CN100465621C - Micro-fluid control chip with surface enhanced Raman spectral active substrate and producing method thereof - Google Patents

Micro-fluid control chip with surface enhanced Raman spectral active substrate and producing method thereof Download PDF

Info

Publication number
CN100465621C
CN100465621C CNB2006100087674A CN200610008767A CN100465621C CN 100465621 C CN100465621 C CN 100465621C CN B2006100087674 A CNB2006100087674 A CN B2006100087674A CN 200610008767 A CN200610008767 A CN 200610008767A CN 100465621 C CN100465621 C CN 100465621C
Authority
CN
China
Prior art keywords
micro
fluidic chip
film
enhanced raman
surface enhanced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006100087674A
Other languages
Chinese (zh)
Other versions
CN1811389A (en
Inventor
周勇亮
郝苇苇
张维
任斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen University
Original Assignee
Xiamen University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen University filed Critical Xiamen University
Priority to CNB2006100087674A priority Critical patent/CN100465621C/en
Publication of CN1811389A publication Critical patent/CN1811389A/en
Application granted granted Critical
Publication of CN100465621C publication Critical patent/CN100465621C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The present invention relates to a microfluidic chip, in particular, it relates to a microfluidic chip with surface enhanced Raman spectrum (SERS) active substrate and its preparation method. On the microfluidic chip, at least a microchannel is set, on the total or partial inner wall surface of said microchannel is set a layer of rough metal film with SERS activity. Besides, said invention also provides the concrete steps for preparing said microfluidic chip.

Description

Have micro-fluidic chip and preparation method at the bottom of the Surface enhanced raman spectroscopy active group
Technical field
The present invention relates to a kind of micro-fluidic chip, particularly relate to a kind of micro-fluidic chip at the bottom of the Surface enhanced raman spectroscopy active group and preparation method thereof that has.
Background technology
Micro-fluidic chip is minisize reaction or the analytic system that a class has the microchannel network, usually by glass or macromolecular material, as polymethylmethacrylate (PMMA), polycarbonate (PC) and dimethyl silicone polymer (PDMS) etc., be prepared from through technological processes such as over etching or plastic compression and bondings.Be characterized in having the microchannel of diameter below 200 μ m.Because size is little, micro-fluidic chip has that use cost is low, the reagent consumption is little, rapidly and efficiently, advantage such as easy of integration and robotization, be widely used in fields such as biomedical and environment pharmacy.But because the size of micro-fluidic chip is little, this has also caused the difficulty that detects.Therefore, detection system is the key component of decision micro-fluidic chip applicability.Micro-fluidic chip uses more detection method that laser-induced fluorescence (LIF) (LIF), uv absorption, galvanochemistry and mass spectrum etc. are arranged at present, and wherein LIF's is most widely used.But do not modify because most samples itself do not have fluorescence and are difficult to carry out fluorescence, its range of application is comparatively narrow, and can't obtain the detailed structural information of sample.Uv absorption is because light path is short, and poor sensitivity, quantity of information are not abundant yet, thereby use less.Though Electrochemical Detection is integrated easily, cost is low, and range of application is wideless, and quantity of information very little.The mass spectrum quantity of information is abundant, but can't carry out the detection of original position.Raman spectroscopy can obtain group and chemical bond and the microenvironment information to sample structure influence from molecular level, and test sample and obtain its finger-print, and its signal in real time can not disturbed by water, so is particularly suitable for the detection of biomolecule.But Raman signal especially a little less than, need strengthen by certain methods during application, normally used Enhancement Method has two classes, one class strengthens Raman for resonance, promptly excite, testing molecule is resonated, thereby obtain strong Raman signal with laser with molecules detected absorbing light co-wavelength, these class methods are had relatively high expectations to LASER Light Source, and once can only be used to detect the molecule of same absorbent.The method of another kind of enhancing Raman signal then is to use coarse metal surface, i.e. Surface enhanced raman spectroscopy (SERS).In system to be detected, add coarse coin family metal (as gold, silver or copper) or its nano particle, can improve the signal of Raman spectrum greatly.Therefore, preparation has the precondition that the rough surface that strengthens the Raman spectrum activity is realization SERS detection.
The main both at home and abroad at present rough surface that preparation has enhancing Raman spectrum activity in micro-fluidic chip by the following method: (1) feeds the aaerosol solution of coin family metal nanoparticle in micro-fluidic chip, as Taehan Park (Taehan Park, Lab Chip, 2005,5:437-442) Bao Dao the potpourri with silver sol and two kinds of oligonucleotides pours into raceway groove, detects after the mixing.The advantage of this method is to obtain fresh surface, but difficulty is all compared in the preparation of even metal nano particle and storage, and is easy to assemble the sedimentation instability, and range of application is very limited; (2) use complicated electronic technology to prepare coarse chip, re-use the extremely thin metal level of electron beam transpiration.As (Gang L Liu, et al, Appl.Phys.Lett. such as Gang L.Liu, 2005,87,074101) the local PDMS that has hemispherical projection of the use photoetching technique of report preparation, deposited by electron beam evaporation local deposits 20nm silver film then obtains the micro-fluidic chip at the bottom of the tool SERS active group.This method needs expensive equipment and numerous and diverse step.
In sum, above listed method or easy sedimentation instability, or complex process, cost is higher.
Summary of the invention
The objective of the invention is to provides micro-fluidic chip of a kind of textured metal film at the bottom of partly or entirely having the SERS active group and preparation method thereof at existing problem at the bottom of the active group of micro-fluidic chip use surface-enhanced Raman detection needs.The technical solution used in the present invention is sputter or an assembling coin family (gold on all or part of inwall of level and smooth micro-fluidic chip passage (raceway groove or pipeline), silver, copper) film, by galvanochemistry or chemical method roughening, preparation has the micro-fluidic chip at the bottom of the Surface enhanced raman spectroscopy active group again.
Of the present invention have micro-fluidic chip at the bottom of the Surface enhanced raman spectroscopy active group for to be provided with at least one microchannel on micro-fluidic chip, and all or part of inner wall surface in the microchannel has one deck to have the textured metal film of Surface enhanced raman spectroscopy activity.
The material of described chip is a glass, dimethyl silicone polymer (PDMS) or polymethyl acrylate (PMMA) etc.; Metal is a gold, silver or copper etc.; Described microchannel is little raceway groove or microchannel, and the diameter of microchannel is less than 200 μ m.Can be provided with at least 2 liquid storage tanks on chip, liquid storage tank communicates with the microchannel.Described film is fine and close solid film or metallic particles single thin film or the multilayer film that are assembled into by metal nanoparticle.Described coarse be the roughness of metal nanoparticle itself or through the roughness of chemistry or electrochemical treatment.
Described film is a gold, the continuous homogeneous film of silver or copper; Described film is a gold, the film that silver or copper nano-particle are assembled into.Described gold, the diameter of the nano particle of silver or copper are 5~500nm.
Described Surface enhanced raman spectroscopy is active to be to make the Raman signal intensity of surface adsorption species increase more than 10 times than smooth surface.
The preparation method of the micro-fluidic chip of the textured metal film at the bottom of the SERS of the having active group of the present invention the steps include:
1) utilizes technology such as MEMS or Laser Processing, machined grooves on glass or macromolecular material thin slice;
2) in all or part of zone of groove, the method by physical evaporation, sputter or chemogenic deposit prepares coin family metallic film in conjunction with mask technique, and described coin family metal is selected from gold, silver or copper;
3) pass through chemical method or electrochemical method with coin family metallic film roughening;
4) will carry out thermal bonding or plasma-activated bonding with the thin slice of groove and the thin slice in hole with holes, obtain having the micro-fluidic chip of complete airtight little raceway groove.
Described step 3) and 4) poly-order can be put upside down two steps.
As use then step 2 of metal nanoparticle) and 3) be combined into a step: in all or part of zone of groove, prepare the component film of coin family metal nanoparticle in conjunction with mask technique by the method for chemistry or physics assembling.Described metal nanoparticle is that diameter is the metallic particles of 1~1000nm.
The chemical method of described textured metal film is as follows: add the nitric acid of 0.1~10mol/L in the micro-fluidic chip passage of metallic film is arranged, behind immersion 1~60min acid solution is rinsed well.
The electrochemical process of described textured metal film is as follows: for silver-colored film, in the KCl of 0.1~10mol/L solution, at first CONTROLLED POTENTIAL is at-0.25V, step is to 0.18V then, and after stopping 5~60s under this current potential, get back to-0.25V with slower speed, all be reduced, obtain flaxen villous surface at last up to the surface.For gold thin film, then be swept to 1.25V, stop 1~30s then from-0.3V with the sweep velocity of 0.1~10V/s, sweep velocity with 0.1~10V/s is swept to-0.3V again, stop 1~100s, circulate 1~50 time, obtain dark-brown coarse gold surface with high SERS activity.As for the copper film, in the KCl of 0.1~10mol/L solution, after carrying out 3~60 steps between current potential-0.4V to 0.4V, under-0.4V current potential, take out electrode and can obtain brown active surface.
Use the method at the bottom of surface-enhanced Raman detects the active group that needs to compare with existing at micro-fluidic chip, equipment required for the present invention is simple, and is easy and simple to handle, active high at the bottom of the prepared SERS active group, can obtain very strong Raman signal.
Description of drawings
Fig. 1 is the sem photograph of the silver-colored film of embodiment 1 preparation.
Fig. 2 is the photo in kind of the PDMS micro-fluidic chip with the active coarse silver surface of SERS of embodiment 1 preparation.
Fig. 3 detects the SERS spectrogram (be respectively the SERS signal of aniline and benzaldehyde and both reaction product, if there is not silverskin, then can not detect the SERS signal) that obtains for the coarse silverskin in three places of the PDMS micro-fluidic chip of embodiment 1 preparation.
Embodiment
Following examples will the present invention is further illustrated in conjunction with the accompanying drawings.
Embodiment 1
The PDMS mask sheet that will be equipped with 3 holes (aperture is 2mm) is attached on the glass sheet that standard cleaning crosses.Use JS2S-80D type sputtering unit (Beijing wound Wei Na company produces), adopt direct current rotatable sputtering pattern, successively with the power sputtered titanium film 7min of 150W, the power sputtering silver film 15min of 160W.Immerse in the 1mol/L KCl solution, it is coarse with CHI631B electrochemical workstation (Shanghai occasion China) the silver-colored film in surface to be carried out electrochemical redox (ORC), detailed process is: at first constant potential is at-0.25V5s, step is to 0.18V then, stop 10s at this current potential, speed with 0.01V/s is slowly got back to-0.25V, and abundant reductase 12 0s under-0.25V all is reduced to faint yellow fine hair shape up to the surface.Take mask off, obtain the glass sheet that the part has rough base.On the PDMS cover plate, process 3 liquid storage tanks with card punch; Use CO 2-50F laser marking machine (source company of Beijing wound section product) machined grooves.Cover plate and the glass sheet that has rough base are placed in the two-tube equipment for burning-off photoresist by plasma vacuum chamber of GP08-2/QJ type, and 1500V is bombardment 15s down, and cover plate and glass sheet surface are fully activated.PDMS cover plate and glass sheet are fit together, leave standstill 5min, promptly obtain a micro-fluidic chip at the bottom of having the Surface enhanced raman spectroscopy active group behind the bonding.
The sem photograph of the silver-colored film that embodiment 1 is prepared is referring to Fig. 1, the prepared photo in kind of the PDMS micro-fluidic chip with the active coarse silver surface of SERS is referring to Fig. 2, the coarse silverskin in three places of prepared PDMS micro-fluidic chip detects the SERS spectrogram that obtains and (is respectively the SERS signal of aniline and benzaldehyde and both reaction product referring to Fig. 3, if there is not silverskin, then can not detect the SERS signal).
Embodiment 2
The PDMS mask sheet that will be equipped with 3 holes (aperture is 2mm) is attached on the fresh PDMS cover plate of peeling off.Adopt direct current rotatable sputtering pattern, successively with the power sputtered titanium film 7min of 150W, the power sputter gold thin film 10min of 150W.Immerse in the 0.1mol/L KCl solution, it is coarse that surperficial gold thin film is carried out ORC, detailed process: at first constant potential is at-0.3V, then with the speed step of 1.0V/s to 1.2V, and stop 1.5s at this current potential, and get back to-0.3V with the speed of 0.5V/s, fully reduce 30s down at-0.3V.With after the said process circulation 20 times under-0.3V current potential taking-up can obtain dark-brown surface with high SERS activity.Take mask off, obtain the PDMS substrate that the part has coarse gold substrate.On the PDMS cover plate, process 3 liquid storage tanks with card punch; Use the laser marking machined recess.PDMS cover plate and the PDMS substrate that has rough base are placed in the equipment for burning-off photoresist by plasma vacuum chamber, and 1500V is bombardment 15s down, and PDMS cover plate and PDMS substrate surface are fully activated.PDMS cover plate and PDMS substrate are fit together, leave standstill 5min, promptly obtain a micro-fluidic chip at the bottom of having the Surface enhanced raman spectroscopy active group behind the bonding.
Embodiment 3
The PDMS mask sheet that will be equipped with 3 holes (aperture is 2mm) is attached on the glass sheet that standard cleaning crosses.Adopt direct current rotatable sputtering pattern, successively with the power sputtered titanium film 7min of 150W, the power sputter copper film 10min of 150W.Immerse in the 0.1mol/L KCl solution, taking-up can obtain brown SERS active surface under-0.4V current potential after step between current potential-0.4V to 0.4V 5 times.Take mask off, obtain the glass substrate that the part has the roughened copper substrate.Processing 3 liquid storage tanks of processing on the reeded cover glass by the wet etching method with laser marking machine.Put into high temperature furnace after cover plate and the glass substrate that has rough base fitted, speed with 10 ℃/min is warming up to 620 ℃, insulation 3.5h again with the cooling of the speed of 10 ℃/min, promptly obtains a micro-fluidic chip at the bottom of having the Surface enhanced raman spectroscopy active group.
Embodiment 4~6
The PDMS mask sheet that will be equipped with 3 holes (aperture is 2mm) is attached on the glass sheet that standard cleaning crosses.Adopt direct current rotatable sputtering pattern, successively with the power sputtered titanium film 7min of 150W, the coin family metal (gold, silver, copper) that certain power and time sputter are required.Immerse in the certain density salpeter solution and react certain hour, take out, wash (specifically as shown in table 1) with 3 water loggings.Take mask off, obtain the glass sheet at the bottom of the part has the SERS active group.On the PDMS cover plate, process sample holes with card punch; Use CO 2-50F laser marking machine (source company of Beijing wound section product) machined grooves.Cover plate and the glass sheet that has rough base are placed in the two-tube equipment for burning-off photoresist by plasma vacuum chamber of GP08-2/QJ type, and 1500V is bombardment 15s down, and cover plate and glass sheet surface are fully activated.PDMS cover plate and glass sheet are fit together, leave standstill 5min, promptly obtain a micro-fluidic chip at the bottom of having the Surface enhanced raman spectroscopy active group behind the bonding.
Table 1
Metal species Sputtering power (W) Sputtering time (min) Concentration of nitric acid (mol/L) Reaction time (min)
Silver 160 15 5 7
Gold 150 10 7 8
Copper 150 10 2 10
Embodiment 7
The PDMS mask sheet that will be equipped with 3 holes (aperture is 2mm) is attached on the PMMA.5h in the polylysine aqueous solution of immersion 5% takes out with putting into silver sol self assembly 12h after the high purity water flushing, takes out with the high purity water flushing again, and nitrogen dries up, Nano silver grain of its surface formation one deck purple.Take mask off, obtain the PMMA substrate that partial groups is equipped with Nano silver grain.PMMA cover plate with laser marking machined recess and liquid storage tank is cleaned 5min in deionized water for ultrasonic, the ultrapure water flushing, dry up, put into laminating machine after fitting with PMMA substrate (the ultrapure water flushing dries up) again, apply suitable pressure, under 90 ℃, constant temperature and pressure 10min takes out after being cooled to room temperature, promptly obtains a micro-fluidic chip at the bottom of having the Surface enhanced raman spectroscopy active group.
Embodiment 8
The PDMS mask sheet that will be equipped with 3 holes (aperture is 2mm) is attached on the glass sheet that standard cleaning crosses.The glass sheet that will have groove immerses coupling molecule solution (3-sulfydryl propyl group-trimethyl silane: three water: isopropyl alcohol=1:1:40) take out behind the middle 24h, clean with isopropyl alcohol, three water respectively, nitrogen dries up, 110 ℃ of insulation 30min, taking-up is ultrasonic 5min in three water, and nitrogen dries up.Put into aurosol, take out after leaving standstill 12h, ultrasonic 5min in three water, nitrogen dries up.All the other steps are similar to Example 1.

Claims (9)

1, has micro-fluidic chip at the bottom of the Surface enhanced raman spectroscopy active group, it is characterized in that being provided with on micro-fluidic chip at least one microchannel, all or part of inner wall surface in the microchannel has one deck to have the textured metal film of Surface enhanced raman spectroscopy activity; Described coarse be the roughness of metal nanoparticle itself or through the roughness of chemistry or electrochemical treatment.
2, the micro-fluidic chip that has at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that described chip is a glass-chip, polydimethylsiloxanechip chip or polymethyl acrylate chip.
3, the micro-fluidic chip that has at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that described metal is gold, silver or copper.
4, the micro-fluidic chip that has at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that described microchannel is little raceway groove or microchannel, and the diameter of microchannel is less than 200 μ m.
5, the micro-fluidic chip that has at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that being provided with at least 2 liquid storage tanks on chip, and liquid storage tank communicates with the microchannel.
6, the micro-fluidic chip that has at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that described film is fine and close metal solid film or single-layer metal particle film or the multiple layer metal particle film that is assembled into by metal nanoparticle.
7, the micro-fluidic chip that has at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that described film is:
Gold, the continuous homogeneous film of silver or copper; Or
Gold, the film that silver or copper nano-particle are assembled into, described gold, the diameter of the nano particle of silver or copper are 5~500nm.
8, the preparation method with the micro-fluidic chip at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that may further comprise the steps:
1) utilizes MEMS or laser processing technology, machined grooves on glass or macromolecular material thin slice;
2) in all or part of zone of groove, the method by physical evaporation, sputter or chemogenic deposit prepares coin family metallic film in conjunction with mask technique, and described coin family metal is selected from gold, silver or copper;
3) pass through chemical method or electrochemical method with coin family metallic film roughening;
4) will carry out thermal bonding or plasma-activated bonding with the thin slice of groove and the thin slice in hole with holes, obtain having the micro-fluidic chip of complete airtight little raceway groove.
9, the preparation method with the micro-fluidic chip at the bottom of the Surface enhanced raman spectroscopy active group as claimed in claim 1 is characterized in that may further comprise the steps:
1) utilizes MEMS or laser processing technology, machined grooves on glass or macromolecular material thin slice;
2) in all or part of zone of groove, the method by the assembling of chemistry or physics prepares the component film of coin family metal nanoparticle in conjunction with mask technique, and described metal nanoparticle is that diameter is the metallic particles of 1~1000nm;
3) will carry out thermal bonding or plasma-activated bonding with the thin slice of groove and the thin slice in hole with holes, obtain having the micro-fluidic chip of complete airtight little raceway groove.
CNB2006100087674A 2006-02-10 2006-02-10 Micro-fluid control chip with surface enhanced Raman spectral active substrate and producing method thereof Expired - Fee Related CN100465621C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2006100087674A CN100465621C (en) 2006-02-10 2006-02-10 Micro-fluid control chip with surface enhanced Raman spectral active substrate and producing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2006100087674A CN100465621C (en) 2006-02-10 2006-02-10 Micro-fluid control chip with surface enhanced Raman spectral active substrate and producing method thereof

Publications (2)

Publication Number Publication Date
CN1811389A CN1811389A (en) 2006-08-02
CN100465621C true CN100465621C (en) 2009-03-04

Family

ID=36844434

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006100087674A Expired - Fee Related CN100465621C (en) 2006-02-10 2006-02-10 Micro-fluid control chip with surface enhanced Raman spectral active substrate and producing method thereof

Country Status (1)

Country Link
CN (1) CN100465621C (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102156114A (en) * 2010-02-12 2011-08-17 财团法人工业技术研究院 Raman detection method and system
CN101792112B (en) * 2010-03-03 2012-05-30 北京大学 Micro fluid control detection device based on surface-enhanced Raman scattering active substrate
CN102285629B (en) * 2011-05-05 2014-03-26 厦门大学 Preparation method for surface-enhanced Raman spectrum active substrate
CN102788777B (en) * 2011-05-19 2015-08-19 北京大学 Micro-fluidic Surface enhanced raman spectroscopy detection means and preparation method thereof and application
CN102877094A (en) * 2011-07-15 2013-01-16 中国科学院合肥物质科学研究院 Ordered hole array with gold-nanoparticle-based micro-nanometer composite structure and preparation method for ordered hole array
CN103389297A (en) * 2013-08-07 2013-11-13 苏州扬清芯片科技有限公司 Quick preparation method of SERS (surface-enhanced Raman scattering) active substrate with inverted cone
CN103575720B (en) * 2013-11-05 2015-11-18 中国科学院城市环境研究所 There is surface enhanced Raman substrate of pliability and light transmission and preparation method thereof
CN104677877B (en) * 2013-11-26 2017-11-28 中国科学院青岛生物能源与过程研究所 A kind of micro-fluidic chip and method for capturing collection cell/particle Raman spectrum
CN104568907B (en) * 2015-01-21 2017-04-12 重庆大学 Micro-fluidic SERS chip for nondestructive testing of blood and biological sample
CN104655608B (en) * 2015-03-12 2017-03-22 首都师范大学 System and method for surface enhancement Raman detection
CN105352935B (en) * 2015-11-16 2018-06-12 中北大学 Controllable layer assembly nano-particle SERS substrates of a kind of performance and preparation method thereof
CN105506559A (en) * 2015-12-15 2016-04-20 龙岩学院 Device and method for realizing thick silver film as surface reinforced Raman scattering substrate by physical method
CN106669872B (en) * 2016-12-29 2019-05-21 中国人民解放军国防科学技术大学 Micro-fluidic surface-enhanced Raman test chip and its preparation method and application
CN107255631B (en) * 2017-05-25 2019-12-13 西南交通大学 surface enhanced Raman spectrum substrate based on PDMS sponge and preparation method thereof
CN109112491B (en) * 2018-07-19 2019-10-11 西安交通大学 Overstable silver-colored tantalum composite material surface enhancing Raman scattering substrate and preparation method
CN109596595B (en) * 2018-12-06 2020-12-22 中国科学院苏州纳米技术与纳米仿生研究所 Application of semiconductor compound in benzaldehyde specificity detection and detection method
CN110441284B (en) * 2019-07-23 2022-02-15 海南大学 Preparation method of surface-enhanced Raman scattering chip for trace detection, obtained product and application
CN110455775B (en) * 2019-09-11 2023-12-01 重庆大学 Super-hydrophobic surface-enhanced substrate for surface-enhanced Raman spectrum detection
CN111175274B (en) * 2019-12-31 2021-02-09 浙江大学 Application of PDMS film in SERS high-sensitivity detection
CN114842735B (en) * 2022-04-29 2023-03-17 北京航空航天大学 Manufacturing method of PUF (physical unclonable function) anti-counterfeit label based on precious metal fractal pattern and anti-counterfeit label

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030187237A1 (en) * 2002-03-26 2003-10-02 Selena Chan Methods and device for DNA sequencing using surface enhanced raman scattering (SERS)
WO2004097384A1 (en) * 2003-04-25 2004-11-11 E2V Technologies (Uk) Limited Molecular detector arrangement
CN1641346A (en) * 2004-12-01 2005-07-20 大连理工大学 Method for preparing electrochemical micro-flor controlled chip of sunk copper electrode
CN1699984A (en) * 2005-05-19 2005-11-23 复旦大学 Multiple channel micro-flow control chip, process for making same and use thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030187237A1 (en) * 2002-03-26 2003-10-02 Selena Chan Methods and device for DNA sequencing using surface enhanced raman scattering (SERS)
WO2004097384A1 (en) * 2003-04-25 2004-11-11 E2V Technologies (Uk) Limited Molecular detector arrangement
CN1641346A (en) * 2004-12-01 2005-07-20 大连理工大学 Method for preparing electrochemical micro-flor controlled chip of sunk copper electrode
CN1699984A (en) * 2005-05-19 2005-11-23 复旦大学 Multiple channel micro-flow control chip, process for making same and use thereof

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
Highly sensitive signal detection of duplex dye-labelledDNA oligonucleotides in a PDMS microfluidic chip:confocal surface-enhanced Raman spectroscopic study. Taehan Park,Sangyeop Lee,Gi Hun Seong,JaebumChoo,Eun Kyu Lee,Yang S.Kim,Won Ho Ji,SeungYong Hwang,Dae-Gab Gweon,Sanghoon Lee.Lab on a Chip,No.5. 2005
Highly sensitive signal detection of duplex dye-labelledDNA oligonucleotides in a PDMS microfluidic chip:confocal surface-enhanced Raman spectroscopic study. Taehan Park,Sangyeop Lee,Gi Hun Seong,JaebumChoo,Eun Kyu Lee,Yang S.Kim,Won Ho Ji,SeungYong Hwang,Dae-Gab Gweon,Sanghoon Lee.Lab on a Chip,No.5. 2005 *
Nanowell surface enhanced Raman scattering arrays fabricated by soft-lithography for label-free biomolecular detections in integrated microfluidics. Gang L.Liu,Luke P.Lee.Applied Physics Letters,Vol.87 No.7. 2005
Nanowell surface enhanced Raman scattering arrays fabricated by soft-lithography for label-free biomolecular detections in integrated microfluidics. Gang L.Liu,Luke P.Lee.Applied Physics Letters,Vol.87 No.7. 2005 *
PDMS微流控芯片中真空氧等离子体键合方法. 沈德新,张春权,罗仲梓,周勇亮,张峰,李佳,田昭武.微纳电子技术,第7/8期. 2003
PDMS微流控芯片中真空氧等离子体键合方法. 沈德新,张春权,罗仲梓,周勇亮,张峰,李佳,田昭武.微纳电子技术,第7/8期. 2003 *

Also Published As

Publication number Publication date
CN1811389A (en) 2006-08-02

Similar Documents

Publication Publication Date Title
CN100465621C (en) Micro-fluid control chip with surface enhanced Raman spectral active substrate and producing method thereof
Smith Practical understanding and use of surface enhanced Raman scattering/surface enhanced resonance Raman scattering in chemical and biological analysis
CN103293142A (en) Flexible surface enhanced Raman spectrum base and preparation method thereof
KR101448111B1 (en) A substrate for surface-enhanced Raman scattering spectroscopy and a preparing method thereof
CN102311095B (en) Method for preparing multistage metal micro-nanostructures inside micro fluidic chip
CN103938158A (en) SERS (Surface Enhanced Raman Scattering) substrate with self-assembled spherical array and preparation method thereof
CN105044076A (en) Back surface detection type SERS (surface-enhanced Raman scattering) chip and preparation method thereof
WO2017106145A1 (en) Lithographic systems and methods
CN104492509B (en) There is the preparation method of the micro-fluidic chip of nanodendrites Raman substrate
CN107543813A (en) A kind of preparation method and applications of surface-enhanced Raman ordered composite array chip
CN110344030A (en) A kind of highly sensitive base material and preparation method thereof for LR laser raman enhancing
Chen et al. A highly sensitive microfluidics system for multiplexed surface-enhanced Raman scattering (SERS) detection based on Ag nanodot arrays
Bashouti et al. Direct laser writing of μ-chips based on hybrid C–Au–Ag nanoparticles for express analysis of hazardous and biological substances
CN105300955B (en) The micro-fluidic SERS chip-detecting apparatus of integrated liquid core light guide and nano metal
CN106018379A (en) Large-area SERS (surface-enhanced Raman scattering) substrate and preparation method thereof
Zhao et al. Design and fabrication of a microfluidic SERS chip with integrated Ag film@ nanoAu
WO2021010906A2 (en) Adsorbable polymeric surface-enhanced raman spectroscopy substrates and the fabrication process
CN108333166A (en) The surface enhanced Raman scattering substrate and preparation method of induced with laser
CN104076021A (en) Optical device, detecting apparatus, and electronic apparatus
CN104803348A (en) Method for preparing high depth-width ratio polymer nanorod array by sacrificing template
Lee et al. SERS decoding of micro gold shells moving in microfluidic systems
Lanzavecchia et al. Plasmonic Photochemistry as a Tool to Prepare Metallic Nanopores with Controlled Diameter for Optimized detection of single entities
CN109827949B (en) SERS substrate for detecting synthetic pigment and Raman detection method
Liu et al. Increasing hotspots density for high-sensitivity SERS detection by assembling array of Ag nanocubes
CN109612975A (en) A kind of surface enhanced Raman substrate and preparation method thereof

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090304

Termination date: 20140210