CN100436657C - 基于霍夫变换的直拉单晶硅棒直径的测量方法 - Google Patents
基于霍夫变换的直拉单晶硅棒直径的测量方法 Download PDFInfo
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Families Citing this family (15)
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CN102469323B (zh) * | 2010-11-18 | 2014-02-19 | 深圳Tcl新技术有限公司 | 一种2d图像转3d图像的方法 |
CN102061517B (zh) * | 2010-12-13 | 2012-03-07 | 浙江长兴众成电子有限公司 | 直拉单晶硅直径测量方法 |
CN102795627B (zh) * | 2012-06-19 | 2013-12-25 | 合肥瑞石测控工程技术有限公司 | 多晶硅还原炉多参量在线监测与优化控制装置及方法 |
CN102787353B (zh) * | 2012-08-15 | 2015-04-01 | 北京七星华创电子股份有限公司 | 单晶炉非接触式硅棒晶线测量方法 |
CN103046128B (zh) * | 2012-12-21 | 2015-10-28 | 西安隆基硅材料股份有限公司 | 直拉单晶直径测量方法 |
CN103558129B (zh) * | 2013-11-22 | 2016-02-24 | 晶格码(青岛)智能科技有限公司 | 一种探头式在线立体成像检测***及方法 |
CN104990510B (zh) * | 2015-07-11 | 2017-10-17 | 烟台南山学院 | 一种直拉单晶硅直径测量方法 |
KR101775057B1 (ko) * | 2015-09-07 | 2017-09-05 | 한국생산기술연구원 | 용융로의 아일랜드 위치검출 장치 및 방법 |
CN111733449B (zh) * | 2020-07-07 | 2021-04-27 | 上海新昇半导体科技有限公司 | 晶棒生长设备及生长方法 |
CN112381807B (zh) * | 2020-11-18 | 2023-06-20 | 北京图知天下科技有限责任公司 | 一种直拉单晶生产中晶体直径检测方法、***及设备 |
CN113112493B (zh) * | 2021-04-29 | 2024-02-02 | 北京图知天下科技有限责任公司 | 引晶亮度的计算方法、***、终端设备及存储介质 |
CN113829673B (zh) * | 2021-11-26 | 2022-03-18 | 武汉宏博纸品包装有限公司 | 一种基于霍夫变换的蜂窝纸芯拉伸控制方法及*** |
CN114252018B (zh) * | 2021-12-29 | 2024-04-30 | 西安奕斯伟材料科技股份有限公司 | 晶体直径检测方法、***及计算机程序产品 |
CN114399489B (zh) * | 2022-01-12 | 2022-11-25 | 苏州天准科技股份有限公司 | 拉晶过程中光圈直径的监测方法、存储介质和终端 |
CN115546284B (zh) * | 2022-11-18 | 2023-04-28 | 浙江晶盛机电股份有限公司 | 晶炉双目三维测量补偿方法、装置、计算机设备和存储介质 |
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CN1020482C (zh) * | 1987-05-05 | 1993-05-05 | 无比太阳能公司 | 生长管状晶体的控制设备 |
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CN1323364A (zh) * | 1998-10-14 | 2001-11-21 | Memc电子材料有限公司 | 控制硅晶体生长的方法和*** |
CN1324414A (zh) * | 1998-11-03 | 2001-11-28 | Memc电子材料有限公司 | 提拉工艺装料时测量多晶块大小和分布的方法和设备 |
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CN1020482C (zh) * | 1987-05-05 | 1993-05-05 | 无比太阳能公司 | 生长管状晶体的控制设备 |
CN1323364A (zh) * | 1998-10-14 | 2001-11-21 | Memc电子材料有限公司 | 控制硅晶体生长的方法和*** |
CN1324414A (zh) * | 1998-11-03 | 2001-11-28 | Memc电子材料有限公司 | 提拉工艺装料时测量多晶块大小和分布的方法和设备 |
CN1320724A (zh) * | 2000-04-26 | 2001-11-07 | 三菱麻铁里亚尔硅材料株式会社 | 单晶与熔液固液界面形状和单晶点缺陷分布的模拟方法 |
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Effective date of registration: 20200804 Address after: E2-002, Science Park, Xi'an University of technology, No.26, gazeng Road, Zhangba Street office, hi tech Zone, Xi'an City, Shaanxi Province Patentee after: Xi'an yisiwei Equipment Technology Co.,Ltd. Address before: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee before: Xi'an core magnetic intelligent technology partnership (limited partnership) Patentee before: Xi'an Polytechnic Asset Management Co.,Ltd. Effective date of registration: 20200804 Address after: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee after: Xi'an core magnetic intelligent technology partnership (limited partnership) Patentee after: Xi'an Polytechnic Asset Management Co.,Ltd. Address before: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee before: Liu Ding Patentee before: Xi'an Polytechnic Asset Management Co.,Ltd. Co-patentee before: Zhao Yue Co-patentee before: Jiao Shangbin Co-patentee before: Jiang Lei Co-patentee before: Liang Yanming Co-patentee before: Wu Shihai Co-patentee before: Jiang Jian Effective date of registration: 20200804 Address after: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee after: Liu Ding Patentee after: Xi'an Polytechnic Asset Management Co.,Ltd. Co-patentee after: Zhao Yue Co-patentee after: Jiao Shangbin Co-patentee after: Jiang Lei Co-patentee after: Liang Yanming Co-patentee after: Wu Shihai Co-patentee after: Jiang Jian Address before: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Patentee before: Xi'an Polytechnic Asset Management Co.,Ltd. Effective date of registration: 20200804 Address after: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Patentee after: Xi'an Polytechnic Asset Management Co.,Ltd. Address before: 710048 Shaanxi city of Xi'an Province Jinhua Road No. 5 Patentee before: XI'AN University OF TECHNOLOGY |
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Effective date of registration: 20210922 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an yisiwei Material Technology Co.,Ltd. Patentee after: Xi'an yisiwei Equipment Technology Co.,Ltd. Address before: E2-002, Science Park, Xi'an University of technology, No.26, gazelle Road, Zhangba Street office, high tech Zone, Xi'an City, Shaanxi Province, 710077 Patentee before: Xi'an yisiwei Equipment Technology Co.,Ltd. |
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Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: Xi'an Xinhui Equipment Technology Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: Xi'an yisiwei Equipment Technology Co.,Ltd. |