CN100529158C - 硬膜,多层硬膜及它们的制造方法 - Google Patents

硬膜,多层硬膜及它们的制造方法 Download PDF

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Publication number
CN100529158C
CN100529158C CNB2006100090164A CN200610009016A CN100529158C CN 100529158 C CN100529158 C CN 100529158C CN B2006100090164 A CNB2006100090164 A CN B2006100090164A CN 200610009016 A CN200610009016 A CN 200610009016A CN 100529158 C CN100529158 C CN 100529158C
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CN
China
Prior art keywords
layer
dura mater
sub
target
hard films
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Expired - Fee Related
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CNB2006100090164A
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English (en)
Chinese (zh)
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CN1821436A (zh
Inventor
山本兼司
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Kobe Steel Ltd
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Kobe Steel Ltd
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Publication of CN1821436A publication Critical patent/CN1821436A/zh
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Publication of CN100529158C publication Critical patent/CN100529158C/zh
Expired - Fee Related legal-status Critical Current
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  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)
CNB2006100090164A 2005-02-16 2006-02-16 硬膜,多层硬膜及它们的制造方法 Expired - Fee Related CN100529158C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005039738 2005-02-16
JP2005039738A JP4676780B2 (ja) 2005-02-16 2005-02-16 硬質皮膜、積層型硬質皮膜およびその製造方法
JP2005069379 2005-03-11

Related Child Applications (1)

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CN2009101297264A Division CN101509121B (zh) 2005-02-16 2006-02-16 硬膜,多层硬膜及它们的制造方法

Publications (2)

Publication Number Publication Date
CN1821436A CN1821436A (zh) 2006-08-23
CN100529158C true CN100529158C (zh) 2009-08-19

Family

ID=36923006

Family Applications (2)

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CN2009101297264A Expired - Fee Related CN101509121B (zh) 2005-02-16 2006-02-16 硬膜,多层硬膜及它们的制造方法
CNB2006100090164A Expired - Fee Related CN100529158C (zh) 2005-02-16 2006-02-16 硬膜,多层硬膜及它们的制造方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN2009101297264A Expired - Fee Related CN101509121B (zh) 2005-02-16 2006-02-16 硬膜,多层硬膜及它们的制造方法

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JP (1) JP4676780B2 (ja)
CN (2) CN101509121B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2528298C2 (ru) * 2008-11-04 2014-09-10 Ёрликон Трейдинг Аг, Трюббах Износостойкое защитное покрытие и способ его получения
WO2011149064A1 (ja) * 2010-05-27 2011-12-01 京セラ株式会社 切削工具
JP5640242B2 (ja) * 2011-02-01 2014-12-17 住友電工ハードメタル株式会社 表面被覆切削工具
JP5640243B2 (ja) * 2011-02-01 2014-12-17 住友電工ハードメタル株式会社 表面被覆切削工具
CN103898456B (zh) * 2014-03-19 2015-12-30 江苏科技大学 NbVN硬质纳米薄膜及制备方法
JP6491031B2 (ja) * 2014-06-24 2019-03-27 株式会社神戸製鋼所 積層型硬質皮膜および切削工具

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555841B2 (ja) * 1973-12-27 1980-02-12
CN1020158C (zh) * 1987-12-22 1993-03-24 昆明物理研究所 锗/硅红外光学镜头(片)镀类金刚石碳膜的方法
JP2816786B2 (ja) * 1992-09-16 1998-10-27 健 増本 Ａｌ−Ｔｉ系又はＡｌ−Ｔａ系耐摩耗性硬質膜及びその製造方法
EP1219723B1 (en) * 2000-12-28 2006-10-25 Kabushiki Kaisha Kobe Seiko Sho Hard film for cutting tools
JP4456374B2 (ja) * 2003-02-07 2010-04-28 株式会社神戸製鋼所 硬質皮膜及びその製造方法並びに硬質皮膜形成用ターゲット
JP2005028520A (ja) * 2003-07-07 2005-02-03 Tungaloy Corp 硬質膜被覆工具

Also Published As

Publication number Publication date
JP4676780B2 (ja) 2011-04-27
JP2006225703A (ja) 2006-08-31
CN1821436A (zh) 2006-08-23
CN101509121B (zh) 2011-10-19
CN101509121A (zh) 2009-08-19

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Granted publication date: 20090819

Termination date: 20210216