CN100421886C

CN100421886C - Apparatus and method for controlling elastic actuator

Info

Publication number: CN100421886C
Application number: CNB2004800269489A
Authority: CN
Inventors: 冈崎安直; 山本正树; 足达勇治; 浅井胜彦
Original assignee: Matsushita Electric Industrial Co Ltd
Current assignee: Panasonic Holdings Corp
Priority date: 2003-09-22
Filing date: 2004-09-22
Publication date: 2008-10-01
Anticipated expiration: 2024-09-22
Also published as: CN101310940A; JP4536349B2; JP2005095989A; CN1852790A; CN101310940B

Abstract

An internal pressure of a fluid pressure drive actuator is measured by pressure measuring means (9), the amount of displacement of a movable mechanism is measured, a target value and a measurement value of displacement are inputted and a positional error is compensated by positional error compensating means (12), a target value of a pressure difference of the actuator antagonistically driven is calculated from the target value by target pressure difference calculating means (14), each output from the positional error compensating means, target pressure difference calculating means, and pressure measuring means is inputted and a pressure difference error is compensated by pressure difference compensating means (15).

Description

The control device of elastic actuator and control method

Technical field

The present invention relates to control the control device and the control method of elastic actuator that fluid pressure actuated device etc. utilizes the action of the elastic actuator that elastomeric distortion drives, relate to the control device and the control method of the elastic-body actuator drive type movable mechanism of the movable agency that control drives by described elastic actuator in addition.

Background technology

In recent years, among carrying out energetically for the exploitation of home-use robots such as pet robot, can expect that more practical home-use robot such as housework auxiliary robot is practical in the future.Home-use robot be owing to need enter in the family, with human community life, therefore with in the past industrial robot etc. different aspect the necessary pattern.

The industrial machine philtrum uses electric motor or decelerator, utilizes the FEEDBACK CONTROL of high-gain, realizes that repeatable accuracy reaches higher finger tip positional precisions such as 0.1mm.But the mechanism that utilizes this kind electric motor to drive often is a rigidity height, flexible poor, and a lot of problems are arranged aspect security.

In contrast, in the home-use robot, not necessarily need such high accuracy such as repeatable accuracy 0.1mm, but security such as pay attention to when contacting with the mankind, can not working the mischief.So the not talkative field that is suitable for safety-sensitive such as home-use robot of mechanism that utilizes electric motor to drive as industrial robot in the past needs soft and safe mechanical arm.

At this kind problem, for example proposed to utilize the mechanical arm of the air pressure driver of MCKIBBEN (マ Star キべ Application) type.The air pressure driver of MCKIBBEN type forms following structure,, is equipped with the restraint device that is made of fibre bundle at the outer surface of the tubular elastomer that is made of elastomeric material that is, and two ends of tubular elastomer are hermetic sealed with containment member.When passing that fluid injects bleeder and when utilizing compressible fluid such as air in give the inner space of tubular elastomer, to press, tubular elastomer will mainly expand to radial direction, yet because of the effect of restraint device, be converted into the motion of the central axis direction of tubular elastomer, total length is shunk.Therefore the driver of this MCKIBBEN type possesses following feature owing to mainly be made of elastomer, that is, be to have flexibility, the driver of safety and lightweight.

But, the driver of MCKIBBEN type etc. utilizes in the fluid pressure actuated device of fluid pressure action of air etc., and what have that compressibility by fluid causes makes the unmanageable problems of elastic actuator such as bad response because of influences such as flexible character or flow path resistances.

At this problem, as conventional art, in No. 2583272 communique of Japanese patent gazette, announcement has following control device, that is,,, delay circuit can describe required track by being set for mechanical arm with servomotor and fluid pressure actuated device combination driving.

But, in the described control device that possesses delay circuit, because delay with respect to the target action often takes place, so bad response, can't carry out the operation that needs real-time.In addition, only under the situation of the combination of servomotor and fluid pressure actuated device, bring into play effect, and in the mechanical arm that only constitutes, can't bring into play effect by the fluid pressure actuated device.

Summary of the invention

The present invention is to solve described problem in the past and makes, its purpose be to provide can response good and precision position or power control the control device and the control method of the elastic actuator of the movable agencies such as mechanical arm that drive by elastic actuator goodly.

In order to reach described purpose, the present invention constitutes as described below.

According to mode 1 of the present invention, a kind of control device of elastic actuator is provided, it possesses:

The internal state measuring device of the internal state of the described elastic actuator that instrumentation changes because of the driving of described elastic actuator,

The output measuring device of the output of the described elastic actuator of instrumentation,

Desired value by importing the output of described elastic actuator and the instrumentation value of the described elastic actuator output that utilizes described output measuring device instrumentation compensate output error the output error compensation arrangement,

Decide according to the instrumentation value of the desired value of described elastic actuator output and the output of described elastic actuator the described elastic actuator that the driving because of described elastic actuator changes internal state desired value target internal state determination device,

By input from the output of described output error compensation arrangement, compensate the internal state error-compensating apparatus of internal state error from the output of described target internal state determination device and from the output of described internal state measuring device,

Control in the following manner, that is, and based on the described internal state error of utilizing the compensation of described internal state error-compensating apparatus and with the instrumentation value of the described output of described elastic actuator desired value as described output.

According to mode 2 of the present invention, a kind of control device of elastic actuator is provided, it possesses:

According to the desired value of described elastic actuator output and utilize the instrumentation value of internal state of the described elastic actuator of described internal state measuring device instrumentation, decide described elastic actuator internal state desired value target internal state determination device,

According to mode 11 of the present invention, a kind of control method of elastic actuator is provided, wherein,

Utilize the internal state of the described elastic actuator that internal state measuring device instrumentation changes because of the driving of described elastic actuator,

Utilize the output of the described elastic actuator of output measuring device instrumentation,

With the desired value of described elastic actuator output and the instrumentation value input and output error-compensating apparatus of the described elastic actuator output that utilizes described output measuring device instrumentation, utilize described output error compensation arrangement compensation output error,

According to the desired value of described elastic actuator output, utilize target internal state determination device to determine the desired value of the internal state of described elastic actuator,

Will be from the output of described output error compensation arrangement, from the output of described target internal state determination device and from the output input internal state error-compensating apparatus of described internal state measuring device, utilize described internal state error-compensating apparatus compensation internal state error, control makes the instrumentation value of the described output of described elastic actuator become the desired value of described output.

According to mode 12 of the present invention, a kind of control method of elastic actuator is provided, wherein,

According to the instrumentation value of the internal state of the desired value of the output of described elastic actuator and described elastic actuator, utilize target internal state determination device to determine the desired value of the internal state of described elastic actuator,

According to control device of the present invention, by setting the internal state error-compensating apparatus, the control system of the internal state feedback of the described elastic actuator that formation will change because of the driving of described elastic actuator, and set target internal state determination device, the control system that formation feedovers the target internal state, and can realize that response is good, steady-state deviation is few, the control of high-speed, high precision.

In addition, according to control method of the present invention, by utilizing the internal state error-compensating apparatus to carry out the control that internal state is fed back, and utilize target internal state determination device to carry out the control that the target internal state is feedovered, just can realize that response is good, steady-state deviation is few, the control of high-speed, high precision.

According to mode 13 of the present invention, a kind of control device of elastic-body actuator drive type movable mechanism of elastic actuator is provided, it possesses:

The internal state of the described elastic actuator that instrumentation changes because of the driving of described elastic actuator export the instrumentation value of described internal state the internal state measuring device,

The driving force that instrumentation is produced by described elastic actuator and export the instrumentation value of described driving force the driving force measuring device,

The output of the described movable agency that instrumentation is driven by described elastic actuator and export the instrumentation value of described output the output measuring device,

The desired value of the described output of the described movable agency that input is driven by described elastic actuator and by the instrumentation value of the described output of described output measuring device instrumentation, and with the output of output error compensated information with the output error compensation arrangement of compensation output error,

Be transfused to from the output of the described output error compensated information of described output error compensation arrangement and from the output of the instrumentation value of the described driving force of described driving force measuring device, and with the output of driving force error compensation information with the driving force error-compensating apparatus of compensation driving force error,

Be transfused to output from the described driving force error compensation information of described driving force error-compensating apparatus, from the output of the instrumentation value of the described internal state of described internal state measuring device and with the internal state error-compensating apparatus of internal state error compensation information output with compensation internal state error

Control in the following manner, that is, based on the instrumentation value of the described output of the described movable agency that will drive by described elastic actuator desired value as described output by the described internal state error compensation information of described internal state error-compensating apparatus output.

According to mode 14 of the present invention, a kind of control device of elastic-body actuator drive type movable mechanism of elastic actuator is provided, it possesses:

Be transfused to the described movable agency that drives by described elastic actuator output desired value and by the instrumentation value of the described output of described output measuring device instrumentation and with the output of output error compensated information with the output error compensation arrangement of compensation output error,

Be transfused to from the output of the described output error compensated information of described output error compensation arrangement and from the output of the instrumentation value of the described driving force of described driving force measuring device and with the output of driving force error compensation information with the driving force error-compensating apparatus of compensation driving force error,

Determine described elastic actuator described internal state desired value and export the desired value of described internal state target internal state determination device,

Be transfused to output from the described driving force error compensation information of described driving force error-compensating apparatus, from the output of the desired value of the described internal state of described target internal state determination device and from the output of the instrumentation value of the described internal state of described internal state measuring device, and with the internal state error-compensating apparatus of internal state error compensation information output with compensation internal state error

According to mode 15 of the present invention, a kind of control device of elastic-body actuator drive type movable mechanism of elastic actuator is provided, it possesses:

Be transfused to from the described output error compensated information of described output error compensation arrangement and from the output of the instrumentation value of the described driving force of described driving force measuring device and with the output of driving force error compensation information with the driving force error-compensating apparatus of compensation driving force error,

Be transfused to from the output of the desired value of the described internal state of described target internal state determination device and from the output of the instrumentation value of the described internal state of described internal state measuring device and with the internal state error-compensating apparatus of internal state error compensation information output with compensation internal state error

Control in the following manner, that is, based on by the instrumentation value of the described output of the described internal state error compensation information of described internal state error-compensating apparatus output and the described movable agency that will drive by described elastic actuator desired value as described output by the described driving force error compensation information of described driving force error-compensating apparatus compensation.

According to mode 17 of the present invention, a kind of control method of elastic-body actuator drive type movable mechanism of elastic actuator is provided, wherein,

The internal state of the described elastic actuator that instrumentation changes because of the driving of described elastic actuator obtains the instrumentation value of described internal state,

Instrumentation is obtained the instrumentation value of described driving force by the driving force of described elastic actuator generation,

Instrumentation is obtained the instrumentation value of described output by the output of the described movable agency of described elastic actuator driving,

According to the desired value of the described output of described elastic actuator with by the instrumentation value of the described output of the described elastic actuator of described output measuring device instrumentation, obtain the output error compensated information with the compensation output error,

Output according to the instrumentation value of the output of described output error compensated information and described driving force obtains driving force error compensation information with compensation driving force error,

Output according to the instrumentation value of the output of described driving force error compensation information and described internal state obtains internal state error compensation information with compensation internal state error,

Become the desired value of described output based on the instrumentation value of controlling the described output that makes the described movable agency that drives by described elastic actuator by described internal state error compensation information.

According to mode 18 of the present invention, a kind of control method of elastic-body actuator drive type movable mechanism of elastic actuator is provided, wherein,

According to the desired value of the output of the described movable agency that drives by described elastic actuator with by the instrumentation value of the described output of described output measuring device instrumentation, obtain the output error compensated information with the compensation output error,

Determine described elastic actuator described internal state desired value and obtain the desired value of described internal state,

Output according to the instrumentation value of the output of the desired value of the output of described driving force error compensation information, described internal state and described internal state obtains internal state error compensation information with compensation internal state error,

The instrumentation value of controlling the described output that makes the described movable agency that is driven by described elastic actuator based on described internal state error compensation information becomes the desired value of described output.

According to mode 19 of the present invention, a kind of control method of elastic-body actuator drive type movable mechanism of elastic actuator is provided, wherein,

According to the desired value of the output of the described movable agency that drives by described elastic actuator and the instrumentation value of described output, obtain the output error compensated information with the compensation output error,

Output according to the instrumentation value of the output of the desired value of described internal state and described internal state obtains internal state error compensation information with compensation internal state error,

Become the desired value of described output based on the instrumentation value of controlling the described output that makes the described movable agency that drives by described elastic actuator by described internal state error compensation information and described driving force error compensation information.

Control device according to mode 13 of the present invention, by setting the driving force error-compensating apparatus, the driving force feedback control system of the driving force feedback that formation will be produced by described elastic actuator, and set the internal state error-compensating apparatus, the internal state feedback control system of the internal state feedback of the described elastic actuator that formation will change because of the driving of described elastic actuator just can realize that response is good, effect of kinetics is few, the control of high-precision elastic-body actuator drive type movable mechanism.

In addition, control device according to mode 14 of the present invention, by setting the driving force error-compensating apparatus, the driving force feedback control system of the driving force feedback that formation will be produced by described elastic actuator, and set the internal state error-compensating apparatus, the internal state feedback control system of the internal state feedback of the described elastic actuator that formation will change because of the driving of described elastic actuator, and set target internal state determination device, with the feedforward of target internal state, just can realize that response is good, the control of the high-precision elastic-body actuator drive type movable mechanism that effect of kinetics is few and steady-state deviation is also little.

In addition, control device according to mode 15 of the present invention, by setting the driving force error-compensating apparatus, the driving force feedback control system of the driving force feedback that formation will be produced by described elastic actuator, and set the internal state error-compensating apparatus, the internal state feedback control system of the described elastic actuator that the driving that formation will be fed back because of the internal state to described elastic actuator changes, and set target internal state determination device, with the feedforward of target internal state, so just can realize that response is good, the control of the high-precision elastic-body actuator drive type movable mechanism that effect of kinetics is few and steady-state deviation is also little.

In addition, control method according to mode 17 of the present invention, in order to carry out the action of driving force error compensation, and constitute the driving force feedback control system of the driving force feedback that will produce by described elastic actuator, and in order to carry out the action of internal state error compensation, and the internal state feedback control system that the internal state that constitutes the described elastic actuator that will change because of the driving of described elastic actuator feeds back so just can realize that response is good, effect of kinetics is few, the control of high-precision elastic-body actuator drive type movable mechanism.

In addition, control method according to mode 18 of the present invention, in order to carry out the action of driving force error compensation, and constitute the driving force feedback control system of the driving force feedback that will produce by described elastic actuator, and in order to carry out the action of internal state error compensation, and the internal state feedback control system that the internal state that constitutes the described elastic actuator that will change because of the driving of described elastic actuator in the inside of described driving force feedback control system feeds back, and, in order to carry out target internal state decision action, and, so just can realize that response is good with the feedforward of target internal state, the control of the high-precision elastic-body actuator drive type movable mechanism that effect of kinetics is few and steady-state deviation is also little.

In addition, control method according to mode 19 of the present invention, in order to carry out the action of driving force error compensation, and constitute the driving force feedback control system of the driving force feedback that will produce by described elastic actuator, and in order to carry out the action of internal state error compensation, and constitute the internal state feedback control system of the internal state feedback of the described elastic actuator that will change independently because of the driving of described elastic actuator with described driving force feedback control system, and, in order to carry out target internal state decision action, and, so just can realize that response is good with the feedforward of target internal state, the control of the high-precision elastic-body actuator drive type movable mechanism that effect of kinetics is few and steady-state deviation is also little.

Description of drawings

These and other purpose of the present invention and feature with by with at the preferred implementation of accompanying drawing relevant following record illustrate.In this accompanying drawing,

Fig. 1 is the block diagram of notion of control device of the elastic actuator of expression embodiments of the present invention 1.

Fig. 2 is the figure of expression as the structure of the mechanical arm of the control object of the control device of the elastic actuator of embodiments of the present invention 1.

Fig. 3 is that the expression driving is as the structure of the elastic expansion contracted configurations body of the mechanical arm of the control object of the control device of the elastic actuator of embodiments of the present invention 1 and the figure of action.

Fig. 4 is that expression is used for as the mechanical arm utilization of the control object of the control device of the elastic actuator of embodiments of the present invention 1 figure as the action of the air operated air pressure feed system of compressible fluid.

Fig. 5 is that expression is used for as the mechanical arm utilization of the control object of the control device of the elastic actuator of embodiments of the present invention 1 figure as the formation of the air operated air pressure feed system of compressible fluid.

Fig. 6 is the figure of structure of control device of the elastic actuator of expression embodiments of the present invention 1.

Fig. 7 is the figure of the relation of the joint angles that drives of the antagonism of the elastic expansion contracted configurations body of the expression elastic actuator that utilizes embodiments of the present invention 1 and internal pressure difference.

Fig. 8 is the flow chart of action step of reality of control program of control device of the elastic actuator of embodiments of the present invention 1.

Fig. 9 A is the figure that expression utilizes the control result that the control device of elastic actuator of embodiments of the present invention 1 obtains.

Fig. 9 B is the figure that expression utilizes the control result that the control device of elastic actuator of embodiments of the present invention 1 obtains.

Figure 10 is the figure of structure of control device of the elastic actuator of expression embodiments of the present invention 2.

Figure 11 is the figure of structure of control device of the elastic actuator of expression embodiments of the present invention 3.

Figure 12 is the figure that represents the structure of the control device that only carries out Position Control in the past.

Figure 13 be represent in the past only according to the figure of the structure of the control device of the desired value of the desired value decision internal state of output.

Figure 14 is the figure that the structural deformation of the control device of the elastic actuator of embodiments of the present invention 1 is represented.

Figure 15 is the block diagram of notion of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 4.

Figure 16 is the figure of expression as the structure of the mechanical arm of the control object of the control device of the elastic-body actuator drive type movable mechanism of embodiments of the present invention 4.

Figure 17 is the figure of structure of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 4.

Figure 18 is the flow chart of action step of reality of control program of control device of the elastic actuator type movable agency of embodiments of the present invention 4.

Figure 19 is the block diagram of notion of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 5.

Figure 20 is the figure of structure of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 5.

Figure 21 is the figure of the relation of the joint angles that drives of the antagonism of the elastic expansion contracted configurations body of the expression elastic actuator that utilizes embodiments of the present invention 5 and internal pressure difference.

Figure 22 is other the figure of structure of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 5.

Figure 23 is the block diagram of notion of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 6.

Figure 24 is the figure of structure of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 5.

Figure 25 is the figure of experimental result of the performance of the expression control device of having verified embodiments of the

present invention

5 and 6.

Figure 26 is the block diagram that more specifically constitutes of control device of the embodiment 5 of expression Figure 19.

Figure 27 is the block diagram that more specifically constitutes of control device of the embodiment 6 of expression Figure 23.

Figure 28 is the block diagram of the formation of only controlling for simple position among the result that is represented by dotted lines among Figure 25 of expression.

Figure 29 is the figure of structure of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 7.

Figure 30 is the figure of expression as the structure of the mechanical arm of the control object of the control device of the elastic-body actuator drive type movable mechanism of embodiments of the present invention 7.

Figure 31 is the figure of structure of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 8.

Figure 32 A is the profile of summary situation of having represented the electrically conductive high polymer actuator of embodiments of the present invention 8.

Figure 32 B is the profile of summary situation of having represented the electrically conductive high polymer actuator of embodiments of the present invention 8.

Figure 32 C is the profile of summary situation of having represented the electrically conductive high polymer actuator of embodiments of the present invention 8.

Figure 33 is the outline drawing of summary feedforward of having represented the electrically conductive high polymer actuator of embodiments of the present invention 8.

Figure 34 is that expression is used to drive the figure as the formation of the power-supply system of the mechanical arm of the control object of the control device of the elastic-body actuator drive type movable mechanism of embodiments of the present invention 8.

The specific embodiment

Before continuing record of the present invention, use identical reference marks for same parts in the accompanying drawings.

Before the explanation embodiments of the present invention, at first describe for variety of way of the present invention.

The desired value of the output by importing described elastic actuator and the instrumentation value of the output of the described elastic actuator that utilizes described output measuring device instrumentation compensate output error the output error compensation arrangement,

Decide according to the instrumentation value of the output of the desired value of the output of described elastic actuator and described elastic actuator described elastic actuator internal state desired value target internal state determination device,

According to the desired value of the output of described elastic actuator and utilize the instrumentation value of internal state of the described elastic actuator of described internal state measuring device instrumentation decide described elastic actuator internal state desired value target internal state determination device,

According to mode 3 of the present invention, the control device of the elastic actuator described in the following

mode

1 or 2 is provided, that is,

Described target internal state determination device utilizes described root of a polynomial to calculate the desired value of the internal state of described elastic actuator according to the desired value of the output of described elastic actuator the relation polynomial approximation of the internal state of the output of elastic actuator and elastic actuator.

According to mode 4 of the present invention, the control device of the elastic actuator described in the following

mode

1 or 2 is provided, that is,

Described target internal state determination device is stored in the relation of the internal state of the output of described elastic actuator and described elastic actuator in the memory as form, utilizes described form to determine the desired value of the internal state of described elastic actuator according to the desired value of the output of described elastic actuator.

According to mode 5 of the present invention, the control device of any described elastic actuator in the following mode 1～4 is provided, that is, described elastic actuator is the fluid pressure actuated device by fluid pressure actuated.

According to mode 6 of the present invention, the control device of the elastic actuator described in the following mode 5 is provided, that is, described fluid pressure actuated device be have the hollow projectile cartridge gonosome, carry out described hollow elastomeric airtight sealing 1 group of containment member, can realize the injection of fluid or the fluid that the outpours elastic expansion contracted configurations body by member with respect to described hollow elastomeric hollow interior.

According to mode 7 of the present invention, the control device of the elastic actuator described in the following mode 5 is provided, that is, the internal state of described elastic actuator is a fluid pressure, and the described internal state measuring device of the described internal state of the described elastic actuator of instrumentation is the pressure measuring device.

According to mode 8 of the present invention, the control device of the elastic actuator described in the following

mode

1 or 2 is provided, that is, described elastic actuator is output as displacement, and the described output measuring device of the output of the described elastic actuator of instrumentation is the displacement measuring device.

According to mode 9 of the present invention, the control device of the elastic actuator described in the following

mode

1 or 2 is provided, that is, described elastic actuator is output as velocity of displacement, and the described output measuring device of the output of the described elastic actuator of instrumentation is the velocity of displacement measuring device.

According to mode 10 of the present invention, the control device of the elastic actuator described in the following

mode

1 or 2 is provided, that is, described elastic actuator is output as power, and the described output measuring device of the output of the described elastic actuator of instrumentation is the power measuring device.

According to mode 11 of the present invention, a kind of control method of elastic actuator is provided,

With the desired value of the output of described elastic actuator with utilize the instrumentation value input and output error-compensating apparatus of output of the described elastic actuator of described output measuring device instrumentation, utilize described output error compensation arrangement compensation output error,

According to the desired value of the output of described elastic actuator, utilize target internal state determination device to determine the desired value of the internal state of described elastic actuator,

Will be from the output of described output error compensation arrangement, from the output of described target internal state determination device and from the output input internal state error-compensating apparatus of described internal state measuring device, utilize described internal state error-compensating apparatus compensation internal state error, control the desired value of the instrumentation value of the described output that makes described elastic actuator as described output.

According to mode 13 of the present invention, a kind of control device of elastic-body actuator drive type movable mechanism is provided, it possesses:

Be transfused to the described movable agency that drives by described elastic actuator described output desired value and by the instrumentation value of the described output of described output measuring device instrumentation and with the output error compensation arrangement of output error compensated information output with the compensation output error,

According to mode 14 of the present invention, a kind of control device of elastic-body actuator drive type movable mechanism is provided, it possesses:

Be transfused to output from the described driving force error compensation information of described driving force error-compensating apparatus, from the output of the desired value of the described internal state of described target internal state determination device and from the output of the instrumentation value of the described internal state of described internal state measuring device and with the internal state error-compensating apparatus of internal state error compensation information output with compensation internal state error

According to mode 15 of the present invention, a kind of control device of elastic-body actuator drive type movable mechanism is provided, it possesses:

According to mode 16 of the present invention, the control device of the elastic-body actuator drive type movable mechanism described in the following

mode

2 or 3 is provided, that is, described target internal state determination device is transfused to the desired value of described output, and determines the desired value of described internal state.

According to other mode of the present invention, the control device of the elastic-body actuator drive type movable mechanism described in the following

mode

2 or 3 is provided, promptly, described target internal state determination device is similar to the relation of the described internal state of the described output of described elastic actuator and described elastic actuator with multinomial, utilize described root of a polynomial to calculate the desired value of the described internal state of the described elastic actuator of decision according to the desired value of described elastomeric described output.

mode

2 or 3 is provided, promptly, described target internal state determination device also possesses the relation of the described internal state of the described output of described elastic actuator and described elastic actuator as the memory that form stores, and utilizes described form to decide the desired value of the described internal state of described elastic actuator according to the desired value of the described output of described elastic actuator.

According to other mode of the present invention, the control device of any described elastic-body actuator drive type movable mechanism in other the mode of following mode 1～described is provided, that is, described elastic actuator is the fluid pressure actuated device by fluid pressure actuated.

According to other mode of the present invention, the control device of the elastic-body actuator drive type movable mechanism described in following described other the mode is provided, that is, described fluid pressure actuated device be have the hollow projectile cartridge gonosome, carry out described hollow elastomeric airtight sealing 1 group of containment member, can realize the injection of fluid or the fluid that the outpours elastic expansion contracted configurations body by member with respect to described hollow elastomeric hollow interior.

According to other mode of the present invention, the control device of the elastic-body actuator drive type movable mechanism described in following described other the mode is provided, promptly, the described internal state of described elastic actuator is a fluid pressure, the pressure measuring device of the described fluid pressure that described internal state measuring device is the described elastic actuator of instrumentation.

mode

1 or 2 or 3 is provided, promptly, the described displacement that is output as described elastic actuator of described elastic actuator, the displacement measuring device of the described displacement that described output measuring device is the described elastic actuator of instrumentation.

mode

1 or 2 or 3 is provided, promptly, the described velocity of displacement that is output as described elastic actuator of described elastic actuator, the velocity of displacement measuring device of the described velocity of displacement that described output measuring device is the described elastic actuator of instrumentation.

mode

1 or 2 or 3 is provided, promptly, the described power that is output as described elastic actuator of described elastic actuator, the power measuring device of the power that described output measuring device is the described elastic actuator of instrumentation.

According to mode 17 of the present invention, a kind of control method of elastic-body actuator drive type movable mechanism is provided, wherein,

Based on the desired value of the instrumentation value of controlling the described output that makes the described movable agency that drives by described elastic actuator by described internal state error compensation information as described output.

According to mode 18 of the present invention, a kind of control method of elastic-body actuator drive type movable mechanism is provided, wherein,

Control the desired value of the instrumentation value of the described output that makes the described movable agency that drives by described elastic actuator as described output based on described internal state error compensation information.

According to mode 19 of the present invention, a kind of control method of elastic-body actuator drive type movable mechanism is provided, wherein,

Based on control the desired value of the instrumentation value of the described output that makes the described movable agency that drives by described elastic actuator by described internal state error compensation information and described driving force error compensation information as described output.

Below, will be elaborated to embodiments of the present invention based on accompanying drawing.

(embodiment 1)

Fig. 1 is the block diagram of notion of control device of the elastic actuator of expression embodiments of the present invention 1.Among Fig. 1,101 is target output generating apparatus, generates the desired value of conduct by the output of the elastic actuator 102 of the fluid pressure actuated device of fluid pressure actuated.104 is the output measuring device that is connected with elastic actuator 102, and the instrumentation value of the output of instrumentation elastic actuator 102 is imported target internal state determination device 105 and output error compensation arrangement 103 respectively with the instrumentation value.The 103rd, be transfused to output error compensation arrangement, according to the mode of following desired value by the instrumentation value of the output of the elastic actuator 102 of output measuring device 104 instrumentations is controlled from the desired value of target output generating apparatus 101.The 105th, the target internal state determination device that the output information of target output generating apparatus 101 is imported, according to the desired value of described output and the instrumentation value of described output, decision is as the internal state desired value of the desired value of the internal state (for example pressure state, state of charge, potential state etc.) of elastic actuator 102.This internal state is to change because of the driving of described elastic actuator 102, rather than refers to not the institutional structural regime that the driving because of described elastic actuator 102 changes.The 106th, be transfused to output information, from the internal state desired value of target internal state determination device 105 with from the internal state error-compensating apparatus of the internal state instrumentation value of internal state measuring device 107 from output error compensation arrangement 103, control according to the mode of will be from the output information input flexibility body driver 102 of internal state error-compensating apparatus 106 and making the internal state instrumentation value of elastic actuator 102 follow desired value.The 107th, the internal state measuring device that is connected with each elastic actuator 102 is measured the internal state instrumentation value as the internal pressure of each elastic expansion contracted configurations body 1, with internal state instrumentation value input internal state error-compensating apparatus 106.

Below, for the concrete example of the control device of the elastic actuator 102 of embodiment 1, will be as the control object for example and describe with mechanical arm 10.

Fig. 2 is the figure of formation of mechanical arm 10 of control object of the control device of the expression elastic actuator 102 that becomes embodiments of the present invention 1.Among Fig. 2, (they are the reference marks at each elastic expansion contracted configurations body, represent with reference marks 1 when thrum expansion contracted configurations body typically for 1-1a, 1-1b, 1-2a, 1-2b, 1-3a, 1-3b, 1-4a, 1-4b, 1-5a, 1-5b, 1-6a, 1-6b.) be elastic expansion contracted configurations body.Elastic expansion contracted configurations body 1 as shown in Figure 3, the outer surface of the hollow projectile cartridge gonosome 2 of the tubulose that plays a role as drive division constituting with elastomeric material is equipped with deformation direction limiting member 3, it is weaved into netted with the resin that is difficult to extend or the filament of metal on material, be converted to the contraction of axial length according to the distortion of the radial direction that will cause by the expansion of tubular elastomer 2, on the other hand, the mode that the distortion of the radial direction that will be caused by the contraction of tubular elastomer 2 is converted to the expansion of axial length constitutes, and becomes the structure of using containment member 4 hermetic to seal respectively two ends of tubular elastomer 2.When being passed in the stream that inside has the fluid that compressible fluid passes through, with respect to the hollow interior of described elastomer 2 can realize the injection of fluid or the fluid of the tubulose that outpours by member 5, compressible fluids such as air are supplied with to elastic expansion contracted configurations body 1, when utilizing institute's compressed and supplied fluid in the inner space of tubular elastomer 2 provides, to press, then tubular elastomer 2 will mainly expand along radial direction, and owing to be utilized the effect of deformation direction limiting member 3, the central shaft that is converted to tubular elastomer 2 to motion, total length is shunk, so the described elastic expansion contracted configurations body 1 of this kind structure just can be used as the straight moving elastic actuator that drives 102 utilizations.

In the mechanical arm 10 of Fig. 2, with 1 group of elastic expansion contracted

configurations body

1,1 according to being that fulcrum and the mode faced mutually set with the joint shaft, form following antagonism type and drive structure, promptly, when the elastic expansion contracted configurations body 1 of any one party in the middle of 1 group of elastic expansion contracted

configurations body

1,1 shrinks and during the opposing party's elastic expansion contracted configurations body 1 elongation, then power is had an effect by fulcrum, makes the joint shaft rotation, so just can realize utilizing the just contrary of joint shaft to rotatablely move.Specifically, form following structure, that is, utilize elastic expansion contracted configurations body 1-1a and elastic expansion contracted configurations body 1-1b (, therefore not shown because elastic expansion contracted configurations body 1-1b is positioned at the behind of elastic expansion contracted configurations body 1-1a.) antagonism drive, the just contrary rotation of the 1st joint shaft 6-1 is driven, utilize the antagonism of elastic expansion contracted configurations body 1-2a and elastic expansion contracted configurations body 1-2b to drive, the just contrary rotation of the 2nd joint shaft 6-2 is driven, utilize the antagonism of elastic expansion contracted configurations body 1-3a and elastic expansion contracted configurations body 1-3b to drive, the just contrary rotation of the 3rd joint shaft 6-3 is driven, utilize the antagonism of elastic expansion contracted configurations body 1-4a and elastic expansion contracted configurations body 1-4b to drive, the just contrary rotation of the 4th joint shaft 6-4 is driven, utilize the antagonism of elastic expansion contracted configurations body 1-5a and elastic expansion contracted configurations body 1-5b to drive, the just contrary rotation of the 5th joint shaft 6-5 is driven, utilize the antagonism of elastic expansion contracted configurations body 1-6a and elastic expansion contracted configurations body 1-6b to drive, the just contrary rotation of the 6th joint shaft 6-6 is driven.

The 9-1a of Fig. 2,9-1b, 9-2a, 9-2b, 9-3a, 9-3b, 9-4a, 9-4b, 9-5a, 9-5b, 9-6a, 9-6b are the pressure sensors as an example of the internal state measuring device separately of elastic expansion contracted configurations body 1-1a, 1-1b, 1-2a, 1-2b, 1-3a, 1-3b, 1-4a, 1-4b, 1-5a, 1-5b, 1-6a, 1-6b, be equipped on each fluid by on the member 5 (fluid injects outlet), the pressure in each elastic expansion contracted configurations body of instrumentation.

Specifically, described mechanical arm 10 is mechanical arms of 6DOF, by with respect to fixation wall 301 along the above-below direction axle at the 1st joint shaft 6-1 along just contrary rotation in the horizontal plane, the 2nd joint shaft 6-2 in just contrary rotation in the plane of above-below direction, between the 2nd arm 308 and the 1st arm 311, in the plane of above-below direction, reciprocally carrying out just contrary the 3rd joint shaft 6-3 that rotates, between the 2nd arm 308 and the 1st arm 311 with the 4th joint shaft 6-4 that axially carries out just contrary rotation of the 3rd joint shaft 6-3 quadrature, in the plane of above-below direction, reciprocally carrying out just contrary the 5th joint shaft 6-5 that rotates between the 1st arm 311 and the hand 313, between the 1st arm 311 and hand 313, constitute at the 6th joint shaft 6-6 that axially carries out just contrary rotation with the 5th joint shaft 6-5 quadrature.

Among the 1st joint shaft 6-1, rotated freely ground by bearing 304 and 305 and the both sides of the rotating shaft 303 that supports along above-below direction link with rotating freely circular support body 302,302 is arranged in upper and lower end parts, and elastic expansion contracted configurations body 1-1a and 1-1b are (wherein, elastic expansion contracted configurations body 1-1b is owing to the behind that is equipped on elastic expansion contracted configurations body 1-1a, and is therefore not shown.) each end by and fixation wall 301 link, and another end is separately linked by the back shaft 314 with described each circular support body 302.Like this, utilize the antagonism of elastic expansion contracted configurations body 1-1a and 1-1b to drive, the hand 313 that just can make the 1st arm 311 of mechanical arm and the 2nd arm 308 around the last lower shaft Z of the rotating shaft 303 of the 1st joint shaft 6-1 in plane transversely is integratedly just against rotatablely moving.And the bearing 305 of upside is supported on the fixation wall 301 with support stick 306.

Among the 2nd joint shaft 6-2,2 circular support bodies 302,302 of the both sides of being fixed in rotating shaft 303 and by and the long side direction of rotating shaft 303 be fixed in orthogonally between the supporter 307,307 of fixation wall 301 sides of rotating shaft 303, elastic expansion contracted configurations body 1-2a and 1-2b are bonded, utilize the antagonism of elastic expansion contracted configurations body 1-2a and 1-2b to drive, in the face of above-below direction, make the 1st arm 311 and the 2nd arm 308 and the just contrary rotation in hand 313 integrated ground of mechanical arm 10 around the transverse axis of the back shaft 314 of the 2nd joint shaft 6-2.

Among the 3rd joint shaft 6-3, at one end be fixed in circular support body 302 sides of the 2nd arm usefulness connecting rod 308 on 2 circular support bodies 302,302, be fixed with supporter 309,309 with the 2nd arm orthogonally with the long side direction of connecting rod 308, and with the head end side of connecting rod 308, can link rotatably to have and be fixed in the supporter 310 of an end of the 1st arm usefulness connecting rod 311 orthogonally with the long side direction of connecting rod 311 with the 1st arm at the 2nd arm.At the 2nd arm with the supporter 309,309 of connecting rod 308 be fixed between the supporter 310 of the 1st arm with an end of connecting rod 311, link flexible expansion contracted configurations body 1-3a and 1-3b, utilize the antagonism of elastic expansion contracted configurations body 1-3a and 1-3b to drive, transverse axis around the back shaft 315 of the 3rd joint shaft 6-3, in the face of above-below direction, make the 1st arm 311 and the relatively just contrary rotation of the 2nd arm 308 of mechanical arm 10.

Among the 4th joint shaft 6-4, at one end be fixed in 2 circular support bodies 302, circular support body 302 sides of connecting rod 308 of the 2nd arm on 302, and respectively with supporter 309, the 309 and the 2nd arm is fixed with supporter 325 orthogonally with the long side direction of connecting rod 308,325, at this supporter 325,325 and be fixed between the supporter 310 of the 1st arm with an end of connecting rod 311, link flexible expansion contracted configurations body 1-4a and 1-4b, utilize the antagonism of elastic expansion contracted configurations body 1-4a and 1-4b to drive, around with the 4th joint shaft 6-4 of the 3rd joint shaft 6-3 quadrature, make the 1st arm 311 and the relatively just contrary rotation of the 2nd arm 308 of mechanical arm 10.

Among the 5th joint shaft 6-5, the supporter 310 of the 1st arm 311, be fixed in hand 313 an end and by can be rotatably and the supporter 312 that links of the 1st arm 311 between, link flexible expansion contracted configurations body 1-5a and 1-5b, utilize the antagonism of elastic expansion contracted configurations body 1-5a and 1-5b to drive, transverse axis around the back shaft 326 of the 5th joint shaft 6-5, in the face of above-below direction, make hand 313 with respect to the just contrary rotation of the 1st arm 311.

Among the 6th joint shaft 6-6, the supporter 310 of the 1st arm 311, be fixed in hand 313-end and by can be rotatably and the supporter 312 that links of the 1st arm 311 between, be connected with elastic expansion contracted configurations body 1-6a and 1-6b with elastic expansion contracted configurations body 1-5a and 1-5b with differing 90 phase places of spending, utilize the antagonism of elastic expansion contracted configurations body 1-6a and 1-6b to drive, around with the 6th joint shaft 6-6 of the 5th joint shaft 6-5 quadrature, make hand 313 with respect to the just contrary rotation of the 1st arm 311.

At elastic expansion contracted configurations body 1-1a and 1-1b, elastic expansion contracted configurations body 1-2a and 1-2b, elastic expansion contracted configurations body 1-3a and 1-3b, elastic expansion contracted configurations body 1-4a and 1-4b, elastic expansion contracted configurations body 1-5a and 1-5b, elastic expansion contracted configurations body 1-6a and 1-6b go up separately, as described later, be connected with flow proportional magnetic valve 18, whole flow proportional magnetic valves 18 is connected with control computer 19, utilize the control of control computer 19, through flow proportional magnetic valve 18, control elastic expansion contracted configurations body 1-1a and 1-1b, elastic expansion contracted configurations body 1-2a and 1-2b, elastic expansion contracted configurations body 1-3a and 1-3b, elastic expansion contracted configurations body 1-4a and 1-4b, elastic expansion contracted configurations body 1-5a and 1-5b, the contraction elongation action separately of elastic expansion contracted configurations body 1-6a and 1-6b.In addition, on each joint shaft, be equipped with encoder 8 as an example of the displacement measuring device that is used as an example exporting measuring device, utilize encoder 8 can measure the joint angles of joint shaft, on each elastic expansion contracted configurations body 1, be equipped with the pressure sensor 9 of conduct, utilize pressure sensor 9 can measure the internal pressure of each elastic expansion contracted configurations body 1 as an example of the pressure measuring device of an example of internal state measuring device 107.If adopt aforesaid structure, then can form multiple degrees of freedom, the basic functions that waits as mechanical arm 10 is carried in controlling of realization object.

Fig. 4 is that expression is used to drive the figure as the formation of the air pressure feed system of the mechanical arm 10 of the control object of the control device of the elastic actuator of embodiments of the present invention 1.Among Fig. 4, only write down the part that the just contrary rotation of the 3rd joint shaft of mechanical arm 10 is driven, other part has been omitted.Among Fig. 4,16 for example is air pressure source such as compressor, and 17 for constituting one group air pressure adjustment assembly by air pressure filter 17a, air pressure pressure-reducing valve 17b and air pressure with lubricating coupler 17c.18 for for example waiting the 5 port flows control magnetic valve of controlling flow by the power driving guiding valve with electromagnet.The 19th, as the control computer that for example constitutes of an example of control section by general personal computer, be equipped with D/A plate 20, by to 5 port flows control magnetic valve, 18 output voltage command value, just can control independently and flow through the flow of each fluid by each air of member 5.In addition, on control computer 19, be equipped with the memory 19a of the operation program that stores mechanical arm 10 in advance etc.

Below, the action of air pressure feed system shown in Figure 4 is described.The pressure-air that utilizes air pressure source 16 to generate is adjusted assembly 17 decompressions by air pressure, for example is adjusted to the such certain pressure of 600kPa, supplies with to 5 port flows control magnetic valve 18.The aperture of 5 port flows control magnetic valve 18 is controlled pro rata with the voltage instruction value of being exported through D/A plate 20 by control computer 19.Import under the situation of positive voltage instruction value to 5 port flows control magnetic valve 18 from control computer 19, just become the state of representing with air pressure loop mark A, open-minded from the stream of air pressure source 16 lateral elasticity expansion contracted configurations body 1-3a sides, to the air of elastic expansion contracted configurations body 1-3a side supply with the proportional flow of absolute value of voltage instruction value.In addition, elastic expansion contracted configurations body 1-3b side is open-minded towards the stream of atmospheric pressure side, and discharge is flowed with the air of the proportional flow of absolute value of voltage instruction value from elastic expansion contracted configurations body 1-3b side direction atmosphere.So as shown in Figure 4, the total length of elastic expansion contracted configurations body 1-3a shortens, the total length elongation of elastic expansion contracted configurations body 1-3b, such the 3rd joint shaft 6-3 just with the motion of turning right of the proportional speed of the absolute value of voltage instruction value.On the other hand, import under the situation of negative voltage instruction value to 5 port flows control magnetic valve 18 from control computer 19, become the state of representing with air pressure loop mark B, the action of elastic expansion contracted configurations body is opposite (promptly, the total length elongation of elastic expansion contracted configurations body 1-3a, the total length of elastic expansion contracted configurations body 1-3b shortens), such the 3rd joint shaft 6-3 just carries out counterclockwise motion.

That is, the air of supplying with to elastic expansion contracted configurations body 1 side from 5 port flows control magnetic valve 18 fluently passes through containment member 4 with fluid by member 5, arrives the inside of tubular elastomer 2, produces the interior pressure of tubular elastomer 2.Though tubular elastomer 2 expands because of the interior pressure that produces, yet be subjected to the netted filametntary constraint effect (restriction) of being woven to of deformation direction limiting member 3, the distortion of the radial direction that is caused by expansion is limited and is converted to the contraction of axial length, shown in the downside of Fig. 3, the total length of elastic expansion contracted configurations body 1 shortens.On the other hand, if to atmosphere, discharge air from 5 port flows control magnetic valve 18, reduce the interior pressure of tubular elastomer 2, then restore because of the elastic force of tubular elastomer 2, expansion is eliminated, and the total length of elastic expansion contracted configurations body 1 is extended shown in the upside of Fig. 3.Consequently, among Fig. 3,,, just have poor apart from d at the left end of tubular elastomer 2 then because of described flexible when considering when right-hand member is fixed.So by air pressure is supplied with control, then the elastic expansion contracted configurations body 1 of embodiment 1 plays a role with regard to the driver that can be used as straight moving displacement.The elongation shortening amount is owing to be pressed into ratio haply with in the elastic expansion contracted configurations body 1, if therefore as shown in Figure 4, utilize control computer 19 controls 5 port flows control magnetic valve 18, control the air mass flow of supplying with to elastic expansion contracted configurations body 1, just can control the total length of elastic expansion contracted configurations body 1.

In the mechanical arm 10 shown in Figure 2, in order to realize utilizing the antagonism of elastic expansion contracted configurations body 1-1a and 1-1b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-2a and 1-2b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-3a and 1-3b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-4a and 1-4b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-5a and 1-5b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-6a and 1-6b to drive, as shown in Figure 5, on the elastic expansion contracted configurations body 1 of antagonism, set 5 port flows control magnetic valve 18 respectively and constitute identical air pressure feed system, utilization from control computer 19 via D/A plate 20 voltage instruction value to 18 outputs of each 5 port flow control magnetic valve, just can be simultaneously whole joint shaft of mechanical arm 10 be carried out just contrary rotation driving.

Fig. 6 is the figure of formation of control device of the elastic actuator of expression embodiments of the present invention 1.Wherein, among Fig. 6, the 10th, as the mechanical arm shown in Figure 2 of the control object of the control device of elastic actuator.Export currency (joint angles vector) q=[q of the joint angles of encoder 8 instrumentations that utilize each joint shaft from mechanical arm 10 ₁, q ₂, q ₃, q ₄, q ₅, q ₆] ^T, utilize the interior pressure P=[P of elastic expansion contracted configurations body 1 of pressure sensor 9 instrumentations of each elastic expansion contracted configurations body 1 _1a, P _1b, P _2a, P _2b, P _3a, P _3b, P _4a, P _4b, P _5a, P _5b, P _6a, P _6b] ^TWherein, q ₁, q ₂, q ₃, q ₄, q ₅, q ₆It is respectively the joint angles of the 1st joint shaft 6-1, the 2nd joint shaft 6-2, the 3rd joint shaft 6-3, the 4th joint shaft 6-4, the 5th joint shaft 6-5, the 6th joint shaft 6-6.In addition, P _1a, P _1b, P _2a, P _2b, P _3a, P _3b, P _4a, P _4b, P _5a, P _5b, P _6a, P _6bIt is respectively the interior pressure of elastic expansion contracted configurations body 1-1a, 1-1b, 1-2a, 1-2b, 1-3a, 1-3b, 1-4a, 1-4b, 1-5a, 1-5b, 1-6a, 1-6b.

In addition, the 13rd, input is by the interior pressure P of the elastic expansion contracted configurations body 1 that utilizes pressure sensor 9 instrumentations of mechanical arm 10 outputs, the pressure differential that is instrumentation value P is calculated device, according to the instrumentation value P of pressure sensor 9, utilizes pressure differential to calculate device 13 calculating, output pressure difference Δ P=[Δ P ₁, Δ P ₂, Δ P ₃, Δ P ₄, Δ P ₅, Δ P ₆] ^T=[P _1a-P _1b, P _2a-P _2b, P _3a-P _3b, P _4a-P _4b, P _5a-P _5b, P _6a-P _6b] ^T

The 21st, be transfused to as positive motion and learn calculation element from the joint angles vector q of the currency q of the joint angles of the encoder that utilizes each joint shaft 8 instrumentations of mechanical arm 10 output, carry out calculating from the geometry of the conversion of the joint angles vector q fingertip location posture vector in one's hands r of mechanical arm 10.

23a, 23b are respectively approximate inverse kinematic calculation devices, utilize approximate expression u _Out=J _r(q) ^-1u _In, carry out the approximate calculation of inverse kinematics.Wherein, J _r(q) be Jacobian, u _InBe the input to approximate inverse kinematic calculation device 23a, 23b, u _OutFor output, if will import u from approximate inverse kinematic calculation device 23a, 23b _InBe made as joint angles error q _e, then can be as q _e=J _r(q) ^-1r _eShown in, become from finger tip posture error r _eTo joint angles error q _eChange type.According to this approximate inverse kinematic calculation device 23a, 23b,, also can easily carry out inverse kinematics and calculate even the multivariant mechanical arm more than the 6DOF etc. are difficult to realize the structure of inverse kinematics calculating.

In approximate inverse kinematic calculation device 23a, be transfused in mechanical arm 10 by the currency q of the joint angles vector of instrumentation with by the finger tip posture object vector r of target track generating apparatus 11 outputs _dError r _e, the error q of output joint angles vector _e

In approximate inverse kinematic calculation device 23b, be transfused in mechanical arm 10 and export Δ P by the currency q of the joint angles vector of instrumentation with from the site error correction of positional error compensation device 12 _Re, output joint error correction output Δ P _Qe

11 is the target track generating apparatus, and output is used to realize the finger tip posture object vector r as the action of the mechanical arm 10 of target _d

12 is the positional error compensation device as an example of output error compensation arrangement 103, is transfused to basis and is utilized positive motion to learn calculation element 21 finger tip posture vector r that calculates and the finger tip posture object vector r that is exported by target track generating apparatus 11 by the currency q of the joint angles vector of instrumentation in mechanical arm 10 _dError r _e, to approximate inverse kinematic calculation device 23b outgoing position error correction output Δ P _Re

Target internal state determination device 105 is made of goal pressure difference calculation element 14 and approximate inverse kinematic calculation device 23a as an example.In goal pressure difference calculation element 14, as based in mechanical arm 10 by the error q of the currency q of the joint angles vector of instrumentation and joint angles vector _eTarget joint angles vector q _d, input q _d=q+J _r(q) ^-1r _e, according to target joint angles vector q _d, calculate goal pressure poor (desired value of pressure differential) Δ P _d=[Δ P _1d, Δ P _2d, Δ P _3d, Δ P _4d, Δ P _5d, Δ P _6d] ^T, to 15 outputs of pressure differential error-compensating apparatus.Wherein, Δ P _1d, Δ P _2d, Δ P _3d, Δ P _4d, Δ P _5d, Δ P _6dIt is respectively the desired value of pressure differential elastic expansion contracted configurations body 1-1a and 1-1b, elastic expansion contracted configurations body 1-2a and 1-2b, elastic expansion contracted configurations body 1-3a and 1-3b, elastic expansion contracted configurations body 1-4a and 1-4b, elastic expansion contracted configurations body 1-5a and 1-5b, elastic expansion contracted configurations body 1-6a and 1-6b.

The 15th, as the pressure differential error-compensating apparatus of an example of internal state error correction device 106, be transfused to goal pressure difference Δ P by 14 outputs of goal pressure difference calculation element _dWith by positional error compensation device 12 output and the joint error correction output Δ P that utilizes approximate inverse kinematic calculation device to change _QeAddition has deducted the value of calculating the current pressure differential Δ P of device 13 from pressure differential again, and u exports to mechanical arm 10 with pressure differential correction output.Pressure differential correction output u is controlled magnetic valve 18 as voltage instruction value to 5 port flows through D/A plate 20 to be provided, and each joint shaft 6 is driven by just contrary rotation, makes mechanical arm 10 move.

Principle about the action of the control device of formation is as described above described.

The substance of action is the finger tip posture error r that utilizes positional error compensation device 12 to carry out _eFEEDBACK CONTROL (Position Control).As positional error compensation device 12, if for example use the PID compensator, then can be according to making finger tip posture error r _e0 the mode of converging to is controlled, and realizes the action as the mechanical arm 10 of target.

But, when by elastic actuator, when for example utilizing the driver drives of fluid movement such as air shown in Figure 2, flexible key element because of elastic actuator, be the influence of the compressibility of fluid or flow path resistance etc., bad response only utilizes Position Control precision to control goodly.

The means that are used to tackle this problem are to utilize the FEEDBACK CONTROL of the pressure differential Δ P of pressure differential error-compensating apparatus 15.Owing to be transfused to joint error correction output Δ P in the pressure differential error-compensating apparatus 15, therefore when producing finger tip posture error r _eThe time, 15 actions of pressure differential error-compensating apparatus are according to making finger tip posture error r _e0 the mode of converging on is carried out the control of pressure differential.Owing in elastic expansion contracted configurations body 1 shown in Figure 3, begin to produce displacement after the variation of generation internal pressure, therefore in time, compare with the variation (displacement) of position, the side that pressure changes is earlier observed.So shown in the control system as shown in Figure 6, the internal pressure feedback that constitutes the control of carrying out pressure differential by the inboard in the position feedback circulation of carrying out Position Control circulates, and just can compensate the deficiency of response, realizes the raising of Position Control performance.

But, pressure differential error-compensating apparatus 15 only is set, though response is enhanced, also can produce the steady-state deviation of position, residual have a problem that can't improve positioning accuracy.This is to be caused by following factor,, will not realize target joint angles vector q that is _dIn necessary pressure differential as desired value input pressure mistake difference compensating device 15.

The means that are used to tackle this problem are goal pressure difference calculation elements 14.When the just contrary rotation of the joint shaft of drive realizing when the antagonism that utilizes 1 group of elastic expansion contracted

configurations body

1,1 shown in Figure 3 drove, the relation of the internal pressure difference of joint angles and 1 group of elastic expansion contracted configurations body 1 for example as shown in Figure 7.Result when Fig. 7 has been to use the elastic expansion contracted configurations body (MCKIBBEN type air pressure artificial-muscle) of total length 250mm, internal diameter 10mm.As shown in Figure 7, the measurement result straight line of can applying greatly is similar to.So, as calculating goal pressure difference Δ P _dFormula, can use the expression straight line 1 formula

(formula 1)

Δ P _d=Aq _d+ b ... (formula 1)

Wherein, A, b are coefficient, can try to achieve according to the measurement result of Fig. 7.So, in goal pressure difference calculation element 14, by utilizing formula (1) according to target joint angles vector q _dCalculate goal pressure difference Δ P _d, input pressure mistake difference compensating device 15 just can be realized the high-precision Position Control that steady-state deviation is little.

As with the control system of target internal state determination device 105 as inscape, can consider the formation that Figure 13 is such, can only be corresponding during this constitutes with the elastic actuator of the desired value that only can determine internal state according to the desired value of output.Therefore in contrast, in the embodiment 1, owing to, also decide internal state, can realize corresponding with a greater variety of elastic actuators according to the currency (measured value) of output or the currency (measured value) of internal state not only according to the desired value of output.

Action step for based on the reality of the control program of above principle will describe based on the flow chart of Fig. 8.

In the step 1, (joint variable vector or joint angles vector q) is transfused to control device by the joint angles data of encoder 8 instrumentations.

In the step 2, utilize approximate inverse kinematic calculation device to carry out the calculating of necessary Jacobian Jr etc. in the kinematic calculation of mechanical arm 10, in the step 3, according to joint angles data (joint angles vector q), utilize positive motion to learn the current finger tip posture vector r (utilizing positive motion to learn the processing of calculation element 21) of calculation element 21 calculating machine arms 10 from mechanical arm 10.

In the step 4,, utilize the finger tip posture object vector r of target track calculation element 11 calculating machine arms 10 based on the operation program of the mechanical arm 10 among the memory 19a that is stored in control device in advance _d

In the step 5, calculate as finger tip posture object vector r _dError r with the finger tip posture of the difference of current finger tip posture vector r _e, in the step 6, according to the error r of finger tip posture _e, utilize positional error compensation device 12 calculating location error correction output Δ P _Re(utilizing the processing of positional error compensation device 12).Concrete example as positional error compensation device 12 can be considered the PID compensator.For the situation of PID compensator, in step 6, at the error r of finger tip posture _eOn multiply by the value of proportional gain, at the error r of finger tip posture _eDifferential value on multiply by the value of the differential gain and at the error r of finger tip posture _eIntegrated value on multiply by these 3 values of value of storage gain aggregate value become site error correction output Δ P _ReBy to suitably adjusting, will control according to making site error converge on 0 mode as 3 gains of the ratio of the diagonal angle determinant of constant, differential, integration.

In the step 7,, utilize approximate inverse kinematic calculation device 23b with site error correction output Δ P by multiply by the contrary determinant of the Jacobian Jr that calculates in the step 2 _ReBe converted to joint error correction output Δ P from the value of the error of relevant finger tip posture as the value of the error of relevant joint angles _Qe(utilizing the processing of approximate inverse kinematic calculation device 23b).

In the step 8,, utilize the error r of approximate inverse kinematic calculation device 23a with the finger tip posture by multiply by the contrary determinant of Jacobian Jr _eBe converted to the error q of joint angles vector _e(utilizing the processing of approximate inverse kinematic calculation device 23a).

In the step 9, utilize goal pressure difference calculation element 14, with the error q of the joint angles vector that will in step 8, calculate _eAdd with the current joint angles q that utilizes encoder 8 instrumentations and value as target joint angles vector q _d, calculate goal pressure difference Δ P _d

In the step 10, be transfused to control device by internal pressure value, utilize pressure differential to calculate current pressure differential Δ P between the internal pressure that device 13 calculates the driver that is driven by antagonism as the driver of pressure sensor 9 instrumentations of an example of internal state measuring device 107.

In the step 11, from the joint error correction output Δ P that will step 7, utilize approximate inverse kinematic calculation device 23b to calculate _QeWith the goal pressure difference Δ P that in step 9, utilizes goal pressure difference calculation element 14 to calculate _dAdd and value in, deduct and in step 10, utilize pressure differential to calculate the current pressure differential Δ P that device 13 calculates, utilize pressure differential error-compensating apparatus 15 calculating pressure difference error delta P _e(utilizing the processing of pressure differential error-compensating apparatus 15).In addition, in the step 11, according to pressure differential error delta P _e, utilize pressure differential error-compensating apparatus 15 calculating pressure mistake difference corrections outputs (utilizing the processing of pressure differential error-compensating apparatus 15).As pressure differential error-compensating apparatus 15, for example can consider the PID compensator.

In the step 12, the output of pressure differential error correction is passed through D/A plates 20 from pressure differential error-compensating apparatus 15, offer each flow control valve 18, each flow control valve 18 is by changing the rotatablely moving of each joint shaft that pressure in each driver produces mechanical arm 10.

By above step 1～step 12 is carried out repeatedly as the computation cycles of control, realize the control of the action of mechanical arm 10.

The track that Fig. 9 A and Fig. 9 B have represented to utilize the control device of control device in the past that only carries out Position Control shown in Figure 12 and embodiment 1 shown in Figure 11 to make mechanical arm shown in Figure 2 10 carry out the finger tip position is followed the result of the situation of control.The length that the result of Fig. 9 A and Fig. 9 B has represented all to have used natural length is 250mm, internal diameter desired value and the measurement result as the finger tip position of the 6DOF mechanical arm of the situation of the elastic expansion contracted configurations body 1 of 10mm.Fig. 9 A is the control result who utilizes control device in the past shown in Figure 12 to obtain.In the control device of Figure 12, do not carry out the FEEDBACK CONTROL of pressure differential, only carry out Position Control.Can find that from Fig. 9 A error is very big, tracing ability is not good.On the other hand, Fig. 9 B is the control result who utilizes the control device of embodiment shown in Figure 11 1 to obtain.Because the effect of pressure differential error-compensating apparatus 15 and goal pressure difference calculation element 14, error is very little, and tracing ability is good.

As implied above, control device according to described embodiment 1, by setting pressure differential error-compensating apparatus 15, formation is with the internal pressure control system of the internal state feedback of described elastic actuator 102, and set goal pressure difference calculation element 14, formation will just can realize that response is good, steady-state deviation is little, the control of high accuracy mechanical arm 10 as the control system of the goal pressure difference feedforward of an example of the target internal state of described elastic actuator 102.

In addition, control method according to described embodiment 1, by utilizing pressure differential error-compensating apparatus 15, carry out internal pressure control with the internal state feedback of described elastic actuator 102, and utilize goal pressure difference calculation element 14, carry out and just can realize that as the control of the goal pressure difference feedforward of an example of the target internal state of described elastic actuator 102 response is good, steady-state deviation is little, the control of high accuracy mechanical arm 10.

And, though will be made as the error of finger tip posture to the input of target internal state determination device 105 in the control system of Fig. 6, yet, (learn finger tip posture vector r that calculation element 21 calculates and finger tip posture object vector r as shown in figure 14 by 11 outputs of target track generating apparatus as utilizing positive motion according to the currency q of the joint angles vector of instrumentation in mechanical arm 10 because error is the poor of desired value and instrumentation value _dError r _e23a is such for input approximate inverse kinematic calculation device) block diagram can be out of shape, and therefore under the situation of input desired value and under the situation at error originated from input, do not have difference in essence.

(embodiment 2)

Figure 10 is the figure of formation of control device of the elastic actuator of expression embodiments of the present invention 2.Among Figure 10,201 is gravity-compensated device.Form following control system, that is, and from the target joint angles vector q of target track generating apparatus 11 output mechanical arms 10 _d, compensate and FEEDBACK CONTROL by the joint angles of the difference of the current joint angles vector q of encoder 8 instrumentations.Other formation is identical with the control device of embodiment 1 shown in Figure 6, and omission will be described.

Input is by the current joint angles vector q of encoder 9 instrumentations in gravity-compensated device 201, utilize the posture of each connecting rod of gravity-compensated device 201 calculating machine arms 10, utilize gravity-compensated device 201 to calculate the torque value that the influence because of gravity produces in each joint shaft.Torque value is transfused to goal pressure difference determination device 14, and goal pressure difference Δ P is calculated in revisal _dCoefficient A, the b of formula (1).

According to control device shown in Figure 10, by in target internal state determination device 105, setting gravity-compensated device 201, just can not make mechanical arm 10 sagging downwards because of the influence of gravity, can realize more high-precision control.

(embodiment 3)

Figure 11 is the figure of formation of control device of the elastic actuator of expression embodiments of the present invention 3.Among Figure 11,202 is temperature compensation means.On mechanical arm 10, be equipped with an example temperature sensor (not shown), measure the elastomeric temperature T of elastic actuator 102 as internal state measuring device 107.Other formation is identical with the control device of embodiment 2 shown in Figure 10, and omission will be described.

When the elastomeric variations in temperature of elastic actuator 102, elastomeric spring rate changes, and calculates goal pressure difference Δ P _dCoefficient A, the b of formula (1) change.In order to compensate the influence that causes by this elastomeric variations in temperature, temperature T is transfused to temperature compensation means 202, in the temperature compensation means 202, based on coefficient A, the b that utilizes experiment to derive at various temperatures, the relation of temperature T and coefficient A, b is utilized polynomial approximation, calculate utilize these multinomial revisals coefficient A, b.By revisal coefficient A, b be transfused to goal pressure difference determination device 14, based on formula (1), the goal pressure difference Δ P that output has been corrected _d

As implied above, according to control device shown in Figure 11, by importing target internal state determination device 105 as the temperature T of internal state, in target internal state determination device 105, set temperature compensation means 202, just can remove the influence that causes by variations in temperature, realize more high-precision control.

And, though in described each embodiment, in goal pressure difference calculation element 14 that the relation of joint angles and pressure differential is approximate with 1 power formula, be not limited thereto, can certainly utilize polynary multinomial such as 2 power formulas to be similar to.Like this, under the situation that the relation with the internal state of the output of elastic actuator and elastic actuator is similar to multinomial, described target internal state determination device 105 utilizes described multinomial, calculates the desired value of the internal state of the described elastic actuator of decision according to the desired value of the output of described elastic actuator.In addition, can not to be similar to also with multinomial, but form following formation, promptly, utilize described target internal state determination device 105, be stored in the relation (for example relation of joint angles and pressure differential) of the internal state of the output of described elastic actuator and described elastic actuator among the memory 19a (with reference to Fig. 4) of control device in advance as form, based on form, from the desired value (for example desired value of joint angles) of the output of described elastic actuator, derive the desired value (for example desired value of pressure differential) of the internal state of described elastic actuator.

In addition, in described each embodiment, though output is made as joint angles, but be not limited thereto, be made as displacement speed sensor will exporting measuring device, output valve is made as velocity of displacement and carries out under the situation of velocity of displacement control also identical as an example of velocity of displacement measuring device.

In addition, in described each embodiment,, be not limited thereto, be made as power sensor will exporting measuring device, output valve is made as power and carries out under the situation of power control also identical as an example of power measuring device though output is made as joint angles.

In addition, in described each embodiment,,, infer internal state, also can bring into play identical effect under the situation of the presumed value of use internal state in that observer is set though be provided with sensor as an example of internal state measuring device 107.

In addition, in described each embodiment, though as elastic actuator, with the fluid pressure actuated device by fluid pressure actuated is that example is illustrated, but be not limited thereto, even,, also can bring into play identical effect by adopting the electric field or the quantity of electric charge etc. as internal state for utilizing electro photoluminescence to drive the situation of elastomeric drivers such as electric conductive polymer, dielectric polymer, various gels.

Below, will be elaborated to embodiments of the present invention 4 later embodiments based on accompanying drawing.

Following embodiment 4 later embodiments are the modes that will further solve following problem.

The driver of described MCKIBBEN type than in big, the light weight, also has the high feature of output at output weight.So, just can under the situation of movable agencies such as driving device arm, not use reducing gear, utilize directly transmission ground drivings such as linkage, do not have hardness because of the joint rigidity of bringing by reducing gear, also have the flexibility of driver concurrently, can realize flexible movable agency.

But utilize at the driver of MCKIBBEN type etc. in the fluid pressure actuated device of fluid pressure action such as air, influences such as flexible character that causes because of the compressibility of fluid or flow path resistance cause the unmanageable problems of elastic actuator such as bad response.

At this problem, as conventional art, in No. 2583272 communique of described Japanese patent gazette, announce the mechanical arm that has for servomotor and fluid pressure actuated device combination driving, can describe the control device of required track by delay circuit is set.

In addition, when not using reducing gear, when utilizing linkage etc. directly transmission ground driving, owing to can't ignore the influence of gravity on the building material that acts on arm etc., inertia force, centrifugal force, Coriolis force etc., therefore the control accuracy variation need utilize calculated torque method etc. to consider that dynamic (dynamical) control valve controls, in addition, in order to realize correct joint moment of torsion, need carry out joint torque feedback control etc.

At this problem, as conventional art, in No. 3324298 communique of Japanese patent gazette, announcement has following control device, promptly, by carrying out following torque feedback control, promptly, for utilizing motor-driven mechanical arm, use the calculated torque method, and will realize stable and high-precision moment of torsion control from supplying with to motor, and make mechanical arm can carry out required motion based on the command value that has deducted the moment of torsion controlling value of calculating as the torque deviation of the difference of moment of torsion desired value and moment of torsion currency based on the value of the current angular speed of motor.

But, in the control device of in No. 2583272 communique of described Japanese patent gazette, being announced that possesses delay circuit, because the frequent delay that takes place with respect to the target action, so bad response, the operation that needs real-time can't be carried out.In addition, only under the situation of the combination of servomotor and fluid driver, bring into play effect, and in the mechanical arm that only constitutes, can't bring into play effect by fluid driver.

In addition, the control device of being announced in No. 3324298 communique of described Japanese patent gazette that possesses the torque feedback control system can't be directly applied for the mechanical arm that is driven by elastic actuator for being effectively by motor-driven mechanical arm.

So, the purpose of the embodiment that embodiments of the present invention 4 are later is, solve described problem in the past, the control device and the control method of following elastic-body actuator drive type movable mechanism are provided, that is the influence ground of, can response controlling movable agency such as the mechanical arm that driven by elastic actuator well and can not having gravity, inertia force, centrifugal force, a Coriolis force etc. is with high accuracy control position or power.

(embodiment 4)

Figure 15 is the block diagram of notion of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 4.Among Figure 15,1101 is target output generating apparatus, the desired value of outputs such as the displacement of the elastic-body actuator drive type movable mechanism 1102 that the elastic actuator that the generation utilization is made of elastic expansion contracted configurations body 1 drives, generation power.1104 is the output measuring device that is connected with elastic-body actuator drive type movable mechanism 1102, and the instrumentation value of the output of instrumentation elastic-body actuator drive type movable mechanism 1102 is imported the instrumentation value respectively to output error compensation arrangement 1103.The 1103rd, be transfused to output error compensation arrangement, according to the mode of following desired value by the instrumentation value of the output of the elastic-body actuator drive type movable mechanism 1102 of output measuring device 1104 instrumentations is controlled from the desired value of target output generating apparatus 1101.The 1105th, according to the driving force error-compensating apparatus of the mode output drive strength error compensation information of the error of the driving force that produced of compensation elastic actuator 1, the output that is transfused to output error compensation arrangement 1103 poor with by the driving force of driving force measuring device 1107 instrumentations that are connected with elastic-body actuator drive type movable mechanism 1102.The 1106th, be transfused to the output information of the driving force error compensation information of coming self drive error-compensating apparatus 1105 and from the difference of the internal state instrumentation value of internal state measuring device 1108 and export the internal state error-compensating apparatus of internal state error compensation information, output information from the internal state error compensation information of internal state error-compensating apparatus 1106 is transfused to each elastic actuator 1, follows the mode of each desired value according to the internal state instrumentation value that makes each elastic actuator 1 and controls.The 1108th, by the internal state measuring device that is connected with elastic expansion contracted configurations body 1 as each elastic actuator that constitutes elastic-body actuator drive type movable mechanism 1102, measure internal state instrumentation value respectively, with internal state instrumentation value input internal state error-compensating apparatus 1106 as the internal pressure of each elastic expansion contracted configurations body 1 of elastic-body actuator drive type movable mechanism 1102.

Below, for the concrete example of the control device of the elastic-body actuator drive type movable mechanism 1102 of embodiment 4, will be that example describes with control device as the mechanical arm 10A of an example of elastic-body actuator drive type movable mechanism 1102 as the control object.

Figure 16 is the figure of formation of mechanical arm 10A of control object of the control device of the expression elastic-body actuator drive type movable mechanism 1102 that becomes embodiments of the present invention 4.Among Figure 16, (they are the reference marks at each elastic expansion contracted configurations body, represent with reference marks 1 when thrum expansion contracted configurations body typically for 1-1a, 1-1b, 1-2a, 1-2b, 1-3a, 1-3b, 1-4a, 1-4b, 1-5a, 1-5b, 1-6a, 1-6b.) be elastic expansion contracted configurations body.Elastic expansion contracted configurations body 1 as shown in Figure 3, the outer surface of the hollow projectile cartridge gonosome 2 of the tubulose that plays a role as drive division constituting with elastomeric material, be equipped with deformation direction limiting member 3, it is weaved into netted with the resin that is difficult to extend or the filament of metal on material, be converted to the contraction of axial length according to the distortion of the radial direction that will cause by the expansion of tubular elastomer 2, on the other hand, the mode that the distortion of the radial direction that will be caused by the contraction of tubular elastomer 2 is converted to the expansion of axial length constitutes, and becomes the structure of using containment member 4 hermetic to seal respectively two ends of tubular elastomer 2.When being passed in the stream that inside has the fluid that compressible fluid passes through, with respect to the hollow interior of described elastomer 2 can realize the injection of fluid or the fluid of the tubulose that outpours by member 5, compressible fluids such as air supply, when utilizing institute's compressed and supplied fluid in the inner space of tubular elastomer 2 provides, to press, then tubular elastomer 2 will mainly expand along radial direction, and owing to be utilized the effect of deformation direction limiting member 3, the central shaft that is converted to tubular elastomer 2 to motion, total length is shunk, and therefore can be used as the straight moving elastic driver that drives 1102 and utilizes.

The mechanical arm 10A of Figure 16, with 1 group of elastic expansion contracted

configurations body

The 9-1a of Figure 16,9-1b, 9-2a, 9-2b, 9-3a, 9-3b, 9-4a, 9-4b, 9-5a, 9-5b, 9-6a, 9-6b are the pressure sensors as an example of the internal state measuring device separately of elastic expansion contracted configurations body 1-1a, 1-1b, 1-2a, 1-2b, 1-3a, 1-3b, 1-4a, 1-4b, 1-5a, 1-5b, 1-6a, 1-6b, be equipped on each fluid by on the member 5 (fluid injects outlet), the pressure in each elastic expansion contracted configurations body of instrumentation.

Specifically, described mechanical arm 10A is the mechanical arm of 6DOF, by with respect to fixation wall 301 along the above-below direction axle at the 1st joint shaft 6-1 along just contrary rotation in the horizontal plane, the 2nd joint shaft 6-2 in just contrary rotation in the plane of above-below direction, between the 2nd arm 308 and the 1st arm 311, in the plane of above-below direction, reciprocally carrying out just contrary the 3rd joint shaft 6-3 that rotates, between the 2nd arm 308 and the 1st arm 311 with the 4th joint shaft 6-4 that axially carries out just contrary rotation of the 3rd joint shaft 6-3 quadrature, in the plane of above-below direction, reciprocally carrying out just contrary the 5th joint shaft 6-5 that rotates between the 1st arm 311 and the hand 313, between the 1st arm 311 and hand 313, constitute at the 6th joint shaft 6-6 that axially carries out just contrary rotation with the 5th joint shaft 6-5 quadrature.

Among the 6th joint shaft 6-6, the supporter 310 of the 1st arm 311, be fixed in hand 313 an end and by can be rotatably and the supporter 312 that links of the 1st arm 311 between, be connected with elastic expansion contracted configurations body 1-6a and 1-6b with elastic expansion contracted configurations body 1-5a and 1-5b with differing 90 degree phase places, utilize the antagonism of elastic expansion contracted configurations body 1-6a and 1-6b to drive, around with the 6th joint shaft 6-6 of the 5th joint shaft 6-5 quadrature, make hand 313 with respect to the just contrary rotation of the 1st arm 311.

At elastic expansion contracted configurations body 1-1a and 1-1b, elastic expansion contracted configurations body 1-2a and 1-2b, elastic expansion contracted configurations body 1-3a and 1-3b, elastic expansion contracted configurations body 1-4a and 1-4b, elastic expansion contracted configurations body 1-5a and 1-5b, elastic expansion contracted configurations body 1-6a and 1-6b go up separately, as described later, be connected with flow proportional magnetic valve 18, whole flow proportional magnetic valves 18 is connected with control computer 19, utilize the control of control computer 19, through flow proportional magnetic valve 18, control elastic expansion contracted configurations body 1-1a and 1-1b, elastic expansion contracted configurations body 1-2a and 1-2b, elastic expansion contracted configurations body 1-3a and 1-3b, elastic expansion contracted configurations body 1-4a and 1-4b, elastic expansion contracted configurations body 1-5a and 1-5b, the contraction elongation action separately of elastic expansion contracted configurations body 1-6a and 1-6b.In addition, on each joint shaft, be equipped with as encoder 8-1,8-2,8-3, the 8-4 of an example of the displacement measuring device of an example of output measuring device, 8-5,8-6 and as torque sensor 7-1,7-2,7-3,7-4,7-5, the 7-6 of an example of driving force measuring device, utilize the encoder 8 (general name of encoder 8-1,8-2,8-3,8-4,8-5,8-6.) can measure the joint angles of joint shaft, utilize the torque sensor 7 (general name of torque sensor 7-1,7-2,7-3,7-4,7-5,7-6.) can measure because of the antagonism of elastic expansion contracted configurations body is driven the driving torque that produces.In addition, on each elastic expansion contracted configurations body 1, be equipped with the pressure sensor 9 (general name of pressure sensor 9-1a, 9-1b, 9-2a, 9-2b, 9-3a, 9-3b, 9-4a, 9-4b, 9-5a, 9-5b, 9-6a, 9-6b of conduct as an example of the pressure measuring device of an example of internal state measuring device 107.), utilize pressure sensor 9 can measure the internal pressure (example of internal state) of the described elastic expansion contracted configurations body 1 that the driving because of each elastic expansion contracted configurations body 1 changes.

If adopt aforesaid structure, then can form multiple degrees of freedom, the basic functions that waits as mechanical arm 10A is carried in controlling of realization object.

Fig. 4 is that expression is used to drive the figure as the formation of the air pressure feed system of the mechanical arm 10 of the control object of the control device of the elastic actuator of embodiment 1, and the formation of described air pressure feed system is identical with the formation that is used to drive as the air pressure feed system of the mechanical arm 10A of the control object of the control device of the elastic-body actuator drive type movable mechanism 1103 of embodiments of the present invention 4, based on Fig. 4, the formation of the air pressure feed system of embodiment 4 is described.And, identical with the embodiment 1 of front, in Fig. 4, only write down the part that the just contrary rotation of the 3rd joint shaft of mechanical arm 10A is driven, other part is omitted.

Among Fig. 4,16 for example is air pressure source such as compressor, and 17 for constituting one group air pressure adjustment assembly by air pressure filter 17a, air pressure pressure-reducing valve 17b and air pressure with lubricating coupler 17c.18 for for example waiting the 5 port flows control magnetic valve of controlling flow by the power driving guiding valve with electromagnet.The 19th, as the control computer that for example constitutes of an example of control section by general personal computer, be equipped with D/A plate 20, by to 5 port flows control magnetic valve, 18 output voltage command value, just can control independently and flow through the flow of each fluid by each air of member 5.In addition, on control computer 19, be equipped with the memory 19a of the operation program that stores mechanical arm 10 in advance etc.

That is, the air of supplying with to elastic expansion contracted configurations body 1 side from 5 port flows control magnetic valve 18 fluently passes through containment member 4 with fluid by member 5, arrives the inside of tubular elastomer 2, produces the interior pressure of tubular elastomer 2.Though tubular elastomer 2 expands because of the interior pressure that produces, yet be subjected to the netted filametntary constraint effect (restriction) of being woven to of deformation direction limiting member 3, the distortion of the radial direction that is caused by expansion is limited and is converted to the contraction of axial length, shown in the downside of Fig. 3, the total length of elastic expansion contracted configurations body 1 shortens.On the other hand, if to atmosphere, discharge air from 5 port flows control magnetic valve 18, reduce the interior pressure of tubular elastomer 2, then restore because of the elastic force of tubular elastomer 2, expansion is eliminated, and the total length of elastic expansion contracted configurations body 1 is extended shown in the upside of Fig. 3.Consequently, among Fig. 3,,, just have poor apart from d at the left end of tubular elastomer 2 then because of described flexible when considering when right-hand member is fixed.So by air pressure is supplied with control, then the elastic expansion contracted configurations body 1 of embodiment 4 plays a role with regard to the driver that can be used as straight moving displacement.The elongation shortening amount is owing to be pressed into ratio haply with in the elastic expansion contracted configurations body 1, if therefore as shown in Figure 4, utilize control computer 19 controls 5 port flows control magnetic valve 18, control the air mass flow of supplying with to elastic expansion contracted configurations body 1, just can control the total length of elastic expansion contracted configurations body 1.

Among the mechanical arm 10A shown in Figure 16, in order to realize utilizing the antagonism of elastic expansion contracted configurations body 1-1a and 1-1b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-2a and 1-2b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-3a and 1-3b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-4a and 1-4b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-5a and 1-5b to drive, utilize the antagonism of elastic expansion contracted configurations body 1-6a and 1-6b to drive, as shown in Figure 5, on the elastic expansion contracted configurations body 1 of antagonism, set 5 port flows control magnetic valve 18 respectively and constitute identical air pressure feed system, utilization from control computer 19 via D/A plate 20 voltage instruction value to 18 outputs of each 5 port flow control magnetic valve, just can be simultaneously whole joint shaft of mechanical arm 10A be carried out just contrary rotation driving.

Figure 17 is the figure of formation of control device that represents for example to be located at the elastic-body actuator drive type movable mechanism 1102 of the embodiments of the present invention 4 in the described control computer 19.Wherein, among Figure 17,10A be as the control object of the control device of elastic-body actuator drive type movable mechanism and as the mechanical arm shown in Figure 16 of an example of elastic-body actuator drive type movable mechanism.Export currency (joint angles vector) q=[q of the joint angles of encoder 8 instrumentations that utilize each joint shaft from mechanical arm 10A ₁, q ₂, q ₃, q ₄, q ₅, q ₆] ^T, with the currency τ=[τ of the driving moment of utilizing torque sensor 7 instrumentations on each joint shaft ₁, τ ₂, τ ₃, τ ₄, τ ₅, τ ₆] ^TThe driving moment that produces, utilize the interior pressure P=[P of the elastic expansion contracted configurations body 1 of pressure sensor 9 instrumentations of being located at each elastic expansion contracted configurations body 1 _1a, P _1b, P _2a, P _2b, P _3a, P _3b, P _4a, P _4b, P _5a, P _5b, P _6a, P _6b] ^TWherein, q ₁, q ₂, q ₃, q ₄, q ₅, q ₆It is respectively the joint angles of the 1st joint shaft 6-1, the 2nd joint shaft 6-2, the 3rd joint shaft 6-3, the 4th joint shaft 6-4, the 5th joint shaft 6-5, the 6th joint shaft 6-6.In addition, τ ₁, τ ₂, τ ₃, τ ₄, τ ₅, τ ₆It is respectively the driving moment that makes the 1st joint shaft 6-1, the 2nd joint shaft 6-2, the 3rd joint shaft 6-3, the 4th joint shaft 6-4, the 5th joint shaft 6-5, the 6th joint shaft 6-6 rotation.In addition, P _1a, P _1b, P _2a, P _2b, P _3a, P _3b, P _4a, P _4b, P _5a, P _5b, P _6a, P _6bIt is respectively the interior pressure of elastic expansion contracted configurations body 1-1a, 1-1b, 1-2a, 1-2b, 1-3a, 1-3b, 1-4a, 1-4b, 1-5a, 1-5b, 1-6a, 1-6b.

In addition, the 13rd, be transfused to the interior pressure P separately of the elastic expansion contracted configurations body of exporting respectively by mechanical arm 10A 1 that utilizes pressure sensor 9 instrumentations, the pressure differential that is instrumentation value P is calculated device, according to the instrumentation value P of pressure sensor 9, utilize pressure differential to calculate device 13 calculating pressure difference Δ P=[Δ P ₁, Δ P ₂, Δ P ₃, Δ P ₄, Δ P ₅, Δ P ₆] ^T=[P _1a-P _1b, P _2a-P _2b, P _3a-P _3b, P _4a-P _4b, P _5a-P _5b, P _6a-P _6b] ^T, calculate output the device 13 from pressure differential.

The 121st, be transfused to conduct and learn calculation element from the positive motion of the vectorial q of joint angles of the currency q of the joint angles of the encoder that utilizes each joint shaft 8 instrumentations of mechanical arm 10A output, utilize positive motion to learn calculation element 121 and carry out from the geometry calculating of the conversion of the vectorial q of the joint angles of mechanical arm 10A fingertip location posture vector in one's hands r.

111 is the target track generating apparatus, and output is used to realize the finger tip posture object vector r as the action of the mechanical arm 10A of target from target track generating apparatus 111 _d

Output error compensation arrangement 1103 is made of positional error compensation device 112 that can compensate the site error of being exported and inverse dynamics calculation element 124 as an example.In positional error compensation device 112, the input basis is utilized positive motion to learn calculation element 121 finger tip posture vector r that calculates and the finger tip posture object vector r that is exported by target track generating apparatus 111 by the currency q of the joint angles vector of instrumentation in mechanical arm 10A _dError r _e, export u to inverse dynamics calculation element 124 outgoing position error correction from positional error compensation device 112 _pIn inverse dynamics calculation element 124, utilize the formula shown in the following formula (2) based on the equation of motion of mechanical arm, calculate and be used to revise finger tip posture vector r _eSite error correction moment τ _p, from inverse dynamics calculation element 124, exported as the output error compensated information.

[formula 2]

τ_{p} = M (q) {J_{r}}^{- 1} (q) [- {\overset{\cdot}{J}}_{r} (q) \overset{\cdot}{q} + u_{p}] + h (q, \overset{\cdot}{q}) + g (q)

Formula (2)

Wherein, M (q) is the inertia determinant,

[formula 3]

h (q, \overset{\cdot}{q})

Formula (3)

Be the item of expression centrifugal force and Coriolis force, g (p) is the item of expression gravity load, J _τ(q) be Jacobian.

The 125th, as the driving moment error-compensating apparatus of an example of driving force error-compensating apparatus 1105, as site error correction moment τ by 124 outputs of inverse dynamics calculation element _pMoment error τ with the difference of the currency τ of the moment of utilizing torque sensor 7 instrumentations _eBe transfused to driving moment error-compensating apparatus 125, from driving moment error-compensating apparatus 125, according to the mode of the error that compensates driving moment, as driving force error compensation information output torque error correction pressure differential Δ P _τ

The 115th, as the pressure differential error-compensating apparatus of an example of internal state error correction device 1106, from moment error correction pressure differential Δ P by output the driving moment error-compensating apparatus 125 _τIn deducted value (the pressure differential error delta P that calculates the current pressure differential Δ P of device 113 outputs by pressure differential _e) be transfused to pressure differential error-compensating apparatus 115, from pressure differential error-compensating apparatus 115, according to the mode of the error that compensates internal pressure conditions, to mechanical arm 10A output pressure mistake difference correction output u.Pressure differential error correction output u is controlled magnetic valve 18 as voltage instruction value to each 5 port flow through D/A plate 20 to be provided, and each joint shaft 6 is driven by just contrary rotation, makes mechanical arm 10A move.

Principle about the control action of the control device that constitutes is as described above described.

The substance of control action is the finger tip posture error r that utilizes positional error compensation device 112 to carry out _eFEEDBACK CONTROL (Position Control).As positional error compensation device 112, if for example use the PID compensator, then can be according to making finger tip posture error r _e0 the mode of converging to is controlled, and realizes the action as the mechanical arm 10A of target.

In addition, because by setting inverse dynamics calculation element 124, compensate the effect of kinetics of the inertia force that in mechanical arm 10A, produces or centrifugal force etc., even therefore mechanical arm 10A as shown in figure 16 is such, employing is not used when driving the joint under the situation of direct drive driving method of reductor, can realize the action that precision is good yet.

But,, need the structure of utilizing elastic actuator 1 to produce required moment as the joint driving force for the compensation that makes the effect of kinetics of utilizing 124 acquisitions of inverse dynamics calculation element plays a role effectively.

The means that are used to tackle this problem are to utilize the moment FEEDBACK CONTROL of driving moment error-compensating apparatus 125.In driving moment error-compensating apparatus 125, input is as site error correction moment τ _pWith moment error τ by the difference of the currency τ of the moment of torque sensor 7 instrumentations _e, according to making moment error τ _e0 the mode of becoming makes 125 actions of driving moment error-compensating apparatus.That is, utilize driving moment error-compensating apparatus 125, correctly realize site error correction moment τ as necessary moment when the correction position error _p, make and utilize the compensation to effect of kinetics of inverse dynamics calculation element 124 to play a role effectively.

But, when by elastic actuator, when for example utilizing driver 1 driving of fluid movement such as air shown in Figure 16, flexible key element because of elastic actuator 1, it is the influence of the compressibility of fluid or flow path resistance etc., the response variation only utilizes the moment FEEDBACK CONTROL precision to control goodly.

The means that are used to tackle this problem are to utilize the FEEDBACK CONTROL of the pressure differential Δ P of pressure differential error-compensating apparatus 115.Owing in pressure differential error-compensating apparatus 115, exported Δ P from driving moment error-compensating apparatus 125 input torque error correction _τ, therefore when producing moment error τ _eThe time, 115 actions of pressure differential error-compensating apparatus are according to making moment error τ _e0 the mode of converging on is carried out the control of pressure differential.So shown in the control system as shown in figure 17, the internal pressure feedback that constitutes the control of carrying out pressure differential by the inboard in the moment feedback circulation of carrying out Torque Control circulates, and just can compensate the deficiency of response, realizes the raising of moment control performance.

For action step, describe based on the flow chart of Figure 18 based on the reality of the control program of above principle.

In the step 41, imported described control device respectively by the joint angles data (joint variable vector or joint angles vector q) of encoder 8 instrumentations of each joint shaft of mechanical arm 10A.

Then, in step 42, utilize inverse dynamics calculation element 124 to carry out necessary Jacobian J in the kinematic calculation of mechanical arm 10A _rDeng calculating, then, in step 43,, utilize positive motion to learn the current finger tip posture vector r (utilizing positive motion to learn the processing of calculation element 121) of calculation element 121 calculating machine arm 10A according to joint angles data (joint angles vector q) from mechanical arm 10A.

Then, in step 44,, utilize the finger tip posture object vector r of target track calculation element 111 calculating machine arm 10A based on the operation program of the mechanical arm 10A among the memory 19a in the control computer 19 that is stored in control device in advance _d

Then, in step 45, calculate as finger tip posture object vector r _dError r with the finger tip posture of the difference of current finger tip posture vector r _e, then, in step 46, according to the error r of finger tip posture _e, utilize positional error compensation device 112 calculating location error correction output u _p(utilizing the processing of positional error compensation device 112).

Concrete example as positional error compensation device 112 can be considered the PID compensator.For the situation of PID compensator, in step 46, at the error r of finger tip posture _eOn multiply by the value of proportional gain, at the error r of finger tip posture _eDifferential value on multiply by the value of the differential gain and at the error r of finger tip posture _eIntegrated value on multiply by these 3 values of value of storage gain aggregate value become site error correction output u _pBy to suitably adjusting, will control according to making site error converge on 0 mode as 3 gains of the ratio of the diagonal angle determinant of constant, differential, integration.

Then, in step 47, carry out necessary inertia determinant M (q), centrifugal force Coriolis force item in dynamics calculation

[formula 4]

h (q, \overset{\cdot}{q})

Formula (4)

, gravity item g (q) calculating, then, in step 48, use described formula (2), calculating location error correction moment τ _p(utilizing the processing of inverse dynamics calculation element 124).

Then, in step 49, by from site error correction moment τ _pIn deduct the instrumentation value τ of torque sensor 7, factored moment error τ _e

Then, in step 50, according to moment error τ _e, utilize driving moment error-compensating apparatus 125 factored moment error correction pressure differential Δ P _τ(utilizing the processing of driving moment error-compensating apparatus 125).Concrete example as driving moment error-compensating apparatus 125 can be considered the PID compensator.For the situation of PID compensator, in step 50, at moment error τ _eOn multiply by the value of proportional gain, at moment error τ _eDifferential value on multiply by the differential gain value and at moment error τ _eIntegrated value on multiply by these 3 values of value of storage gain aggregate value become moment error correction pressure differential Δ P _τ

Then, in step 51, by as the pressure sensor 9 of an example of internal state measuring device 107 respectively the internal pressure value separately of the elastic actuator 1 of instrumentation be transfused to control device, utilize pressure differential to calculate current pressure differential Δ P between the internal pressure that device 113 calculates the elastic actuator 1 that is driven by antagonism.

Then, in step 52, utilize pressure differential error-compensating apparatus 115, calculate from the moment error correction pressure differential Δ P that step 50, utilizes driving moment error-compensating apparatus 125 to calculate _τIn, deducted the pressure differential error delta P that in step 51, utilizes pressure differential to calculate the current pressure differential Δ P of device 113 calculating _e(utilizing the processing of pressure differential error-compensating apparatus 115).Then, in step 53, according to pressure differential error delta P _e, utilize pressure differential error-compensating apparatus 115 calculating pressure mistake difference corrections output u (utilizing the processing of pressure differential error-compensating apparatus 115).As pressure differential error-compensating apparatus 115, for example can consider the PID compensator.

Then, in step 54, pressure differential error correction output u is offered mechanical arm 10A from pressure differential error-compensating apparatus 115, specifically, be through the D/A plate 20 in the control computer 19 of mechanical arm 10A, offer each flow control valve 18, each flow control valve 18 rotatablely moves by the just contrary of each joint shaft that changes pressure in each elastic actuator 1 and produce mechanical arm 10A.

By above step 41～step 54 is carried out repeatedly as the computation cycles of control, realize the control of the action of mechanical arm 10A.

As implied above, according to the control device of described embodiment 4, (in fact driving moment error-compensating apparatus 125 is used as the part of control program and records and narrates, and is carried out by the control computer by setting driving moment error-compensating apparatus 125.), the moment feedback control system of the driving moment feedback that formation will be produced by described elastic-body actuator drive type movable mechanism 1102, and between driving moment error-compensating apparatus 125 and elastic-body actuator drive type movable mechanism 1102, set pressure differential error-compensating apparatus 115, formation just can realize control that response is good, effect of kinetics is few, high accuracy mechanical arm 10A with the internal pressure control system of the internal state feedback of each elastic expansion contracted configurations body 1 of described elastic-body actuator drive type movable mechanism 1102.

In addition, control method according to described embodiment 4, by setting driving moment error-compensating apparatus 125, the moment feedback control system of the driving moment feedback that formation will be produced by described elastic-body actuator drive type movable mechanism 1102, and between driving moment error-compensating apparatus 125 and elastic-body actuator drive type movable mechanism 1102, set pressure differential error-compensating apparatus 115, formation just can realize that with the internal pressure control system of the internal state feedback of each elastic expansion contracted configurations body 1 of described elastic-body actuator drive type movable mechanism 1102 response is good, effect of kinetics is few, the control of high accuracy mechanical arm 10A.

(embodiment 5)

Figure 19 is the block diagram of notion of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 5.Among Figure 19,1101 are target output generating apparatus, generate the desired value of the outputs such as displacement, generation power of the elastic-body actuator drive type movable mechanism 1102 that is driven by elastic actuator 1.1104 is the output measuring device that is connected with elastic-body actuator drive type movable mechanism 1102, and the instrumentation value of the output of instrumentation elastic-body actuator drive type movable mechanism 1102 is imported the instrumentation value respectively to output error compensation arrangement 1103.The 1103rd, be transfused to from the export target value of target output generating apparatus 1101 with from the output error of the output instrumentation value of output measuring device 1104 and with the output error compensation arrangement of output error compensated information output, its following control, promptly, by utilizing output error compensation arrangement 1103 compensation output errors ground, make by the instrumentation value of the output of the elastic-body actuator drive type movable mechanism 1102 of output measuring device 1104 instrumentations and follow desired value the output of output error compensated information.The 1105th, the driving force error-compensating apparatus of the error of the driving force that compensation elastic actuator 1 is produced, be transfused to driving force error-compensating apparatus 115 from the output of the output error compensated information of output error compensation arrangement 1103 with difference by the driving force of driving force measuring device 1107 instrumentations that are connected with elastic-body actuator drive type movable mechanism 1102, output can compensate the driving force error compensation information of the error of driving force.The 1109th, be transfused to the target internal state determination device of the export target value that target output generating apparatus 1101 generated, according to the desired value of described output, the internal state desired value of the elastic actuator 1 of decision elastic-body actuator drive type movable mechanism 1102.The 1106th, be transfused to by the driving force error compensation information of driving force error-compensating apparatus 1105 output and by the output information of target internal state determination device 1109 outputs and, poor by the internal state instrumentation value of internal state measuring device 1108 output, and the internal state error-compensating apparatus of output internal state error compensation information, be transfused to each elastic actuator 1 of elastic-body actuator drive type movable mechanism 1102 from the output information of the internal state error compensation information of internal state error-compensating apparatus 1106, follow the mode of desired value according to the internal state instrumentation value that makes each elastic actuator 1 and control.The 1108th, by the internal state measuring device that is connected with each elastic actuator 1 of elastic-body actuator drive type movable mechanism 1102, utilize the internal state instrumentation value 1108 of internal state measuring device mensuration, with internal state instrumentation value input internal state error-compensating apparatus 1106 as the internal pressure of each elastic actuator 1.

Below, for the concrete example of the control device of the elastic-body actuator drive type movable mechanism 1102 of embodiment 5, be that example describes with control device as the mechanical arm 10A of an example of elastic-body actuator drive type movable mechanism 1102 as the control object.Because the details of mechanical arm 10A is identical with embodiment 4, therefore details is omitted.

Figure 20 is the figure of formation of control device of the elastic-body actuator drive type movable mechanism 1102 of further concrete expression embodiments of the present invention 5.

Among Figure 20, the 126th, as the goal pressure difference determination device of an example of target internal state determination device 1109.In goal pressure difference calculation element 126, input is by the target joint angles vector q of target track generating apparatus 111 outputs _d, according to target joint angles vector q _d, utilize goal pressure difference calculation element 126 to calculate goal pressure poor (desired value of pressure differential) Δ P _d=[Δ P _1d, Δ P _2d, Δ P _3d, Δ P _4d, Δ P _5d, Δ P _6d] ^T, from goal pressure difference calculation element 126 desired values to pressure differential error-compensating apparatus 115 output pressure differences.Wherein, Δ P _1d, Δ P _2d, Δ P _3d, Δ P _4d, Δ P _5d, Δ P _6dIt is respectively the desired value of pressure differential elastic expansion contracted configurations body 1-1a and 1-1b, elastic expansion contracted configurations body 1-2a and 1-2b, elastic expansion contracted configurations body 1-3a and 1-3b, elastic expansion contracted configurations body 1-4a and 1-4b, elastic expansion contracted configurations body 1-5a and 1-5b, elastic expansion contracted configurations body 1-6a and 1-6b.

In the pressure differential error-compensating apparatus 115 as an example of internal state error-compensating apparatus 1106, input is at the goal pressure difference Δ P by 126 outputs of goal pressure difference calculation element _dOn, added moment error correction pressure differential Δ P from driving moment error-compensating apparatus 1105 _τ, and deducted value (the pressure differential error delta P that calculates the current pressure differential Δ P of device 113 from pressure differential _e), from pressure differential error-compensating apparatus 15, according to the mode of the error that compensates internal pressure conditions, to mechanical arm 10A output pressure mistake difference correction output u.Pressure differential error correction output u is offered each 5 port flow control magnetic valve 18 through D/A plate 20 as voltage instruction value, and each joint shaft 6 is driven by just contrary rotation, makes mechanical arm 10A action.

In addition, because by setting inverse dynamics calculation element 124, compensate the effect of kinetics of the inertia force that in mechanical arm 10A, produces or centrifugal force etc., therefore identical with the mechanical arm shown in Figure 2 10 of embodiment 1, even adopt under the situation of the direct drive driving method that when driving the joint, does not use reductor, also can realize the action that precision is good.

The means that are used to tackle this problem are to utilize the moment FEEDBACK CONTROL of driving moment error-compensating apparatus 125.Input is as site error correction moment τ in driving moment error-compensating apparatus 125 _pWith moment error τ by the difference of the currency τ of the moment of torque sensor 7 instrumentations _e, according to making moment error τ _e0 the mode of becoming makes 125 actions of driving moment error-compensating apparatus.That is, utilize driving moment error-compensating apparatus 125, correctly realize site error correction moment τ as necessary moment when the correction position error _p, make and utilize the compensation to effect of kinetics of inverse dynamics calculation element 124 to play a role effectively.

But, when by elastic actuator, when for example utilizing the driver drives of fluid movement such as air shown in Figure 16, flexible key element because of elastic actuator 1, it is the influence of the compressibility of fluid or flow path resistance etc., the response variation only utilizes the moment FEEDBACK CONTROL precision to control goodly.

The means that are used to tackle this problem are to utilize the FEEDBACK CONTROL of the pressure differential Δ P of pressure differential error-compensating apparatus 115.Owing in pressure differential error-compensating apparatus 115, exported Δ P from driving moment error-compensating apparatus 125 input torque error correction _τ, therefore when producing moment error τ _eThe time, 115 actions of pressure differential error-compensating apparatus are according to making moment error τ _e0 the mode of converging on is carried out the control of pressure differential.So shown in the control system as shown in figure 20, the internal pressure feedback that constitutes the control of carrying out pressure differential by the inboard in the moment feedback circulation of carrying out Torque Control circulates, and just can compensate the deficiency of response, realizes the raising of moment control performance.

But, pressure differential error-compensating apparatus 115 only is set, though response is enhanced, also can produce the steady-state deviation of position, residual have a problem that can't improve positioning accuracy.This is to be caused by following factor,, will not realize target joint angles vector q that is _dIn necessary pressure differential as desired value input pressure mistake difference compensating device 115.

The means that are used to tackle this problem are goal pressure difference calculation elements 126.When the just contrary rotation of the joint shaft of drive realizing when the antagonism that utilizes 1 group of elastic expansion contracted

configurations body

1,1 shown in Figure 3 drove, the relation of the internal pressure difference of joint angles and 1 group of elastic expansion contracted configurations body 1 for example as shown in figure 21.Figure 21 is as an example, the result when having used the elastic expansion contracted configurations body (MCKIBBEN type air pressure artificial-muscle) of total length 250mm, internal diameter 10mm.As shown in Figure 21, the measurement result straight line of can applying greatly is similar to.So, as calculating goal pressure difference Δ P _dFormula, can use the expression straight line 1 formula

(formula 5)

Δ P _d=Aq _d+ b ... (formula 5)

Wherein, A, b are coefficient, can try to achieve according to the measurement result of Figure 21.So, in goal pressure difference calculation element 126, by utilizing formula (5) according to target joint angles vector q _dCalculate goal pressure difference Δ P _d, input pressure mistake difference compensating device 115 just can be realized the high-precision Position Control that steady-state deviation is little.

Figure 22 is other the figure of formation of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 5.

In the control device of Figure 22, target internal state determination device 1109 is used as the example different with Figure 20, is made of goal pressure difference calculation element 126 and approximate inverse kinematic calculation device 127.The finger tip posture vector r and the finger tip posture object vector r that exports by target track generating apparatus 111 of input instrumentation in mechanical arm 10A in approximate inverse kinematic calculation device 127 _dError r _e, the joint angles vector currency q, according to error r _e, the Jacobian J that calculates by the currency q of joint angles vector _r, utilize q _e=J _r ^-1r _eCalculating formula, calculate the error q of joint angles vector approx _eIn goal pressure difference calculation element 126, as based on the currency q of the joint angles vector of instrumentation in mechanical arm 10A and the error q of the joint angles vector that utilizes approximate inverse kinematic calculation device 127 to calculate _eAdd and target joint angles vector q _d, input q _d=q+J _r(q) ^-1r _e, according to target joint angles vector q _d, utilize goal pressure difference calculation element 126 to calculate goal pressure poor (desired value of pressure differential) Δ P _d=[Δ P _1d, Δ P _2d, Δ P _3d, Δ P _4d, Δ P _5d, Δ P _6d] ^T, from goal pressure difference calculation element 126 to pressure differential error-compensating apparatus 115, the desired value of output pressure difference.

Even the formation that this kind is shown in Figure 22, also the formation with Figure 20 is identical, by calculating goal pressure difference Δ P _d, input pressure mistake difference compensating device 115 just can be realized the high-precision Position Control that steady-state deviation is little.

Figure 26 is other the figure of formation of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 5.

The control device of Figure 26 is compared with the control device as Figure 20 of the concrete example of the control device of Figure 19, at target track generating apparatus 111 export target joint angles vector q _dThe aspect does not have positive motion to learn calculation element 121, is transfused to joint angles vector q, will be as target joint angles vector q _dError q with the joint angles vector of the difference of joint angles vector q _eThe aspect of input position error-compensating apparatus 112 is to goal pressure difference calculation element 126 input target joint vector q _dAspect difference, other part are identical formation.So, according to the control device of Figure 26, by target joint vector q is provided _d, just can be according to making joint angles vector q become target joint vector q _dMode control.

Figure 25 has represented to verify the experimental result of the performance of control device of the present invention.In order to understand the effect that obtains because of the formation that adopts control device of the present invention easily, the experimental result of Figure 25 is to utilize control device shown in Figure 26, only makes the 6th joint 6-6 action of mechanical arm 10A shown in Figure 2, has carried out the anglec of rotation q of the 6th joint 6-6 ₆The result of control.The elastic expansion contracted configurations body 1 that drives the 6th joint 6-6 is made as 17cm with the total length of tubular elastomer 2, and internal diameter is made as 1cm.Distance between the intersection point of the intersection point of joint shaft 6-3 and 6-4 and joint shaft 6-5 and 6-6 is made as 28cm.Hammer arranged in that handle portion is additional, make that the moment of inertia around joint shaft 6-6 reaches 0.0045kgm ²In addition, the pressure-air of being supplied with by air pressure source 16 is utilized air pressure and adjusts assembly 17 pressure is adjusted into 0.6Mpa, supplies with to 5 port flows control magnetic valve 18.

The result who represents with solid line among Figure 25 utilizes the control device of the embodiment 5 of Figure 19, more particularly, is the control result who utilizes the control device represent with the formation of Figure 26 to obtain.Desired value is the desired value of per stepped variation in 2 seconds between 0 ° and 35 °.

On the other hand, the result who is represented by dotted lines among Figure 25 is according to the currency q and the target joint angles vector q that utilizes 111 outputs of target track generating apparatus that make as the joint angles vector of being exported by mechanical arm 10A shown in the formation of Figure 28 _dThe error q of joint angles vector of difference _e0 the mode of reaching is controlled only is the result of the situation of the formation of simple position control.

Observing Figure 25 can find, according to the formation of the control device of present embodiment 5, and only compares the control accuracy raising for the situation of simple position control.

As implied above, control device according to described embodiment 5, by setting driving moment error-compensating apparatus 125, the moment feedback control system of the driving moment feedback that formation will be produced by described elastic-body actuator drive type movable mechanism 1102, and between described elastic-body actuator drive type movable mechanism 1102 and driving moment error-compensating apparatus 125, set pressure differential error-compensating apparatus 115, formation is with the internal pressure control system of the internal state feedback of described elastic-body actuator drive type movable mechanism 1102, and set goal pressure difference calculation element 126, the goal pressure difference is imported between driving moment error-compensating apparatus 125 and pressure differential error-compensating apparatus 115 and feedovered, just can realize that response is good, the control of the high accuracy mechanical arm 10A that effect of kinetics is few and steady-state deviation is also little.

In addition, control method according to described embodiment 5, by on described elastic-body actuator drive type movable mechanism 1102, setting driving moment error-compensating apparatus 125, the moment feedback control system of the driving moment feedback that formation will be produced by described elastic-body actuator drive type movable mechanism 1102, and between described elastic-body actuator drive type movable mechanism 1102 and driving moment error-compensating apparatus 125, set pressure differential error-compensating apparatus 115, formation is with the internal pressure control system of the internal state feedback of described elastic-body actuator drive type movable mechanism 1102, and set goal pressure difference calculation element 126, the goal pressure difference is imported between driving moment error-compensating apparatus 125 and pressure differential error-compensating apparatus 115 and feedovered, just can realize that response is good, the control of the high accuracy mechanical arm 10A that effect of kinetics is few and steady-state deviation is also little.

And, in the control system of Figure 22, though will be made as the error r of finger tip posture to the input of target internal state determination device 1109 _eYet, because error r _eBe the poor of desired value and instrumentation value, as utilizing positive motion to learn finger tip posture vector r that calculation element 121 calculates and finger tip posture object vector r according to the currency q of the joint angles vector of instrumentation in mechanical arm 10A by 111 outputs of target track generating apparatus _dError r _e123a is such for input approximate inverse kinematic calculation device, and block diagram can be out of shape, and therefore under the situation of input desired value and under the situation at error originated from input, does not have difference in essence.

(embodiment 6)

Though the inscape of the control device of the elastic-body actuator drive type movable mechanism 1102 of embodiment 6 shown in Figure 23 is identical with the control device of the elastic-body actuator drive type movable mechanism 1102 of embodiment 5 shown in Figure 19, the input/output relation difference of each square frame.In the control device of Figure 23, internal state is not in the inside of driving force to the circulation of driving force error-compensating apparatus 1105 feedbacks by the circulation to inner state error compensation arrangement 1106 feedbacks, but form self-existent formation, become utilization will be from the output of the internal state error compensation information of internal state error-compensating apparatus 1106 and the signal after coming the output addition of driving force error compensation information of self drive error-compensating apparatus 1105 drive the formation of elastic-body actuator drive type movable mechanism 1102.

Below, for the concrete example of the control device of the elastic-body actuator drive type movable mechanism 1102 of embodiment 6, be that example describes with control device as the mechanical arm 10A of an example of elastic-body actuator drive type movable mechanism 1102 as the control object.Therefore the details of mechanical arm 10A omits details owing to identical with embodiment 4.

Figure 24 is the figure of formation of control device of the elastic-body actuator drive type movable mechanism of further concrete expression embodiments of the present invention 6.In the control device shown in Figure 24, the signal of input after in mechanical arm 10A with the output addition of the output of pressure differential error-compensating apparatus 115 and driving moment error-compensating apparatus.

By adopting this kind formation, in goal pressure difference calculation element 126, for example by utilizing formula (5) according to target joint angles vector q _dCalculate goal pressure difference Δ P _d, import goal pressure difference Δ P to pressure differential error-compensating apparatus 115 from goal pressure difference calculation element 126 _d, just can realize the high-precision Position Control that steady-state deviation is little in the same manner with the situation of the control device of embodiment 5.

Figure 27 is other the figure of formation of control device of the elastic-body actuator drive type movable mechanism of expression embodiments of the present invention 6.

The control device of Figure 27 is compared with the control device as Figure 24 of the concrete example of the control device of Figure 23, at target track generating apparatus 111 export target joint angles vector q _dThe aspect does not have positive motion to learn calculation element 121, is fed joint angles vector q, will be as target joint angles vector q _dError q with the joint angles vector of the difference of joint angles vector q _eThe aspect of input position error-compensating apparatus 112 is to goal pressure difference calculation element 126 input target joint vector q _dAspect difference, other part are identical formation.So, according to the control device of Figure 27, by target joint vector q is provided _d, just can be according to making joint angles vector q become target joint vector q _dMode control.

Figure 25 has represented to verify the experimental result of the performance of control device of the present invention.The details of experiment is because explanation in described embodiment 5, therefore omission.

Result with single-point line expression among Figure 25 utilizes the control device of the embodiment 6 of Figure 23, more particularly, is the control result who utilizes the control device represented with the formation of Figure 27 to obtain.

Observing Figure 25 can find, identical with the situation of embodiment 5 according to the formation of the control device of embodiment 6, and only compares the control accuracy raising for the situation of simple position control.

As implied above, control device according to described embodiment 6, by on described elastic-body actuator drive type movable mechanism 1102, setting driving moment error-compensating apparatus 125, the moment feedback control system of the driving moment feedback that formation will be produced by described elastic-body actuator drive type movable mechanism 1102, and with driving moment error-compensating apparatus 125 independently, on described elastic-body actuator drive type movable mechanism 1102, set goal pressure difference calculation element 126 and pressure differential error-compensating apparatus 115, formation is with the internal state of described elastic-body actuator drive type movable mechanism 1102 feedback, with moment reponse system control pressurer system independently, just can realize that response is good, the control of the high accuracy mechanical arm 10A that effect of kinetics is few and steady-state deviation is also little.

In addition, control method according to described embodiment 6, by on described elastic-body actuator drive type movable mechanism 1102, setting driving moment error-compensating apparatus 125, the moment feedback control system of the driving moment feedback that formation will be produced by described elastic-body actuator drive type movable mechanism 1102, and with driving moment error-compensating apparatus 125 independently, on described elastic-body actuator drive type movable mechanism 1102, set goal pressure difference calculation element 126 and pressure differential error-compensating apparatus 115, formation is with the internal state of described elastic-body actuator drive type movable mechanism 1102 feedback, with moment reponse system control pressurer system independently, just can realize that response is good, the control of the high accuracy mechanical arm 10A that effect of kinetics is few and steady-state deviation is also little.

(embodiment 7)

Figure 29 represents that particularly control device with elastic-body actuator drive type movable mechanism shown in Figure 19 is applied to the figure of formation of control device of the situation of following operation, promptly, as shown in figure 30, utilize mechanical arm 1400 to control instrument 1407, along the direction (x vertical with stationary plane 1406 _cDirection) the exert oneself power control of F pushing, simultaneously, along the direction (y parallel with stationary plane 1406 _c, z _cDirection) carries out Position Control.Among Figure 29, and use identical numbering, below its explanation is omitted as the position of the identical formation of the control device shown in Figure 22 of one of concrete example of Figure 19.In addition, in Figure 30, the 1405th, be disposed at the power sensor on the hand 313, measure the force vector F=[F that finger tip produced _x, F _y, F _z, M _x, M _y, M _z] ^T, promptly instrument 1407 is by the power to stationary plane 1406 pushings.Wherein, F _x, F _y, F _zThe translation power of representing x direction, y direction, z direction respectively, M _x, M _y, M _zRepresent respectively around the x axle the power momentum, around the power momentum of y axle, around the power momentum of z axle.Therefore other structure omits detailed explanation owing to identical with mechanical arm 10A shown in Figure 16.

In the control device shown in Figure 29, compare with control device shown in Figure 22, difference aspect following, promptly, the formation difference of output error compensation arrangement 1103, in addition, conduct output from mechanical arm 1400, except joint angles vector q, also utilize the force vector F that finger tip produced of power sensor 1405 output mechanical arms 1400.

Among Figure 29,1401 is the site error extraction element, is transfused to site error r _e, only extract the direction (y that carries out Position Control _c, z _cDirection) site error r _Ex, to 112 outputs of positional error compensation device.Carry out reference axis x and the x of extraction shown in Figure 30 of site error of the direction of Position Control _c, y and y _c, z and z _cWhen parallel respectively, utilize following formula (6) to carry out.

[formula 6]

r_{ex} = (\begin{matrix} 0 & 0 & 0 & 0 & 0 & 0 \\ 0 & 1 & 0 & 0 & 0 & 0 \\ 0 & 0 & 1 & 0 & 0 & 0 \\ 0 & 0 & 0 & 1 & 0 & 0 \\ 0 & 0 & 0 & 0 & 1 & 0 \\ 0 & 0 & 0 & 0 & 0 & 1 \end{matrix}) r_{e}

Formula (6)

1402 is power error extraction element, is transfused to force vector F that produces as finger tip and the target force that finger tip the produced vector F that is exported by target track generating apparatus 111 _dThe power error F of error _e, only extract the direction (x that carries out power control _cDirection) power error F _Ex, to 1403 outputs of power error-compensating apparatus.The extraction of power error of direction of carrying out power control is as reference axis x and the x shown in Figure 30 _c, y and y _c, z and z _cWhen parallel respectively, utilize following formula (7) to carry out.

[formula 7]

F_{ex} = (\begin{matrix} 1 & 0 & 0 & 0 & 0 & 0 \\ 0 & 0 & 0 & 0 & 0 & 0 \\ 0 & 0 & 0 & 0 & 0 & 0 \\ 0 & 0 & 0 & 0 & 0 & 0 \\ 0 & 0 & 0 & 0 & 0 & 0 \\ 0 & 0 & 0 & 0 & 0 & 0 \end{matrix}) F_{e}

Formula (7)

From power error-compensating apparatus 1403, export u to force-moment conversion equipment 1404 power output error correction _FForce-moment conversion equipment 1404 is utilized the formula shown in the following formula (8), calculates and export to be used to revise power error F _ePower error correction τ _F

[formula 8]

τ _F＝J ^T _ru _F

Formula (8)

From output error compensation arrangement 1103, export site error correction τ as the output error compensated information _pWith power error correction moment τ _FValue after the addition.

The substance of control action is side by side to realize the finger tip posture error r that utilizes positional error compensation device 112 to carry out _eFEEDBACK CONTROL (Position Control), the position of FEEDBACK CONTROL (power control) that utilizes the power F that finger tip produced that power error-compensating apparatus 1403 carries out and the compound control of power.If as positional error compensation device 112, for example use the PID compensator, as power error-compensating apparatus 1403, for example use the PI compensator, then can be according to making finger tip posture error r _e0 the mode of converging on is controlled, and, according to the power error F that finger tip is produced _e0 the mode of converging on is controlled, and therefore just can realize the action as the mechanical arm 1400 of target.

As implied above, by driving moment error-compensating apparatus 125 and pressure differential error-compensating apparatus 115 are set, can carry out the moment FEEDBACK CONTROL that response is good, precision is high, therefore just can realize the power control that response is good, precision is high.So, by instrument shown in Figure 30 1407 is applied in the various operations to the pushing control as the wall of stationary plane 1406, for example just can realize wiping the operation of the uses such as end face wiping action of window action, desk with high security.

(embodiment 8)

Below, as embodiments of the present invention 8, other the concrete example for the control device of elastic actuator type movable agency shown in Figure 15 describes as example to use the situation of electrically conductive high polymer actuator as elastic actuator.The details of mechanical arm 10A is owing to except use electrically conductive high polymer actuator as elastic actuator, and is identical with embodiment 4, therefore details omitted.

Figure 32 A～Figure 32 C is the profile of having represented as the summary of the artificial-muscle driver 1301 of an example of the electrically conductive high polymer actuator of embodiments of the present invention 8.In addition, represented its outline drawing among Figure 33.

Among Figure 32 A～Figure 32 C, the 1311st, as being accompanied by redox reaction and the expansion plate of the extrusome of the rectangle of the electroconductive polymer system of expansion contraction distortion, be configured in be full of the space that surrounds by columnar box body 1321, discoideus lid 1322 as the substantial middle portion in the liquid of the electrolyte 1313 of electrolyte base body layer.As electrolyte, can utilize NaPF ₆, TBAPF ₆Deng electrolyte, the BMIPF of electrolyte dissolution in organic solvents such as water or propene carbonate ₆Isoiony liquid.Particularly, owing to contain PF as anion ₆Electrolyte because of obtaining very big displacement with combination as the polypyrrole of electroconductive polymer, therefore preferred.

Electroconductive polymer as the expansion plate 1311 that constitutes electroconductive polymer can utilize polypyrrole, polyaniline or polymethoxy aniline etc., but polypyrrole is big preferred because of displacement.In addition, about the preferred tens of μ m of the thickness of the expansion plate 1311 of electroconductive polymer.When thinner than it, then on the intensity a little less than, when thicker than it, then ion can't pass in and out the inside of the expansion plate 1311 of electroconductive polymer, and is therefore not ideal enough.

Two ends at the long side direction of the expansion plate 1311 of electroconductive polymer are connected with

bar

1323a, 1323b, bar 1323a runs through the containment member 1324a that is located on the lid 1322, bar 1323b runs through the containment member 1324b that is located on the box body 1321, and is outstanding to the outside of lid 1322 and box body 1321 respectively.

The distribution that is connected with the expansion plate 1311 of electroconductive polymer is connected with power supply 1303 through being located at containment member 1324c on the lid 1322, switch 1304, current-flow test set 1326.On the opposing party's of power supply 1303 electrode, be connected with electrode 1325.Electrode 1325 is passed the containment member 1324d that is located on the lid 1322, be filled in box body 1321 in the space in electrolyte 1313 contact.

In addition, power supply 1303, switch 1304 are utilized not shown control device, serve as basis 3 and suitably carry out voltage adjustment, switch, the action of control artificial-muscle driver 1301 with the information of current-flow test set 1326.

Below, the effect of this artificial-muscle driver 1301 is described.

The reason of shrinking as the expansion plate 1311 of electroconductive polymer, the discrepancy of anion (anion), the discrepancy of cation (cation), the variation of macromolecule structure etc. are arranged, yet in the explanation that utilizes Figure 32 A, Figure 32 B and Figure 32 C to operating principle, owing to anionic doping in material systems such as polypyrrole, mix and to be used as main mechanism of deformation, therefore anionic discrepancy is narrated.

Figure 32 A is illustrated in the state that does not apply voltage under the switch closing state to the high molecular expansion plate 1311 of electric conductivity, and Figure 32 B represents to have applied to the high molecular expansion plate 1311 of electric conductivity the situation of positive current potential.When the electrical high molecular expansion plate 1311 that acts as a guide applies voltage, when not applying voltage, be present in expansion plate 1311 sides that are pulled to the electroconductive polymer of positive electrode side as the anion in the electrolyte 1313 of electrolyte base body layer equably, thereby enter in the expansion plate 1311 of electroconductive polymer.Be accompanied by this oxidizing process, 1311 elongations of the expansion plate of electroconductive polymer, thus can utilize

bar

1323a, 1323b to provide the displacement of prolonging direction of the expansion plate 1311 of electroconductive polymer.In addition, Figure 32 C represents to have applied to the high molecular expansion plate 1311 of electric conductivity the situation of negative pressure.Be present in anion in the expansion plate 1311 of electroconductive polymer be pulled to face mutually to electrode 1325, thereby in as the electrolyte 1313 of electrolyte base body layer, break away from, be accompanied by this reduction process, the expansion plate 1311 of electroconductive polymer shrinks, thereby can utilize

bar

1323a, 1323b to provide the displacement of shrinkage direction.

Because the displacement of the known electrically conductive high polymer actuator that moves because of aforesaid anionic discrepancy or generation power are roughly proportional with the quantity of electric charge that is injected, therefore in present embodiment 8, the internal state amount during as the instrumentation internal state is used the quantity of electric charge.

Figure 34 is that expression is used to drive the figure as the formation of the power-supply system of the mechanical arm 10A of the control object of the control device of the elastic actuator driven nature movable agency 1102 of embodiments of the present invention 8.Among Figure 34, only write down the part that the just contrary rotation of the 3rd joint shaft 6-3 of mechanical arm 10A is driven, other part has been omitted.Among Figure 34,1351-3a, 1351-3b are driving power, constitute by voltage variable power supply 1352-3a, 1352-3b and galvanometer 1353-3a, 1353-3b, be connected with electrically conductive high polymer actuator 1301-3a, 1301-3b (example of elastic expansion contracted configurations body 1-3a and elastic expansion contracted configurations body 1-3b), applied voltage.The 19th, the control computer that constitutes by for example general personal computer as an example of control part, be equipped with D/A plate 20, by to voltage variable power supply 1352-3a, 1352-3b output voltage command value, just the magnitude of voltage that is applied on each electrically conductive high polymer actuator 1301-3a, the 1301-3b can be controlled independently, just electrically conductive high polymer actuator 1301-3a, 1301-3b can be driven thus.In addition, on control computer 19, be equipped with A/D plate 1354, can be with current value input control computer 19 by galvanometer 1353-3a, 1353-3b instrumentation.

Figure 31 is the figure of formation of control device of the elastic-body actuator drive type movable mechanism 1102 of expression embodiments of the present invention 8.Among Figure 31, the 1201st, as the quantity of electric charge error-compensating apparatus of an example of internal state error-compensating apparatus 1106.In quantity of electric charge error-compensating apparatus 1201, input is from from the moment error correction quantity of electric charge c as the driving moment error-compensating apparatus 125 of an example of driving moment error-compensating apparatus 1105 _τIn, deducted by will be by driving power (for the situation of electrically conductive high polymer actuator 1301-3a, be driving power 1351-3a, for the situation of electrically conductive high polymer actuator 1301-3b, be driving power 1351-3b) value (quantity of electric charge error c of the current i current quantity of electric charge c that integration obtains in quantity of electric charge calculation element 1202 of instrumentation _e), from quantity of electric charge error-compensating apparatus 1201, according to the mode of the error correction of the quantity of electric charge that will in electrically conductive high polymer actuator 1301-3a or electrically conductive high polymer actuator 1301-3b, inject, to mechanical arm 10A output charge amount error correction output u.Quantity of electric charge error correction output u is offered each power supply by process D/A plate 20 as voltage instruction value, and the 3rd joint shaft 6-3 is driven by just contrary rotation and mechanical arm 10A is moved.In other joint shaft 6-1～6-2,6-4～6-6, for each joint shaft, also be utilized the identical control of described control device, just contrary respectively rotation drives, and makes mechanical arm 10A action.

Control device according to above embodiment 8, by setting driving moment error-compensating apparatus 125, the moment feedback control system of the driving moment feedback that formation will be produced by described elastic-body actuator drive type movable mechanism 1102, and between described elastic-body actuator drive type movable mechanism 1102 and driving moment error-compensating apparatus 125, set charge difference error-compensating apparatus 1201, formation just can realize that with the control system of the internal state feedback of described elastic-body actuator drive type movable mechanism 1102 response is good, the control of the high accuracy mechanical arm 10A that effect of kinetics is few and steady-state deviation is also little.

And, in the described embodiment 5 and 6, though in goal pressure difference calculation element 126 that the relation of joint angles and pressure differential is approximate with 1 power formula, be not limited thereto, can certainly utilize polynary multinomial such as 2 power formulas to be similar to.Like this, under the situation that the relation with the internal state of the output of elastic actuator 1 and elastic actuator 1 is similar to multinomial, described target internal state determination device 1105 utilizes described multinomial, calculates the desired value of the internal state of the described elastic actuator 1 of decision according to the desired value of the output of described elastic actuator 1.In addition, can not to be similar to also with multinomial, but form following formation, promptly, utilize described target internal state determination device 1105, the relation (for example relation of joint angles and pressure differential) of the internal state of the output of described elastic actuator 1 and described elastic actuator 1 is stored in advance as form among the memory 19a (with reference to Fig. 4) of control computer 19 of control device, based on form, from the desired value (for example desired value of joint angles) of the output of described elastic actuator 1, derive the desired value (for example desired value of pressure differential) of the internal state of described elastic actuator 1.

In addition, in the described embodiment 6, though target internal state determination device 1109 is made as goal pressure difference calculation element 126, but be not limited thereto, identical with the situation of the formation of Figure 22, by also identical under approximate inverse kinematic calculation device 127 and the situation that goal pressure difference calculation element 126 constitutes.

In addition, in described each embodiment, though output is made as joint angles, but be not limited thereto, be made as displacement speed sensor will exporting measuring device 1104, the output valve of described elastic actuator is made as the velocity of displacement of described elastic actuator and carries out under the situation of velocity of displacement control also identical as an example of velocity of displacement measuring device.

In addition, in described each embodiment, though output is made as joint angles, but be not limited thereto, be made as power sensor will exporting measuring device 1104, the output valve of described elastic actuator is made as the power of utilizing described elastic actuator performance and carries out under the situation of power control also identical as an example of power measuring device.

In addition, in described each embodiment,,, infer internal state, also can bring into play identical effect under the situation of the presumed value of use internal state in that observer is set though be provided with sensor as an example of internal state measuring device 1108.

In addition, in described each embodiment,,, infer driving force, also can bring into play identical effect under the situation of the presumed value of use driving force in that observer is set though be provided with torque sensor 7 as an example of driving force measuring device 1107.

In addition, in the described embodiment 8, though elastic actuator is made as the driver that utilizes electro photoluminescence to drive, with the electrically conductive high polymer actuator is that example is illustrated, but be not limited thereto, even utilizing electro photoluminescence to drive under the situation of elastomeric drivers such as dielectric polymer, various gels,, also can bring into play identical effect by adopting the current potential or the quantity of electric charge etc. as internal state.

And, by the embodiment arbitrarily in the middle of the described various embodiments suitably being made up, can play separately the effect that is had.

Though the present invention by in the reference accompanying drawing with preferred embodiment carried out sufficient record relatedly, for these those skilled in the art, various distortion or correction are very clearly.This kind distortion or only revise otherwise break away from the scope of the present invention that is formed by the technical scheme of being added is appreciated that to be contained in wherein.

The industrial possibility of utilizing

The control device of elastic actuator of the present invention and control method are as utilizing elastomer The control device of the positions such as the track control control of the finger tip position of the mechanical arm of driver action reaches Control method is very useful. In addition, be not limited to mechanical arm, also can be used as production equipment etc. Utilize control device and control method, linear slide block or the punching press dress of the rotating mechanism of elastic actuator The control device of the straight-moving mechanism that utilizes elastic actuator of putting etc. and control method are used.

In addition, the control device of elastic-body actuator drive type movable mechanism of the present invention and control method Track control equipotential as the finger tip position of the mechanical arm that utilizes elastic actuator action Control device and the control method of putting control are very useful. In addition, be not limited to mechanical arm, also can With control device and the controlling party as the rotating mechanism that utilizes elastic actuator of production equipment etc. The control device of the straight-moving mechanism that utilizes elastic actuator of method, linear slide block or decompressor etc. reaches Control method is used.

Claims

1. the control device of an elastic actuator (102),

Possess:

The internal state measuring device (107,9) of the internal state of the described elastic actuator that instrumentation changes because of the driving of described elastic actuator,

The output measuring device (104,8) of the output of the described elastic actuator of instrumentation,

The desired value of the output by importing described elastic actuator and the instrumentation value of the output of the described elastic actuator that utilizes described output measuring device instrumentation compensate output error output error compensation arrangement (103,12),

Decide according to the instrumentation value of the output of the desired value of the output of described elastic actuator and described elastic actuator described elastic actuator internal state desired value target internal state determination device (105),

By input from the output of described output error compensation arrangement, from the output of described target internal state determination device, and compensate the internal state error-compensating apparatus (106,15) of internal state error from the output of described internal state measuring device,

Control based on the described internal state error of utilizing the compensation of described internal state error-compensating apparatus, make the instrumentation value of the described output of described elastic actuator become the desired value of described output.

2. the control device of an elastic actuator (102),

Possess:

According to the desired value of the output of described elastic actuator and utilize the instrumentation value of internal state of the described elastic actuator of described internal state measuring device instrumentation decide described elastic actuator internal state desired value target internal state determination device (105),

By input from the output of described output error compensation arrangement, compensate the internal state error-compensating apparatus (106,15) of internal state error from the output of described target internal state determination device and from the output of described internal state measuring device,

3. according to the control device of the elastic actuator described in claim 1 or 2, wherein,

Described target internal state determination device (105) utilizes described root of a polynomial to calculate and determine the desired value of the internal state of described elastic actuator according to the desired value of the output of described elastic actuator the relation polynomial approximation of the internal state of the output of elastic actuator and elastic actuator.

4. according to the control device of the elastic actuator described in claim 1 or 2, wherein,

Described target internal state determination device (105) is stored in the relation of the internal state of the output of described elastic actuator and described elastic actuator in the memory (19a) as form, utilizes described form to determine the desired value of the internal state of described elastic actuator according to the desired value of the output of described elastic actuator.

5. according to the control device of the elastic actuator described in claim 1 or 2, wherein, described elastic actuator is the fluid pressure actuated device by fluid pressure actuated.

6. according to the control device of the elastic actuator described in the claim 5, wherein, described fluid pressure actuated device be have hollow projectile cartridge gonosome (2), carry out described hollow elastomeric airtight sealing 1 group of containment member (4), can inject or outpour the elastic expansion contracted configurations body of the fluid of fluid to described hollow elastomeric hollow interior by member (5).

7. according to the control device of the elastic actuator described in the claim 5, wherein, the internal state of described elastic actuator is a fluid pressure, and the described internal state measuring device of the described internal state of the described elastic actuator of instrumentation is pressure measuring device (9).

8. according to the control device of the elastic actuator described in claim 1 or 2, wherein, described elastic actuator is output as displacement, and the described output measuring device of the output of the described elastic actuator of instrumentation is displacement measuring device (8).

9. according to the control device of the elastic actuator described in claim 1 or 2, wherein, described elastic actuator is output as velocity of displacement, and the described output measuring device of the output of the described elastic actuator of instrumentation is the velocity of displacement measuring device.

10. according to the control device of the elastic actuator described in claim 1 or 2, wherein, described elastic actuator is output as power, and the described output measuring device of the output of the described elastic actuator of instrumentation is the power measuring device.

11. the control method of an elastic actuator (102), wherein,

Utilize the internal state of the described elastic actuator that internal state measuring device (107,9) instrumentation changes because of the driving of described elastic actuator,

Utilize the output of the described elastic actuator of output measuring device (104,8) instrumentation,

With the desired value of the output of described elastic actuator with utilize the instrumentation value of output of the described elastic actuator of described output measuring device instrumentation to be input to output error compensation arrangement (103,12), utilize described output error compensation arrangement compensation output error,

According to the desired value of the output of described elastic actuator, utilize the desired value of the internal state of the described elastic actuator of target internal state determination device (105) decision,

Will be from the output of described output error compensation arrangement, be input to internal state error-compensating apparatus (106 from the output of described target internal state determination device and from the output of described internal state measuring device, 15), utilize described internal state error-compensating apparatus compensation internal state error, control, make the instrumentation value of the described output of described elastic actuator become the desired value of described output.

12. the control method of elastic actuator according to claim 11 (102), wherein,

Described target internal state determination device (105) determines the desired value of the internal state of described elastic actuator according to the instrumentation value of the internal state of the desired value of the output of described elastic actuator and described elastic actuator.