 1 and the graph of a relation of the voltage that applies.
Fig. 4 is the synoptic diagram that can be used for driving one group of row and column voltage of interferometric modulator display.
Fig. 5 A and Fig. 5 B have shown an exemplary sequential chart that can be used for a frame of display data is write the row and column signal of 3 * 3 interferometric modulator displays among Fig. 2.
Fig. 6 A is a sectional view of device shown in Figure 1.
Fig. 6 B is the sectional view of an alternate embodiment of interferometric modulator.
Fig. 6 C is the sectional view of another alternate embodiment of interferometric modulator.
Fig. 7 one has the vertical view of the system of corner interferometric modulator array, and described corner interferometric modulator array is configured to light and interacts.
Fig. 7 A is the skeleton view of a corner interferometric modulator among Fig. 7.
Fig. 7 B is the skeleton view of modified corner interferometric modulator.
Fig. 8 A is the side view of an optical element in the interferometric modulator, has shown its operation under binary mode and its influence to light when it is positioned at the ON position.
Side view when Fig. 8 B is positioned at the OFF position for the optical element among Fig. 8 A.
Fig. 9 is the skeleton view with interferometric modulator embodiment of an optical element.
Fig. 9 A be among Fig. 9 interferometric modulator along the viewgraph of cross-section of line 9A-9A.
Fig. 9 B is the skeleton view of interferometric modulator among Fig. 9, has shown exemplary light path.
Figure 10 is the side view that is similar to the optical element of Fig. 8 A, has showed two exemplary light paths.
Figure 11 is the viewgraph of cross-section of the modified embodiment of a corner display element, and described corner display element moves by encouraging a removable wall, and described removable wall has weakened the total internal reflection of described element.
Figure 12 is the vertical view of the modified embodiment of a corner interferometric modulator with a plurality of removable optical elements.
Figure 12 A be among Figure 11 interferometric modulator along the viewgraph of cross-section of line 12A-12A.
Figure 13 A is the vertical view of another embodiment with system of an interferometric modulator array, and described interferometric modulator array is configured to light and interacts.
Figure 13 B is the viewgraph of cross-section of another embodiment of removable optical element among Figure 13 A along line 13B-13B.
Figure 14 A is the planimetric map of another embodiment with modulator of interferometric modulator array.
Figure 14 B be modulator among Figure 14 A along the viewgraph of cross-section of line 14B-14B, wherein said modulator has a pair of movably optical element.
Figure 15 A has shown the various aspects of making the flow process of interferometric modulator to Figure 15 H with synoptic diagram.
Figure 16 A is the system block diagram that shows the embodiment of the visual display unit that comprises a plurality of interferometric modulators to Figure 16 B.
Embodiment
Hereinafter will discuss in further detail, one embodiment of the present of invention are the display based on interferometric modulator, and wherein said display comprises at least two surfaces that are orientated a non-zero angle each other.When non-zero angle is approximately 90 °, and in two surfaces each is when including an interferometric modulator, and this configuration can be used to help to compensate the gamut as the function of viewing angle.If used three surfaces, each surface to comprise that all an interferometric modulator and each interferometric modulator have similar reflectance signature, then can obtain more comprehensively compensation to gamut.If use one to have at least three displays on the surface of vertical orientation substantially each other, and each surface all has an interferometric modulator, described interferometric modulator has one and is different from the air gap distance that is in its interferometric modulator in the nonexcited state, then can use subtractive color process to reflect the light of a particular color.When comparing with a similar display that uses additive color process to produce same color, the use of this subtractive color process advantageously causes a brighter display.
The following detailed description is at specific embodiments more of the present invention.Yet, can many different modes implement the present invention.In this describes, please refer to accompanying drawing, wherein similarly parts use similar numeral from start to finish.To be not difficult from hereinafter describe to find that the present invention can implement in arbitrary device that is arranged to display image (no matter no matter is dynamic image (for example video) or still image (for example rest image), be character image or picture).More specific says, expection the present invention can be in the multiple electronic installation (but being not limited to) below for example enforcement or be associated with these electronic installations: mobile phone, wireless device, personal digital assistant (PDA), handheld computer or portable computer, gps receiver/omniselector, camera, the MP3 player, video camera, game machine, wrist-watch, clock, counter, TV monitor, flat-panel monitor, computer monitor, automotive displays (for example, mileometer display or the like), driving cabin controller and/or display, the camera view display (for example, the rear view cameras display of vehicle), electronic photo, electronics billboard or label, projector, building structure, packing and aesthetic structures (for example, the image display of a jewelry).Also can be used in the non-display application such as electronic switching device with MEMS device in the structure of structure similar described herein.
Fig. 1 explanation comprises the embodiment of an interferometric modulator display of an interfere type MEMS display element.In these devices, pixel is under the bright or dark state.Under bright (" opening " or " opening ") state, described display element reflects most incident visible light to the user.When being in dark (" pass " or " closing ") state following time, described display element reflects the incident visible light to the user hardly.Decide on described embodiment, can put upside down the reflective character of " opening " and " pass " state.Configurable MEMS pixel is with the selected color of main reflection, thereby the colour of permission outside white and black displays shows.
Fig. 1 one is presented at the isometric view of two neighbors in a series of pixels of a visual displays, and wherein each pixel comprises a MEMS interferometric modulator.In certain embodiments, an interferometric modulator display comprises a row/column array of being made up of these interferometric modulators.Each interferometric modulator comprises a pair of reflection horizon, and the variable and controllable distance in described reflection horizon apart is to form an optical resonator with at least one variable dimension.In one embodiment, one of them reflection horizon can be moved between the two positions.In primary importance, this paper is called release conditions, and described displaceable layers is positioned at from the fixing relative larger distance of a partially reflecting layer place.In the second place, described displaceable layers is positioned at more contiguous described partially reflecting layer place.From the incident light of described two layers reflection according to the position in removable reflection horizon and long mutually or destructive interference form total reflection or non-reflective state for each pixel.The part of shown pel array comprises two adjacent interferometric modulator 12a and 12b among Fig. 1.Among the interferometric modulator 12a of on the left side, shown removable and high reflection layer 14a is positioned at the place, off-position from fixing partially reflecting layer 16a one preset distance place.Among the interferometric modulator 12b on the right, shown removable high reflection layer 14b is positioned at and the described fixing adjacent energized position of partially reflecting layer 16b.
Fixed bed 16a, 16b are conduction, partially transparent and partial reflection, and can be made by the layer that chromium and tin indium oxide form respectively by for example deposit one layer or more on a transparent substrates 20.These layer patterns are changed into parallel band, and can form column electrode in a display device, this will be further described hereinafter. Displaceable layers 14a, 14b can be formed the series of parallel band and that is deposited on the one layer or more depositing metal layers (vertical) on pillar 18 top and be deposited on middle expendable material between the pillar 18 with column electrode 16a, 16b.When etching away expendable material, define air gap 19 by one deformable metal layers is separated from described fixed metal layer.High conductivity and reflexive material (such as, aluminium) can be used for deformable layer, and these bands can form the row electrode in a display device.
Nothing applies under the voltage condition, and cavity 19 remains between a layer 14a, the 16a, and deformable layer is in by the mechanical release conditions shown in the pixel 12a among Fig. 1.Yet when when a selected row and column applies a potential difference (PD), being in the electric capacity that column electrode and row electrode intersection form in the pixel of correspondence will charge, and electrostatic force is moved these electrodes together to.If voltage is enough high, so shown in the pixel 12b among Fig. 1, displaceable layers distortion and be pressed against on the fixed bed and (can deposit a dielectric material (not shown) on fixed bed, to prevent short circuit and to control spacing) is shown in the pixel on right side among Fig. 1.Regardless of the polarity of the potential difference (PD) that is applied, operating condition (behavior) is all identical.In this way, the row of described reflection of may command and non-reflective pixel state/row excitation is employed similar with LCD and other display techniques of routine in many aspects.
Fig. 2 to Fig. 5 shows the exemplary process and the system that use an interferometric modulator array in display application.Fig. 2 is a system block diagrams, and it shows that one can comprise an embodiment of the electronic installation of the some aspects of the present invention.In described exemplary embodiments, described electronic installation comprises a processor 21, and it can be any general purpose single-chip or multicore sheet microprocessor, for example ARM,
Pentium
Pro, 8051,
Or any special microprocessor, for example digital signal processor, microcontroller or programmable gate array.According to convention in the industry, processor 21 can be configured to carry out one or more software modules.Except that carrying out an operating system, also described processor can be configured to carry out one or more software applications, comprise web browser, telephony application, e-mail program or any other software application.
In one embodiment, processor 21 also is configured to communicate with an array controller 22.In one embodiment, array control unit 22 comprises horizontal drive circuit 24 and the column drive circuit 26 that signal is provided to pel array 30.The xsect of array shown in Fig. 1 illustrates with line 1-1 in Fig. 2.For the MEMS interferometric modulator, OK/the row excitation protocol can utilize the hysteresis property of these devices shown in Fig. 3.It for example may need, and 10 volts potential difference (PD) makes pixel be deformed to actuated state from release conditions.Yet, when voltage when described value reduces, be brought down below 10 volts along with voltage returns, described displaceable layers keeps its state.In exemplary embodiments shown in Figure 3, displaceable layers can not discharge fully, is brought down below 2 volts up to voltage.Thereby, in example shown in Figure 3, there is a voltage range (be about 3 to 7V), in described voltage range, exist one to apply voltage window, in described window, stable release or the actuated state of remaining on of device.This is referred to herein as " lag windwo " or " stability window ".For the display array of Fig. 3, OK/the row excitation protocol can be designed to be expert at during the gating, make and selectedly treat that actuated pixel is exposed to about 10 a volts voltage difference in current, and make pixel to be discharged be exposed to one near 0 volt voltage difference with retarding characteristic.After gating, it is poor to make pixel be exposed to about 5 a volts steady state voltage, makes its residing any state so that it remains in capable gating.After being written into, in this example, each pixel all experiences the potential difference (PD) of 3-7 volt in " stability window ".Described characteristic makes pixel design shown in Figure 1 be stabilized in an existing foment or release conditions under the voltage conditions in identical applying.Owing to no matter be in actuated state or release conditions, each pixel of interferometric modulator in fact all is a capacitor that is formed by described fixed mirror and mobile reflection horizon, the almost inactivity consumption so described steady state (SS) can remain in a lag windwo under the voltage.If the current potential that is applied is fixed, then essentially no electric current flows into pixel.
In the typical case uses, can be by determining that according to one group of desired actuated pixels in first row one group of row electrode forms a display frame.After this, horizontal pulse is applied to the electrode of row 1, thereby encourages the pixel corresponding with determined alignment.After this, it is corresponding with desired one group of actuated pixels in second row determined one group of row electrode to be become.Then, pulse is put on row 2 electrodes, thereby come suitable pixel in the action line 2 according to determined row electrode.The pixel of row 1 is not subjected to the influence of row 2 pulses, and remains on the state that its 1 impulse duration of being expert at sets.The property mode repeats this process to the row of whole series in order, to produce described frame.Usually, repeat this process continuously, refresh and/or upgrade these frames with new video data by speed with a certain required frame number/second.The row and column electrode that much is used to drive pel array is also known by people with the agreement that produces display frame, and can be used in combination with the present invention.
Fig. 4 and Fig. 5 show a kind of possible excitation protocol that is used for forming a display frame on 3 * 3 arrays shown in Figure 2.Fig. 4 shows the one group of possible row and the voltage level of going of the pixel that can be used for those hysteresis curves that represent Fig. 3.In Fig. 4 embodiment, encourage a pixel to comprise suitable row are set to-V
Bias, and suitable row is set to+Δ V, can correspond respectively to-5V and+5V.By suitable row are set to+V
BiasAnd suitable row is set at identical+Δ V, and on pixel, produce 0 volt potential difference (PD), realize the release of pixel.Remain in 0 volt the row at those row voltages, pixel is stabilized in its residing any state at first, and is to be in+V with described row
BiasStill-V
BiasIrrelevant.Fig. 5 B is the sequential chart that a demonstration is applied to a series of row and column signals of 3 * 3 arrays shown in Figure 2, and it will form the demonstration shown in Fig. 5 A and arrange, and wherein actuated pixels is non-reflexive.Before writing the frame shown in Fig. 5 A, pixel can be in any state, and in this example, all row all are in 0 volt, and all row all be in+5 volts.Under these applied voltage, all pixels were stable at its existing actuated state or release conditions.
In the frame shown in Fig. 5 A, pixel (1,1), (1,2), (2,2), (3,2) and (3,3) excited target.For realizing this purpose, during be expert at 1 " line time (line time) ", row 1 and row 2 are set at-5 volts, and row 3 are set at+5 volts.This can not change the state of any pixel, because all pixels all remain in the stability window of 3-7 volt.After this, rise to 5 volts of pulses of getting back to 0 volt then again by one from 0 volt and come gating capable 1.This has encouraged pixel (1,1) and (1,2) and has discharged pixel (1,3).Other pixels in the array are all unaffected.For row 2 is set at desired state, row 2 is set at-5 volts, and row 1 and row 3 are set at+5 volts.After this, apply identical strobe pulse with actuate pixel (2,2) and discharge pixel (2,1) and (2,3) to row 2.Equally, other pixels in the array are all unaffected.Similarly, by row 2 and row 3 being set at-5 volts and row 1 are set at+5 volts row 3 is set.The strobe pulse of row 3 is set at row 3 pixels shown in Fig. 5 A.After writing incoming frame, the row current potential is 0, and the row current potential can remain on+5 volts or-5 volts, and after this display will be stable at the arrangement shown in Fig. 5 A.Should be appreciated that, can use identical programs the array that constitutes by tens of or hundreds of row and columns.Should also be clear that the voltage that is used to carry out the row and column excitation time, order and voltage level can great changes have taken place in above-mentioned General Principle, and above-mentioned example only is exemplary, and any actuation voltage method all can be used for the present invention.
Detailed structure according to the interferometric modulator of above-mentioned principle operation can have a great difference.For example, Fig. 6 A-6C shows three different embodiment of moving lens structure.Fig. 6 A is a sectional view embodiment illustrated in fig. 1, and wherein a metal material 14 bands are deposited on the vertically extending support member 18.In Fig. 6 B, removable reflecting material 14 only is attached on the tethers 32 of support member at the corner place.In Fig. 6 C, removable reflecting material 14 is suspended from a deformable film 34.Present embodiment has some advantages, because the structural design of reflecting material 14 and material therefor can be optimized aspect optical characteristics, and the structural design of deformable layer 34 and material therefor can be optimized aspect the desired mechanical property.In the many publication files that comprising the open application case of (for example) No. 2004/0051929 U.S., the manufacturing of various dissimilar interferometric device has been described.Multiple known technology can be used to make the above-mentioned structure that relates to a series of material depositions, patterning and etching step.
Fig. 7, Fig. 7 A and Fig. 7 B have illustrated the various embodiment of the modulating system 32 that is used to modulate light.Modulating system 32 comprises angle, a corner interfere type display element 34 arrays (Fig. 7 A), its be configured to control the light that is incident on each corner interferometric modulator display elements 34 from interference.One or more display elements 34 can have at least one removable optical element (not shown), and it has influence on the light of the system of leaving 32.System 32 can be configured to interact with incident light, so that the demonstration of colored demonstration, black/white demonstration or other desired types to be provided.For example, system 32 can be formed for the display screen of computing machine, communicator (for example, mobile phone), Electronic Paper, pager, televisor, panel (for example, display panel or control panel), billboard, label, lighting device or any other display device.Preferably, incident light before outwards drawing, modulator 34 is repeatedly being reflected incident light.In the embodiment shown, incident light can be reflected before modulator display element 34 is left in its propagation three times.
Generally, the modulator display element 34 among Fig. 7 A can comprise at least one and be used to influence the interference of light formula optical element (hereinafter describing) that withdraws from modulator display element 34.In the embodiment shown, modulator 34 is the corner reverberator, and it comprises a plurality of walls, substrate or surperficial 35a.Modulator 34 among Fig. 7 A preferably comprises the surperficial 35a of the substantially flat with fundamental triangle shape, and the surperficial 35a of described substantially flat is similar substantially each other.
Fig. 7 B has shown the alternate embodiment of corner display display element modulator 34, and it has foursquare substantially view surface 35b.In other alternate embodiments, the view surface of modulator 34 can have suitable and interactional virtually any size of light and configuration.
Describe the operation of interferometric modulator optical element in further detail with reference to Fig. 8 A and Fig. 9, described interferometric modulator optical element is arranged at least one surface of surperficial 35a, 35b of corner interfere type display element 34.Fig. 8 A shows the optical element 12 of modulator display element 34 with synoptic diagram, and it is positioned at and does not drive or case of bending is so that the setted wavelength of reflection incident light, and this will specifically discuss hereinafter.Optical element 12 has the wall or the substrate 20 on a plane among surperficial 35a, the 35b that can form modulator 34.
In the embodiment of Fig. 8, when optical element 12 is positioned at not excited target or not during activation point, it exports a kind of light of color based on the optical interference that it produced.The reflectivity of this element 12 (for example, the light wavelength of its reflection) becomes function with state and this circuit elements design of optical element.Hereinafter will describe more all sidedly, when optical element 12 is driven to the actuated state shown in Fig. 8 B when (perhaps be called and be subjected to drive, subside (collapsed) or crooked (deflected) state), optical element 12 can be dead color, that is, and and reflective for visible light wavelengths not.Yet in alternate embodiment, when element 12 was driven to its collapsed mode, described element can be positioned at basically under the white states.For colour element or modulator, indivedual optical elements 12 be not subjected to driving condition according to modulated configuration and demonstration or install 32 scheme of colour, can be white, redness, green, blueness, cyan, magneta colour, yellow or other colors.For the sake of brevity, when hereinafter describing optical element (as 12), can (for example be in two states according to it, red/black or yellow/white) color output be described, and refer to a given state (for example, " redness " state or " white " state) by its color that is configured to for reflection.Should be appreciated that, and hereinafter will describe in further detail that the optical element with two kinds of particular states can be realized in many ways, by the selection of for example (but being not limited to) institute materials used and the size of each assembly.
With reference to figure 8A, optical element 12 comprises a substrate 20 again, and it is preferably a basic transmissive substrate that allows light to pass and enter an interference cavity 19.Substrate 20 can comprise glass, polymkeric substance, plastics and/or any material that is suitable for allowing the light transmission.For example, layer 16 is supported on the surface of a substantially flat of substrate 20 and can comprises primary mirror/conductor.In one embodiment, layer 16 is made up of a transparent conductive coating, has made a minute surface on it.In a preferred embodiment, a dielectric layer is manufactured on the described minute surface side opposite with conductor.In other embodiments, can use other combinations and the configuration of transparent conductor, minute surface and dielectric layer.Support member 18 is installed is extended so that its far-end supports a displaceable layers 40 from substrate 20, its can comprise one have one with second conductive layer 43 and the one secondary mirror/conductor 41 on the opposed surface, a surface of layer 16.Displaceable layers 40 can extend between this is to support member 18 and can be under the drawing stress effect, is basically parallel to substrate 20 to guarantee it.Minute surface/conductor 41 can be the whole and a part of of displaceable layers 40 according to circumstances.Therefore, layer 40 can comprise plurality of layers.Perhaps, layer 40 can be a homogenous material layer.For example, displaceable layers 40 can be a movably high reflection layer 14 (referring to Fig. 1).The those skilled in the art will be easy to distinguish that suitable configuration, material type, the number of plies and other architectural features of element 12 are to reach element 12 desired machinery and optical characteristics.Chamber 19 is formed between layer 16 and the minute surface/conductor 41 and between the support member 18.According to circumstances, chamber 19 can comprise a plurality of chambeies.In the embodiment shown, chamber 19 is generally rectangular shape.
The color of the visible light that chamber 19 presents has been determined in constructive interference in chamber 19.Along with displaceable layers 40 moves to layer 16, the interference in the chamber 19 obtains modulation, and modulation effects see through the color of layer 16 light that presents of modulator.Because layer 16 and 40 is substantially parallel, can in the chamber, experience repeatedly reflection from the last or following optical radiation that enters interference cavity 19, produced optical interference.According to the size in chamber 19, interference will determine its virtual impedance, and determine its reflection and/or transmission feature thus.One or the above size that changes chamber 19 will change the optical signature of optical element 12.In the embodiment shown, change one of them size,, will change the optical signature of element 12 such as air gap or chamber height (that is, the spacing between layer 16 and layer 40).As mentioned above, can be by on two conductive layers 16,40 at 19 places, chamber, applying the height that a voltage changes chamber 19.This has produced and can cause layer 40 one an or above electrostatic force that moves.In certain embodiments, layer 40 can shown in not driving condition and driving condition between move, its lumen 19 partially or even wholly subsides.Electrostatic force can be used for scale-of-two or simulation model operating optical element.
Continue with reference to figure 8A, optical element 12 is configured to the scale-of-two operating mode of carrying out between excited target and non-energized position.As shown in the figure, optical element 12 is positioned at non-energized position and chamber 19 does not subside.If optical element 12 is designed to have a lag windwo, then when basic no-voltage is applied to layer 40, maybe when the difference of the voltage on voltage that is applied to layer 40 and the layer 34 during less than a selected threshold value, this condition existence.The bias voltage of layer 40 has caused layer 40 to be basically parallel to layer 16.In Fig. 8 B, shown chamber 19 owing to the voltage that is applied to layer 40 subsides, thereby the voltage difference between layer 40 and layer 16 exceeds selected threshold value.In other words, voltage can be applied to optical element 12, to produce a power that causes relative motion between layer 16 and the layer 40.The those skilled in the art can select desired voltage to realize the position of wanting of layer 16 and layer 40.
Continue with reference to figure 8A, the incident light 42 (for example, white light) that comprises the frequency range in the visible spectrum contains a spectral components in the resonance frequency of the optical element 12 of unenergized condition.Incident light 42 partly reflects by layer 16, and is partly or wholly reflected by displaceable layers 40.Therefore, this harmonic components is reflected to the observer by optical element 12, shown in 50.The disresonance component of incident light 46 is because repeatedly reflection experience destructive interference, and therefore not reflected back give the observer.Therefore, when white light 46 incides on the optical element 12 that is in nonexcited state, the light 50 at the resonance frequency place of the optical element 12 that is positioned at nonexcited state will be reflected to the observer.Certainly, the height in air gap or chamber 19 can be designed to by optical element 12 desired light 50 (that is the light that, has selected color) be reflected to the observer.
Fig. 8 B display optics 12 is positioned at the excited target position, and chamber 19 subsides substantially.Because the distance between layer 16,40 is changed, the resonance frequency of device 12 also changes.Under other appropriate interference cavity sizes, the incident light 46a of a large portion is reflected into light 46b, and optical element 12 serves as a minute surface basically when being in actuated state.This actuated state is called " white light " state herein, but should be appreciated that, the light that is substantially white can be produced by other modes, produces as the optical element that has a plurality of resonance frequencies by use.In the alternate embodiment of described optical element, when element 12 was positioned at actuated state, light can experience destructive interference, and therefore presented black, discussed as mentioned.
A kind of method that modification is in the light wavelength that the optical element 12 of actuated state reflected is the characteristic that changes layer 16.For example, in a preferred embodiment, layer 16 comprises a dielectric layer, and the height of described dielectric layer can be changed to realize shades of colour under actuated state.One extremely thin dielectric layer can make optical element 12 serve as a minute surface basically, discusses as mentioned, and therefore reflects the white light that is in actuated state.If dielectric layer is thicker, then optical element 12 may not reflect the visible light that is positioned at actuated state, because compare with wavelength of visible light, partially transmitting mirror and the distance between the mirror in the displaceable layers 40 in the layer 16 are very little.If further increase the height of dielectric layer, then optical element can reflect the versicolor visible light that is in actuated state.If further continue to increase the height of dielectric layer, then optical element 12 can reflect the basic white light that is in foment, discusses as mentioned.Should be appreciated that the part of this dielectric layer and nonessential cambium layer 16 as discussing before, can form the part of (for example) displaceable layers 40 but replace.As long as dielectric layer is inserted into respectively between the reflecting element of layer 40 and layer 16, when optical element was in actuated state, the height that changes dielectric layer can produce the characteristic of actuated state discussed above.
Fig. 9 is the skeleton view of an embodiment with corner modulator display element 34 of at least one above-mentioned interference formula optical element 12.In the embodiment shown, display element 34 has the surface 62 of an optical element 12 and a plurality of substantially flats, is placed with a reflection horizon on described plane, makes the surface 62 of described substantially flat serve as a minute surface basically.The shape of surface 62 and optical element 12 and configuration can differ from one another or be similar.
Preferably, at least two described surperficial 62 and optical element 12 are perpendicular to one another basically.In certain embodiments, one of minute surface of optical element 12 (for example, layer 40) and surface 62 are perpendicular to one another basically.For example, can spend in the scope of about 100 degree about 80 in formed angle [alpha] between the substrate 20 of one of surface 62 and optical element 12, preferably about 90 degree, but can use any suitable angle [alpha], as discussed below.Therefore optical element 12 and surface 62 can form the cubical corner of imagination.In one embodiment, one of optical element 12 definition basically with one or of display element 34 with the perpendicular imaginary plane of upper wall.
The xsect of Fig. 9 A displayed map 9 embodiment.The surface area on the plane at the surface area on plane 62 and optical element 12 places (being also referred to as substrate 20) (referring to Fig. 1) can be equal substantially each other.Yet in other embodiments, the surface area on the surface area of substrate 20 and plane 62 can differ from one another.The those skilled in the art can determine that the dimensional configurations on substrate 20 and surface 62 is to realize desired optical characteristics.Should be appreciated that,, the substitute is display element 34 and can comprise and link together or two or more substrates otherwise fixed relative to one another though this paper describes and to have quoted a substrate that comprises a plurality of planes.For example, the element of three leg-of-mutton flat can be fixed together to form substrate 34.In alternate embodiment, can be in a framework with three leg-of-mutton substantially flat components set, described framework makes each several part fixing at an angle to each other.
Fig. 9 B shows the skeleton view with corner modulator display element of optical element 12 and reflecting surface 62a, 62b.Light is incident on the surperficial 62a of corner modulator display element 34 along path 68a.Because surperficial 62a comprises a reflecting surface, then, light is reflected to optical element 12 along path 68b.When light was incident on the optical element 12, light and optical element interacted.For example, optical element 12 can be the optical element of one colour/black, such as the optical element of red/black.Be at optical element 12 under the situation of actuated state, incident light 68b can partly be reflected into (for example) ruddiness by modulator 12.When optical element 12 was in the excited target position, the internal reflection of display element 34 was destroyed basically, and optical element 12 presents black.If optical element 12 is under the state that light is reflected, then light will be reflected to surperficial 62b along path 68c.Then, light is along the path 68d modulator that is reflected out.Therefore, the interaction of light and optical element 12 can make according to the feature of element 12 and foment be incident on the element 12 all, some light reflect modulator or all light do not reflect modulator.
As can be seen, the inside surface of incident light and display element 34 interacts and therefore can be returned to the observer, is basic be dead color/white or any desired color so that the observer observes display element 34 according to the light quantity and the catoptrical wavelength of reflected back.When optical element 12 is in the excited target position, can select one or more than one layer (for example, layer 16 and/or layer 41) thickness and/or material index to be producing the color of being wanted, as above with respect to dielectric layer discuss.For example, optical element 12 can reflect yellow light when being in the excited target position.In another embodiment, when being in the excited target position, optical element 12 can be dead color or black.In another embodiment, when being in the excited target position, optical element 12 can be white.
As previously noted, the state of optical element 12 (that is, optical element is in non-energized position or excited target position) has determined the observer whether to observe a specific color or an observer and whether has observed a dark or bright element 12.Layer 16 can be applied the modulator display element 34 that becomes to make to be in actuated state can be dark or reflective (for example, output white light) according to the coating of layer 16 or processing (for example, absorption filter).
Advantageously, in one embodiment, wherein surperficial 62a, 62b and optical element 12 are oriented perpendicular to each other usually, modulator display element 34 can be orientated it is reflected back most of or all substantially incident raies basically along its former direction.Get back to Fig. 9 B, can find out, when each surperficial 62a, 62b and optical element 12 are oriented perpendicular to each other, travel path of incident light 68a will be parallel to light path 68d, and reflected light can be propagated along light path 68d leave display element 34.Therefore, because each surface of modulator 34 all can be reflection, so incident ray 68a can rebound away from each surface, and net result is one 180 rotation of spending of light experience.
It will be understood by one of ordinary skill in the art that, according to used material in the design of optical element 34 and its structure, angle [alpha] between one of optical element 12 and surface 62 can be non-90 ° of angles, with the characteristic of the embodiment of the display element 34 realizing above being discussed, wherein modulated light reflects back along the path that is parallel to travel path of incident light.Angle [alpha] will depend on the factors such as reflectivity index of material used in the structure such as display element 34.Therefore, the those skilled in the art can determine the suitable angle between optical element 12 and minute surface 62, to realize modulator display element 34 desired optical characteristics.
Because the light wavelength that optical element 12 is reflected is the function of factors such as material used in the structure such as interlayer size of gaps and optical element, so also will exert an influence for observer's light wavelength to reflection with respect to the angle on optical element plane, observer place.This be because when light when layer 16 propagates into displaceable layers 40 and get back to layers 16, be the function of incident ray and normal angulation (being called viewing angle herein) by the length in the light ray propagation path of layer 16 transmission.Along with the increase (that is, the observer moves to the side of display away from normal) of viewing angle, light is propagated in the chamber path increases, and the optical path difference between the light of light that layer 16 is reflected and 16 transmission of layer changes.
For example, in Figure 10, show the xsect of the part of optical element 12, be similar to the optical element of being showed among Fig. 8 A 12.In this optical element 12, layer 16 comprises one and is positioned at partially reflecting layer 56 and on transparent conductor 58 side opposite with substrate at the transparent conductor on the substrate 58, and is positioned at dielectric layer 54 on partially reflecting layer 56 side opposite with the reflection horizon.To partly be reflected along path 92a with the light 92 that incides on the described partially reflecting layer 56 with the incident of the angled Θ of normal, and by layer 56 and layer 54 along path 92b part transmission, and then by displaceable layers 40 reflections.Interfere the wavelength X (with the wavelength of therefore giving the observer) that takes place mainly to be limited by following equation by optical element 12 reflections:
Nλ＝-4(nh+g)cos(Θ)
Wherein n is the specific inductive capacity of dielectric layer 54, h is along the distance perpendicular to the path of layer 54 between layer 54 bottom and layer 54 top, g be between layer 54 top and layer 40 bottom along distance (being called air gap again) perpendicular to the path of layer 54, and N is called as and interferes peaked exponent number, is arbitrary integer.Although the interference major part that is produced all is limited by above equation, the interference of light that other layers reflected that relates to from optical element is also influential to final interference.
When light along the path 94 during with the angled Θ ' of normal (wherein Θ '〉Θ) incident, some light optics cavity 19 in along the path 94b propagation longer than path 92b.For given optics cavity 19, can see that the wavelength that is reflected is direct and viewing angle Θ is proportional.Therefore, as observer during, be that the wavelength that interferes is reduced for the influence of observer's light modulated to reflection away from normal.This influence is called angular variation herein.Might utilize a diffusion layer to help the offset angle skew, but can wherein at least two substrates to be each other with the embodiment of the display element of the non-zero angle orientation angular variation that affords redress by using one, described substrate has the optical element of the identical reflectance signature of tool.
In certain embodiments, corner modulator display element 34 can comprise a plurality of optical elements 12.For example, although do not show that the display element 34 of Fig. 9 can comprise a pair of optical element 12 and a reflecting surface 62.Can make optical element 12 synchronously so that both all are in excited target position or non-energized position.Preferably, when optical element 12 was in non-energized position, optical element 12 had an interference cavity 19 all similar substantially each other aspect size and material therefor.When the incident angle on the interferometric modulator 34 between a pair of optical element 12 when approximate complementary, will be similar to from the angular variation of optical element 12 and cancel each other out.Angular variation that reduce or that offset advantageously reduces or has eliminated the influence of viewing angle to gamut basically.Preferably, incident ray two optical elements 12 that will be reflected out are to guarantee substantially to reduce the influence of viewing angle to gamut.
Figure 11 is the viewgraph of cross-section that comprises the display element embodiment of taper optical element 170, and described taper optical element 170 comprises the material of transmissive visible light substantially.Taper element 170 comprises each other three side 172a, 172b and the 174 and bottom surfaces 176 with an angle orientation.172a, 172b and 174 arrange at an angle to each other on the surface, so that be incident on light 80a on taper optical element 170 bottom surfaces 176 can be reflected out each surperficial 172a, 172b and 174, and the path that is parallel to incident light substantially, edge is passed bottom surface 176 and is returned.The factors such as possible range of the exponent of refractive index of consideration such as taper optical element 170 and the incident angle of incident light, the those skilled in the art can determine the necessary proper angle of these characteristics.
Select the refractive index of taper optical element 170, make a big chunk of the light 80a that is incident on the bottom surface 176 enter taper optical element 170 and can pass bottom surface 176 transmissions go out before in each surperficial 172a, 172b and 174 experience total internal reflections.Therefore, taper optical element 170 should be made up of the material with the exponent of refractive index that is higher than air refraction substantially.For example, in certain embodiments, can use glass, it has about 1.3 exponent of refractive index.In a preferred embodiment, can use plastics, it has the exponent of refractive index of about 1.5-1.6.If use made taper element 170 with very high exponent of refractive index, then with a very wide-angle with respect to normal be incident on light on the inside surface of bottom surface 176 can experience total internal reflection and therefore not transmission pass bottom surface 176.In order to stop this phenomenon to take place, can put the layer 178 of a refractive index between the refractive index of taper element 170 and air on the bottom surface of taper, locate thereby weaken total internal reflection and allow light to pass bottom surface 176 and propagate into the observer forward.Pass the quantity of the light of surperficial 172a, 172b in order to minimize transmission, these surfaces can comprise reflecting element (not shown).
Taper optical element 170 further comprises a displaceable layers 180, its light-transmissive and select its refractive index to weaken otherwise will occur in the total internal reflection on surface 174.As shown in figure 11, displaceable layers 180 can comprise a layer, and described layer can be excited to a second place 186 around pivoting point 182 according to direction shown in the arrow 184, shown in shade.Displaceable layers 180 can be biased to the position shown in Figure 15, is butted on the surface 174 of taper element 170, has weakened the internal reflection on surface 174.
Can be by using electrostatic force around pivoting point 182 excitation displaceable layers 180.Taper display element 170 can comprise a conducting element 188, can apply voltage to described conducting element 188.Member 190 can extend from the back side of display element 170 and displaceable layers 180 is remained on shown position 186.Member 190 can comprise lead so that element 188 communicates with the power supply electricity.Can apply voltage to element 188 by member 190, to produce an electrostatic potential, it can be built between element 188 and the displaceable layers 180.Electrostatic potential is with displaceable layers 180 director element 188.Displaceable layers 180 can comprise a conductive material and with element 188 electrical isolations.In certain embodiments, can use a spring or other biasing members that displaceable layers 180 is biased to a specific position of wanting.Though do not show that a plurality of elements 188 can be used for realizing any desired location of displaceable layers 180.
Refer now to the running that Figure 11 describes taper optical element 170.Light 80a is incident on the bottom surface 176 and directly is transmitted to surperficial 172a, and wherein it is reflected onto surface 174 along path 80b.If displaceable layers 180 is in excited target position 186, then light 80b reflects by total internal reflection, preferably reflexes to surperficial 172b and therefrom along path 80c reflected back observer.Yet, when displaceable layers 180 is in non-excited target position, as shown in figure 11, weakened total internal reflection, and light is along pass surface 174 such as the path transmission of 80d.Therefore, when displaceable layers 180 is energized, an observer who observes bottom surface 176 will observe from taper element 170 reflected white light, and when displaceable layers excited target and be offset to surperficially 174 time not, will not observe reflected light (that is, deceiving).
Though show, one or one of modulator display element 34 can have the optical element similar with above-mentioned optical element 12 with upper wall.For example, surperficial 172a can comprise the optical element 12 of a red/white color, and it is reflect red under non-energized position, presents black, white or red so that taper display element 170 can be configured to the observer.If displaceable layers 180 and optical element 12 all are in the excited target position, then display element 170 can present white to the observer.If be that displaceable layers 180 is in the excited target position only, then display element will present redness to the observer.If displaceable layers 180 is in non-energized position, then display element 170 will present black and irrelevant with the state of optical element 12 to the observer.
Figure 12 and Figure 12 A have shown another embodiment of the modulator display element 34 that comprises three removable optical elements 12, and each described removable optical element 12 is configured to manipulation light.One or more than one optical element 12 can binary mode and/or the simulation model running.For example, in one embodiment, another optical element 12 operates with simulation model an optical element 12 with the binary mode running.Can select the operating mode of each optical element 12, to obtain desired optics output from display element 34.
The optical element 12 of modulator display element 34 can be synchronous or asynchronous.Under a kind of operating mode, optical element 12 can be in non-energized position and two other optical element 12 is in the excited target position.Perhaps, two optical elements 12 can be in non-energized position and another one optical element 12 is in the excited target position.In other embodiments, each optical element 12 can be in excited target or non-energized position.
For color monitor, modulator display element 34 can have the optical element 12 that can move individually, it is decided according to the configuration of modulator and the color scheme of display, and is coated or be treated to output white, redness, green, blueness, cyan, magneta colour, yellow or other colors.
In one embodiment, modulator display element 34 comprises three optical elements 12, and it can reflect blue, ruddiness and/or green glow.Each optical element 12 can be activated between non-excitation and the excited target position together.In other words, in one embodiment, display element 34 can have three and produce the optical element 12 of interfering blue light.In another embodiment, modulator display element 34 can comprise three optical elements 12 that produce interference ruddiness.In another embodiment, display element 34 can comprise three optical elements 12 that produce the interference green glow.Advantageously, when the optical element 12 of a modulator display element 34 reflected same color simultaneously, viewing angle can be reduced or eliminate the influence of gamut.
In one embodiment, system 32 comprises modulator 34, and each modulator comprises at least one optical element 12.Given modulator 34 can reflection Red, the only a kind of color in green or the blueness, so that 1/3rd modulator 34 can produce is red, 1/3rd can produce green and 1/3rd can produce yellow.In order to make described display produce gold-tinted, both must be set at reflect red and green glow respectively red and green modulator 34, and green modulator 34 must be set at not reflected light.This is a kind of additive color process that is used to produce a given color.
In an alternate embodiment, each surface of the modulator display element 34 in display 32 comprises a different optical element 12, and for example, an indigo plant/white light is learned element, red/white light element and a green/white light and learned element.Therefore, by encouraging two optical elements 12, display element 34 can produce a given color.For example, for reflect green light, red/as must to be excited to its white positions with green/white optical element in vain.When whole three optical elements 12 all are excited to its white positions, with reflected white-light, and be excited to its white positions if be less than two optical element 12, then modulator display element 34 will present dead color usually.For example, all be in its redness and green state respectively if red/white and green/white light is learned element, then red/white light is learned only reflect red of element, and green/white light is learned only reflect green light of element.Therefore, be incident on the corner modulator 34 and the white light that each surface reflection goes out from three surfaces will not reflected from modulator 34.
In another embodiment, the optical element 12 of the modulator display element 34 among Figure 12 and Figure 12 A can be green grass or young crops/white, purple/Bai Hehuang/white light element.Anticipate promptly, the chamber 19 of optical element 12 can be designed to realize green grass or young crops, purple and/or the yellow interference color of wanting.But each optical element 12 individual operation and move to suitable state cutting a desired color are with by using subtractive color process known in this field and technology to produce full-colour image.Each optical element 12 can be positioned at white positions, is white display to realize substantially from modulator display element 34.Each optical element 12 can be positioned at non-white (for example, cyan, purple or yellow) state to produce an optical element that presents black, because each optical element all will deduct a different piece in the incident visible-range.In this embodiment, in order to produce a given color, can use the additive color technology or the technology or use the combination of two kinds of technology of losing lustre.For example, can use the technology that loses lustre, move to yellow position and will other optical elements in modulator display element 34 move to white positions and produce yellow by Huang/white light being learned element.Because each individual display elements 34 produces yellow by deduct green wavelength from incident light, so be called the technology that loses lustre.
If need one light yellow (for example, tone is being combined to form by gold-tinted and white light), then can produce this color, as hereinafter discussing by the combination of using the additive color technology and the technology that loses lustre.Can use a combination technique, wherein the display element 34 of half produces yellow by the above-mentioned technology that loses lustre in display, and display element 34 generations white (by whole three optical elements 12 are placed white states) of half in addition.The interpolation of white light and gold-tinted will produce desired light yellow.
In another embodiment, each surface of modulator display element comprises a plurality of indivedual optical elements, described optical element have with in the basic similarly optical signature of these lip-deep other optical elements.In this embodiment, can produce one light yellow by single corner modulator display element, by learning that element places yellow position and second half places white positions at given lip-deep half a Huang/white light, be incident on only about half of blue light on the display element 34 with reflection only, thereby produce desired light yellow.
Therefore, the optical element 12 of modulator display element 34 can transmit any suitable color according to desired Show Color scheme.
The use of using modulator display element 34 to produce the technology that loses lustre of a particular color advantageously allows than the similar display that the adopts simple additive color technology generation of bright display more.Use therein the additive color technology and wherein a given display element can only show among redness, green or the blue embodiment, because each display element only reflects the white-light spectrum a small amount of incident thereon corresponding to wavelength to be reflected, so lost a large amount of brightness.In order to produce (for example) yellow, can use the display element 34 of some reflect red and the display element 34 of some reflect green light to produce gold-tinted.Yet the display element that is set to reflect red can the reflection green wavelength, and vice versa.Therefore, the brightness of described yellow approximately is half of its display element with each reflect yellow.In addition, if display element that can reflect blue 34 is special-purpose blue element (rather than above three look corner additive color display elements of discussing), these display elements must be set to fully not reflected light so.In described embodiment, gold-tinted brightness approximately be if each display element 34 be set to reflect yellow possible brightness 1/3rd.
By the utilization technology that loses lustre, each display element can be used for reflecting redness and the green wavelength that comprises gold-tinted now.Huang in each display element 34/white light is learned element 12 and is under the yellow state (and therefore, not reflection blue wavelength), and other optical elements are under the white states.Because above the argumentation, the brightness of described display can be a wherein special-purpose display element three times via the colorific display of additive color technology.
Because the light that the corner modulator reflected will reflex to the observer along a path that is parallel to its path that advances to the corner modulator usually, so light source must approximately be positioned at the observer back.Equally, in order to use a display that utilizes the corner modulator, described display must comprise a light source that is placed between observer and the display, such as a smooth guide plate, or display must locate at a distance of enough distances with the observer, makes incident light can observed person self not block.
Therefore in the large-scale plant that the corner modulator of the type of discussing especially is suitable for locating at a distance of a very big distance with the observer herein.For example, the corner interferometric modulator can be used for producing the static traffic sign of a high reflection, and it can be seen by the driver easily, because its head lamp can provide along approaching the illumination in a path in parallel driver's observation path.Such as those billboards used on the athletic ground and very large display screen is the well-adapted Another application of corner interferometric modulator display.
For the large-scale application such as billboard and display screen, the hysteresis characteristic of interferometric modulator is not as crucial in (for example) mobile phone display for the design of display, and in mobile telephone display, minimum can power attenuation be very crucial.Therefore, in the structure of the extensive display that utilizes described corner modulator display element, can trade off aspect employed design and the material.The advantage (for example) that does not represent the optical element 12 of hysteresis behavior be can be bigger power attenuation be that cost obtains the big degree of freedom when driving optical element 12.
Figure 13 A has shown that one has the system 98 of the array 100 of V-type modulator 102, described V-type modulator 102 by with adjacent relative formation of positive conical surface.Each V-type modulator 102 has one or more than one surface with other surperficial angled relations.In the embodiment shown, modulator 102 has leg-of-mutton observation surface 104,106 usually.Incident light can both interact with surface 104,106, and light can be handled in described two surfaces 104,106.Advantageously, modulator 102 provides two chances for handling light.For example, each light impact surface 104,106, modulator 102 just can be handled light.In certain embodiments, modulator 102 can have the optical element that is used to influence being similar to of light optical element described above 12 or 170.Perhaps, modulator 102 can have optical element shown in Figure 13 B and described below.
Figure 13 B is the sectional view of an alternate embodiment of the V-type modulator 102 among Figure 13 A, and has shown an embodiment who revises of a pair of optical element 128.These optical elements 128 have represented that one can be used for substituting an alternate design of the optical element among any embodiment that discloses in this article, and similar with the optical element of being discussed with reference to figure 6C.In an illustrated embodiment, optical element 128 comprises an electrode layer 112 that is fixed on the transparent substrates 110, and described transparent substrates 110 is preferably typical glass or transparent plastic.Optical element 128 preferably has a reflection horizon 114 that is inserted between dielectric layer 115 and the electrode 112.External member 119 has the sidewall 121 that is connected to upper strata 123.One chamber support member 118 123 extends and is connected to a mirror 120 from the upper strata.In certain embodiments, mirror 120 be all with portion of external member 119.Sidewall 121 and mirror 120 have defined chamber 116.In operation, when voltage was applied to electrode 112 and transparent substrates 110, mirror 120 was pulled to transparent substrates 110 statically.External member 119 can move with respect to transparent substrates 110 and is out of shape with mirror 120.Mirror 120 mobile changed the size in chamber 116 and caused that light in the chamber is by interference modulations.
Figure 14 A has shown the vertical view of a modification embodiment of system 98, and described system 98 comprises the V-type modulator 102 that defines V-type groove or passage.Modulator 102 can comprise as described above one or more than one optical element 12,128 or 170.
As shown in Figure 14 B, each modulator 102 can comprise a pair of optical element 12.Described optical element 12 can be in operating state and proofread and correct with the gamut that is provided at least one direction.For example, modulator 102 can be provided at the gamut correction on arrow 106 and/or 108 directions.In a preferred embodiment, when optical element 12 was shown in an open position, its formation one had the inner chamber of the air gap of the air gap that is similar to another optical element 12 usually.When optical element 12 was in this and arranges, incident light 66 can be handled and 113 reflexes to another optical element 12 along the path by an optical element 12, another optical element 12 then handle described light and with light along the path 115 reflected back observers.Advantageously, modulator 102 can reduce or preferably eliminate angular variation to reduce or eliminate the influence of viewing angle to gamut.Preferably, optical element 12 is perpendicular to one another usually.Yet, according to design in modulator 102 structures and used material, be necessary that optical element 12 (be the angle ranging from the angle except that about 90 °) at an angle to each other to be placed, so that give the observer along a path 115 reflected backs in the path 66 that is parallel to incident light with light.
Though can any direction with V-type groove 102 orientations so that the offset angle skew, a series of level trough will provide the compensation to angular variation, wherein said angular variation is because perpendicular to the mobile generation of the observer in the plane of the axis of groove 102.In the display of a vertical orientation (for example, televisor or graphoscope), the observer is the off-centring of the screen on horizontal direction rather than on the vertical direction more likely.Therefore, wherein the embodiment of the vertical orientation groove 102 with similar optical element 12 on each side of groove 102 will provide the compensation to the angular variation on the horizontal direction, and this can be the abundant compensation to many displays based on interferometric modulator.
Though do not show, expection can be positioned at the optical element that is disclosed in the literary composition on the inside of corner reverberator modulator 34 or V-type modulator 102.Therefore, optical element 12 and/or 128 can be placed on the inside or outside of corner reverberator modulator 34.Similarly, optical element 12 and/or 128 can be placed on the inside or outside of V-type modulator 102.Light can pass described optical element on the direction of any suitable manipulation light.
That view disclosed herein surface can be is polygonal, crooked, smooth, circular, oval-shaped and/or any other and the interactional suitable shape of light.In addition, each wall of modulator disclosed herein or view surface can have more than one optical element (for example, optical element 12 or 170).Therefore, an array of optical elements can be located with upper wall along one or of interferometric modulator.
Interferometric modulator disclosed herein can form by many manufacture methods.For example, can revise the 5th, 835, No. 255 manufacture methods described in the United States Patent (USP) and make interferometric modulator disclosed herein.In addition, the cardinal principle manufacture method of making institute's announcement modulator below will be described.
Figure 15 A has shown a method flow making interferometric modulator disclosed herein to 15H.Figure 15 A shows a substrate 150 as the original material that forms a corner corner reflector modulator.Substrate 150 has a pattern 152, and it preferably comprises an outwards outstanding and forward character array that have adjacent forward surface of main body from substrate 150, and described forward surface is preferably formed one in about 85 internal angle beta of spending in about 95 degree scopes.In a preferred embodiment, angle β is approximately 90 degree.Owing to must reach desired optical signature, the those skilled in the art can change and select angle β to define the orientation between the surface that forms pattern 152.In an illustrated embodiment, substrate 150 has one and comprises a plurality of patterns 152 from the cube corner that wherein extends.
Pattern 152 can form by well-known various proper methods of those skilled in the art and routine techniques.Be understood by those skilled in the art that manufacture method herein can be by carrying out such as impression, etching, photoetching process, stereolithography, micro-cutting processing, scrolling, cutting, mold or any other method that is applicable to formation substrate 150 features.In one embodiment, substrate 150 has a pattern 152 by the formation of micro-embossing method.For example, a formable material (being preferably a transparent polymer) can contact with a coining tool with the imprinted pattern of being actually 152 reverse side patterns.That is, coining tool can have a negative sense patterns of features that is actually the reverse side of pattern 152 forward features.After forming desired pattern 152, coining tool can be removed from substrate 150, thereby be formed pattern 152.In addition, can use etching technique to form desired pattern 152.For example, chemical etching, mechanical etching or other ablative methods such as laser ablation or reactive ion etching can be used for forming micro-embossing pattern 152.The those skilled in the art can be chosen in the manufacturing technology that forms pattern 152 on the substrate 150 based on size and configuration, manufacturing time and/or other Fabrication parameters of (for example) pattern 152 features.
One optical element 128 can be formed on the substrate 150.For this reason, an electrode is formed on the substrate 150.As shown in Figure 15 B, electrode material 156 is deposited on the substrate 150.Electrode material 156 can be followed processed to remove the part of its material.In the embodiment shown in Figure 15 C, electrode layer 156 experience one form the patterning and the etched process of electrode 160.After etched electrodes material 156, a dielectric layer 158 is deposited on the exposed parts 162 of first electrode 160 and substrate 150.First electrode material for the conduction and can be metal or semiconductor, such as silicon, preferably be doped to have desired conductivity.In one embodiment, first electrode 160 is a sandwich construction, and it comprises a transparent conductor and the primary mirror such as chromium such as tin indium oxide.In another embodiment, first electrode 160 is a sandwich construction, and it comprises transparent conductor and a dielectric layer (for example, monox) and a primary mirror such as tin indium oxide.Dielectric layer 158 can be monox.The those skilled in the art can determine that the material of first electrode 160 and size are to reach the desired optical characteristics of interfere type optical element.
For simplicity, Figure 15 D has only shown the part of substrate 150 to 15H.As shown in Figure 15 D, a sacrifice layer 164 can be deposited on the dielectric layer 158.Shelter and etch sacrificial layer 164 can form hole or sunk area as shown in Figure 15 E.Material 166 can be deposited in the sunk area 165 to form the supporting construction 18 shown in Figure 15 F.Sacrifice layer 164 can be molybdenum and can be by being exposed to XeF
2Steam and etched.Material 166 can be a kind of negative photoresist.Material 166 can be polymkeric substance, metal, oxide or any other is applicable to the material of filling sunk area 165.
With reference to figure 15G, can then second electrode 168 be deposited on corbeling 18 and the sacrifice layer 164 to form the part (seeing Fig. 8 A) of displaceable layers 40.Second electrode 40 for conduction and can be metal or, be doped to have desired conductivity such as the semiconductor of silicon.Displaceable layers 40 can be made by similar or different materials with conductive layer 156.In the method flow (not shown) that substitutes, use the rapid method of a multistep to make one second electrode, described second electrode hangs on a mechanical layer (for example seen in Figure 13 B).Then come mobile sacrifice layer 164 to form an interferometric cavities, the chamber 19 as shown in Figure 15 H by (for example) etching.One molybdenum sacrifice layer 164 can be by being exposed to XeF
2Steam removes.Be understood by those skilled in the art that, can have sacrifice layer and pillar or supporting construction 18 as method flow illustrated and the manufacturing interferometric modulator described herein, its different materials by (for example) molybdenum (sacrifice layer) and polymerization photoresistance (corbeling) is formed, and it deposits during one or above different phase of manufacture process.
In an alternate embodiment, especially on the surface of display element with respect to optical element 12 or 128 assemblies (such as, billboard or Road sign) the very large embodiment of ratio in, can assemble a plurality of flat substrate to form display element 34.For example, three optical elements 12 can be formed on one or the more than one flat surfaces in three independent triangle glass substrate, wherein substrate is then fixed at an angle to each other, so that form a display element 34.In addition, optical element can be formed on the non-triangle substrate, the several portions of described non-triangle substrate is optionally removed with formation is roughly leg-of-mutton substrate.The advantage of described manufacture method is that when final display is very large a formation with large-sized substrate of a plurality of forward features may be very difficult, and can use the existing equipment that can make optical element on flat substrate, need not it is made amendment.
In an alternate embodiment, the electrode layer of display element 34 can be positioned in one or of other places in the display element 34 and be replaced with top electrode, and the electrode layer of wherein said display element 34 is formed on the surface identical with remaining optical element in embodiment discussed above.In one embodiment, an electrode is formed on the bottom of display element 34, makes a unitary electrode can encourage each optical element 12 of display element 34 simultaneously.This is configured in display element 34 and has a plurality of optical elements of similar reflectance signature that have so that can be favourable among the embodiment of offset angle skew.Though may need a higher trigger voltage so that optical element is in driving condition, this arrangement can be simplified the manufacturing of drive scheme and described display element.
Figure 16 A and Figure 16 B are the system block diagram of an embodiment of demonstration one display device 2040.Described display device 2040 can be (for example) cellular phone or mobile phone.Yet, but the same components of display device 2040 or its slight variations also dissimilar display device of illustration, for example TV or portable electronic device.
The display 2030 of exemplary display device 2040 can be any in the many kinds of displays, comprises bistable display as described herein.In other embodiments, know as the those skilled in the art, display 2030 comprises a flat-panel monitor, for example, and aforesaid plasma, EL, OLED, STN LCD or TFT LCD; Or non-tablet display, for example CRT or other kinescope devices.Yet as described herein, for the purpose of explanation present embodiment, display 2030 comprises an interferometric modulator display.
Figure 16 B schematically shows the assembly of an embodiment of exemplary display device 2040.Shown in exemplary display device 2040 comprise a shell 2041 and can comprise that other are at least partially enclosed within the assembly in the shell 2041.For example, in one embodiment, exemplary display device 2040 comprises a network interface 2027, and network interface 2027 comprises that one is coupled to the antenna 2043 of a transceiver 2047.Transceiver 2047 is connected to and regulates the processor 2021 that hardware 2052 links to each other.Regulate hardware 2052 and can be configured to regulate a signal (for example, signal being carried out filtering).Regulate hardware 2052 and be connected to a loudspeaker 2045 and a microphone 2046.Processor 2021 also is connected to an input media 2048 and a driving governor 2029.Driving governor 2029 is coupled to one frame buffer 2028 and array driver 2022, and array driver 2022 is coupled to a display array 2030 again.One power supply 2050 provides electric power according to the designing requirement of particular exemplary display device 2040 to all component.
In an alternate embodiment, transceiver 2047 can be substituted by a receiver.In another alternate embodiment, network interface 2027 can be substituted by an image source that can store or produce the view data to processor 2021 to be sent.For example, described image source can be the software module that hard disk drive or that a digital video disk (DVD) or comprises view data produces view data.
System disclosed herein and modulator can form by any suitable member.Above-described the whole bag of tricks and technology provide some kinds to carry out mode of the present invention.Certainly, should be appreciated that, needn't realize all described purpose or advantage according to arbitrary specific embodiment as herein described.Therefore, for example, be understood by those skilled in the art that, can carry out these described methods realizing or to optimize one or one group of advantage taught herein, and needn't realize other purposes or the advantage of institute's teaching herein or hint.
In addition, the those skilled in the art can understand the interchangeability of various features from various embodiment disclosed herein.Similarly, the those skilled in the art can mix and mate other known equivalents of above-mentioned various feature and step and each described feature or step, to come manner of execution according to principle described herein.In addition, method described herein and explanation is not limited to described definite behavior order, also needn't be limited to the behavior practice of statement.Other orders of incident or behavior or embodiments of the invention take place all can be used to carry out when being less than whole described incidents or described incident.
Though the present invention has disclosed some embodiment and example in context, but it will be understood by one of ordinary skill in the art that scope of the present invention exceeded specific announcement embodiment and extend to other alternate embodiment and/or purposes with and obviously revise and equivalent.Therefore, the present invention does not desire to be subject to the specific announcement of the preferred embodiment of this paper.
Claims (52)
1. display, it comprises:
One transparent substantially substrate, it comprises the surface of at least one first substantially flat and the surface of one second substantially flat, and described second surface becomes one first non-zero angle with respect to described first surface;
At least one first reflecting element, it is positioned on the described first surface, and wherein said first reflecting element has response one first signal and first reflectivity that changes; And wherein said first reflecting element comprises:
One removable reflection horizon, it can move between at least one primary importance and a second place; With
A partially reflecting layer, it is between described removable reflection horizon and described first surface; With
At least one second reflecting element, it is positioned on the described second surface.
2. display as claimed in claim 1, wherein said second reflecting element comprises a reflection horizon that is positioned on the described substrate.
3. display as claimed in claim 1, wherein said second reflecting element has second emissivity that changes in response to a secondary signal.
4. display as claimed in claim 3, wherein said first reflecting element are identical with described second reflecting element substantially.
5. display as claimed in claim 1, wherein said first non-zero angle are about 90 degree.
6. display as claimed in claim 1, wherein said substrate comprise a surface that becomes the 3rd substantially flat of one second non-zero angle with described first surface, and described the 3rd surface becomes one the 3rd non-zero angle with described second surface.
7. display as claimed in claim 6 further comprises at least one the 3rd reflecting element, and it is positioned on described the 3rd surface of described substrate.
8. display as claimed in claim 7, wherein said second reflecting element comprises a reflection horizon that is positioned on the described second surface, and wherein said the 3rd reflecting element comprises one and is positioned at the described the 3rd lip-deep reflection horizon.
9. display as claimed in claim 7, wherein:
Described second reflecting element has response one secondary signal and second reflectivity that changes; With
Described the 3rd reflecting element has response one the 3rd signal and the 3rd reflectivity that changes.
10. display as claimed in claim 9, wherein said first reflecting element are identical with the described second and the 3rd reflecting element substantially.
11. display as claimed in claim 1, described first reflectivity of wherein said first reflecting element comprises a wavelength coverage tool reflectivity, and described wavelength coverage responds described first signal and changes.
12. display as claimed in claim 11, wherein when the described removable reflection horizon of described first reflecting element was positioned at described primary importance, described first reflecting element had reflectivity to white light.
13. display as claimed in claim 1, it further comprises:
One processor, it communicates with at least one electricity in described first and second reflecting elements, and described processor is configured to image data processing; With
One memory storage that communicates with described processor electricity.
14. display as claimed in claim 13, it further comprises one drive circuit, and it is configured to send at least one signal at least one in described first and second reflecting elements.
15. display as claimed in claim 14, it further comprises a controller, and it is configured to send the described view data of at least a portion to described driving circuit.
16. display as claimed in claim 15, it further comprises an image source module, and it is configured to send described view data to described processor.
17. processor as claimed in claim 16, wherein said image source module comprises at least one in a receiver, transceiver and the transmitter.
18. processor as claimed in claim 17, it further comprises an input media, and it is configured to receive the input data and sends described input data to described processor.
19. display as claimed in claim 1, wherein said first reflecting element comprises interferometric modulator.
20. a display comprises:
Be used for the member of light conducting substantially;
Be used for catoptrical first member, the reflectivity of wherein said reflecting member can respond a signal and change, and described first member comprises the member that is used for partial reflection light and is used for catoptrical movable part; With
Be used to reflect second member of described light.
21. display as claimed in claim 20, the wherein said member that is used for light conducting comprises a transparent substantially substrate, it comprises the surface of at least one first substantially flat and the surface of one second substantially flat, and described second surface becomes one first non-zero angle with respect to described first surface.
22. display as claimed in claim 20, wherein said first reflecting member comprises one first reflecting element, and it has response one first signal and the reflectivity that changes.
23. display as claimed in claim 20, wherein said second reflecting member comprises a reflection horizon.
24. display as claimed in claim 20, wherein said second reflecting member comprises a reflection horizon that is positioned on the substrate.
25. display as claimed in claim 20, wherein said first reflecting member comprises the member that is used for light modulated.
26. display as claimed in claim 25, wherein said optical modulation member comprises an interferometric light modulator.
27. display as claimed in claim 20, wherein said first and second reflecting members are identical substantially.
28. a method that shows a color, it comprises:
Surface light modulated at one first substantially flat, described first surface comprises first optical element that is configured to modulate described light, wherein said first optical element comprises a removable reflection horizon, it can move between at least one primary importance and a second place, with a partially reflecting layer, it is between described removable reflection horizon and described first surface;
With the light of one first wavelength coverage from described first surface reflex to one second substantially flat the surface and
Reflect described light to an observer.
29. method as claimed in claim 28 is wherein modulated described light and is comprised interferometric modulation.
30. method as claimed in claim 28 wherein reflects described light to an observer and comprises from described second surface to described observer's reflected light.
31. method as claimed in claim 30, wherein said second surface comprises a reflection horizon.
32. method as claimed in claim 30 wherein reflects light described second surface and comprises the light that reflects one second wavelength coverage.
33. method as claimed in claim 32, wherein said first wavelength coverage is similar to described second wavelength coverage substantially.
34. method as claimed in claim 28 wherein reflects described light to an observer and comprises:
From the surface reflection of described second surface to one the 3rd substantially flat; With
From described the 3rd surface to described observer's reflected light.
35. method as claimed in claim 34 wherein reflects light described the 3rd surface and comprises the light that reflects one second wavelength coverage.
36. method as claimed in claim 35, wherein said second wavelength coverage is similar to described first wavelength coverage substantially.
37. method as claimed in claim 28 wherein reflects described light to described observer and comprises:
The light of one second optical wavelength range is reflexed to the surface of one the 3rd substantially flat from described second surface; With
With the light of one the 3rd optical wavelength range from described the 3rd surface reflection to the observer.
38. method as claimed in claim 37, wherein said first wavelength coverage is different from described first and second wavelength coverages.
39. method as claimed in claim 37, its light that further comprises one the 4th wavelength coverage reflects described first surface, and described the 4th wavelength coverage is different from described first wavelength coverage.
40. a method of making a display device, it comprises:
Form the surface of first and second substantially flats on one or more substrates, wherein said first and second surfaces are positioned at and are oriented relative to one another to a non-zero angle place;
On described first surface, form one first electrode;
Deposition one dielectric layer on described first electrode;
Deposition one sacrifice layer on described dielectric layer;
On described sacrifice layer, form a flexible layer;
Remove described sacrifice layer to form an interference cavity between described flexible layer and described dielectric layer, wherein said flexible layer can move with respect to described dielectric layer based on one first signal; With
Form a reflecting element that is positioned on the described second surface.
41. method as claimed in claim 40, it further comprises:
Before the formation of described flexible layer, remove a part of described sacrifice layer, in described sacrifice layer, to form cavity; With
In described cavity, form supporting construction.
42. method as claimed in claim 40 wherein forms described flexible layer and comprises formation one second electrode.
43. method as claimed in claim 40 wherein forms a flexible layer and comprises on described sacrifice layer:
On at least a portion of described sacrifice layer, form one second electrode; With
Form a mechanical layer on described second electrode, wherein said mechanical layer contacts with at least a portion of described second electrode.
44. method as claimed in claim 40, it further comprises:
Form the surface of one the 3rd substantially flat, it is positioned at one and becomes the non-zero angle place with second surface with respect to described first surface; With
On described the 3rd surface, form one second reflecting element.
45. method as claimed in claim 44, its further comprise with described first, second with the 3rd surface orientation for substantially vertical each other.
46. method as claimed in claim 44 wherein forms described second reflecting element and comprises formation one interferometric modulator.
47. method as claimed in claim 40 wherein forms described first and second surfaces and is included in described first and second surfaces of formation on one first substrate.
48. method as claimed in claim 40, it further comprises formation one interferometric modulator, and wherein said interferometric modulator comprises described electrode, described dielectric layer, described flexible layer, and wherein said flexible layer comprises towards the reflecting surface of described first electrode.
49. method as claimed in claim 40, wherein form described first and second surfaces comprise described first surface is orientated vertical substantially with described second surface.
50. method as claimed in claim 40 wherein forms described first and second surfaces and is included on one first substrate and forms described first surface and form described second surface on one second substrate.
51. method as claimed in claim 50, it further comprises described first substrate directly is fixed on described second substrate, and wherein said first substrate is positioned at one and becomes the non-zero angle place with respect to described second substrate.
52. method as claimed in claim 50, it further comprises described first substrate and described second substrate is fixed on the framework, and wherein said first substrate is positioned at one and becomes the non-zero angle place with respect to described second substrate.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61359704P | 2004-09-27 | 2004-09-27 | |
| US60/613,597 | 2004-09-27 | ||
| US11/103,378 | 2005-04-11 |
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| CN1755499A CN1755499A (en) | 2006-04-05 |
| CN100538493C true CN100538493C (en) | 2009-09-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB200510105062XA Expired - Fee Related CN100538493C (en) | 2004-09-27 | 2005-09-26 | The method and apparatus that is used for the corner interference modulations |
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| Country | Link |
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| CN (1) | CN100538493C (en) |
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