CN100511620C - Equipment alarm and interlocking treatment method - Google Patents
Equipment alarm and interlocking treatment method Download PDFInfo
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- CN100511620C CN100511620C CNB2005101262962A CN200510126296A CN100511620C CN 100511620 C CN100511620 C CN 100511620C CN B2005101262962 A CNB2005101262962 A CN B2005101262962A CN 200510126296 A CN200510126296 A CN 200510126296A CN 100511620 C CN100511620 C CN 100511620C
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The present invented method contains: 1, assigning all system interlocking with unified interlocking identifying number and all alarm with unified identifying number; 2, establishing unique interlocking-alarm mapping relation in system; 3, querying whether interlocking condition be from system work flow is satisfy; 4, when interlocking condition is satisfy through interlocking-alarm mapping relation querying alarm identifying number corresponding with said interlocking identifying number and alarming, to proceed relevant alarm processing; 5, waiting alarm processing complete and feeding back system work flow. The present invented method can effectively raise semiconductor technology treating plant control software efficiency in processing interlocking and alarm, convenient updating, raising systematical maintainability.
Description
Technical field
The present invention relates to alarm processing method, the method for special semiconductor fabrication process equipment alarm and interlock process.
Background technology
The modern semiconductors manufacturing process relates to multi-disciplinary crossing domain, and most PROCESS FOR TREATMENT all need be in severe rugged environment condition very, and as certain vacuum degree, temperature or the like just can be carried out down.Therefore in the control logic of semiconductor equipment, be greatly about the processing of warning with interlocking.Theoretically, the warning in the Equipment Control logic is the prompting for some abnormal conditions, and suitable option is provided can for next step operation of user.Interlocking is the qualification for some specified conditions, according to predefined processing logic, generally can be divided into setup parameter interlocking and value interlocking.The setup parameter interlocking guarantees just can set certain value under the prerequisite that a series of conditions all satisfy; Value interlocking then is after the value of certain triggering variable reaches preset value, takes certain corrective action, and the assurance system is under the safe state all the time.In the Equipment Control field, the interlocking condition is generally used for the particular job condition of initialization system, guarantees the safe condition and the operate as normal of equipment, and alarm mechanism then provides corresponding abnormal information for the operator, and provides contact unusual a series of options.The a big chunk in Equipment Control field is reported to the police all directly related with the interlocking condition, therefore the interlocking condition of device interior is carried out association process with the processing of reporting to the police, and is an important content realizing semiconductor equipment control.
In semiconductor technology treatment facility control field, be as shown in Figure 1 at present for the processing mode of reporting to the police and interlocking is at present comparatively general.
In the operational process logic of equipment, exist judgement to warning and interlocking condition, if some alert if satisfies, then dish out and report to the police accordingly, and handle accordingly according to user's selection, continue to judge alert if after pending the finishing, if remove, then proceed flow process.Judgement for the interlocking condition is similar with warning, and its difference is the interlocking condition in case satisfy, and is carrying out necessary interlock process simultaneously, and the generation of specific interlocking judgement and the warning message among the processing logic is corresponding reports to the police according to being present in.Like this, the user can learn the link that interlocking takes place, and takes corresponding recovery measure.
The shortcoming of technique scheme is, in specific interlock process logic inside, need specify warning message associated therewith one by one, and waits for the return results of reporting to the police and handling.Because the control logic of semiconductor technology treatment facility can relate to comparatively complicated warning and interlocking usually; and identical or close interlocking and warning that trooping (Cluster Tool), the developing direction of modularization (Modularization) also require the Equipment Control logic be able to handle gradually and come from a plurality of technological reaction modules are handled.To make the maintenance of the software program of being realized according to the prior art scheme become very difficult like this, also be unfavorable for the upgrading and the renewal of subsequent software.
Summary of the invention
Goal of the invention
The maintenance that the purpose of this invention is to provide a kind of software program easily, the upgrading of subsequent software and interlocking and the alarm processing method that upgrades a kind of easily semiconductor technology treatment facility.
Technical scheme
A kind of equipment alarm and interlocking treatment method may further comprise the steps:
A. give unified interlocking identifier with all interlockings in the control system of equipment, give unified warning identifier All Alerts;
B. set up interlocking identifier unique in the control system-warning identifier mapping relations table;
Whether C. inquire about the interlocking condition that comes from the control system workflow satisfies;
D. when the interlocking condition satisfies, by interlocking identifier-inquiry of warning identifier mapping relations table and the corresponding warning identifier of this interlocking identifier and this warning of dishing out, the processing of reporting to the police accordingly;
E. the control system workflow is finished and returned to the process of wait warning processing.
Wherein, the interlocking identifier-warning identifier mapping relations table described in the automatic step of updating B in the each compilation process of software systems.
Wherein, the control system identifier of the interlocking described in the step of updating B-warning identifier mapping relations table at any time.
Beneficial effect
Use method of the present invention, can improve the efficient of Control Software aspect processing interlocking and warning of semiconductor technology treatment facility effectively, promote the maintainable of software systems dramatically and make things convenient for the upgrading of system and the maintainability of renewal raising system, make things convenient for the upgrading and the renewal of software.Particularly need handle situation from the identical or similar interlocking condition of a plurality of modules at the semiconductor technology treatment facility, this scheme is the operating efficiency of elevator system effectively.
Description of drawings
Existing interlocking of Fig. 1 and warning processing mode schematic flow sheet
Fig. 2 interlocking of the present invention and warning processing mode schematic flow sheet
Embodiment
Following examples are used to illustrate the present invention; but be not used for limiting the scope of the invention; the those of ordinary skill in relevant technologies field; under the situation that does not break away from the spirit and scope of the present invention; can also make various variations and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be limited by every claim.
Whether in the control system of semiconductor vacuum treatment facility, the need of work of system carries out under vacuum condition, for this reason, need the operating pressure of continuous detection system to satisfy pre-conditioned.The operating pressure that for example pre-defines chamber is less than 50mtorr, in case the pressure that detects system in system work process is greater than 50mtorr, the then current action of halt system, and send warning, prompting operation person operates accordingly, as open the vacuum pump valve, reduce to below the 50mtorr up to system pressure.
The warning of above-mentioned semiconductor vacuum treatment facility and interlocking treatment method, concrete steps are as follows:
With all interlockings in the system and report to the police and to give unified interlocking identifier Interlock ID and warning identifier Alarm ID respectively as its attribute variable: in case the pressure of promptly giving the system that in system work process, detects greater than 50mtorr then Interlock ID of the interlocking condition of the current action of halt system is 205, giving the warning identifier of being correlated with is 3001.
Set up unique interlocking-warning mapping relations table, 205 and 3001 corresponding relation such as following table be set in the mapping relations table:
| Interlock?ID | Alarm?ID |
| 101 | 1001 |
| 102 | 1002 |
| ... | ... |
| 205 | 3001 |
| 206 | 3003 |
| ... | ... |
Whether starting independently, whether the continuous interlocking condition that comes from the system works flow process of inquiring about of thread satisfies: that is to say to exist independent interlocking condition to detect thread (Interlock ServerThread) in the system, be used for detecting at any time predefined interlocking condition (comprising 205) and satisfy.
When the interlocking condition satisfies, answer inquiry of firing table processing threads and the corresponding warning identifier of this interlocking identifier, this warning of dishing out, and the processing of reporting to the police accordingly: in case interlocking condition 205 satisfies, then return corresponding interlocking condition numbering 205, system at first blocks the current service of carrying out, and the system of assurance is in a safe condition.From interlocking and warning mapping relations table, inquire the warning of the numbering 3001 of interlocking 205 mappings subsequently, 3001 warnings of dishing out then, and carry out the processing relevant with this warning.
The end of waiting to report to the police and handling, alert if is returned workflow after removing: if the operator has selected suitable recovery option, make system pressure return to below the 50mtorr, then this moment at first alert if be eliminated, then the return value of interlocking detection thread becomes 0 again, and the service that gets clogged can continue to carry out downwards.
When needing increase system interlocking condition, except rewriting interlocking condition detects thread, and increase outside the corresponding processing of reporting to the police, as long as in above-mentioned mapping table, increase mapping relations.
Claims (3)
1, a kind of equipment alarm and interlocking treatment method is characterized in that, may further comprise the steps:
A. give unified interlocking identifier with all interlockings in the control system of equipment, give unified warning identifier All Alerts;
B. set up interlocking identifier unique in the control system-warning identifier mapping relations table;
Whether C. inquire about the interlocking condition that comes from the control system workflow satisfies;
D. when the interlocking condition satisfies, by interlocking identifier-inquiry of warning identifier mapping relations table and the corresponding warning identifier of this interlocking identifier and this warning of dishing out, the processing of reporting to the police accordingly;
E. the control system workflow is finished and returned to the process of wait warning processing.
2, equipment alarm as claimed in claim 1 and interlocking treatment method is characterized in that, the interlocking identifier-warning identifier mapping relations table described in the automatic step of updating B in the each compilation process of software systems.
3, equipment alarm as claimed in claim 1 and interlocking treatment method is characterized in that, control system is the identifier of the interlocking described in the step of updating B-warning identifier mapping relations table at any time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101262962A CN100511620C (en) | 2005-12-05 | 2005-12-05 | Equipment alarm and interlocking treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101262962A CN100511620C (en) | 2005-12-05 | 2005-12-05 | Equipment alarm and interlocking treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1851593A CN1851593A (en) | 2006-10-25 |
| CN100511620C true CN100511620C (en) | 2009-07-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005101262962A Active CN100511620C (en) | 2005-12-05 | 2005-12-05 | Equipment alarm and interlocking treatment method |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104073784B (en) * | 2013-03-27 | 2016-08-10 | 北京北方微电子基地设备工艺研究中心有限责任公司 | The interlock control method of MOCVD device and system |
| CN103219258B (en) * | 2013-04-03 | 2015-11-25 | 无锡华润上华科技有限公司 | Wafer defect sampling Detection system and method thereof |
| CN105446274B (en) * | 2014-08-12 | 2018-05-25 | 北京北方华创微电子装备有限公司 | The monitoring method and system of a kind of semiconductor processing equipment |
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Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |