CN100489475C - Piezoelectric type hexa-dimensional force sensor - Google Patents

Abstract

The invention relates to a piezoelectricity 6-D force sensor, comprising sensor base seat, cover and piezoelectricity 4-D dynamometer with two opposite working planes fixed in the base seat by force transmission preloading frame. Right Cartesian coordinate is built based on the installing plane of sensor. Installing positions for YOO and X00 cutting piezoelectricity quartz wafer of dynamometer are satisfied with following conditions that the number of wafer is even number; they are distributed round two concentric circles evenly; the sensing axis direction of X00 cutting piezoelectricity quartz wafer is parallel with the Y axis; two Y00 cutting piezoelectricity quartz wafers with the same sensing axis direction and parallel with X axis and Z axis are set in horizontal direction and vertical direction of center of each dynamometer respectively; sensing axes of residual wafers are arranged on circular tangent direction and directions of sensing axes are arranged on the same clockwise direction. The sensor is provided with simple and compact structure, small cubage, no interference between poles. There is no need to carry out decoupling calculation for output signals of sensor to obtain output result.

Description

A kind of piezoelectric type hexa-dimensional force sensor

Technical field

The invention belongs to the piezoelectric sensor technical field, be specifically related to the sensor of the sextuple power of a kind of measurement space.

Background technology

At present, what known six-dimension force sensor extensively adopted is the mode of pasting foil gauge on the elastic body of complexity, obtains sextuple force signal by the output signal of foil gauge is carried out the decoupling zero computing.Processing this class multi-dimension force sensor needs high-precision process equipment, and difficulty of processing is big, is difficult to realize the miniaturization of sensor.Simultaneously, owing to have coupling phenomenon on all directions, need carry out complicated decoupling zero computing to output signal and just can obtain exporting the result.Except adopting the mode of on elastic body, directly pasting foil gauge, Chinese patent CN00119096.2 discloses a kind of thick film technology of utilizing, sintered thick film force sensing resistance on diaphragm, mode by decoupling zero realizes the measuring method to sextuple force signal, though this method has overcome most shortcomings that traditional six-dimension force sensor is pasted the foil gauge mode, but still there is coupling phenomenon on all directions, needs that still the output signal of force sensing resistance is carried out further decoupling zero computing and just can obtain exporting the result.

The three-dimensional force sensor that piezoelectric type is now also arranged adopts quartz wafer as sensitive element, does not need the decoupling zero computing, can directly obtain exporting the result.But this piezoelectric three dimension force transducer can not be realized the six-dimensional space force measurement.

Summary of the invention

The objective of the invention is at the prior art above shortcomings, a kind of simple in structure, direct output type piezoelectric type hexa-dimensional force sensor of need not the decoupling zero computing is provided.

Technical solution of the present invention is as follows:

The piezoelectric type hexa-dimensional force sensor that the present invention proposes comprises sensor base, sensor cover and is fixedly installed in the interior parts such as piezoelectricity dynamometer of sensor base.

Wherein, the piezoelectricity dynamometer adopts the four-dimensional dynamometer of piezoelectricity, and the four-dimensional dynamometer of this piezoelectricity is by Y0 ⁰And X0 ⁰Cut type piezoelectric quartz wafer, insulation locating rack, signal are drawn socket and dynamometer box formation.Y0 ⁰And X0 ⁰Cut type piezoelectric quartz wafer is installed in the pilot hole on the insulation locating rack same plane, and the insulation locating rack is fixed in the dynamometer box.Set up right hand Cartesian coordinates with the mounting plane of sensor, wherein the Z axle perpendicular to the sensor mounting plane upwards, Y-axis to the right, Y0 ⁰And X0 ⁰The installation site of cut type piezoelectric quartz wafer should meet the following conditions: Y0 ⁰Cut type piezoelectric quartz wafer and X0 ⁰Cut type piezoelectric quartz wafer all adopts the even number sheet, is evenly distributed on respectively on two concentric circless; X0 ⁰The sensitive axes direction of cut type piezoelectric quartz wafer is identical and be parallel to Y-axis; Y0 ⁰Cut type piezoelectric quartz wafer should satisfy in the layout on the circumference: will arrange respectively on the horizontal direction of crossing each dynamometer center and vertical direction that two sensitive axes directions are identical and be parallel to the Y0 of X-axis and Z axle respectively ⁰Cut type piezoelectric quartz wafer, remaining Y0 ⁰The sensitive axes of cut type piezoelectric quartz wafer is arranged along the tangential direction of place circumference, and its sensitive axes direction is promptly arranged clockwise or counterclockwise along same hour hands.

The four-dimensional dynamometer of above-mentioned such piezoelectricity has two, be installed in the two ends of the power transmission pretension frame in the sensor base symmetrically, the working face of two four-dimensional dynamometers of piezoelectricity should be relative, and respectively draw socket by four signals draws signal the Y0 that the sensitive axes direction is identical to the four-dimensional dynamometer of each piezoelectricity ⁰, the sensitive axes orientation is along clockwise or the Y0 that arranges counterclockwise ⁰Cut type piezoelectric quartz wafer and the identical X0 of sensitive axes direction ⁰The signal output electrode of cut type piezoelectric quartz wafer is connected to signal separately after the parallel connection respectively and draws socket, and signal is drawn socket and exposed from sensor cover, outwards exports measuring-signal.Power transmission pretension frame center is provided with force application apparatus and connects screw, by screw rod with sensor is connected with application of force platform, with acquisition external force.

Among the present invention, also can adopt piezoelectric ceramic wafer to substitute the piezoelectric quartz wafer, their corresponding relation is: X0 ⁰Cut type piezoelectric quartz wafer is replaceable to be Z0 ⁰Cut type (being that wafer thickness is along Z-direction) piezoelectric ceramic wafer, Y0 ⁰Cut type piezoelectric quartz wafer is replaceable to be Y0 ⁰Or X0 ⁰The cut type piezoelectric ceramic wafer, the technique effect that reaches is identical.

The piezoelectric six-dimensional force sensor that the present invention proposes is simple and compact for structure, and volume is little, does not exist interpolar to disturb, and need not that signal of sensor is carried out the decoupling zero computing and just can obtain exporting the result.

Description of drawings

Fig. 1 is the cross-sectional view of the dynamometer in this piezoelectric six-dimensional force sensor;

Fig. 2 is the planar structure synoptic diagram that the insulation locating rack of piezoelectric quartz wafer is installed in the dynamometer;

Fig. 3 is the side view of Fig. 2;

Fig. 4 is the Y0 in this piezoelectric six-dimensional force sensor ⁰, X0 ⁰Cut type piezoelectric quartz wafer layout stretch-out view;

Fig. 5 is the structural representation of the force transmission rack in this piezoelectric six-dimensional force sensor;

Fig. 6 is the front view of this piezoelectric six-dimensional force sensor wiring layout;

Fig. 7 is the vertical view of this piezoelectric six-dimensional force sensor wiring layout;

Fig. 8 is this piezoelectric six-dimensional force sensor signal Processing block diagram.

Among the figure: 1,2,3---Y0 ⁰Cut type piezoelectric quartz wafer, 4---X0 ⁰Cut type piezoelectric quartz wafer, 5---the insulation locating rack, 6---the dynamometer box, 71,72,73,74---signal is drawn socket, 8---the pretension abutment sleeve, 9---pretension connects cushion block, 10---pretension connects cushion block and connects screw, and 11---the pretension screw rod, 12---power transmission pretension frame, 13---force application apparatus connects screw, 14---sensor cover, 15---sensor is installed screw, and 16---the sensor cover screw, 17---pretension connects the cushion block attachment screw, and 18---sensor base.

Embodiment

Referring to Fig. 6 and Fig. 7, this six-dimension force sensor mainly by sensor base 18, sensor cover 14, be fixedly installed in four-dimensional dynamometers of two piezoelectricity in the sensor base, two pretensions connect cushion blocks 9 and parts such as power transmission pretension frame 12 are formed.Two four-dimensional dynamometer symmetries of piezoelectricity are installed in the two ends of the power transmission pretension frame 12 in the sensor base, and the four-dimensional dynamometry of each piezoelectricity is drawn socket 71,72,73,74 in respect of four signals, exposes from sensor cover 14, outwards exports measuring-signal.

Referring to Fig. 5, the center of power transmission pretension frame 12 is provided with force application apparatus and connects screw 13, and the application of force platform outer by screw rod and sensor is connected,

A kind of specific implementation structure of the four-dimensional dynamometer of piezoelectricity is example referring to Fig. 1 with the piezoelectric quartz wafer, and dynamometer is by eight Y0 ⁰1,2,3 and eight X0 of cut type piezo crystals ⁰Cut type piezoelectric quartz wafer 4, insulation locating rack 5, signal draw socket and dynamometer box 6 constitutes.Referring to Fig. 2 and Fig. 3, on two concentric circumferences of teflon insulation locating rack 5, process 16 pilot holes suitable earlier, again with Y0 with the piezoelectric quartz wafer size ⁰, X0 ⁰Cut type piezoelectric quartz wafer 1-4 packs into after the layout in insulation locating rack 5 by the requirement of Fig. 2 in the dynamometer box 6.Fig. 4 is the Y0 in this piezoelectric six-dimensional force sensor ⁰, X0 ⁰Cut type piezoelectric quartz wafer layout stretch-out view, wherein, the direction of arrow is represented the direction of piezoelectric quartz wafer sensitive axes, sets up right hand Cartesian coordinates with the mounting plane of sensor, wherein the Z axle perpendicular to the sensor mounting plane upwards, Y-axis to the right, Y0 ⁰And X0 ⁰Cut type piezoelectric quartz wafer 1,2,3 and 4 is distributed in respectively on two concentric circless, X0 ⁰Cut type piezoelectric quartz wafer 4 has eight, evenly arranges on circumference, and its sensitive axes direction is identical and be parallel to Y-axis.Y0 ⁰Cut type piezoelectric quartz wafer also has eight, is evenly distributed on another circumference, and it is axially identical and be parallel to the Y0 of X-axis and Z axle respectively wherein to be furnished with two sensitive axes on the horizontal direction of crossing each dynamometer center and vertical direction respectively ⁰Cut type piezoelectric quartz wafer 1 and 2, four Y0 in addition ⁰The sensitive axes of cut type piezoelectric quartz wafer 3 is arranged along the tangential direction of place circumference, and its sensitive axes direction is arranged along same hour hands (being illustrated as counterclockwise) direction.

The assembling mode of this six-dimension force sensor is: assemble the four-dimensional dynamometer of piezoelectricity by above requirement earlier, then under the positioning action of pretension abutment sleeve 8, successively pretension is connected cushion block 9, one end of four-dimensional dynamometer of piezoelectricity and power transmission pretension frame 12 links together by the certain pretightning force of pretension screw rod 11 usefulness, the other end of power transmission pretension frame 12 connects by same structure, to be connected with power transmission pretension frame 12 that two pretensions connect cushion blocks 9 and the four-dimensional dynamometer of piezoelectricity then packs in the sensor base 18, connecting cushion block attachment screw 17 with pretension fixedlys connected two pretensions connection cushion blocks 9 with sensor base 18, fixedly connected with sensor cover 14 by sensor cover screw 16 again, at last the application of force platform of processing is connected screw 13 by screw rod with force application apparatus and is connected with power transmission pretension frame 12.

Referring to Fig. 8, when external force acts on this six-dimension force sensor, with eight signals draw socket respectively with corresponding charge amplifier I ₁-I ₄, II ₁-II ₄Connect, No. eight charge amplifier output signals are transferred to microprocessor (or computing machine), just can obtain sextuple force information intuitively after in microprocessor (or computing machine), carrying out simple calculations by sextuple power display module by eight road data acquisition cards.

Below do an explanation with regard to the principle of work of this six-dimension force sensor:

Work as F _XWhen acting on the sensor, piezoelectric quartz wafer I ₁And II ₁Can produce all identical quantity of electric charge of size, direction on (I, II represent the numbering of dynamometer respectively, and subscript is represented the numbering of piezoelectric quartz wafer in the dynamometer), promptly $Q_{I_1}-Q_{{\mathrm{II}}_1}=0;$ Work as M _ZWhen acting on the sensor, piezoelectric quartz wafer I ₁And II ₁On can produce equal and opposite in direction, the quantity of electric charge that direction is opposite, promptly $Q_{I_1}+Q_{{\mathrm{II}}_1}=0;$ Work as M _XWhen acting on the sensor, piezoelectric quartz wafer I ₂And II ₂On can produce all identical quantity of electric charge of size, direction, promptly $Q_{I_2}-Q_{{\mathrm{II}}_2}=0;$ Work as F _ZWhen acting on the sensor, piezoelectric quartz wafer I ₂And II ₂On can produce equal and opposite in direction, the quantity of electric charge that direction is opposite, promptly ${\mathrm{<figure-callout\; id="2"\; label="Q\; I"\; filenames="C200710078684E00092.png"\; state="\{\{state\}\}">Q</figure-callout>}}_{I_{}}+Q_{{\mathrm{II}}_2}=0;$ Work as M _YWhen acting on the sensor, piezoelectric quartz wafer I ₃And II ₃On can produce equal and opposite in direction, the quantity of electric charge that direction is opposite, promptly $Q_{I_3}+Q_{{\mathrm{II}}_3}=0;$ Work as F _YWhen acting on the sensor, piezoelectric quartz wafer I ₄And II ₄On can produce equal and opposite in direction, the quantity of electric charge that direction is opposite, promptly $Q_{I_4}+Q_{{\mathrm{II}}_4}=0.$

So when external force acted on application of force platform center, this six-dimension force sensor was output as:

$\left\{\begin{array}{c}{F}_X=-(Q_{{\mathrm{II}}_1}+Q_{I_1})\\ F_Y=Q_{{\mathrm{II}}_4}-Q_{I_4}\\ F_Z=Q_{I_2}-Q_{{\mathrm{II}}_2}\\ M_X=Q_{{\mathrm{II}}_2}+Q_{I_2}\\ M_Y=Q_{I_3}-Q_{{\mathrm{II}}_3}\\ M_Z=Q_{{\mathrm{II}}_1}-Q_{I_1}\end{array}\right.$

According to above analysis as can be seen, this sensor does not exist interpolar to disturb, and need not that signal of sensor is carried out complicated decoupling zero computing and just can obtain exporting the result.

Claims (3)

1, a kind of piezoelectric type hexa-dimensional force sensor comprises sensor base (18), sensor cover (14) and is fixedly installed in the interior piezoelectricity dynamometer of sensor base (18), it is characterized in that:

Described piezoelectricity dynamometer adopts the four-dimensional dynamometer of piezoelectricity, and the four-dimensional dynamometer of described piezoelectricity is by Y0 ⁰And X0 ⁰Cut type piezoelectric quartz wafer (1,2,3 and 4), insulation locating rack (5), signal are drawn socket and dynamometer box (6) formation; Y0 ⁰And X0 ⁰Cut type piezoelectric quartz wafer is installed in the pilot hole on insulation locating rack (5) the same plane, and insulation locating rack (5) is fixed in the dynamometer box (6); Set up right hand Cartesian coordinates with the mounting plane of sensor, wherein the Z axle perpendicular to the sensor mounting plane upwards, Y-axis to the right, Y0 ⁰And X0 ⁰The installation site of cut type piezoelectric quartz wafer (1,2,3 and 4) meets the following conditions: Y0 ⁰Cut type piezoelectric quartz wafer (1,2,3) and X0 ⁰Cut type piezoelectric quartz wafer (4) all adopts the even number sheet, is evenly distributed on respectively on two concentric circless; X0 ⁰The sensitive axes direction of cut type piezoelectric quartz wafer (4) is identical and be parallel to Y-axis; Y0 ⁰Cut type piezoelectric quartz wafer should satisfy in the layout on the circumference: will arrange respectively on the horizontal direction of crossing each dynamometer center and vertical direction that two sensitive axes directions are identical and be parallel to the Y0 of X-axis and Z axle respectively ⁰Cut type piezoelectric quartz wafer (1 and 2), remaining Y0 ⁰The sensitive axes of cut type piezoelectric quartz wafer (3) is arranged along the tangential direction of place circumference, and its sensitive axes direction is arranged clockwise or counterclockwise;

The four-dimensional dynamometer of described piezoelectricity is drawn socket (71,72,73,74) by four signals signal is drawn, described two Y0 that the sensitive axes direction is identical that cross the horizontal direction at dynamometer center and be parallel to X-axis ⁰Be connected to first signal after the signal output electrode parallel connection of cut type piezoelectric quartz wafer (1) and draw socket (71), described two Y0 that the sensitive axes direction is identical that cross the vertical direction at dynamometer center and be parallel to the Z axle ⁰Be connected to secondary signal after the signal output electrode parallel connection of cut type piezoelectric quartz wafer (2) and draw socket (72), the sensitive axes direction is along Y0 clockwise or that arrange counterclockwise ⁰Be connected to the 3rd signal after the signal output electrode parallel connection of cut type piezoelectric quartz wafer (3) and draw socket (73), X0 ⁰Be connected to the 4th signal after the signal output electrode parallel connection of cut type piezoelectric quartz wafer (4) and draw socket (74);

Totally two of the four-dimensional dynamometers of described piezoelectricity, be installed in power transmission pretension frame (12) two ends in the sensor base symmetrically in the relative mode of working face, signal is drawn socket (71,72,73,74) and is exposed from sensor cover (14), power transmission pretension frame (12) center has application of force platform to connect screw (13), by screw rod sensor is connected with application of force platform.

2, piezoelectric type hexa-dimensional force sensor according to claim 1 is characterized in that: described X0 ⁰Cut type piezoelectric quartz wafer (4) is by Z0 ⁰The cut type piezoelectric ceramic wafer substitutes, and promptly wafer thickness substitutes Y0 along the piezoelectric ceramic wafer of Z-direction ⁰Cut type piezoelectric quartz wafer (1,2,3) is by Y0 ⁰Or X0 ⁰The cut type piezoelectric ceramic wafer substitutes.

3, piezoelectric type hexa-dimensional force sensor according to claim 1 and 2, it is characterized in that: on the four-dimensional dynamometer of the piezoelectricity at power transmission pretension frame (12) two ends, also be separately installed with pretension and connect cushion block (9), the end that pretension connects cushion block (9) and four-dimensional dynamometer of piezoelectricity and power transmission pretension frame (12) links together by pretension screw rod (11) respectively, and it is fixing by attachment screw (17) and sensor base (18) respectively again that pretension connects cushion block (9).

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