CN100538253C - The measuring method of single-crystal bar V type groove deep - Google Patents

Abstract

A kind of measuring method of single-crystal bar V type groove deep, finish by the following step: equal at known V-type groove both sides angle under the condition of 90 degree, in the groove of V-type groove, axially place the needle roller of a known diameter d greater than V-type groove width of rebate, measure the overall height H of monocrystal rod diameter D, needle roller and monocrystal rod with vernier caliper, then institute is surveyed data and given data substitution formula h=1.207d+D-H, numerical value h is groove depth.The present invention is with the needle roller of a known diameter, measure several simple geometric data by survey instrument vernier caliper commonly used, then known and data substitution formula that measure just can be calculated the groove depth of V-shaped groove, method is simple, it is few to relate to instrument, be particluarly suitable for process application, just can obtain the groove depth value of V-shaped groove quickly and accurately, thereby guaranteed normally carrying out of production effectively.

Description

The measuring method of single-crystal bar V type groove deep

[technical field]

The present invention relates to a kind of measuring method, especially belong to a kind of measuring method of single-crystal bar V type groove deep.

[background technology]

In the silicon single crystal flake process of diameter 150mm～300mm, it is to open the axial V-type groove of a cross section for " V " font on the outer peripheral face of cylindrical monocrystal rod that a procedure is arranged, and groove depth requires to be controlled between the 1.0-1.25mm, as main reference plane.In order to ensure the quality of following process polished silicon wafer, in actual job, also must measure once more before the processing polished silicon wafer, to obtain V-type groove deep data accurately to the groove depth of V-type groove.The problem that prior art exists is: because this groove shape is " V " font; opening is less again; and the top cambered surface of V-type groove is clipped again; make present survey instrument can't go deep into measuring and obtaining in the groove accurate groove depth data; not only can not satisfy polished silicon wafer processing to the high requirement of V-type groove deep precision; go back regular meeting between manufacturer and the user and therefore economic dispute takes place, restricted the processing of silicon single crystal flake.

[summary of the invention]

For overcoming the problems referred to above that prior art runs into, the present invention aims to provide a kind of measuring method of single-crystal bar V type groove deep, this method is simple to operation, after producers use the routine measurement instrument to measure, just can utilize simple computing formula to calculate groove depth, normally carry out thereby guarantee to produce.

For achieving the above object, the present invention has adopted following technical scheme: the measuring method of this single-crystal bar V type groove deep, finish by the following step: equal at known V-type groove both sides angle under the condition of 90 degree, in the groove of V-type groove, axially place the needle roller that known diameter d is 3.0mm, measure the overall height H of diameter D, needle roller and the monocrystal rod of V-type groove place monocrystal rod with vernier caliper, then institute is surveyed data and given data substitution formula h=1.207d+D-H, numerical value h is groove depth.

Beneficial effect: we are in the process repeated tests with after calculating, worked out this measuring method of utilizing the column type needle roller to measure groove depth, this method does not need to dispose miscellaneous equipment, and it is simple to operation, after the tester uses survey instrument commonly used to measure, just can utilize computing formula to calculate groove depth, can control the machining precision of monocrystal rod groove depth very easily.After using this method to measure, the monocrystal rod groove depth numerical value behind the fluting can be good at satisfying diameter 150mm～300mm monocrystalline silicon piece and makes requirement and technical indicator.

[description of drawings]

Fig. 1 is a measuring method synoptic diagram of the present invention.

[embodiment]

Referring to Fig. 1.To equal 90 degree be that technology is desired to V-type groove both sides angle among the figure, and needle roller 1 axially is placed on the V-shaped groove top of monocrystal rod 2, because the diameter d of needle roller 1 is greater than the V-shaped groove notch, therefore, the major part of needle roller 1 is laid in the V-shaped groove notch with the upper part.The diameter d of needle roller 1 can record in advance, measure the total distance H between bottom to needle roller 1 top of monocrystal rod 2 with the vernier card, and monocrystal rod diameter D (this diameter D preferably records being positioned at V-type groove notch place, the diameter D that records like this is more accurate), then institute is surveyed data and given data substitution formula h=1.207d+D-H, numerical value h is groove depth.

" 1.207 " numerical value source is as follows in the formula of h=1.207d+D-H:

Because the angle of V-type groove is 90 °, article two, the line of rabbet joint is the outer tangent line of circle needle roller, the line at the needle roller center of circle and outer point of contact is perpendicular to outer tangent line so, and two length of tangent degree equate that therefore the quadrilateral of two point of contacts and needle roller centre point, groove depth point composition is a square, and the foursquare length of side is the radius of needle roller, we suppose that the V-shaped groove groove depth is h, the V-shaped groove bottom land is M to the distance of monocrystal rod bottom, and needle roller axle center to the distance of V-shaped groove bottom land is L (i.e. this foursquare diagonal line), then:

$L=\sqrt{2}/2d$

And: the distance=H-M=H-(D-h) on groove depth and needle roller top;

Therefore $(\sqrt{2}+1)d/2=H-(D-h)$

$h=(\sqrt{2}+1)d/2+D-H=1.207d+D-H$

(please describe the derivation of above formula in detail, and whether check being correct)

Following embodiment is 150mm～300mm silicon single crystal flake at customer requirement processing diameter, diameter 150mm～300mm monocrystal rod is opened V-shaped groove, requirement V-shaped groove groove depth is controlled at the actual conditions between the 1.0-1.25mm, and whether check V-shaped groove groove depth meets the requirements.

Embodiment one: the measurement of φ 150mm single-crystal bar V type groove deep

Known needle roller diameter d=3.0mm; Measure the diameter D=150.3mm of φ 6 ＂ monocrystal rod with vernier caliper in the left side of V-type groove; Monocrystal rod is fixed on the monocrystalline frame, needle roller is shelved on the V-type groove, utilize vernier caliper to measure the overall height H=152.8mm at needle roller bottom to monocrystal rod top; With the given data and the data substitution formula of surveying, then therefore groove depth h=1.207d+D-H=1.207 * 3+150.3-152.8=1.119mm, meets the requirement of user's V-type groove deep between 1-1.25mm.

Embodiment two: the measurement of φ 200mm single-crystal bar V type groove deep

Known needle roller diameter d=3.0mm; Measure the diameter D=200.7mm of φ 8 ＂ monocrystal rod with vernier caliper on the right side of V-type groove; Monocrystal rod is fixed on the monocrystalline frame, needle roller is shelved on the V-type groove, utilize vernier caliper to measure the overall height H=203.1mm at needle roller bottom to monocrystal rod top; With given data and the data substitution formula of surveying, then groove depth=1.207d+D-H=1.207 * 3+200.7-203.1=1.221mm.Therefore, meet the requirement of user's V-type groove deep between 1-1.25mm.

Embodiment three: φ 300mm single-crystal bar V type groove deep is measured

Known needle roller diameter d=3.0mm; Measure the diameter D=301.1mm of φ 12 ＂ monocrystal rod with vernier caliper on the right side of V-type groove; Monocrystal rod is fixed on the monocrystalline frame, needle roller is shelved on the V-type groove, utilize vernier caliper to measure the overall height H=303.7mm at needle roller bottom to monocrystal rod top; With given data and the data substitution formula of surveying, then groove depth=1.207d+D-H=1.207 * 3+301.1-303.7=1.021mm.Therefore, meet the requirement of user's V-type groove deep between 1-1.25mm.

Claims (2)

1, a kind of measuring method of single-crystal bar V type groove deep, finish by the following step: equal at known V-type groove both sides angle under the condition of 90 degree, in the groove of V-type groove, axially place the needle roller of a known diameter d greater than V-type groove width of rebate, measure the overall height H of monocrystal rod diameter D, needle roller and monocrystal rod with vernier caliper, with the overall height H of monocrystal rod diameter D, needle roller and the monocrystal rod surveyed and known needle roller diameter d substitution formula h=1.207d+D-H, numerical value h is groove depth then.

2, the measuring method of single-crystal bar V type groove deep as claimed in claim 1 is characterized in that: monocrystal rod diameter D is the diameter at V-type groove notch place.

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