CN100514034C - Method for judging maintenance of times of semiconductor production apparatuses - Google Patents
Method for judging maintenance of times of semiconductor production apparatuses Download PDFInfo
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- CN100514034C CN100514034C CNB2005100846976A CN200510084697A CN100514034C CN 100514034 C CN100514034 C CN 100514034C CN B2005100846976 A CNB2005100846976 A CN B2005100846976A CN 200510084697 A CN200510084697 A CN 200510084697A CN 100514034 C CN100514034 C CN 100514034C
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Abstract
The invention discloses a semiconductor preparing device, which is characterized by the following: purifying after high-effective protection; condensing time of purifying disposal; recovering CVD device; adopting high-heat conductive gas and inert gas as purifying gas; guiding extracted vacuum and inert gas for many times in the purifying disposal before forming semiconductor film; judging protective period of eroded gas according to changed water density of eroding gas.
Description
The application be the applying date be submit on August 31st, 2000, division day be that October 17, application number in 2003 are 200310102823.7, denomination of invention divides an application for the application for a patent for invention of " purification method of CVD (Chemical Vapor Deposition) apparatus "; These No. 200310102823.7 applications are again to be August 31, application number in 2000 the dividing an application for the application for a patent for invention of " CVD (Chemical Vapor Deposition) apparatus and purification method thereof and semiconductor-fabricating device " that be 00131310.X, denomination of invention the applying date.
Technical field
Aspect of the present invention relates to CVD (chemical vapour deposition) device and its purification method, particularly can shorten in structure and its purification method of having carried out the CVD device of required time aspect the purified treatment after the maintenance.
In addition, when carrying out epitaxial growth etc. on the silicon chip that the present invention relates to use corrosive gas for example in reaction chamber, to dispose, the moisture monitoring arrangement of the moisture that corrosive gas comprised during monitoring is handled and have the maintenance determination methods in period of the semiconductor-fabricating device and the semiconductor-fabricating device of this device.
Background technology
The CVD device is by making the semiconductor material gas that imports in the reaction chamber (reactor) carry out chemical reaction on substrate (wafer), the device of growing semiconductor film on wafer.But, because all material gas is reacted on wafer, so can pay secondary growth-gen everywhere at the reactor wall face.Because this secondary growth-gen exerts an influence when film grow as particulate etc., the formation of the film of obstruction better quality is so must carry out the clean-out operation (maintenance) of reactor wall face.
For example, in the CVD device of growth thick film, the maintenance about must carrying out once in 3～4 days.But, in maintenance,, cleans in device because being in the atmosphere and with ethanol, thus bring a large amount of air into, can adsorption moisture on the device internal face.
In the growth of semiconductor film, if there is moisture in the atmosphere, with the semiconductor material gas reaction, generates metallic impurity, or produce particulate so, film quality is worsened.Therefore, after maintenance, before making the film growth, come purification plant inside, must reduce moisture concentration and film quality not produced dysgenic degree until reaching with inert gases such as high-purity nitrogens.
But CVD device inside has very complicated shape, and, because the absorption affinity of hydrone is very strong, thus the moisture after maintenance remove aspect the needed time long, the running efficiency of installing is also produced big influence.
In order to shorten the device service time that comprises purification, in the past, can implement variously to vacuumize and add thermal purification (curing), use hydrogen or their methods such as combination.But, vacuumize and cure condition and combination owing to deciding, so the optimization of purification method is difficult by experience.
In addition, after having carried out purification to a certain degree, film is grown practically, judge to purify according to the evaluation of its quality and finish.Therefore, in the growth before the film of the quality that obtains the goods level, material gas and time have all been wasted.It is called gives up film (The て エ ピ), but because of service time of CVD device and maintenance situation to purifying the asynchronism(-nization) that needs, can increase significantly so give up the number of times of film.
In addition, in recent years,, be manufactured on the silicon chip of utmost point low-resistivity epitaxial wafer with the epitaxial crystallization grower by the impurity concentration vapor phase growth monocrystalline silicon thin film of being scheduled to (epitaxial loayer) as the silicon wafer that the MOS device uses.This device disposes silicon chip in process chamber, corrosive source gas that circulates carries out epitaxial growth on substrate.Have again, in this device, also utilize hydrogen chloride to corrode the polysilicon of paying in inner treatment chamber as etchant gas.
In addition, in semiconductor manufacturing processes such as LSI, adopt to use corrosive gas and film forming various CVD devices or be used for the corrosion device that composition is used on substrate.
These semiconductor-fabricating devices use the hydrogen chloride gas and the such corrosive gas of ammonia gas of ultrahigh concentration, even if wherein contain some moisture, so also cause the corrosion of the metal parts that uses in the device (inner treatment chamber, gas supply system, gas exhaust system etc.) easily, the metal (heavy metal) that partly produces because of metal becomes harmful pollution cause.In addition, enter moisture and the secondary growth-gen reaction of paying on process chamber inwall and gas outlet in the process chamber, have the situation that becomes the particulate reason.Therefore,, the maintenance of device be must carry out termly, the opening of process chamber, the cleaning of internal part (quartzy anchor clamps etc.) promptly carried out termly though, be difficult to make moisture not have fully in the various countermeasures of taking to reduce moisture in the process chamber.In the past, for example under piece situation of leaf formula CVD device, handle piece number with the accumulative total of wafer the period of maintenance was that benchmark is judged.
But there is following problem in the determination methods with regard to above-mentioned maintenance period in the past.In other words, job content and process chamber open hour during according to maintenance, when maintaining at every turn, in fact the amount of moisture difference that enters in the process chamber, handling piece number with the accumulative total of wafer as in the past is that benchmark is judged under the maintenance situation in period, in fact with process chamber in the moisture that enters irrelevant, every certain number of processes is just maintained, and may not maintain in suitable period.For example, when maintaining last time, compare, under the situation that a lot of moisture enter, just handle, have so to obtain the good membranous possibility of quality if handle a piece number until predetermined accumulative total with the hypothesis amount.In addition, under the fewer situation of the moisture that entered when maintaining last time, compare period with in fact necessary maintenance, maintenance is carried out earlier, and it is many that the number of times of maintenance becomes, and causes the decline of throughput rate.
In addition, aspect the moisture in reducing process chamber, require the moisture of quantitative test process chamber internal corrosion gas in high sensitivity.
Moisture meter as the moisture in the monitoring gas, it is well-known for example utilizing the quartz vibrator method and the moisture in the adsorbed gas of frequency change of monitoring quartz vibrator and the static capacity method etc. of monitoring electric capacitance change, but because this moisture meter must directly contact with gas, so under the situation of corrosive gas, because of the corrosivity of gas can not be monitored.
Therefore, in recent years, for example open in flat 5-99845 communique and the flat 11-183366 communique of Te Kai and disclosed following moisture meter, that is, adopt the laser moisture meter of the infrared absorption optical spectroscopy that uses the trace impurity that comprises in the laser determination gas the spy.In this laser moisture meter, in measuring pipe, import corrosive gas, while incident in measuring pipe has the laser of predetermined wavelength, the laser that sees through by analysis, from the intensity of absorbing wavelength, detect impurity such as moisture, needn't adsorb corrosive gas, highly sensitive, and can carry out high slowdown monitoring.
But, in the monitoring device that utilizes above-mentioned moisture meter in the past, have following problem.In other words, corrosive gas is heated its part of back and is imported into above-mentioned moisture meter by the sampling pipe arrangement in reaction chamber, but can pay accumulation subsidiary reaction growth-gen on its inwall to the sampling pipe arrangement of moisture meter, and the possibility of stopping up the sampling pipe arrangement is arranged.Therefore, in processing, be difficult to often monitor the moisture in the corrosive gas, promptly be difficult to carry out monitoring in the original place.
In recent years, as the device of measuring the moisture concentration in the etchant gas, for example open in flat 5-99845 communique and the flat 11-183366 communique of Te Kai etc., disclosed the laser moisture meter of monitoring incident through the laser absorption spectrum of the tubular units body inner laser that is connected with process chamber the spy.This laser moisture meter since with the gas noncontact under can measure, so even corrosive gas also can measure accurately.
Summary of the invention
Therefore, first purpose of the present invention is to provide the purification method of a kind of CVD, and the purified treatment after can high-level efficiency maintaining can know that purified treatment finishes simultaneously reliably, shorten the needed time of purified treatment, can promptly carry out the recovery of CVD device.
In addition, second purpose of the present invention is to provide the maintenance determination methods in period of the semiconductor-fabricating device that can judge suitable maintenance period.
Purification method according to CVD device of the present invention, can carry out the purified treatment of reactor expeditiously, in addition, owing to can know the moment of beginning film growth reliably, so can realize the CVD device running efficiency raising and give up the elimination of film, can subdue the waste and the waste of time of material gas.
To achieve these goals, according to the present invention, a kind of maintenance determination methods in period of semiconductor-fabricating device is provided, wherein, the maintenance period of the semiconductor-fabricating device that corrosive gas handles is carried out in judgement in reaction chamber, it is characterized in that, is carrying out described corrosive gas when handling, come the indoor moisture concentration of monitoring reaction with the moisture meter that is connected with described reaction chamber, the variation of the described moisture concentration when repeating corrosive gas and handle decides described maintenance period.
In the maintenance determination methods in period of this semiconductor-fabricating device, owing to carrying out using the moisture meter that is connected with reaction chamber to come the indoor moisture concentration of monitoring reaction when corrosive gas is handled, the variation of the moisture concentration when repeating corrosive gas and handle decides maintenance period, according to the actual amount of moisture that enters in described moisture concentration and the reaction chamber to change, so can judge suitable maintenance period exactly.Therefore, the frequent kilter of holdout device can reduce the maintenance number of times simultaneously and prolong maintenance period, can realize the raising of throughput rate.
In addition, in the maintenance determination methods in period of semiconductor-fabricating device of the present invention, also can be according to the variation of described moisture concentration, calculate the cumulative amount that enters in the described reaction chamber from the moisture of maintenance last time, decide described maintenance period according to this cumulative amount.
In the maintenance determination methods in period of this semiconductor-fabricating device, owing to decide maintenance period according to change the moisture cumulative amount calculate by moisture concentration, so can estimate the actual amount of moisture that enters in the reaction chamber exactly, can easily judge suitable maintenance period.
And, in the maintenance determination methods in period of semiconductor-fabricating device of the present invention, also can carry out described corrosive gas when handling, come the indoor pressure of monitoring reaction with the pressure gauge that is connected with described reaction chamber, the described pressure when repeating corrosive gas and handle changes and the cumulative amount of described moisture decides described maintenance period.
In the maintenance determination methods in period of this semiconductor-fabricating device, owing to change and the cumulative amount of moisture decides maintenance period according to the pressure in the reaction chamber, so from the reaction chamber internal pressure changes, pass through the circulation status of the pipe arrangement of detection exhaust system, the pressure variation that produces when for example inaccessible etc., it is considered can determine more suitably to maintain period in moisture concentration.
In addition, the described moisture meter of the maintenance determination methods in period of semiconductor-fabricating device of the present invention is the laser moisture meter, measures the laser absorption spectrum that incident sees through the tubular units body inner laser that is connected with described reaction chamber.
In other words, in the maintenance determination methods in period of above-mentioned semiconductor-fabricating device, as moisture meter, owing to use above-mentioned laser moisture meter, even so in processing, the also indoor moisture concentration of assaying reaction exactly, and can determine maintenance period accurately.
Description of drawings
Fig. 1 is the system diagram of a form of expression CVD device of the present invention.
Fig. 2 represents only to use nitrogen to bake the time variation diagram of the hydrone discharge rate during the purification.
Fig. 3 is that expression uses nitrogen hydrogen mixeding gas to bake the time variation diagram of the hydrone discharge rate during the purification.
Fig. 4 is the figure of the time-varying relationship of expression number of times of batch purification and the molecular weight water in the exhaust gas.
Fig. 5 is the signal overall plan view of epitaxial crystallization grower of an embodiment of the maintenance determination methods in period of expression semiconductor-fabricating device of the present invention.
Fig. 6 is the sectional view of the moisture meter structure that is used to handle of an embodiment of the maintenance determination methods in period of expression semiconductor-fabricating device of the present invention.
The curve map that the moisture concentration of monitoring changed when Fig. 7 was the repeating film forming and handle an of embodiment of maintenance determination methods in period of expression semiconductor-fabricating device of the present invention.
Fig. 8 is the signal overall plan view of expression moisture monitoring arrangement of the present invention and the epitaxial crystallization grower of an embodiment of the semiconductor-fabricating device that has this moisture monitoring arrangement.
Fig. 9 is the piping diagram of expression moisture monitoring arrangement of the present invention and the moisture monitoring arrangement structure of an embodiment of the semiconductor-fabricating device that has this moisture monitoring arrangement.
Figure 10 is the sectional view of expression moisture monitoring arrangement of the present invention and the laser moisture meter structure of an embodiment of the semiconductor-fabricating device that has this moisture monitoring arrangement.
Embodiment
The purification method of A.CVD device and CVD device
Fig. 1 is the system diagram of an embodiment of expression CVD device of the present invention.The process chamber 115 of drying box 113, the rotating mechanism that receptacle 114 is housed and heated filament etc. that CVD device body part 110 has the reactor 112 that is provided with gas channel 111 in inside, be connected with this reactor 112.
In reactor 112, the high heat-conduction coefficient gas feed path 123 of the gas that connected the material gas feed path 121 of supplying with the semiconductor material gas that is used to form semiconductor film, supply with the inert gas feed path 122 that purifies the inert gas that uses, supply with the hydrogen that in Purge gas, mixes, heat-conduction coefficient such as helium is high and eject the reactor exhaust pathway 131 of the gas of autoreactor 112.In addition, drying box 113 is connected respectively with the Purge gas feed path 124,125 of supplying with Purge gas with process chamber 115, and drying box 113 is connected with drying box exhaust pathway 132.
Described reactor exhaust pathway 131 branches into analysis path 134 and vacuum exhaust path 135 from main exhaust path 133, in individual path 134, be provided with the moisture meter 141 of the amount of moisture of mensuration from the gas that reactor 112 is discharged, in vacuum exhaust path 135, be provided with the vacuum pump 142 that is used for reactor 112 inside are carried out vacuum exhaust.Downstream in this main exhaust path 133 is from the derivation path 136 of vacuum pump 142, be connected with depollution device 143 from the derivation path 137 and the back, described drying box exhaust pathway 132 interflow of moisture meter 141.
As described moisture meter 141, use can be at the moisture meter of this occasion monitoring and continuous monitoring.In addition, even after maintenance,, after curing the reaction growth-gen cooling of evaporating, paying again owing to from the gas that the CVD device is discharged, contain a lot of reaction growth-gens, so the test section (unit 141a) of expectation moisture meter 141 is noncontacts, can thermal exhaust gas communication part.And because most of CVD devices do not have withstand voltage design, inside also is in below the normal pressure in purification, so can therefrom sample.As the single moisture meter 141 that satisfies these conditions, can list the laser spectrometer that utilizes near infrared absorption spectrum analysis method, this spectrometer except as the laser instrument of light source and test section not with determined other contact, can also heat the stream of all determined gases, have the vacuum pump (not shown) at the back segment of unit 141a.
The CVD device in film when growth wafer (not shown) of loading on receptacle 114 is heated to the semiconductor material gas of state downhill reaction device 112 internal feeds of predetermined temperature from the predetermined composition of material gas feed path 121, growing semiconductor film on wafer.At this moment, the discharge gas of discharging from reactor 112 passes through to discharge from depollution device 143 by reactor exhaust pathway 131, filtrator 151, valve 152, preparation filtrator 153, valve 154.In addition, import the Purge gas that is used to be maintained in the clean condition from Purge gas feed path 124,125 respectively to drying box 113 and process chamber 115 inside, drying box 113 gas inside are collaborated through the exhaust gas of valve 155 with described main exhaust path 133 from drying box exhaust pathway 132, gas in the process chamber 115 flows in the reactor 12 of connected state, discharges with described exhaust gas.
Because of the purified treatment behind the atmosphere opening that causes of maintenance operation is carried out like this, at first, make the valve of each feed path be in closed condition, close the valve 156 of described valve 152 and analysis path 134, under the state of the valve 157 of opening vacuum exhaust path 135, make simultaneously vacuum pump 142 work, the operation (vacuum purification) that repetition vacuumizes reactor 112 inside, with from the inert gas of inert gas feed path 122 for example nitrogen import reactor 112 inside, batch purification is carried out in the operation that pressure is recovered.At this moment, in the unit of moisture meter 141 141a, be in the state that makes the circulations of supplying with from path 141b such as high-purity nitrogen.Then, supply with for example nitrogen of inert gas from inert gas feed path 122, supply with for example hydrogen of the high gas of heat-conduction coefficient from high heat-conduction coefficient gas feed path 123 simultaneously, reactor 112 inside are heated to predetermined temperature, add type of thermal communication and purify (curing purification).At this moment, vacuum pump 142 is stopped, valve-off 157 is opened valve 152, and, open the valve 158,159 of moisture meter 141, a part of exhaust gas is imported moisture meter 141, measure the amount of moisture in the exhaust gas continuously.Then, repeat described batch purification and cure purification, the amount of moisture in exhaust gas reaches below the predetermined concentration.
Like this, as the Purge gas feed path, be provided with inert gas feed path 122 and high heat-conduction coefficient gas feed path 123, when curing purified treatment by using the Purge gas that inert gas and the high gas of heat-conduction coefficient are suitably mixed, compare with the situation of only using inert gas to carry out purified treatment, can shorten the needed time of purified treatment significantly.Have, the mixture ratio of the gas that inert gas and heat-conduction coefficient are high can suitably be set according to the film formation condition of reality again.
And, by being provided with the moisture meter 141 of measuring the amount of moisture in the exhaust gas continuously, can know the end point of purified treatment reliably.In addition,, repeatedly repeat the purified treatment of the reactor 112 of film before forming, the batch purification that Purge gas imports and vacuum purification is formed, can carry out the high purified treatment of fugitive rate of time by being provided with vacuum pump 142.
Have again,, can carry out the best purification corresponding and handle with the state of CVD device by described batch purification with cure purification and suitably make up.
Embodiment
The clean-up effect that the gas cleaning that the gas that the purified treatment of only using inert gas at first, more in the past is high with using inert gas and heat-conduction coefficient mixes is handled.After moisture concentration from the gas that reactor 112 is discharged being reached fully purify below the 0.1ppm, the nitrogen that circulates on one side, on one side the door of 113 in reactor 112 and drying box is formed 15 minutes of standard time of opening when turning round when wafer is set at the film of reality.
Then, closing behind the door describedly, as the Purge gas nitrogen that only circulates, the stable back of the hydrone discharge rate in the exhaust gas to heated filament is heated to till 120 ℃ in reactor 112, stops the heating of heated filament after through 40 minutes, and temperature is slowly reduced.Mensuration is carried out the amount of moisture in this exhaust gas during curing purification.Fig. 2 represents its result.Have, the quantity delivered of nitrogen gas (1 minute flow) was 24 liters from purifying beginning till 14 minutes, was 34 liters from 14 minutes to 15 minutes, was 38 liters from 15 minutes to 55 minutes, was 184 liters later in 55 minutes again.
In addition,, use the nitrogen hydrogen mixeding gas that mixes nitrogen and hydrogen, measure the amount of moisture in the exhaust gas equally as the Purge gas of curing when purifying.Fig. 3 represents its result.The quantity delivered (1 minute flow) of nitrogen, each gas of hydrogen of this moment is that 20 liters, hydrogen are 4 liters from purifying beginning to 11 minutes nitrogen, nitrogen was that 30 liters, hydrogen are 4 liters from 11 minutes to 12 minutes, nitrogen was that 78 liters, hydrogen are 60 liters from 12 minutes to 53 minutes, and 53 minutes only have nitrogen later on is 184 liters.
Have again, because the amount of moisture among Fig. 2, Fig. 3 has been ignored the difference of Purge gas flow condition, so represent by the hydrone discharge rate of average unit interval.In addition, circulate often in the drying box 13 from the high-purity nitrogen of Purge gas feed path 124, inner moisture concentration is fixed.
If comparison diagram 2 and Fig. 3, the discharge rate of hydrone sharply rises before welcoming peak value in heating beginning back in about 15 minutes, descends lentamente during keeping 1200 ℃ then.In addition, adding the hydrone discharge rate of pining for only has a side of nitrogen less, and a side of the hydrone discharge rate nitrogen hydrogen mixeding gas after heating stops is less.
Stop (subduing) to hydrone discharge rate from heating and reach 2 * 10s17s[/min] time of level, nitrogen hydrogen mixeding gas is fast more than 10 minutes as can be known, can shorten the needed time of purified treatment.In addition, because the heat-conduction coefficient of hydrogen is compared big about 10 times with nitrogen, even identical hot-wire temperature, the temperature of reactor wall and peripheral thin is that a side of nitrogen hydrogen mixeding gas is high, because the amount of moisture that breaks away from increases, the hydrone sum of discharging in the mensuration during 100 minutes is 3.94 * 10 under the situation that nitrogen is only arranged
20[individual], and under the situation of nitrogen hydrogen mixeding gas, increase to 8.20 * 10
20[individual].In other words,, improve the heat-conduction coefficient of Purge gas, obviously can improve the efficient of curing purification by the high hydrogen of heat-conduction coefficient is blended in the Purge gas.Even use and the same high helium of heat-conduction coefficient of hydrogen, also can obtain same result.
Secondly, confirm to use simultaneously the experiment of repeating effect of the batch purification of vacuum purification.With above-mentioned the same, after purifying moisture concentration in exhaust gas and reaching below the 0.1ppm, the door between reactor 112 and the drying box 113 was opened 15 minutes.When 0 batch purification, closing behind the door, make reactor 112 be in the state of 24 liters of nitrogen of per minute circulation under the normal temperature, measure the moisture concentration in the exhaust gas.
When a batch purification, closing behind the door describedly, stop the supply of nitrogen, carry out vacuum exhaust, reach 6.65Pa until reactor 112 inside, then, the nitrogen that the per minute circulation is 24 liters is measured the moisture concentration in the exhaust gas.Under the situation of twice batch purification, after vacuumizing for the first time, reactor 112 is imported nitrogen, until reaching atmospheric pressure, carry out sealing in 10 minutes and interrupt, carry out then vacuumizing the second time.That is, by door open and close, vacuumize, nitrogen imports, keep under the atmospheric pressure, vacuumize, nitrogen imports and the order of circulation is carried out.
Fig. 4 represents closing in the described door point to start with, the variation of the moisture concentration separately when 0 batch purification, a batch purification, twice batch purification.As shown in Figure 4, even consider to vacuumize the needed time,, also can shorten purified treatment (dry decline) the needed time by carrying out batch purification.In addition, and once compare, by twice repetition, obviously its effect is big.
At this moment, by measuring amount of moisture continuously with moisture meter 141, when twice repeated batch purifies, through about 110 minutes the time, owing to can know that the amount of moisture in the exhaust gas reaches below the 0.1ppm, so can begin common film generating run in this moment.In addition, though because of the use experience of CVD device so under situation about there are differences on the clean-up effect owing to can know the end of purified treatment definitely, thus can be almost not in the past give up film (The て エ ピ).
B. the maintenance determination methods in period of semiconductor-fabricating device
Below, an embodiment of the maintenance determination methods in period of semiconductor-fabricating device of the present invention is described with reference to Fig. 5 to Fig. 7.
In these figure, symbol 1 expression process chamber, 2 expression conveying rooms, load locking room is sent in 3 expressions, and load locking room is sent in 4 expressions, 5 expression moisture monitoring arrangements.
Fig. 5 is the figure that represents for example to use semiconductor-fabricating device situation of the present invention in the epitaxial crystallization grower of piece leaf formula.This epitaxial crystallization grower as shown in Figure 5, has: the process chamber (reaction chamber) 1 of three quartzy systems is the hollow gas-tight containers at internal configurations silicon chip (substrate) W; Conveying room 2 carries out the displacement of atmosphere at the confined space of inside when silicon chip W being sent in these process chambers 1; Send into load locking room 3, the silicon chip W before handling is sent into this conveying room 2; With send load locking room 4, the silicon chip W after from conveying room 2, take out handling.
In described chambers 1, being provided with the moisture meter that is used to handle that sampling imports the gas of this process chamber 1 and monitor the moisture that comprises in the gas with and the pressure gauge 7 of monitoring process chamber 1 internal pressure.
In addition, even in conveying room 2, the system that the transports moisture meter 6 of moisture in the monitoring internal atmosphere is set also.This transports system's moisture meter 6, for example wishing it is the laser moisture meter identical with the good following laser moisture meter of precision and response speed 10, also can be that adsorption moisture in the aluminium oxide capacitor etc. is with the moisture meter of the static capacity mode of the variation of monitoring its electric capacity with adopt the moisture meter etc. of mass analysis.
Described process chamber 1 is connected with gas supply sources (omitting among the figure) such as corrosive gass, can import the gas (SiCl from this gas supply source
2H
2, SiCl
3H, HCl, H
2, N
2, B
2H
6, PH
3Deng), by the gas exhaust system, can be connected with exhaust gas treatment facility (figure part omitted), in process chamber 1 with corrosive gas behind the supply response etc. to the exhaust of exhaust gas treatment facility.
As shown in Figure 6, the described moisture meter that is used to handle 5 has: sampling pipe arrangement 9, and by the gas exhaust system and the valve (figure part omitted) of process chamber 1, the one end connects sample conduit; The moisture that comprises in the moisture meter body 10, monitoring and corrosive gas that the other end of this sampling pipe arrangement 9 is connected from process chamber 1; With rotary pump 12, be connected by the rear end of connecting pipe 11 with this moisture meter body 10.
Described moisture meter body 10 is provided with tubular units body 19 in framework 10a, be connected with sampling pipe arrangement 9 with regard to this tubular units body 19, is distolateral, and another distolaterally is connected with connecting pipe 11.Tubular units body 19 is installed light transmission window material 19a at two ends, the outside at a light transmission window material 19a, the wavelength variable semiconductor laser LD that produces infrared laser L (wavelength 1.3～1.55 μ m) is provided with opposed to each other, in the outside of another light transmission window material 19a, receive the infrared laser L that sees through in the tubular units body 19 and also this photodetector PD that is subjected to light intensity to be transformed into electric signal is provided with opposed to each other.
Have again, on described sampling pipe arrangement 9 and described connecting pipe 11, the banded heated filament 20 of reeling and being connected with current supply source (figure part omitted), and, the thermal insulation material 21 of the silicone rubber of reeling thereon.Have, banded heated filament 20 is such parts again, adjusts the electric current that flows, and sampling pipe arrangement 9 and connecting pipe 11 are heated to more than 100 ℃, can suppress adhering to of these pipe arrangements secondary growth-gen of interior reaction.
In addition, in the pipe arrangement tube body 19 and light transmission window material 19a of moisture meter 10, the pipe use heated filament 22 based on the resistance wire that heats them is installed also, is heated to more than 100 ℃.And moisture meter 10 carries out adjustment and the correction that it measures sensitivity in advance according to the temperature of utilizing banded heated filament 20 and pipe to use heated filament 22 to be heated to the gas more than 100 ℃.
Below, use Fig. 7 that the maintenance determination methods in period of the epitaxial crystallization grower of present embodiment is described.
At first,, so silicon chip W is sent in the conveying room 2 from sending into load locking room 3, the atmosphere in the conveying room 2 is replaced as N if explanation uses above-mentioned grower to carry out epitaxially grown operation on silicon chip W
2Deng inert gas,, after confirming to reach the state that moisture fully reduces, silicon chip W is transported in the process chamber 1 simultaneously with the moisture that transports in system's moisture meter 6 monitoring atmosphere.
In process chamber 1, before processing, be in N
2Deng the purification state of inert gas, but after disposing the silicon chip W that sends into from conveying room 2 and being heated to predetermined temperature, import predetermined corrosive gas, on the surface of silicon chip W, carry out epitaxial growth.At this moment, driven in rotation pump 12 is opened the valve of sampling pipe arrangement 9 etc. simultaneously, Yi Bian adjust influx, Yi Bian a part of corrosive gas that has heated of supply response in the process chamber 1 is imported moisture meter body 10 often by sampling pipe arrangement 9.
The gas stream that is sampled is gone in the tubular units body 19 in the moisture meter body 10, by the infrared laser L irradiation from semiconductor laser LD.The infrared laser L that sees through gases in the tubular units body 19 is received by photodetector PD, monitors moisture concentration in the gas according to the absorption spectrum intensity that is obtained by this quantities received, carries out the quantitative test of the moisture that comprises in the gas.Have, the gas that flows into tubulose cell body 19 is discharged to exhaust system by connecting pipe 11, rotary pump 12 again.In addition, the pressure in the process chamber 1 is often monitored by pressure gauge 7.
After epitaxial growth finishes, process chamber 1 inside is replaced with inert gas, and, by conveying room 2 from sending the silicon chip W after load locking room 4 transports processing.
Repeat above-mentioned processing, on many pieces of silicon chip W, carry out epitaxial growth successively, but as shown in Figure 7, often monitor the moisture concentration of process chamber 1 at this moment by the moisture meter 5 that is used to handle, write down this process.Have again, in Fig. 7, in one piece of film forming is handled, detect the peak value of moisture concentration size, but small leak is the moisture concentration in the actual film forming, and big peak value is the moisture concentration when utilizing the indoor polysilicon of paying of HCl (hydrogen chloride) corrosion treatment.
By Fig. 7 also as can be known, each increasing when handling piece number, moisture concentration slowly diminishes.Because it is suitable with the amount of moisture of reactions such as process chamber 1 interior actual supply corrosion that enters and particulate that the reduction of this moisture is considered to, so variation (minimizing of moisture concentration) according to this moisture concentration, calculate the cumulative amount that enters in the process chamber 1, decide next maintenance period according to this cumulative amount since the moisture of last time maintenance.In other words, from the variation of moisture concentration of monitoring, infer the passing of moisture cumulative amount, as setting period as the maintenance of next time the period of predetermined cumulative amount, in the actual moment that reaches predetermined cumulative amount of the moisture cumulative amount of calculating, maintain simultaneously by the variation of moisture concentration.Have again, preestablish the maximum piece number of handling according to other factors (the secondary growth-gen Fu Zhe in the pipe arrangement etc.), handling a piece number with this maximum compares, reach under the situation of above-mentioned predetermined cumulative amount period before expectation, carry out above-mentioned maintenance, but low at moisture concentration, handle piece number period late situation under than reaching this maximum the period that reaches predetermined cumulative amount, in case reach the moment of maximum processing piece number and just maintain.
In the present embodiment, owing to decide maintenance period, so the actual amount of moisture that enters in the prediction processing chamber 1 exactly can maintain in suitable period according to the moisture cumulative amount of calculating according to the variation of moisture concentration.Therefore,, can determine the maintenance period of next time, can often keep good film forming and handle, can reduce the maintenance number of times simultaneously and prolong maintenance period, can boost productivity according to actual moisture inlets different in each maintenance.
In addition, pressure in the process chamber 1 is also the same with moisture concentration, owing to utilize pressure gauge 7 often to monitor, so circulation status that can detected gas exhaust system pipe arrangement (for example, because of generating paying of subsidiary reaction thing, pressure variations in the process chamber 1 that produces in the obturation of pipe arrangement etc.), cumulative amount by considering above-mentioned moisture simultaneously and above-mentioned pressure change and estimate maintenance period can determine more suitably to maintain period.Have, in the cumulative amount of above-mentioned moisture and above-mentioned pressure changed, also the data of the defective products incidence when relatively making waited the maintenance period of estimating next time, can determine more suitably to maintain period again.
Have again, owing to the moisture concentration and the pressure of often monitoring in the process chamber 1, so under it changes with respect to the situation about being inclined to that shows abnormality usually,, can directly carry out this causal investigation and maintain operation according to this situation.
In addition, as the moisture concentration pick-up unit, owing to adopt above-mentioned laser moisture meter, so, can determine maintenance period accurately even in processing, also can measure moisture concentration in the process chamber 1 exactly at the moisture meter that is used for handling 5.
Have again, the present invention includes following examples.
In the above-described embodiments,, adopted and carried out epitaxially grown epitaxially growing equipment, but if the device that corrosive gas is reacted also can be applied to other semiconductor-fabricating device as semiconductor-fabricating device.For example, can adopt the dry corrosion device etc. that other film is formed on on-chip CVD device and uses corrosive gas corrosion substrate surface.
In addition, in the above-described embodiments, adopt the epitaxial growth device of piece leaf formula, but be not limited to this, also can adopt alternate manner (various batch mode etc.).
C. moisture monitoring arrangement and have the semiconductor-fabricating device of this device
Below, with reference to Fig. 8 to Figure 10 a moisture monitoring arrangement of the present invention and an embodiment who has the semiconductor-fabricating device of this device are described.
In these figure, symbol 1 expression process chamber, 2 expression conveying rooms, load locking room is sent in 3 expressions, and load locking room is sent in 4 expressions, 25 expression moisture monitoring arrangements.
Fig. 8 is the figure that represents for example to use semiconductor-fabricating device situation of the present invention in the epitaxial crystallization grower of piece leaf formula.This epitaxial crystallization grower as shown in Figure 8, has: the process chamber (reaction chamber) 1 of three quartzy systems is the hollow gas-tight containers at internal configurations silicon chip (substrate) W; Conveying room (substrate transports system) 2, the confined space in inside when silicon chip W being sent in these process chambers 1 carry out the atmosphere displacement; Send into load locking room 3, the silicon chip W before handling is sent into this conveying room 2; With send load locking room 4, the silicon chip W after from conveying room 2, take out handling.
In described chambers 1, be provided with the moisture monitoring arrangement 25 that sampling imports the corrosive gas of this process chamber 1 and monitors the moisture that comprises in the corrosive gas.
In addition, even in conveying room 2, the system that the transports moisture meter 6 of moisture in the monitoring internal atmosphere is set also.This transports system's moisture meter 6, for example wishing it is the laser moisture meter identical with the good following laser moisture meter of precision and response speed 10, also can be that adsorption moisture in aluminium oxide, the capacitor etc. is with the moisture meter of the static capacity mode of the variation of monitoring its electric capacity with adopt the moisture meter etc. of mass analysis.
In described process chamber 1, as shown in Figure 9, be used for importing gas (SiCl from gas supply sources (figure omits) such as corrosive gass
2H
2, SiCl
3H, HCl, H
2, N
2, B
2H
6, PH
3Deng) processing gas introduction tube 27 and process chamber 1 in behind supply response, the processing gas exhaust pipe 28 to exhaust gas treatment device (figure part omitted) exhaust such as corrosive gas is connected.
Described moisture monitoring arrangement 2 has: sampling pipe arrangement 9, and a distolateral front by processing gas exhaust pipe 28 that has valve 9a connects sampling process chamber 1; Laser moisture meter 10 is monitored the moisture that comprises in the corrosive gas from process chamber 1 of the other end by vario valve 9b connection of this sampling pipe arrangement 9; With rotary pump 12, connect the rear end of this laser moisture meter 10 with connecting pipe by vario valve 11a.
In the front of described sampling pipe arrangement 9, connect sample conduit N by valve 13a
2Purify the pipe arrangement purge conduits 13 of usefulness, in addition, handle gas introduction tube 27 and be connected with pipe arrangement purge conduits 13 with take-off pipe 14 by valve 14a.Have, pipe arrangement purge conduits 13 has and compares the valve 13b that is in the upper reaches with the coupling part of take-off pipe 14 again.
In described laser moisture meter 10, as Fig. 9 and shown in Figure 10, this framework 10a inner with carry out N
2The framework purge conduits 15 that purifies connects, simultaneously in order to discharge this N
2, connected its other end and handled the N that gas exhaust pipe 28 is connected
2 Exhaust manifolds 16.
Have, described rotary pump 12 comes connection processing gas exhaust pipe 28 by valve 17a with sampling gas outlet 17 again.In addition, the N of rotary pump 12 and gas balancing machine use
2Purge conduits 18 connects.
As shown in figure 10, described laser moisture meter 10 is provided with tubular units body 19 in framework 10a, and in this tubular units body 19, an end connects sampling pipe arrangement 9, and the other end is connected with connecting pipe 11.Tubular units body 19 is installed light transmission window material 19a at two ends, the outside at a light transmission window material 19a, the wavelength variable semiconductor laser LD that produces infrared laser L (wavelength 1.3～1.55 μ m) is provided with opposed to each other, in the outside of another light transmission window material 19a, reception is provided with opposed to each other through the photodetector PD that the infrared laser L in the tubular units body 19 also are transformed into this receiving light power degree electric signal.
On described sampling pipe arrangement 9 and described connecting pipe 11, the banded heated filament of reeling (pipe arrangement heating arrangements, resistance wire) 20, and, the thermal insulation material 21 of the silicone rubber of reeling thereon.Have, banded heated filament 20 is connected with not shown current supply source again.Then, adjust the electric current that flows in the banded heated filament 20, sampling pipe arrangement 9 and connecting pipe 11 are heated to about 100 ℃.
In addition, in the pipe arrangement tube body 19 and light transmission window material of laser moisture meter 10, the unit use heated filament (unit heating arrangements) 22 based on the resistance wire that heats them is installed also, is heated to 100 ℃.
And laser moisture meter 10 carries out adjustment and the correction that it measures sensitivity in advance according to the temperature of utilizing banded heated filament 20 and pipe to use heated filament 22 to be heated to 100 ℃ corrosive gas.
Below, the moisture method for monitoring in the epitaxial crystallization growth of an embodiment of the semiconductor-fabricating device that has moisture monitoring arrangement of the present invention is described.
At first, be transported in the conveying room 2 from carrying load lock chamber 3 carrying out epitaxially grown silicon chip W, the atmosphere in the conveying room 2 is replaced as N
2Deng inert gas.At this moment, monitor moisture in the atmosphere, after confirming to reach the state that moisture fully reduces, silicon chip W is transported in the process chamber 1 by transporting system's moisture meter 6.
In the process chamber 1, before processing, though use N
2Reach the purification state Deng inert gas, but after the silicon chip W that configuration is transported from conveying room 2 is heated to predetermined temperature, shut-off valve 13a, 13b, 14a utilize and handle the predetermined corrosive gas of gas introduction tube 27 importings etc., carry out epitaxial growth on the surface of silicon chip W.At this moment, open valve 9a, 17a, simultaneously the driven in rotation pump 12, and adjust influx with vario valve 9b, 11a on one side, in process chamber 1 by sample pipe arrangement 9 pair laser moisture meters 10 often import a part of corrosive gas of the heating of supply response on one side.
In the tubular units body 19 in the corrosive gas inflow laser moisture meter 10 that is sampled, by infrared laser L irradiation from semiconductor laser LD.The infrared laser L that sees through tubular units body 19 internal corrosion gases is received by photodetector PD, according to the absorption spectrum intensity that is obtained by this reception light quantity, can carry out the quantitative test of the moisture that comprises in the corrosive gas.
The corrosive gas that flows into tubulose cell body 19 is discharged to handling gas exhaust pipe 28 by connecting pipe 11, rotary pump 12 and sampling gas outlet 17.
In the present embodiment, owing to not only have laser moisture meter 10, and in sample pipe arrangement 9 and connecting pipe 11, also have the banded heated filament 20 that heats them, so can heat sampling pipe arrangement 9 and connecting pipe 11 to reach the condition of high temperature about 100 ℃, can suppress the subsidiary reaction of the pipe arrangement inside of the corrosive gas of heating in the process chamber 1, prevent to react secondary growth-gen and can stop up pipe arrangement.Therefore, can monitor moisture at ordinary times in the original place.
And, because laser moisture meter 10 carries out adjustment and the correction that it measures sensitivity in advance according to the temperature that is heated to the corrosive gas about 100 ℃, even so the corrosive gas of high temperature also can be measured moisture concentration accurately by appropriate sensitivity.Have again, for example measure the adjustment and the correction of sensitivity from the signal of photodetector PD by calculation process in the control section (omitting among the figure) that is connected with photodetector PD.
In addition, because conveying room 2 also has the system that the transports moisture meter 6 of the inner confined space moisture of monitoring except laser moisture meter 10, so when silicon chip W being sent into process chamber 1 by conveying room 2, can measure the moisture of confirming in the conveying room 2, can prevent that the moisture in the conveying room 2 from can flow into process chamber 1 in careless.
Have again, the present invention includes following examples.
In the above-described embodiments,, be applied to carry out epitaxially grown epitaxially growing equipment, but so long as the device that on the substrate of reaction chamber corrosive gas is reacted also can be applied to other semiconductor-fabricating device as semiconductor-fabricating device.For example, can be applied to that other film is formed on on-chip CVD device and use the dry corrosion device etc. of corrosive gas corrosion substrate surface.
In addition, in the above-described embodiments, adopt the epitaxial growth device of piece leaf formula, but be not limited to this, also can adopt alternate manner (various batch mode etc.).
And, before processing, in each pipe arrangement and process chamber, carry out N
2After the purification, import corrosive gas as reacting gas, but also can be at sufficient N
2After the purification, purify again, import the corrosive gas that growth is provided then with HCl (hydrogen chloride).In this case, the moisture that adsorbs on the inwall of each pipe arrangement and process chamber combines with the HCl molecule and is sent, and can reduce the moisture that enters in the corrosive gas of supplying with afterwards.
Claims (4)
1. the maintenance determination methods in period of a semiconductor-fabricating device, wherein, the maintenance period of the semiconductor-fabricating device of corrosive gas processing is carried out in judgement in reaction chamber (1), it is characterized in that, carrying out described corrosive gas when handling, come moisture concentration in the monitoring reaction chamber (1) with the moisture meter (5) that is connected with described reaction chamber (1), the variation of the described moisture concentration when repeating corrosive gas and handle decides described maintenance period.
2. the maintenance determination methods in period of semiconductor-fabricating device as claimed in claim 1, it is characterized in that, according to the variation of described moisture concentration, calculate the cumulative amount that enters in the described reaction chamber (1) since the moisture of last time maintenance, decide described maintenance period according to this cumulative amount.
3. the maintenance determination methods in period of semiconductor-fabricating device as claimed in claim 2, it is characterized in that, carrying out described corrosive gas when handling, come pressure in the monitoring reaction chamber (1) with the pressure gauge (7) that is connected with described reaction chamber (1), the described pressure when repeating corrosive gas and handle changes and the cumulative amount of described moisture decides described maintenance period.
4. the maintenance determination methods in period of semiconductor-fabricating device as claimed in claim 1, it is characterized in that, described moisture meter (5) is the laser moisture meter, and this moisture meter is measured the interior and laser absorption spectrum of the laser that sees through of the tubular units body (19) that laser is incided is connected with described reaction chamber (1).
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24624099 | 1999-08-31 | ||
| JP246240/99 | 1999-08-31 | ||
| JP52516/00 | 2000-02-28 | ||
| JP52555/00 | 2000-02-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101028237A Division CN1282764C (en) | 1999-08-31 | 2000-08-31 | Purifying metod and chemical vapour-phase deposition deivce |
Publications (2)
| Publication Number | Publication Date |
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| CN1854715A CN1854715A (en) | 2006-11-01 |
| CN100514034C true CN100514034C (en) | 2009-07-15 |
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|---|---|---|---|
| CNB2005100846976A Expired - Fee Related CN100514034C (en) | 1999-08-31 | 2000-08-31 | Method for judging maintenance of times of semiconductor production apparatuses |
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| CN105510228A (en) * | 2014-10-10 | 2016-04-20 | 中国科学院大连化学物理研究所 | Sample cell with purifying function for observing fluorescence spectrum of liquid oxygen |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5328872A (en) * | 1989-12-29 | 1994-07-12 | At&T Bell Laboratories | Method of integrated circuit manufacturing using deposited oxide |
| CN1167914A (en) * | 1995-10-10 | 1997-12-17 | 液体空气乔治洛德方法利用和研究有限公司 | Polygonal planar multipass cell, system and apparatus including same, and method of use |
-
2000
- 2000-08-31 CN CNB2005100846976A patent/CN100514034C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5328872A (en) * | 1989-12-29 | 1994-07-12 | At&T Bell Laboratories | Method of integrated circuit manufacturing using deposited oxide |
| CN1167914A (en) * | 1995-10-10 | 1997-12-17 | 液体空气乔治洛德方法利用和研究有限公司 | Polygonal planar multipass cell, system and apparatus including same, and method of use |
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| CN1854715A (en) | 2006-11-01 |
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