CN100425783C - Floor structure for purified chamber - Google Patents
Floor structure for purified chamber Download PDFInfo
- Publication number
- CN100425783C CN100425783C CNB021419841A CN02141984A CN100425783C CN 100425783 C CN100425783 C CN 100425783C CN B021419841 A CNB021419841 A CN B021419841A CN 02141984 A CN02141984 A CN 02141984A CN 100425783 C CN100425783 C CN 100425783C
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- Prior art keywords
- floor board
- adjacent
- iron
- mentioned
- floor
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- Expired - Lifetime
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Abstract
Provided is a floor structure of a clean room generating no level difference in adjacent floor panels when moving a carrier.This floor structure is characterized by being composed of a plurality of H-shape steel arranged in parallel at a prescribed interval,a plurality of floor panels laid by placing the opposed outermost peripheral edge parts on the adjacent H-shape steel and a floor panel support device for connecting a central part of the outermost peripheral edge part of the floor panels adjacent between the adjacent H-shape steel and respective lower parts of the adjacent H-shape steel.The floor panel support device is characterized by being composed of a receiving member for receiving the central part of the outermost peripheral edge part of the floor panels adjacent between the adjacent H-shape steel and an freely expandable support member rotatably installed in both end parts of this receiving member and abutting to the respective lower parts of the H-shape steel.
Description
Technical field
The present invention relates to lay the deck construction of the Clean room that forms with floor board.
Background technology
In the past, the deck construction of Clean room for example shown in Figure 9, be by the sheet material width be arranged in parallel i iron (H shaped steel) 2, and lay for example floor board 3 of 600mm * 600mm * 45mm thereon.On the rail level 2a of the top of i iron 2, be provided with the bight that sheet material fixing mount 5 is used to support each floor board 3.
So the deck construction 1 of the Clean room that constitutes is the structure of carrier 4 of can walking thereon.
Recently, maximization, the carrier 4 along with liquid crystal board and semiconductor wafer further maximizes, its gross weight becomes very heavy.
The thing followed is, along with the moving of carrier 4, because of problem damaged around the surface lining of caused vibrations of floor board 3 deflections and floor board 3.
For example, in Figure 10, carrier 4 is when the direction of arrow moves, because floor board 3 belows of splicing mutually has i iron 2, and inserts therein and the fixing thickness with pedestal 5 of floor board spacer equally, the deflection that can eliminate floor board 3 thus makes between the two floor sheet materials 3 and does not produce Tai Bands.
But, as shown in figure 11, when carrier 4 when the direction of arrow moves, as shown in Figure 12 and Figure 13, owing to the load that is not subjected to for 3 times being added at the two floor sheet materials that splice on the carrier 4 wheel 4a, therefore wheel 4a one rides up to the edge part 3a1 of floor board 3, and the edge part 3a1 that then is subjected to load one side's floor board 3 produces deflection and produce big step 6 between adjacent floor board 3.Therefore when wheel 4a crosses this step 6, will produce very big impact to the edge part 3a2 of the floor board 3 that also do not carry a side and make the surface lining of the edge part 3a2 of floor board 3 produce damage or peel off, problem such as vibrations in addition thereupon.
Summary of the invention
The present invention is in order to solve so invention of problem in the past, and its purpose is: a kind of deck construction that the floor board of adjacency can not produce the Clean room of Tai Bands when carrier moves is provided.
The deck construction of Clean room of the present invention is characterized in that: it is made of many i iron (H shaped steel), polylith floor board and the floor board bracing or strutting arrangement of spaced and parallel setting in accordance with regulations,
Described polylith floor board, its on adjacent i iron mounting relatively to outermost edge portion be laid; And described floor board bracing or strutting arrangement, its be the central portion of the outermost edge portion of floor board adjacent between the above-mentioned adjacent i iron, and each soffit of girders of above-mentioned adjacent two i iron and lower flange linking part between form bearing diagonal.
The deck construction of described Clean room is characterized in that: described floor board bracing or strutting arrangement, constituted by the support unit of bearing part and retractable,
Described bearing part is between above-mentioned adjacent i iron, bear the central portion of the outermost edge portion of adjacent floor board; The support unit of described retractable is contained in the both ends of this bearing part free to rotately and is abutted against with the soffit of girder and the lower flange linking part of above-mentioned i iron.
The deck construction of described Clean room, it is characterized in that: described floor board bracing or strutting arrangement, load for the central portion of the outermost edge portion of floor board adjacent between above-mentioned adjacent i iron is applied in from top prevents the central portion deflection of this outermost edge portion by resistance to compression pression.
A kind of deck construction of Clean room is characterized in that: it is made of many i iron, polylith floor board and the floor board bracing or strutting arrangement of spaced and parallel setting in accordance with regulations,
Described polylith floor board, its on adjacent i iron respectively in the same parts of mounting relatively to outermost edge portion be laid; And described floor board bracing or strutting arrangement, it is to be connected between the above-mentioned adjacent i iron with the central portion of other outermost edge portion of the outermost edge portion quadrature of mounting on above-mentioned i iron of floor board, with each bottom of above-mentioned adjacent i iron,
Described floor board bracing or strutting arrangement is made of the support unit of bearing part and retractable,
Described bearing part bears two central portions of above-mentioned other outermost edge portion of adjacent floor board between above-mentioned adjacent i iron; The support unit of described retractable is installed in the both ends of described bearing part free to rotately and is abutted against with each soffit of girder and the lower flange connecting portion of above-mentioned i iron.
Description of drawings
Fig. 1 is the plan view of deck construction of the Clean room of embodiments of the invention.
Fig. 2 is the I-I sectional drawing of Fig. 1.
Fig. 3 is the II-II sectional drawing of Fig. 1.
Fig. 4 is the side view of the bearing part that uses of Fig. 1.
Fig. 5 is the front view of the bearing part that uses of Fig. 1.
Fig. 6 is the plan view of the bearing part that uses of Fig. 1.
Fig. 7 is the front view of the head that uses of Fig. 1.
Fig. 8 is the front view of the seat portion that uses of Fig. 1.
Fig. 9 is the plan view of Clean room deck construction in the past.
Figure 10 is the III-III sectional drawing of Fig. 9.
Figure 11 is the IV-IV sectional drawing of Fig. 9.
Figure 12 is the enlarged drawing of Figure 11.
Figure 13 is the key diagram that produces step on floor board.
Symbol description
The deck construction of 10-Clean room
11-i iron (H shaped steel)
The 12-upper flange
The 13-lower flange
The 14-i iron soffit of girder
The 15-linking part
The 16-floor board
16a, 16b, 16c, 16d-outermost edge portion
16c1,16d1-central portion
17-sheet material is fixedly used pedestal
The 18-spacer
20-floor board supporting arrangement
The 21-bearing part
The 22-metal sheet
23-bears portion
The 24-through hole
The 25-support unit
The 26-head
27-junction plate parts
The 27a-body
The 27b-axial region
The 28-axis hole
The 29-bolt and nut
30-connecting axle parts
31-first tube connector
31a, 33a-cylindrical thread
The 32-sleeve
33-second tube connector
34-seat portion
The 40-carrier
The 40a-wheel
The C-Clean room
C1-ground
Specific embodiments of the invention
Below, with reference to embodiment shown in the drawings, the present invention is described.
Fig. 1 to Fig. 3 be embodiments of the invention the Clean room floor structure 10 schematic diagram (corresponding to the invention 1,2).
The structure 10 on the Clean room floor of embodiments of the invention, at first is the same with the floor of in the past Clean room, by the width (interval of regulation) of the floor board 16 many i iron 11 that be arranged in parallel.
At this moment, i iron 11 is to be arranged on the floor C1 in the room that forms Clean room C according to conventional way.
Then, lay polylith the floor board 16 and 16a of outermost edge portion, 16b being placed on the upper flange 12,12 of adjacent i iron 11,11.
At this moment, on the upper flange 12,12 of i iron 11, place floor board 16 the 16a of outermost edge portion, 16b part, to be provided with sheet material fixing with pedestal 17 and spacer 18.
Constructed and the same in the past Clean room floor in order to last method.
Then, be attached at each the i iron soffit of girder 14,14 of central portion 16c1, the 16d1 of the 16c of outermost edge portion, the 16d of floor board adjacent between the adjacent i iron 11,11 16,16, adjacent i iron 11,11 and the linking part 15,15 of each lower flange 13,13 with floor board supporting arrangement 20.
At this, floor board supporting arrangement 20 be by: bear floor board adjacent between adjacent i iron 11,11 16,16 the 16c of outermost edge portion, 16d central portion 16c1,16d1 bearing part 21, can be contained in the both ends of this bearing part 21 and the support unit that can freely stretch 25,25 formations of being abutted against flexibly rotationally with the linking part 15,15 of the soffit of girder 14,14 of each i iron 11 and each lower flange 13,13.
Bearing part 21 as Fig. 4～shown in Figure 6, be that an end is converted into the portion of bearing 23 that the welded together and end of pair of metal sheet material 22, the 22 usefulness spot welding of L font forms the recess shape.
And bearing part 21 is provided with the through hole 24,24 of the both sides side that connects the opposite side wall that bears portion 23.
Support unit the 25, the 25th, by: can be contained in head 26,26 on the through hole 24,24 of the both sides side of being located at bearing part 21 by bolt and nut 29 flexibly rotationally, be connected the connecting axle parts 30,30 of retractable of this head 26,26 and the seat portion 34 that is contained in the bottom of these connecting axle parts 30,30 constitutes.
Head the 26, the 26th, by: be provided with body 27a, the 27a of the axis hole 28 that is connected with through hole 24,24 respectively by bolt and nut 29,29 from the both sides of bearing part 21 and a pair of junction plate parts 27,27 that axial region 27b, the 27b thinner than this body 27a, 27a forms and constitute.
Connecting axle parts the 30, the 30th, by: first tube connector 31,31 of cylindrical thread 31a, first tube connector, 33,33 formations of on internal face, having established the sleeve 32 of threaded portion 32a and having established cylindrical thread 33a in the end established in the end.
At this, in order to prevent connecting axle parts 30 reversing and to be convenient to keep the extended bottom of the body 34a of seat portion of linearity and up rightness, seat portion 34.
The following describes the assembling of the floor board supporting arrangement 20 of formation like this.
At first, from the both sides of the bearing part 21 of Fig. 4～shown in Figure 6 near last a pair of junction plate parts 27,27, can connect 28,28 and two through holes 24,24 of each axis hole flexibly rotationally and can be contained in the both sides of bearing part 21 at the following head 26,26 of the state of clamping bearing part 21 flexibly rotationally with bolt and nut 29.
Then, load onto a portion 34,34 respectively in the bottom of second tube connector 33,33 of connecting axle parts 30,30.
Then, at each soffit of girder 14,14 that seat portion 34,34 is placed i iron 11,11, with under the state of the linking part 15,15 of each lower flange 13,13, lift connecting axle parts 30,30 and also axial region 27b, the 27b of head 26,26 inserted in the 31b of hole portion, the 31b of first tube connector 31,31.
Then, while lift connecting axle parts 30,30, rotational sleeve 32,32 and draw back first tube connector 31,31 and second tube connector 33,33, adjust the height of floor board supporting arrangement 20 simultaneously again.
With this, the bottom of central portion 16c1, the 16d1 of the 16c of outermost edge portion, the 16d of the adjacent floor board 16,16 between adjacent i iron 11,11, abut against in the portion of bearing 23 of bearing part 21.
At this moment, the connecting axle parts between bearing part 21 and seat portion 34 30,30 are skewed crossing, have firmly fixed floor board supporting arrangement 20.
Simultaneously, head 26,26 and connecting axle parts 30,30, so axial region 27b, 27b by head 26,26 are filled within the 31b of hole portion, the 31b of first tube connector 31,31 and withstand bottom 27c, the 27c of body 27a, 27a with end 31c, the 31c of first tube connector 31,31, the head 26,26 and first tube connector 31,31 are arranged in a straight line.
In addition, owing to cylindrical thread 31a, 33a by being located at each end of first tube connector 31,31 and second tube connector 33,33, connect together movably with sleeve 32, so first tube connector 31,31 and second tube connector 33,33 are arranged in a straight line similarly.
And, so because axial region 34b, the 34b of seat portion 34,34 fills out in the 33b of hole portion, the 33b of second tube connector 33,33 and end 33c, 33c second tube connector 33,33 and 34,34 arrangements of seat portion of having withstood second tube connector 33,33 with shoulder 34c, the 34c of seat portion 34,34 in a straight line.
Therefore, the load that is added on the bearing part 21 passes to connecting axle parts 30,30 and each soffit of girder 14,14 by seat portion 34,34 usefulness i iron 11,11 by head 26,26, props up with the linking part 15,15 of each lower flange 13,13.
Thereby, even the wheel 40a of carrier 40 roll the 16c of outermost edge portion, the 16d that are not stated from each floor board 16 on the i iron 11,11, can be to the step that produced like that in the past yet, therefore, can not produce the edge part of each floor board 16 big impact, also can not make each floor board 16 edge part surperficial veneer damage or peel off, also just produce simultaneously the problem of vibrations.
The effect of invention
As mentioned above, according to the present invention, since carrier on adjacent floor board, do not produce when moving So give birth to step, have to prevent along with the movement of the carrier vibrations because of the floor board deflection Advantage with the breakage of floor board surfacing edge part.
Claims (2)
1, a kind of deck construction of Clean room is characterized in that:
It is made of many i iron, polylith floor board and the floor board bracing or strutting arrangement of spaced and parallel setting in accordance with regulations,
Described polylith floor board, its on adjacent i iron respectively in the same parts of mounting relatively to outermost edge portion be laid; And
Described floor board bracing or strutting arrangement, its be make between the above-mentioned adjacent i iron and the mounting of floor board in the central portion of other outermost circumference of the outermost edge portion quadrature on the above-mentioned i iron, and each soffit of girders of above-mentioned adjacent two i iron and lower flange linking part between form bearing diagonal.
2, the deck construction of Clean room according to claim 1 is characterized in that:
Described floor board bracing or strutting arrangement is made of the support unit of bearing part and retractable,
Described bearing part is between above-mentioned adjacent i iron, bear two central portions of above-mentioned other outermost edge portion of adjacent floor board;
The support unit of described retractable is contained in the both ends of this bearing part free to rotately and is abutted against with each soffit of girder and the lower flange linking part of above-mentioned i iron.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP181382/2002 | 2002-06-21 | ||
| JP2002181382A JP3867020B2 (en) | 2002-06-21 | 2002-06-21 | Clean room floor structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1465831A CN1465831A (en) | 2004-01-07 |
| CN100425783C true CN100425783C (en) | 2008-10-15 |
Family
ID=29774078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021419841A Expired - Lifetime CN100425783C (en) | 2002-06-21 | 2002-08-30 | Floor structure for purified chamber |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3867020B2 (en) |
| CN (1) | CN100425783C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100430567C (en) * | 2005-07-29 | 2008-11-05 | 株式会社海广 | High strength panel |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11310974A (en) * | 1998-04-30 | 1999-11-09 | Nippon Steel Corp | Vibration proof structure of c-shaped steel architectural material and vibration proof method thereof |
| JP2001098750A (en) * | 1999-09-29 | 2001-04-10 | East Japan Railway Co | Floor structure of building |
-
2002
- 2002-06-21 JP JP2002181382A patent/JP3867020B2/en not_active Expired - Lifetime
- 2002-08-30 CN CNB021419841A patent/CN100425783C/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11310974A (en) * | 1998-04-30 | 1999-11-09 | Nippon Steel Corp | Vibration proof structure of c-shaped steel architectural material and vibration proof method thereof |
| JP2001098750A (en) * | 1999-09-29 | 2001-04-10 | East Japan Railway Co | Floor structure of building |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3867020B2 (en) | 2007-01-10 |
| JP2004027514A (en) | 2004-01-29 |
| CN1465831A (en) | 2004-01-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP02 | Change in the address of a patent holder |
Address after: Japan Tokyo central Akashi Cho 8 time 1 Patentee after: SANKI ENGINEERING CO.,LTD. Address before: Tokyo, Japan Patentee before: SANKI ENGINEERING CO.,LTD. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20081015 |