CN100519475C - Method of preparing zirconium oxide ceramic by curtain coating method and product obtained by using the method - Google Patents
Method of preparing zirconium oxide ceramic by curtain coating method and product obtained by using the method Download PDFInfo
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- CN100519475C CN100519475C CNB031140971A CN03114097A CN100519475C CN 100519475 C CN100519475 C CN 100519475C CN B031140971 A CNB031140971 A CN B031140971A CN 03114097 A CN03114097 A CN 03114097A CN 100519475 C CN100519475 C CN 100519475C
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Abstract
A process for preparing the zirconium oxide ceramics by doctor blading method includes calcining the square-crystal zirconium oxide powder at 600-800 deg.C for 1-3 hr, proportionally mixing it with disperser, solvent and homogenizing agent, ball grinding for 10 hr, adding plasticizer and defoaming agent, ball grinding for 10 hr, vacuum stirring for defoaming, doctor blading, drying at 60-100 deg.C for 2-3 hr, degumming by heating to 600 deg.C and holding the temp for 4 hr, and sintering at temp lower than 1540 deg.C for 2-4 hr.
Description
Technical field
The present invention relates to a kind ofly prepare the method for zirconia ceramics and the product that obtains by this method thereof by casting method.
Background technology
Flow casting molding (Tape Casting) is a kind of forming method that can obtain high quality, ultra-thin type ceramic substrate, at present can the many thin slice stupaliths of moulding except that zirconium white, and as aluminum oxide, aluminium nitride, barium titanate etc.Be characterized in process stabilizing, production efficiency height, can realize automatic continuous production, quality product is also higher simultaneously, and the scale operation cost is low.The conventional thickness that general ceramic substrate requires is 0.4-1.0mm, and dimensional precision is higher.It is very strict to the requirement of ceramic powder average particle size particle size that production reaches the curtain coating ceramic substrate of this thickness, and the average particle size particle size that laser method is surveyed powder must be stabilized in 2-3 μ m.When the powder average particle size particle size less than 2 μ m, serious cracking or at all can not be used for carrying out flow casting molding 0.4-1.0mm substrate during by present casting method moulding, its reason is as follows:
1. the zirconium white micro mist of present partially stabilized cubic crystalline phase is to use wet chemistry method production basically, and the powder active height can effectively reduce sintering temperature.But the zirconium white micro mist average particle size particle size that this method is produced is generally less than 1 μ m, and it is serious to reunite usually, is difficult for disperseing.Being configured to equal flowing property casting slurry like this needs a large amount of solvents effectively to disperse powder, forms certain fluidity.Cause the solid load (mainly being inorganic material content) of slurry relatively very low like this, finally cause all severe exacerbations of the processability of green compact and the ceramic body performance behind the sintering.Therefore this powder can not satisfy the needs that present traditional curtain coating is produced.
2. can cause all serious cracking of curtain coating process when the solid load of slurry is low, drying is very difficult, and green compact are Texturized easily when dry.Sintering warpage simultaneously is also corresponding bigger, and product size is restive, and yield rate is extremely low.Therefore this powder can not directly be adapted to the large-scale production of the zirconia ceramics substrate of big area, high-precision requirement.
Summary of the invention
The purpose of this invention is to provide and a kind ofly prepare the method for zirconia ceramics and the product that obtains by this method thereof by casting method.
Above-mentioned purpose of the present invention be adopt following technical scheme with to realize:
A kind ofly prepare the method for zirconia ceramics by casting method, its basic step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 1-3 hour;
(2). pretreated zirconium white micro mist adds ball mill, be that basic calculation adds dispersion agent 1-3% by weight percentage with the zirconia powder body weight then, solvent 50-60%, levelling agent 0.5-3%, ball milling was made slurry in 10 hours one time, to add softening agent 2-8% respectively in the above-mentioned slurry again, secondary ball milling was made curtain coating slurry in 10 hours behind the binding agent 3-10%, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent is a dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 10-30 minute, control slurry viscosity 10000-30000mPa.s, on large-scale casting machine, carry out curtain coating then, descended dry 2-3 hour at 60 ℃-100 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 0.5-1.5 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 2-4 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
According to the present invention, its step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 1 hour;
(2). pretreated zirconium white micro mist adds ball mill, add dispersion agent 1% then, solvent 50%, levelling agent 0.5%, ball milling was made slurry in 10 hours one time, to add softening agent 2% respectively in the above-mentioned slurry again, binding agent 3% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 10 minutes, control slurry viscosity 10000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 2 hours at 60 ℃-100 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 0.5 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 2 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
According to the present invention, its step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 2 hours;
(2). pretreated zirconium white micro mist adds ball mill, add corresponding dispersion agent 2% then, solvent 55%, levelling agent 2%, ball milling was made slurry in 10 hours one time, to add softening agent 6% respectively in the above-mentioned slurry again, binding agent 6% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 20 minutes, control slurry viscosity 20000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 2 hours at 80 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 1 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 3 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
According to the present invention, its step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 3 hours;
(2). pretreated zirconium white micro mist adds ball mill, add dispersion agent 3% then, solvent 60%, levelling agent 3%, ball milling was made slurry in 10 hours one time, in an above-mentioned slurry, add softening agent 8% respectively again, binding agent 10% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 30 minutes, control slurry viscosity 30000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 3 hours at 100 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 1.5 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 4 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
According to the present invention, the weight percent of the zirconia ceramics of being produced composition is:
ZrO
2 94.6％
Y
2O
3 5.2％
Surplus is Al
2O
3
According to the present invention, the performance of the zirconia ceramics that is produced is as follows:
Performance perameter testing performance index method
Volume density (Kg/m
3) 〉=6.02 GB2413-81
Volume specific resistance (Ω .cm25 ℃) 〉=10
13Agilent high resistant tester
The accurate LCR tester of dielectric loss (7.5GHz) 0.001-0.002 Agilent
The anti-folding of bending strength (MPa) 〉=800 experimental machine
Surfaceness R
Max≤ 0.2 μ m surfaceness or profile tester
Parallelism MAX (mm) 0.10 parallelism tester
Coefficient of linear expansion
10
-6mm/℃(RT～1000) 9.5-10.5 GB5594.3
The accurate LCR tester of specific inductivity (1MHz) 28.0-29.0 Agilent
Thermal conductivity (20 ℃) is the pulse laser method (W/m.K) 〉=2.0
Planeness (mm) (～/ 25 (length)) 0.04/25 testing flatness instrument
Squareness MAX (mm) 0.10 squareness tester
The ivory white range estimation of color.
According to the present invention, the zirconia ceramics cutter of being produced that is obtained, its weight percent composition is:
ZrO
2 94.6％
Y
2O
3 5.2％
Surplus is Al
2O
3
Because the present invention carries out pre-treatment by the zirconium white micro mist to partially stabilized cubic crystalline phase, under the prerequisite that guarantees the powder sintering performance, effectively reduced the specific surface area of powder, improved the solid load of slurry.And adopt unique flow casting molding prescription and dispersant with high efficiency, realized the production of superfine zirconia powder (average particle size particle size 0.5 μ m) large-scale industrialization curtain coating.Adopt this method can be in enormous quantities, low-cost high-strength, high frequency microwave device, comprise stripline loop and wave filter, use the zirconia ceramics substrate, thickness 0.2-1.0mm and other microwaves economize on electricity device.The zirconia ceramics substrate of being produced is smooth smooth.
Embodiment
Embodiment one:
A kind ofly prepare the method for zirconia ceramics by casting method, its basic step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 1 hour;
(2). pretreated zirconium white micro mist adds ball mill, be that basic calculation adds dispersion agent 1% by weight percentage with the zirconia powder body weight then, solvent 50%, levelling agent 0.5%, ball milling was made slurry in 10 hours one time, to add softening agent 2% respectively in the above-mentioned slurry again, binding agent 3% back secondary ball milling was made curtain coating slurry in 10 hours, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent is a dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 10-30 minute, control slurry viscosity 10000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 2 hours at 60 ℃-100 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 0.5 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 2 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
Embodiment two
Its step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 2 hours;
(2). pretreated zirconium white micro mist adds ball mill, add corresponding dispersion agent 2% then, solvent 55%, levelling agent 2%, ball milling was made slurry in 10 hours one time, to add softening agent 6% respectively in the above-mentioned slurry again, binding agent 6% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 20 minutes, control slurry viscosity 20000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 2 hours at 80 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 1 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 3 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
Embodiment three:
Its step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 3 hours;
(2). pretreated zirconium white micro mist adds ball mill, add dispersion agent 3% then, solvent 60%, levelling agent 3%, ball milling was made slurry in 10 hours one time, in an above-mentioned slurry, add softening agent 8% respectively again, binding agent 10% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 30 minutes, control slurry viscosity 30000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 3 hours at 100 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 1.5 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 4 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
The present invention adopts the weight percent of the zirconia ceramics of casting method production to form:
ZrO
2 94.6％
Y
2O
3 5.2％
Surplus is Al
2O
3
The zirconia ceramics chemical constitution that adopts casting method to produce is as follows:
Chemical constitution ZrO
2Y
2O
3Al
2O
3
Weight percent 94.6% 5.2% surpluses.
The main performance index and the testing method of the zirconia ceramics of employing curtain coating legal system are as follows:
Performance perameter testing performance index method
Volume density (Kg/m
3) 〉=6.02 GB2413-81
Volume specific resistance (25 ℃ of Ω .cm) 〉=10
13Agilent high resistant tester
The accurate LCR tester of dielectric loss (7.5GHz) 0.001-0.002 Agilent
The anti-folding of bending strength (MPa) 〉=800 experimental machine
Surfaceness R
Max≤ 0.2 μ m surfaceness or profile tester
Parallelism MAX (mm) 0.10 parallelism tester
Coefficient of linear expansion
10
-6mm/℃(RT～1000) 9.5-10.5 GB5594.3
The accurate LCR tester of specific inductivity (1MHz) 28.0-29.0 Agilent
Thermal conductivity (20 ℃) is the pulse laser method (W/m.K) 〉=2.0
Planeness (mm) (～/ 25 (length)) 0.04/25 testing flatness instrument
Squareness MAX (mm) 0.10 squareness tester
The ivory white range estimation of color.
Claims (7)
1, a kind ofly prepare the method for zirconia ceramics by casting method, its basic step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 1-3 hour;
(2). pretreated zirconium white micro mist adds ball mill, be that basic calculation adds dispersion agent 1-3% by weight percentage with the zirconia powder body weight then, solvent 50-60%, levelling agent 0.5-3%, ball milling was made slurry in 10 hours one time, to add softening agent 2-8% respectively in the above-mentioned slurry again, secondary ball milling was made curtain coating slurry in 10 hours behind the binding agent 3-10%, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent is a dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 10-30 minute, control slurry viscosity 10000-30000mPa.s, on large-scale casting machine, carry out curtain coating then, descended dry 2-3 hour at 60 ℃-100 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 0.5-1.5 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 2-4 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
2, according to claim 1ly a kind ofly prepare the method for zirconia ceramics by casting method, its step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 1 hour;
(2). pretreated zirconium white micro mist adds ball mill, add dispersion agent 1% then, solvent 50%, levelling agent 0.5%, ball milling was made slurry in 10 hours one time, to add softening agent 2% respectively in the above-mentioned slurry again, binding agent 3% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 10 minutes, control slurry viscosity 10000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 2 hours at 60 ℃-100 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 0.5 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 2 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
3, according to claim 1ly a kind ofly prepare the method for zirconia ceramics by casting method, its basic step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 2 hours;
(2). pretreated zirconium white micro mist adds ball mill, add dispersion agent 2% then, solvent 55%, levelling agent 2%, ball milling was made slurry in 10 hours one time, to add softening agent 6% respectively in the above-mentioned slurry again, binding agent 6% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 20 minutes, control slurry viscosity 20000mPa.s, on large-scale casting machine, carry out curtain coating then, following dry 2 hours at 80 ℃ simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 1 ℃/min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 3 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
4, according to claim 1ly a kind ofly prepare the method for zirconia ceramics by casting method, its step is as follows:
(1). with the zirconium white micro mist of the partially stabilized cubic crystalline phase of wet chemistry method production 600-800 ℃ down calcining carried out pre-treatment in 3 hours;
(2). pretreated zirconium white micro mist adds ball mill, add dispersion agent 3% then, solvent 60%, levelling agent 3%, ball milling was made slurry in 10 hours one time, to add softening agent 8% respectively in the above-mentioned slurry again, binding agent 10% back secondary ball milling was made curtain coating slurry in 10 hours, below all be weight percentage, with the zirconia powder body weight is basic calculation, above-mentioned dispersion agent is Viscotrol C or phosphoric acid ester, binding agent is a polyvinyl butyral acetal, softening agent is the mixture of dibutyl phthalate and o-phthalic acid dibutyl ester, weight ratio 1:1, solvent are dehydrated alcohol, and levelling agent is a pimelinketone;
(3). the casting slurry behind the ball milling is rich in a large amount of bubbles, must be through vacuum stirring de-bubble 30 minutes, control slurry viscosity 30000mPa.s, on large-scale casting machine, carry out curtain coating then, under 100 ° of C dry 3 hours simultaneously, be prepared into the zirconia ceramics green compact, green compact after the curtain coating are placed on that the temperature rise rate with 1.5 ℃ of min is raised to 600 ℃ from room temperature on the load bearing board, be incubated 4 hours binder removals, then less than 1540 ℃ of following sintering 4 hours, substrate behind the sintering is through sandblast and smooth processing, and thickness is 0.2-1.0mm.
5, the product that is obtained according to claim 1 or 2 or 3 or 4 described methods is characterized in that: the weight percent of the zirconia ceramics of being produced is formed and is:
ZrO
2 94.6％
Y
2O
3 5.2％
Surplus is Al
2O
3
6, product according to claim 5, it is characterized in that: the performance of the zirconia ceramics that is produced is as follows:
Performance perameter testing performance index method
Volume density (Kg/m
3) 〉=6.02 GB2413-81
Volume specific resistance (25 ℃ of Ω .cm) 〉=10
13Agilent high resistant tester
The accurate LCR tester of dielectric loss (7.5GHz) 0.001-0.002 Agilent
The anti-folding of bending strength (MPa) 〉=800 experimental machine
Surfaceness R
Max≤ 0.2 μ m surfaceness or profile tester
Parallelism MAX (mm) 0.10 parallelism tester
Coefficient of linear expansion
10
-8mm/℃(RT～1000) 9.5-10.5 GB5594.3
The accurate LCR tester of specific inductivity (1MHz) 28.0-29.0 Agilent
Thermal conductivity (20 ℃) is the pulse laser method (W/m.K) 〉=2.0
Planeness (mm) (～/ 25 (length)) 0.04/25 testing flatness instrument
Squareness MAX (mm) 0.10 squareness tester
The ivory white range estimation of color.
7, the zirconia ceramics cutter that is obtained according to claim 1 or 2 or 3 or 4 described methods, its weight percent are formed:
ZrO
2 94.6％
Y
2O
3 5.2％
Surplus is Al
2O
3
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|---|---|---|---|
| CNB031140971A CN100519475C (en) | 2003-04-02 | 2003-04-02 | Method of preparing zirconium oxide ceramic by curtain coating method and product obtained by using the method |
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| US6068828A (en) * | 1997-06-13 | 2000-05-30 | Nippon Shokubai Co., Ltd. | Zirconia powder, method for producing the same, and zirconia ceramics using the same |
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