CN100450774C - Droplet ejection method, electro-optic device manufacturing method, and electronic instrument - Google Patents
Droplet ejection method, electro-optic device manufacturing method, and electronic instrument Download PDFInfo
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- CN100450774C CN100450774C CNB2005101186545A CN200510118654A CN100450774C CN 100450774 C CN100450774 C CN 100450774C CN B2005101186545 A CNB2005101186545 A CN B2005101186545A CN 200510118654 A CN200510118654 A CN 200510118654A CN 100450774 C CN100450774 C CN 100450774C
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Abstract
In a drawing target region forming pixel on a substrate, the ejection head ejecting interval droplet while scanning. Arranging a not-ejection area no ejection droplet on the drawing target region, except the central side surrounding the drawing target region and along outside of the cofferdam peripheral.
Description
Technical field
The present invention relates to the manufacture method and the electronic instrument of droplet discharge method, electro-optical device.
Background technology
Find out: spray drop from ink-jet is first-class to substrate, and film forming drop ejection mode is made electro-optical device on its substrate.As electro-optical device, have: the display unit of liquid-crystal apparatus, Organnic electroluminescent device (to call organic EL (Electronic Luminescent electroluminescent) device in the following text), plasm display device etc.
In addition, in recent years, the substrate that constitutes these electro-optical devices is maximizing, and in relevant large substrate, requires to utilize drop ejection mode to come the high meticulous and high accuracy film (pattern formation) of drawing.
As such drop ejection mode, known: according to the suitable drop amount of the ejection each time of shower nozzle, by adjusting theoretic ink ejection position, make the constant mode (for example, speciallyying permit communique No. 3332812) of quantity of ink that is sprayed on each drawing object zone with reference to Japan.
Yet above-mentioned drop ejection mode is only to consider to make the constant mode of spray volume of the ink in drawing object zone, the bullet of not considering the ink droplet in this drawing object zone position that falls.
Thereby, in this ejection mode, exist: fall ink thickness that the position produces deviation or be sprayed on the drawing object zone of the ink droplet bullet in drawing object zone is produced the small inhomogeneous and danger that causes quality to reduce.
Summary of the invention
The present invention carries out in view of the above-mentioned problems, its purpose is, provide a kind of and can not produce membrane thickness unevenness, and cooperate the drawing object zone and the bullet an amount of drop that falls, can carry out the manufacture method and the electronic instrument of the possible droplet discharge method of high accuracy and high-quality drawing, electro-optical device.
In the manufacture method and electronic instrument about droplet discharge method of the present invention, electro-optical device, in order to solve the above problems the following method that adopted.
First form of the present invention is a droplet discharge method, it is characterized in that: comprise the drawing object zone that is surrounded by cofferdam (bank) on the substrate, while making shower nozzle scanning spray the operation of drop at certain intervals, the drawing object zone has: be positioned at the drawing object zone outer circumferential side the outer circumferential side zone and as the center side zone in zone except the outer circumferential side zone, in the center side zone, be provided with not non-ejection place that can bullet falls from the drop of shower nozzle.
According to first form of the present invention, non-ejection place that does not spray drop is configured in the center side beyond the outer circumferential side of cofferdam that forms the drawing object zone, so, can not produce and have its ripple along the small pit in cofferdam, and an amount of liquid is not coated in the drawing object zone with omitting, and, can make uniform film thicknessization.That is, can not produce inhomogeneously on the thickness, and cooperate the drawing object zone bullet an amount of drop that falls, can carry out high accuracy and high-quality drawing.
In first form of the present invention, for example, also comprise the operation that generates the bit map corresponding with the drawing object zone, bit map has respectively along the multiple row of the long side direction of drawing area, non-ejection place is set at least one row of the center side except that the row in the outside in the multiple row, thus, can seek the homogenising of thickness well.
In first form of the present invention, by being loose, non-ejection punishment is configured at least one row of center side, so, the further homogenising that can seek thickness.
In first form of the present invention, whole at least row of described center side are described non-ejections place, so, the homogenising that can seek thickness well.
Second form of the present invention is a droplet discharge method, it is characterized in that: comprise the drawing object zone that the cofferdam surrounded on the substrate, while making shower nozzle scanning spray the operation of drop at certain intervals, the drawing object zone has: be positioned at the drawing object zone outer circumferential side the outer circumferential side zone and as the center side zone in zone except the outer circumferential side zone, in the center side zone, be provided with bullet from the drop of the shower nozzle amount different spray volumes place different that fall with its elsewhere.
According to second form of the present invention, also can seek the homogenising of thickness.
In second form of the present invention, also comprise the operation that generates the bit map corresponding with the drawing object zone, bit map has respectively along the multiple row of the long side direction of drawing area, different spray volumes place is set at least one row of the center side except that the row in the outside in the multiple row, thus, can seek the homogenising of thickness well.
In second form of the present invention,, described different spray volume punishment are configured at least one row of center side, the homogenising that can seek thickness well by being loose.
In second form of the present invention, whole at least row of center side are different spray volumes places, the homogenising that can seek thickness well.
The 3rd form of the present invention is the manufacture method of electro-optical device, it is characterized in that: utilized described droplet discharge method.
According to the 3rd form of the present invention, by described droplet discharge method, on substrate, form the drawing pattern accurately, can make the electro-optical device of organic El device, plasm display device, liquid-crystal apparatus etc.Thereby,,, can show the electro-optical device of high meticulous, high quality image so that all to big picture can be provided at a low price according to the present invention.For example, the luminescent material of inscape of organic El device and hole transporting material etc. will be become and high meticulous pattern of pixels can be applied as.
The 4th form of the present invention is an electronic instrument, it is characterized in that possessing: the electro-optical device of making by described electro-optical device manufacture method.
According to the 4th form of the present invention, can with provide at a low price can high meticulous demonstration high quality image electronic instrument.Particularly, the present invention can be to provide the electronic instrument that can show the high-grade image at a low price.
Description of drawings
Fig. 1 is the stereogram that the expression droplet ejection apparatus constitutes.
Fig. 2 is the block diagram of the control device function of expression droplet ejection apparatus.
Fig. 3 A, 3B, 3C are that expression does not have the mode view of application about the reflection of the situation of droplet discharge method of the present invention.
Fig. 4 A, 4B are the mode view of expression application about the reflection of the situation of droplet discharge method of the present invention.
Fig. 5 is that expression does not have the mode view of application about the reflection of the situation of droplet discharge method of the present invention.
Fig. 6 A, 6B are the mode view of expression application about the reflection of the situation of droplet discharge method of the present invention.
Fig. 7 A, 7B, 7C and 7D are the sectional views of the relevant organic El device of the present invention of expression manufacturing process.
Fig. 8 is the circuit diagram that utilizes the display unit that manufacturing process makes.
Fig. 9 is the amplification view of the planar structure of expression display unit pixel region.
Figure 10 A, 10B and 10C are the stereograms that expression possesses the electronic instrument of display unit.
The specific embodiment
Below, in conjunction with the manufacture method and the electronic instrument of figure explanation droplet discharge method of the present invention, electro-optical device.
(droplet ejection apparatus)
Fig. 1 is the stereogram of the formation of expression droplet ejection apparatus.
This droplet ejection apparatus 1 is used in the droplet discharge method of relevant embodiment of the present invention.Droplet ejection apparatus 1 has as the main composition key element: as the control device 2 of relevant controlling organization of the present invention; Jet head sets 3; With objective table 4.Droplet ejection apparatus 1 is by the action of control device 2 control jet head sets 3 and objective table 4, and the substrate 5 ejection drops to being positioned in objective table 4 on this substrate 5, form the pattern of regulation.
In addition, the drop ejection mechanism as shower nozzle 3a except utilizing above-mentioned piezoelectric element (mechanoelectric conversion's body) mode, can also adopt: for example, utilized the electricity as energy generating element, the mode of thermal conversion body; The continuation mode that is called charged control type or pressurization and vibration type; The electrostatic attraction mode; Utilize the electromagnetic irradiation hotwork of laser etc. to be used for mode that sprays aqueous body etc.
In addition, above-mentioned jet head sets 3 is made of a plurality of shower nozzle 3a that are arranged in 1 row, but is not limited to these.For example, also can be: to wear (pitch) at interval of the nozzle of each shower nozzle 3a, depart from the shower nozzle 3a of 1/2 pitch, be arranged in 2 row at directions X.Or, shower nozzle 3a is disposed directions X inclination predetermined angular.In these constitute, to wear less than nozzle that spraying drop becomes possibility at interval.
Objective table 4 has: the 4a of mounting portion of mounting substrate 5; Make in the face of the 4a of this mounting portion on the XY plane the possible pedestal part 4b of rotation and constitute.Be provided with the pin (omitting diagram) of location usefulness at the 4a of mounting portion.On pedestal part 4b, be provided with encoder 4c.This encoder 4c reads along the scale of the slide-rule dial 15 of the Y direction setting of base station 6, reads the result according to it, detects the position of the objective table 4 of Y direction.The scale of slide-rule dial 15 can be set at Mi Danwei, also can be set at DPI unit.
And objective table 4 constitutes along the Y axis of orientation 9 that lays perpendicular to directions X and can move.As the conveying mechanism that objective table 4 is moved to the Y direction, utilized linear motor in the present example.This linear motor has: be arranged in the permanent magnet 10 on the Y axis of orientation 9; Fixedly be located at a plurality of coils (omit diagram) of the pedestal part 4b downside of objective table 4 and constitute.These a plurality of coils are to be arranged on the plate 11 along the Y direction and near permanent magnet 10.
Substrate 5 is the objects that form pattern in the present embodiment.As the material of substrate 5, can utilize the transparency carrier of glass etc., still, do not require under the situation of the transparency, can adopt metallic plate etc.In addition, the size of this substrate 5, horizontal, linear foot is very little can to surpass 1M.
As the pattern that is formed on the substrate 5, can enumerate: have the formed pattern of pixels of colour filter of RGB look or the metal wiring of formation TFT circuit conditions etc.
For example, be made of substrate 5 under the situation of organic El device, the pattern of pixels that is made of luminescent material or hole transporting material etc. is to form with this droplet ejection apparatus 1.
Below, the detailed formation of control device 2 is described in conjunction with Fig. 2.Fig. 2 is the block diagram for the function that control device 2 is described.
Drop ejection data setting value input part 20 is to have to set following function: promptly, and the size of the size of setting substrate 5, sheet that substrate 5 is cut out as a plurality of (zones), the pitch (space) of abutment flange, the arrangement of pixel (pattern), the number of pixel, the size (the longitudinal and transverse size of pixel) of pixel, the pitch (space) of adjacent pixels.Shower nozzle setting value input part 22 has sets following function: promptly, set for form the necessary drop amount of pixel, for the configuration of the shower nozzle 3a that forms the number of buses (number of times of the action that relatively moves) between necessary jet head sets 3 of pixel and the substrate 5, the above-mentioned jet head sets 3 of using.
Cad data operating portion 24 has: be created on the function of cad data pattern, that become design drawing that should form on the substrate 5, and by the input mechanism that is used for tablet pattern information (data of the attribute of vector data, figure etc.); With formations such as work station with graphics processing function.At this, cad data can be that DPI class unit generates, and also can generate with the unit of rice.
Bit map data preparing department 26 has: former data are transformed to the function that CAD goes up the bit map data of desired resolution.Bit map handling part 28 carries out: number, configuration and the drop bullet of considering shower nozzle 3a drops on processing diameter, require the bit map data of change bit Image Data preparing department 26 mades according to the graph thinning of circuit model of substrate 5.
Drop ejection data creating portion 30 be diameter when considering that the drop bullet falls so that become desired pattern dimension, make drop ejection data (binary series data).At this, these drop ejection data comprise: the corresponding record data of counting of number of each drop ejection mechanism of each nozzle setting of corresponding jet head sets 3.
Drop ejection data transfer part 32 has: drop is sprayed the drop ejection data that data creating portion 30 is exported, the function of transmitting to the drop ejection mechanism of jet head sets 3.Switches set 34 is made of a plurality of switches, described a plurality of switch is located between drop ejection data transfer part 32 and the jet head sets 3, and correspondence is connected each a plurality of drive division that jet head sets 3 is comprised one to one, and is set at connection, off-state according to the record data that transmitted by drop ejection data transfer part 32.
Shower nozzle drive division 38 and jet head sets 3 being integral for example, can be linear motor, and jet head sets 3 is moved to the throughput direction perpendicular to substrate 5.Shower nozzle drive control part 40 according to the indication of omitting illustrated high level controller, drives control shower nozzle drive division 38.
Below, illustrate that present embodiment droplet ejection apparatus 1 sprays the droplet discharge method of drop.The ejection of this drop mainly is by performed in the drop of the droplet ejection apparatus 1 ejection time control part 44.
Fig. 3 A, 3B, 3C and Fig. 5 are the mode views of reflection of representing not have to use the situation of relevant droplet discharge method of the present invention respectively.Fig. 4 A, 4B and Fig. 6 A, 6B are the mode views of reflection of ejection state of representing to use the situation of relevant droplet discharge method of the present invention respectively.
1 couple of pixel G of droplet ejection apparatus as formation drawing object on the substrate, Yi Bian make shower nozzle 3a to a scanning direction, Yi Bian according to each regulation ejection ejection time at interval, ejection drop.Thus, among the drawing object zone A that is surrounded by the cofferdam that forms pixel G (omit diagram, with reference to Fig. 7), according to the bit map data bullet drop that falls.
At this, shower nozzle 3a decision is the drop amount of ejection each time.As shown in Figure 3A, be sprayed in all pixel G, then be easy to generate the too much or not enough phenomenon of drop amount if spray drop in all ejection times of corresponding drawing object zone A.Therefore, for example, if under the too much situation of drop amount, adjust in the stipulated time and the drop spray volume or a part of drop that reduce each becomes non-ejection state and the bullet that saves the drop in the pixel G falls etc., be necessary to adjust the drop amount in the A of drawing object zone.
As the non-ejection state of drop, save under the situation that the bullet in the pixel G falls, shown in Fig. 3 B, make the non-ejection place N that do not spray drop to drawing object zone A sheet lateral deviation from, then the drop amount of its part reduces, and also produces deviation on the thickness.
And, shown in Fig. 3 C, if non-ejection place N is disperseed along the cofferdam that forms drawing object zone A, though then the drop of its appropriate amount is disperseed,, in such cases, be easy to generate along the backward formed film of cofferdam drop bullet surface, have the ripple of small pit.
Therefore, in droplet discharge method of the present invention, shown in Fig. 4 A,, make the bit map data that is provided with the non-ejection place N in the A of drawing object zone along the center side of cofferdam outer circumferential side.At this moment, exist under the situation of a plurality of non-ejection place N, be preferably decentralized configuration they.In the A of drawing object zone, be dispersed in except center side by making non-ejection place N along the cofferdam outer circumferential side, an amount of drop is not coated in the A of drawing object zone with omitting and forms the pixel G of uniform film thickness.
Remove in addition, in droplet discharge method of the present invention, shown in Fig. 4 B, except drawing object zone A along the outer circumferential side in cofferdam at least along the center side of long side direction, make the bit map data that is provided with non-ejection place N.The short side direction along the cofferdam outer circumferential side that it is included in drawing object zone A is provided with the situation of non-ejection place N.For example, in ejection place with rectangular configuration (bit map data preparing department) in the A of drawing object zone and approximately parallel 1 row of the long side direction in the cofferdam of center side or multiple row all become the situation of non-ejection place N.Non-ejection place N owing to being provided with by the center side at drawing object zone A along the cofferdam length direction is not easy to produce the ripple that the drop bullet falls behind formed film surface, and the making of bit map data or ejection control are uncomplicated, so be easy.
In addition, producing the phenomenon of ripple on the film surface that the drop bullet fall behind to form, is that to be not limited to drawing object zone A be the situation of rectangular shape on the vertical view, also is created in having the zone of profile as shown in Figure 5, disposes the situation of non-ejection place N along the cofferdam.
And, in such cases, shown in Fig. 6 A and Fig. 6 B,, can seek the uniform film thicknessization that the drop bullet falls behind formed film also by non-ejection place N is dispersed in except the center side along the cofferdam outer circumferential side.
Like this, according to present embodiment, the non-ejection place N that does not spray drop is configured in except forming the center side along the cofferdam outer circumferential side of drawing object zone A, so, can avoid: fall behind the generation that has the ripple of small pit on the formed film surface along cofferdam drop bullet.Therefore, do not omit ground an amount of drop of coating in the A of drawing object zone, and can make uniform film thicknessization.
That is, can not produce membrane thickness unevenness and cooperate drawing object zone A an amount of drop can be sprayed on pixel G, can carry out high accuracy and high-quality drawing.
And except the center side along the cofferdam outer circumferential side, the non-ejection place N of decentralized configuration is so can seek the further homogenising of thickness.
In addition, drop amount adjustment method as in the A of drawing object zone has illustrated the method that non-ejection place N is set, but in non-ejection place N place, by give the mode of small amount of drop than other ejections place, the drop amount that also can carry out in the A of drawing object zone is adjusted (the different spray volumes M of place).According to this method, also be not easy to produce the ripple on formed film surface in the A of drawing object zone than the situation of not giving drop.
Further, under the few situation of amount of liquid in the A of drawing object zone, to illustrated up to now non-ejection place N, (the different spray volumes M of place) mode of the drop by the amount of giving to Duo than other ejections place also can be carried out the amount of liquid adjustment in the A of drawing object zone.Remove in addition,, also can carry out the amount of liquid adjustment by making up the mode that does not spray drop, ejection small amount of drop, ejection volume drop respectively.
(electro-optical device)
Below, an example of the electro-optical device of making in conjunction with the figure explanation utilizes above-mentioned droplet discharge method.In the present embodiment, as an example of electro-optical device, enumerate organic El device and describe.
Fig. 7 A, 7B, 7C and 7D are the sectional views of the relevant organic El device of the present invention of expression manufacturing process.
Shown in Fig. 7 D, organic El device 201 has: forming pixel electrode 202 on transparency carrier 204, between each pixel electrode 202, is the formation that clathrate forms when the arrow G direction is seen cofferdam 205.
In clathrate recess as these drawing object zones A, form hole injection layer 220, and with when the arrow G direction is seen serve as banded arrange etc. become the mode that regulation is arranged, in each clathrate recess, form R look luminescent layer 203R, G look luminescent layer 203G, B look luminescent layer 203B.And, form opposite electrode 213 thereon.The active component that is called 2 terminal types of TFD (Thin Film Diode thin film diode) element drives under the situation of above-mentioned pixel electrode 202, and above-mentioned opposite electrode 213 forms band shape when the arrow G direction is seen.On the other hand, (ThinFilm Transistor: the active component of 3 terminal types thin film transistor (TFT)) drives under the situation of above-mentioned pixel electrode 202, and above-mentioned opposite electrode 213 forms single face electrode to be called TFT.
The zone of being clamped by each pixel electrode 202 and each opposite electrode 213 is a pixel pixel, and the pixel pixel of 3 looks of R, G, B becomes a unit and forms a pixel.
Control makes the desirable pixel pixel in a plurality of pixel pixels optionally luminous by the method for the electric current of each pixel pixel, thus, in arrow H direction, can show desirable complete color images.
For example, manufacture method as follows can be made above-mentioned organic El device 201.That is, shown in Fig. 7 A,, after formation is called the active element of TFE element or TFT element, further form pixel electrode 202 on the surface of transparency carrier 204.As the formation method, for example, can utilize photoetching process, vacuum vapour deposition, sputtering method, pyrosol (pyrosol) method etc.
As the material of pixel electrode 202, can utilize the composite oxides of ITO (Indium Tin Oxide indium tin oxide), tin oxide, indium oxide and zinc oxide etc.
Then, shown in Fig. 7 A, utilizing well-known pattern formation method, for example utilizing photoetching process to form the next door is cofferdam 205, by the junction of this cofferdam each transparent pixels electrode 202 of 205 landfills.Thus, can improve contrast, can prevent the colour mixture of luminescent material, can prevent the leakage of the light between pixel and the pixel.As cofferdam 205 materials, as long as to the solvent of EL luminescent material have durability just there is no particular limitation, but, that the teflon of fluorohydrocarbon gas plasma process (registration mark) is changed is possible, for example, the organic material that is called allyl resin, epoxy resin, photosensitive polyimide is for well.
Then, coating, is carried out the continuumpiston of oxygen and fluorohydrocarbon gaseous plasma and is handled with before the material as the hole injection layer of functional aqueous body to transparency carrier 204.Thus, polyimide surface becomes hydrophobization, ITO surface and becomes hydrophiling and wait and control the wettability that pattern imperceptibly forms the substrate-side of usefulness.As plasma generating device, can utilize the device that produces plasma in the vacuum, also can utilize the device that produces plasma in the atmosphere.
Then, shown in Fig. 7 A,, on each pixel electrode 202, apply and form pattern from the drop 258 of the shower nozzle 3a of droplet ejection apparatus shown in Figure 11 ejection hole injection layer material.The ejection of this drop 258 utilizes relevant droplet discharge method of the present invention to carry out.Thereby, drop 258 correctly bullet fall (spray) 205 that surrounded in the cofferdam, be that each color filter element forms in the zone as the ejection zone in want drawing object zone, have the evenly coating of deviation ground with uniform thickness.After its coating, in vacuum (1 holder), under the room temperature, 20 minutes condition, remove solvent.Then, in atmosphere, 200 ℃ (on hot plate), form by 10 minutes heat treatments: and the immiscible hole injection layer 220 of luminescent layer material.Thickness in above-mentioned condition is 40nm.
Then, shown in Fig. 7 B, each color filter element forms on the hole injection layer 220 in the zone, coating as the R luminescent layer of organic EL luminescent material of functional aqueous body with material with as the G luminescent layer material of organic EL luminescent material of functional aqueous body.At this, each luminescent layer also is from the shower nozzle 3a of droplet ejection apparatus shown in Figure 11 ejection drop 258 with material and bullet drops on each color filter element and forms the zone.And the ejection of this drop 258 also is to utilize relevant droplet discharge method of the present invention to carry out, so each drop 258 correctly is sprayed on color filter element and forms in the zone, does not have the evenly coating of deviation ground with uniform thickness.
The coating luminescent layer with material after, under (1 holder), room temperature, 20 minutes the condition, remove solvent in a vacuum.Then, in nitrogen atmosphere, 150 ℃, 4 hours heat treatment comes to form R look luminescent layer 203R and G look luminescent layer 203G behind the conjugation.By the thickness in the above-mentioned condition is 50nm.Come the luminescent layer of conjugation to be insoluble to solvent by heat treatment.
In addition, form before the luminescent layer, also can carry out the continuumpiston processing of oxygen and fluorohydrocarbon gaseous plasma hole injection layer 220.Thus, form fluorine compound layer on hole injection layer 220, ionization potential uprises and the increase of hole injection efficiency, can provide luminous efficiency high organic El device.
Then, shown in Fig. 7 C, on R look luminescent layer 203R, the G look luminescent layer 203G and hole injection layer 220 in each pixel pixel, overlapping and form B look luminescent layer 203B as the EL luminescent material of functional aqueous body.Thus, on the basis of 3 looks that form R, G, B, the difference in height (ladder) between landfill R look luminescent layer 203R and G look luminescent layer 203G and the cofferdam 205 and can make its planarization.Thus, can reliably prevent short circuit between upper/lower electrode.By adjusting the thickness of B look luminescent layer 203B, in the stepped construction of B look luminescent layer 203B between R look luminescent layer 203R and G look luminescent layer 203G, play a part electronics and inject transfer layer, do not send the light of B look.
Formation method as forming as above-mentioned B look luminescent layer 203B for example, can adopt general whirl coating maybe can adopt and R look luminescent layer 203R, the identical ink-jet method of G look luminescent layer 203G forming method as wet method.
Then, shown in Fig. 7 D,, can produce organic El device 201 as target by forming opposite electrode 213.Opposite electrode 213 is respectively under the situation of face electrode, and for example, Mg, Ag, Al, Li etc. utilize the one-tenth embrane method that is called vacuum vapour deposition, sputtering method etc. to form as material.In addition, opposite electrode 213 is under the situation of band electrode, utilizes photoetching process etc. that the electrode layer that forms film is carried out pattern and forms and can form.
According to the manufacture method of organic El device 201 discussed above, can be from the shower nozzle 3a of droplet ejection apparatus 1 as drop ejection hole injection layer with material and each luminescent layer material, and bullet drops on each color filter element and forms in the zone.Thereby according to this manufacture method, hole injection layer is with material or each luminescent layer material, in cofferdam 205, with the coating of uniform uniform film thickness, its result can produce easily: big picture all can high meticulous demonstration high quality image big picture organic El device 201.
In addition, in the manufacture method of the organic El device of present embodiment, utilize droplet ejection apparatus 1, utilize the drop of shower nozzle 3a to gush out and form each colored pixels pixel of R, G, B, so, there is no need the complicated procedures of forming that the process picture utilizes photolithographic method, can waste material yet.
Below, illustrate that in conjunction with Fig. 8 and Fig. 9 the circuit of the EL device of present embodiment constitutes.
Fig. 8 circuit diagram that to be expression make with the manufacture method shown in Fig. 7 A to Fig. 7 D as the part of the display unit of organic El device inscape.Fig. 9 is the amplification view of planar structure of the pixel region of the display unit shown in the presentation graphs 8.
In Fig. 8, display unit 501 is the active matrix type displays that utilize as the EL display element of organic El device.This display unit 501, on transparent display base plate 502, have: a plurality of scan lines 503, a plurality of common supply line 505 that extends side by side to a plurality of holding wires 504 of these scan line 503 crisscross extensions, at these holding wires 504, the formations of distribution separately.And,, be provided with pixel region 501A in the crosspoint of scan line 503 with holding wire 504.
To holding wire 504, be provided with: data side drive circuit 507 with shift register, level shift, video line, analog switch.To scan line 503, be provided with: scan-side drive circuit 508 with shift register and level shift.At each pixel region 501A, be provided with: the switching thin-film transistor 509 of supplying with sweep signal by scan line 503; The memory capacitance cap of the picture signal of being supplied with by 509 storages of these switching thin-film transistors and inhibit signal line 504; The picture signal that kept of memory capacitance cap is supplied with the current film transistor 510 at gate electrode thus; When being connected electrically in common supply line 505, flow to the pixel electrode 511 of drive current from common supply line 505 by this current film transistor 510; Be sandwiched in the light-emitting component 513 between this pixel electrode 511 and the reflecting electrode 512.
According to such formation, if driven sweep line 503 and switching thin-film transistor 509 becomes connection, then the current potential of Ci Shi holding wire 504 remains on memory capacitance cap.According to the state of this memory capacitance cap, the connection off-state of decision current film transistor 510.By the passage of current film transistor 510, pass through electric current from common supply line 505 to pixel electrode 511, further pass through electric current to reflecting electrode 512 by light-emitting component 513.
Thus, light-emitting component 513 sends and the corresponding light of these magnitudes of current that pass through.
Like this display unit 501 that constitutes utilizes the manufacture method of above-mentioned organic El device to make, so, relatively at a low price and big picture can the high meticulous high quality images that shows in all.
(electronic instrument)
Below, illustrate: the electronic instrument that possesses the electro-optical device of above-mentioned embodiment.Figure 10 A is the stereogram of expression mobile phone one example.
In Figure 10 A, symbol 1000 is expression mobile phone main bodys, and symbol 1001 is expression display parts that electro-optical device constituted by above-mentioned embodiment.
Figure 10 B is the stereogram of one of expression Wristwatch-type electronic instrument example.In Figure 10 B, symbol 1100 expression wrist-watch main bodys, symbol 1101 expressions are by the display part that electro-optical device constituted of above-mentioned embodiment.
Figure 10 C is the stereogram of one of example such as the portable information processor of expression word processor, personal computer etc.In Figure 10 C, symbol 1200 expression information processors, the input part of symbol 1202 expression keyboards etc., the main body of symbol 1204 expression information processors, symbol 1206 expressions are by the display part that electro-optical device constituted of above-mentioned embodiment.
At the electronic instrument shown in Figure 10 A, Figure 10 B and Figure 10 C, possess the electronic instrument of above-mentioned embodiment, so, even display part becomes big picture, can the high meticulous high quality images that shows at its display part.
In addition, technical scope of the present invention is not limited to above-mentioned embodiment, does not break away from the scope of aim of the present invention all changes in addition; Concrete material of enumerating in embodiment or layer formation etc. be an example only, can suitably change.For example, in the above-described embodiment, exemplified out organic El device, but the present invention is defined in this, in the various electro-optical devices of plasm display device, liquid-crystal apparatus etc., can use the present invention as one of electro-optical device; Aspects such as coating at the coloured material of colour filter also can be suitable for the present invention.In addition, the formation thing of relevant droplet discharge method of the present invention is not limited to pixel etc., also can utilize relevant droplet discharge method of the present invention to form Wiring pattern, electrode, various semiconductor elements etc.
Claims (10)
1, a kind of droplet discharge method, wherein:
Comprise: to the drawing object zone that the cofferdam surrounded on the substrate, while make shower nozzle scan the operation that sprays drop at certain intervals,
Described drawing object zone has: be positioned at described drawing object zone outer circumferential side the outer circumferential side zone and as the center side zone in zone except described outer circumferential side zone,
In described center side zone, be provided with not non-ejection place that can bullet falls from the described drop of described shower nozzle.
2, droplet discharge method according to claim 1, wherein:
Also comprise the operation that generates the bit map corresponding with described drawing object zone,
Described bit map has respectively along the multiple row of the long side direction of described drawing area,
Described non-ejection place is set at least one row of the center side except that the row in the outside in the described multiple row.
3, droplet discharge method according to claim 2, wherein:
Described non-ejection place is by at least one row of decentralized configuration in described center side.
4, droplet discharge method according to claim 2, wherein:
At least whole row of described center side are described non-ejections place.
5, a kind of droplet discharge method, wherein:
Comprise: to the drawing object zone that the cofferdam surrounded on the substrate, while make shower nozzle scan the operation that sprays drop at certain intervals,
Described drawing object zone has: be positioned at described drawing object zone outer circumferential side the outer circumferential side zone and as the center side zone in zone except described outer circumferential side zone,
In described center side zone, be provided with bullet from the described drop of the described shower nozzle amount different spray volumes place different that fall with its elsewhere.
6, droplet discharge method according to claim 5, wherein:
Also comprise the operation that generates the bit map corresponding with described drawing object zone,
Described bit map has respectively along the multiple row of the long side direction of described drawing area,
Described different spray volumes place is set at least one row of the center side except that the row in the outside in the described multiple row.
7, droplet discharge method according to claim 6, wherein:
Described different spray volumes place is by at least one row of decentralized configuration in described center side.
8, droplet discharge method according to claim 6, wherein:
At least whole row of described center side are described different spray volumes places.
9, a kind of manufacture method of electro-optical device, wherein:
Utilize described any one droplet discharge method of claim 1 to 8.
10, electronic instrument, wherein:
Possesses the electro-optical device that the described electro-optical device manufacture method of claim 9 is made.
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| JP2004323659 | 2004-11-08 | ||
| JP2004323659 | 2004-11-08 | ||
| JP2005234377 | 2005-08-12 |
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| CN100450774C true CN100450774C (en) | 2009-01-14 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1220404A (en) * | 1997-07-16 | 1999-06-23 | 精工爱普生株式会社 | Composition for organic EL element and method of manufacturing organic EL element |
| JP2000106278A (en) * | 1997-09-02 | 2000-04-11 | Seiko Epson Corp | Manufacture of organic el element and the organic el element |
| JP2002343567A (en) * | 2001-05-22 | 2002-11-29 | Canon Inc | Manufacturing method of organic el element, exposure device and light-emission device |
| JP2003317945A (en) * | 2002-04-19 | 2003-11-07 | Seiko Epson Corp | Manufacturing method for device, device, and electronic apparatus |
| JP2004255335A (en) * | 2003-02-27 | 2004-09-16 | Seiko Epson Corp | Method and apparatus for discharging liquid substance, manufacture method for color filter and color filter, liquid crystal display device, manufacture method for electroluminescence device, electroluminescence device, manufacture method for plasma display panel, plasma display panel, and electronic equipment |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1220404A (en) * | 1997-07-16 | 1999-06-23 | 精工爱普生株式会社 | Composition for organic EL element and method of manufacturing organic EL element |
| JP2000106278A (en) * | 1997-09-02 | 2000-04-11 | Seiko Epson Corp | Manufacture of organic el element and the organic el element |
| JP2002343567A (en) * | 2001-05-22 | 2002-11-29 | Canon Inc | Manufacturing method of organic el element, exposure device and light-emission device |
| JP2003317945A (en) * | 2002-04-19 | 2003-11-07 | Seiko Epson Corp | Manufacturing method for device, device, and electronic apparatus |
| JP2004255335A (en) * | 2003-02-27 | 2004-09-16 | Seiko Epson Corp | Method and apparatus for discharging liquid substance, manufacture method for color filter and color filter, liquid crystal display device, manufacture method for electroluminescence device, electroluminescence device, manufacture method for plasma display panel, plasma display panel, and electronic equipment |
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| CN1772485A (en) | 2006-05-17 |
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Denomination of invention: Droplet ejection method, manufacturing method of electro-optical device, and electronic instrument Effective date of registration: 20230625 Granted publication date: 20090114 Pledgee: Xinji Co.,Ltd. Pledgor: Kedihua display technology (Shaoxing) Co.,Ltd. Registration number: Y2023990000312 |