CN100491970C - Infrared heat wave detecting system with THZ wave as light source - Google Patents
Infrared heat wave detecting system with THZ wave as light source Download PDFInfo
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- CN100491970C CN100491970C CNB031287611A CN03128761A CN100491970C CN 100491970 C CN100491970 C CN 100491970C CN B031287611 A CNB031287611 A CN B031287611A CN 03128761 A CN03128761 A CN 03128761A CN 100491970 C CN100491970 C CN 100491970C
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Abstract
The present invention relates to one new kind of thermal wave detecting system. It adopts THz wave as heat source for heating object; thermal imaging instrument to monitor the varying temperature field in the surface of the sample and detect the phase relation between the variance in the temperature field and the heat source applies the THz wave; synchronous or time sequence controller to control the emission of the THz wave and the detection of thermal imaging instrument; and computer for thermal wave transmission calculating processing and data fitting, so as to obtain the inner fault and heterogeneity information from the temperature field variation.
Description
Technical field
The present invention relates to nondestructive examination detection technique field, relate in particular to method and instrument that infrared thermal wave detects.
Background technology
The infrared thermal wave nondestructive testing technique all has report in many documents, it is the thermal excitation by special pattern, adopt modern infrared imagery technique, and under computer control, carry out sequential heat wave acquisition of signal and data acquisition, the dedicated computer software that use is developed according to heat wave theoretical model and modern Flame Image Process theoretical model carries out realtime graphic signal Processing and analysis, obtain the digital tomographic map of interior of articles, thereby can carry out the quantitative Diagnosis of three-dimensional visualization to interior of articles defective or damage in engineering site and outfield.
The scope that the infrared thermal wave nondestructive testing technique is used is very extensive, for example: in Aeronautics and Astronautics, the military industry field to the safety detection of aircraft, in the various industrial manufacturings to the monitoring of product quality, monitoring to the equipment operation situation, load in the research and development of products process or destructive test after to the assessment of product, searching surface and subsurface crackle, metal fatigue degree assessment, various bonding, welding, coating quality detect or the like.
A core of infrared thermal wave nondestructive testing technique is to select the thermal source of different qualities test specimen to be carried out the heating of functional forms such as cycle, pulse, direct current at all kinds of test specimens.
Adopt LASER Light Source that object is heated at present mostly, as US4950897, US4874251 etc.
Adopt ultrasound wave that defect part is heated among the US6236049, and with the temperature on infrared imagery technique inspected object surface, ultrasound wave only heats rejected region, and do not have the part of defective to heat hardly for other, therefore the signal of thermal imaging gained is very strong, to such an extent as to the surface need not cover radiating matter, and it has higher sensitivity, can detect littler crack, perhaps closed, vertical fully crack.
When other member is detected diagnosis, different thermal excitation modes be can select as the case may be for use, ultrasonic, microwave, visible light, induction, electric current, gas, liquid, mechanical vibration heating etc. comprised.
The THz ripple is commonly referred to as wavelength, and (～100GHz-10THz) the electromagnetic radiation in interval, its wave band is between microwave and infrared light at 3.3mm-33 μ m.Effectively produce and detection method owing to lack always, people are very limited to the understanding of this wave band electromagnetic radiation character, so that this wave band is called as " THz space " in the electromagnetic wave spectrum for a long time.Developing rapidly of ultrafast laser technique in recent ten years for the generation of THz pulse provides stable, excitation source reliably, promoted mechanism research, detection technique and application technology flourish of THz wave radiation.
The THz light-pulse generator is compared the character with a lot of uniquenesses with conventional light source:
(a) typical pulse-widths of THz pulse not only can be carried out the transient state spectral investigation of subpicosecond, femtosecond time resolution in the subpicosecond magnitude, and by the sampling gate measuring technique, can prevent the interference of background radiation noise effectively.At present, the signal to noise ratio (S/N ratio) that the THz intensity of wave is measured can be greater than 10
6
(b) the THz impulse source only comprises the electromagnetic oscillation in several cycles usually, and the frequency band of individual pulse can cover the scope up to tens THz from GHz.
(c) the THz ripple is to produce by the nonlinear optics difference frequency by the dipole vibration generation of relevant current drives or by relevant laser pulse, has very high time and spatial coherence.The amplitude that what is more important, existing measuring technique can obtain each frequency component of its bandwidth covering simultaneously need not to carry out post-processed by means of the Kramers-Kronig relation with the position mutually, and common optical technology can't be accomplished this point.
(d) energy of THz glistening light of waves has only the milli electron-volt, therefore is not easy to destroy detected material.
The THz ripple is as a kind of novel far infrared coherent source, main application at present concentrates on two aspects, be that THz ripple time-domain spectroscopy is analyzed and THz ripple imaging research, possible application comprises THz ripple medical imaging, the THz ripple time-domain spectroscopy of biomolecule conformation is analyzed, unmarked dna molecular is surveyed, THz ripple micro-imaging etc.
Summary of the invention
The present invention relates to a kind of new infrared thermal wave detection system, it adopts the THz ripple as thermal source object to be heated, and uses the variation of thermal imaging system monitoring test specimen surface temperature field and the appearance and the THz ripple thermal source relation that goes up mutually on the throne that is applied of this variation.Wherein adopt synchronously or time schedule controller is controlled the emission of THz ripple and the detection of imager.Utilize computing machine that the data that obtained are carried out heat wave transmission computing and data fitting, from change of temperature field information acquisition material internal defect and the heterogeneity information that obtains.Can see the picture of tested object in monitor, wherein the position of interior of articles defective and corresponding intact position show as the luminance difference on the image.
The present invention is made up of three subsystems: THz ripple light source generation system, and THz ripple irradiation heating system, thermal imaging system, each subsystem realizes collaborative work by light path, in THz ripple irradiation heating system, the THz ripple is as the thermal excitation source.
The producing method in present THz glistening light of waves source has multiple, as free electron laser, Gunn oscillator, photoconduction antenna, electro-optic crystal (optical rectification), gas laser (CO
2) and semiconductor laser.
The imaging of THz ripple realizes by electrooptical effect, laser and THz ripple are passed through electrooptic modulating cell, the THz ripple is as corresponding electric field, laser deflects by electric field, deflection angle contains the information of body surface temperature field sequence, and temperature or thermal characteristic parameter distribution that computer software is extrapolated each layer depth of material according to the dynamic time course and the thermal conduction study model of surface temperature field utilize these result of calculations to do the chromatography digital image reconstruction again, carry out the defective portrayal, display defect figure.
Detection system of the present invention can detect any sample, comprises compound substance, metal, biological sample etc.It can be used for the defective of test sample inside, comprises slight crack, crack, corrosion etc., also can be used for the detection of various films, plated film and be used for crystal impurity detecting.
Adopt the THz ripple to carry out infrared thermal wave as light source and detect, can obtain the amplitude of each frequency component that its bandwidth covers and position simultaneously mutually, therefore, compare with X ray that can only measured intensity, the detection of THz ripple infrared thermal wave has better testing result.
Description of drawings
Fig. 1: the pumping-detection system synoptic diagram that adopts the THz ripple sample to be detected as light source.
Embodiment
With reference to Fig. 1, this infrared thermal wave detection system is with the generation system of THz ripple, the heating system of THz ripple and THz ripple imaging system combine together, send a branch of light-pulse generator by laser instrument 1, wavelength is 800nm, pulsewidth is 30fs, pass polarizer 2, through beam splitter 3 light beam is divided into two bundles, wherein a branch of pump light passes beam splitter 3 and beam splitter 4 is radiated on the crystal 5, and produce the THz ripple of a beam pulse, this bundle THz ripple is through parabolic mirror 6, chopper 7, parabolic mirror 8 is radiated on the sample 9, the THz ripple that reflects on the sample 9 is according to former road then, through parabolic mirror 8, chopper 7, parabolic mirror 6 turns back to crystal 5 and passes crystal 5, and crystal 5 is the ZnTe electro-optic crystal.Another is restrainted by beam splitter 3 detection light reflected by an optical delay circuit of being made up of catoptron 10,11,12, shine on the crystal 5 to beam splitter 4 through beam splitter 13, in crystal 5, be subjected to the modulation of the THz ripple that returns by sample 9 through the detection light of crystal 5 rear surface reflected back, press former road through beam splitter 4, pass beam splitter 13 and reflex to polarizer 15 by catoptron 14, produce signal through photoelectric commutator 16 then, and this signal is transferred in the computing machine by lock-in amplifier handles, finally obtain the image of tested interior of articles.
In the above-mentioned embodiment, crystal 5 also can be selected GaAs, InAs, InP or GaAsP electro-optic crystal for use.
Claims (1)
1. infrared thermal wave detection system that is used to survey various defectives in the object, it is characterized in that: described detection system is made up of three subsystems, THz ripple light source generation system, THz ripple irradiation heating system, thermal imaging system, each subsystem realizes collaborative work by light path, in THz ripple irradiation heating system, the THz ripple is as the thermal excitation source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031287611A CN100491970C (en) | 2003-05-23 | 2003-05-23 | Infrared heat wave detecting system with THZ wave as light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031287611A CN100491970C (en) | 2003-05-23 | 2003-05-23 | Infrared heat wave detecting system with THZ wave as light source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1548943A CN1548943A (en) | 2004-11-24 |
| CN100491970C true CN100491970C (en) | 2009-05-27 |
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| CNB031287611A Expired - Fee Related CN100491970C (en) | 2003-05-23 | 2003-05-23 | Infrared heat wave detecting system with THZ wave as light source |
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Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1749201A1 (en) * | 2004-05-26 | 2007-02-07 | Picometrix, LLC | Terahertz imaging in reflection and transmission mode for luggage and personnel inspection |
| JP5144175B2 (en) * | 2007-08-31 | 2013-02-13 | キヤノン株式会社 | Inspection apparatus and inspection method using electromagnetic waves |
| CA2672378A1 (en) * | 2007-12-06 | 2009-06-11 | Lockheed Martin Corporation | Non-destructive inspection using laser-ultrasound and infrared thermography |
| CN101832940B (en) * | 2010-03-16 | 2012-07-25 | 首都师范大学 | Terahertz polarization real-time imaging method |
| CN102012361A (en) * | 2010-09-26 | 2011-04-13 | 首都师范大学 | Reflection type terahertz spectrum analysis method for eliminating phase error |
| CN101975754A (en) * | 2010-09-26 | 2011-02-16 | 首都师范大学 | Reflective terahertz spectral analysis method capable of eliminating phase error |
| CN103048061B (en) * | 2012-10-29 | 2014-12-17 | 大连理工大学 | Device for detecting transient temperature of divertor graphite tile through reflecting terahertz spectrum technique |
| CN103033282B (en) * | 2012-10-29 | 2014-08-13 | 大连理工大学 | Method detecting instant temperature of graphite tile of partial filter of magnetic confinement fusion device |
| CN103091255B (en) * | 2013-01-15 | 2016-03-30 | 首都师范大学 | Terahertz time-space resolution imaging system, formation method and application thereof |
| GB201303324D0 (en) * | 2013-02-25 | 2013-04-10 | Subterandt Ltd | Passive detection of deformation under coatings |
| CN103245668B (en) * | 2013-04-22 | 2015-03-25 | 南京诺威尔光电***有限公司 | Laser scanning thermal wave imaging method |
| CN111122654B (en) * | 2020-01-14 | 2022-08-12 | 国宏华业投资有限公司 | Double-sided infrared thermal image detection system for crystal surface defects |
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2003
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