CN100411793C - Micro-scale line electrode electrolysis machining method and micro-vibration line electrode system - Google Patents
Micro-scale line electrode electrolysis machining method and micro-vibration line electrode system Download PDFInfo
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- CN100411793C CN100411793C CNB2006100400546A CN200610040054A CN100411793C CN 100411793 C CN100411793 C CN 100411793C CN B2006100400546 A CNB2006100400546 A CN B2006100400546A CN 200610040054 A CN200610040054 A CN 200610040054A CN 100411793 C CN100411793 C CN 100411793C
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Abstract
The present invention relates to a method for processing micro scale wire electrodes and electrolysis, which belong to a micro-fine electrochemical processing field. The method is characterized in that a micro vibration device is used for making the wire electrodes generating micro vibration perpendicular to the feed direction of the wire electrodes in the course of carrying out electrolytic micro cutting processing on metal materials by the wire electrodes so as to be favorable for eliminating electrolytic products in processing gaps. Thereby, a short-circuit phenomenon is avoided, electrolytic quality is greatly improved, processing efficiency is improved at the same time, and processing cost is reduced. The present invention also relates to a wire electrode system realizing the method of the present invention, and the system is arranged on a Z axis of a numerical control machine. The present invention is characterized in that the present invention is composed of a wire electrode frame (3), a micro scale wire electrode (4) and the micro vibration device, wherein the micro scale wire electrode (4) is arranged on the wire electrode frame (3), and the micro vibration device makes the wire electrode frame (3) drive the micro scale wire electrode (4) to generate micro vibration perpendicular to the feed direction of the micro vibration device.
Description
Technical field
The present invention relates to a kind of little vibration line electrode system of minute yardstick line electrode Electrolyzed Processing, belong to the minuteness electrochemical manufacture field.
Background technology
Micrometer-Nanometer Processing Technology is one of a most active scientific research direction in this century, and the microfabrication of metal material has growth requirement widely.For micro-system, aspect cellular systems such as propelling, driving, execution, transmission, usually relate to the manufacturing of metal material micro parts such as planar coil, fluid channel, miniature gears, power transmission shaft, arm, rudder, oar, decelerator.Also there is significant limitation in existing metal material Micrometer-Nanometer Processing Technology, can not satisfy the demand of development.What the electrochemistry process technology was based on the anodic solution principle subtracts the material manufacturing technology, as Electrolyzed Processing etc., process all is to carry out with the form of ion, because the size of metal ion is very small, less than nanoscale, so the minuteness electrochemical processing method has advantage with respect to other a lot of fine machining methods on principle.
Macroscopical electrolysis wire cutting technology was proposed in the eighties in 20th century, because the gap of Electrolyzed Processing can not control to micro-meter scale effectively, so the electrolysis wire cutting technology of macroscopic view only is used to cut off the blank with certain thickness difficult-to-machine material, can not directly be used for processing parts.
The appearance of high frequency narrow pulsewidth Electrolyzed Processing power supply in recent years makes the side clearance of Electrolyzed Processing narrow down to micro-meter scale, has avoided serious this shortcoming of Electrolyzed Processing dispersion corrosion effectively.The minute yardstick Electrolyzed Processing becomes the concern of extremely going together of emerging fine machining method.Recently, people such as the researcher B.H.Kim of Korea S adopt 10 microns platinum filament to make line electrode, have carried out the Primary Study of minute yardstick line electrode Electrolyzed Processing, are expected to solve the suitable to fine structure with high depth-width ratio that is difficult to process in the common minute yardstick Electrolyzed Processing.
But; when removing the Electrolyzed Processing suitable to fine structure with high depth-width ratio with the minute yardstick line electrode; because the side clearance narrows down to micron order or even submicron order usually; if the electrolysate in the processing can not be discharged smoothly; new electrochemical reaction ions can't in time be replenished; then short circuit phenomenon occurs, make processing can't continue to carry out through regular meeting.
Summary of the invention
The objective of the invention is to, at having the difficulty that electrolysate can not be discharged smoothly in the minuteness electrochemical process technology now, a kind of little vibration line electrode system of minute yardstick line electrode Electrolyzed Processing is provided, make in the process, electrolysate is got rid of smoothly, avoid short circuit, improved working (machining) efficiency and crudy.
A kind of little vibration line electrode system of minute yardstick line electrode Electrolyzed Processing, it comprises the little vibrating device that is installed on the Digit Control Machine Tool, wherein little vibrating device is made up of voltage amplifier and piezoelectric ceramic piece, this little vibration line electrode system also comprises by pitman and is installed in line electrode framework on the above-mentioned piezoelectric ceramic piece, be installed in the minute yardstick line electrode on the line electrode framework, wherein voltage amplifier links to each other with computer and receives control signal from computer, piezoelectric ceramic piece links to each other with voltage amplifier and receives pulse voltage from voltage amplifier output to produce little vibration, the line electrode framework passes to the minute yardstick line electrode with little vibration that piezoelectric ceramic piece produced, it is characterized in that: described piezoelectric ceramic piece is connected with the line electrode frame rigidity by pitman, and little direction of vibration that little vibrating device produces the minute yardstick line electrode is vertical with minute yardstick line electrode direction of feed.
Wherein, there is a groove that is used for limiting minute yardstick line electrode position line electrode framework lower end, has a processing can hold the breach structure of workpiece at the groove middle part, online electrode framework two sides have a contact screw that is used for fixing the minute yardstick line electrode respectively, also are useful on the online electrode framework line electrode framework is navigated to locating hole on the pitman.
Utilize the minute yardstick line electrode electrolysis machining method of said system as follows:
(1), the minute yardstick line electrode is accurately positioned on the Digit Control Machine Tool Z axle by the line electrode framework, electrolytic bath is fixed on the numerical control table, NC table, workpiece is fixed in the electrolytic bath by work piece holder, and makes electrolyte be full of electrolytic bath, the submergence workpiece; (2), utilize high frequency narrow pulsewidth Electrolyzed Processing power supply as electrolysis power, make the anodal workpiece of connecting, negative pole is connected the minute yardstick line electrode, simultaneously, Faradaic current sudden change when being short-circuited by current sensor collection line electrode and workpiece, when current break took place, control Z axle stopped the tool setting campaign, returns initial position; (3), utilize metal that the principle of electrochemistry anodic solution takes place in electrolyte, X, Y, Z three-axis numerical control by the minute yardstick line electrode move work piece cut machine-shaping; (4), in minute yardstick line electrode electrochemical machining process, utilize little vibrating device to make the line electrode framework drive the double vibrations that the minute yardstick line electrode produces the small amplitude of vertical its direction of feed, with the eliminating electrolysate, and make new electrochemical reaction ions in time add to the processing district.
Beneficial effect of the present invention is:
1, utilize little vibrating device to make line electrode produce little vibration of vertical its direction of feed, the electrolysate that is beneficial in the machining gap is got rid of, thereby has avoided the generation of short circuit phenomenon, makes amount of electrolyte significantly improve, improve working (machining) efficiency simultaneously, reduced processing cost.
2, line electrode of the present invention system is simple in structure.And line electrode is positioned on the main shaft by a frame structure, and positioning accuracy is good, and convenient mounting and clamping has improved machining accuracy and working (machining) efficiency.
Description of drawings
Fig. 1 is a minute yardstick line electrode electrolytic machining device overall structure schematic diagram.
Fig. 2 is a line electrode frame structure schematic diagram.Wherein Fig. 2 (a) is the front schematic view of line electrode frame structure; Fig. 2 (b) is the side schematic view of line electrode frame structure.
Fig. 3 is the processing schematic diagram.Wherein Fig. 3 (a) is processing center line electrode framework and workpiece schematic diagram; Fig. 3 (b) is the enlarged diagram of processing district.
Label title among Fig. 1: 1, machine body, 2, pitman, 3, the line electrode framework, 4, minute yardstick line electrode, 5, workpiece, 6, work piece holder, 7, electrolyte, 8, electrolytic bath, 9, XY bidimensional numerical control table, NC table, 10, piezoelectric ceramic piece, 11, current sensor, 12, the pulse power, 13, computer, 14, screw, 15, voltage amplifier.
Label title among Fig. 2: 16, groove, 17, the breach structure, 18, locating hole, 19, contact screw.
The specific embodiment
According to shown in Figure 1, minute yardstick line electrode electrolytic machining device of the present invention, by forming with the lower part:
(1), comprises machine body 1, pitman 2, piezoelectric ceramic piece 10, XY bidimensional numerical control table, NC table 9, computer 13, voltage amplifier 15 etc. and can realize the Digit Control Machine Tool that Three Degree Of Freedom moves;
(2), electrolytic bath 8 is installed on the XY bidimensional numerical control table, NC table 9, work piece holder 6 and workpiece 5 are fixed in the electrolytic bath 8.Electrolyte 7 is full of electrolytic bath 8, submergence workpiece 5;
(3), the minute yardstick line electrode 4 that is wrapped in a kind of line electrode framework 3 is fixed by two contact screw 19 two ends up and down, and is made minute yardstick line electrode 4 keep certain force of strain.With two screws 14 this line electrode framework 3 is connected on the pitman 2 by the locating hole on it 18;
(4), the positive pole of the pulse power 12 links to each other with workpiece 5 by plain conductor; The negative pole of the pulse power 12 links to each other with contact screw 19 on the line electrode frame structure by plain conductor;
(5), realize processing real-time data acquisition and servo-controlled current sensor 11 and computer 13.
According to Fig. 1, Fig. 2 and shown in Figure 3, for realize minute yardstick line electrode 4 accurately and easily clamping on pitman 2, multidimensional numerical control relative motion with workpiece 5 generation X, Y, Z, and guarantee insulation between the minute yardstick line electrode 4 of motion platform and energising again, so adopt insulating materials to make the carrier of a kind of line electrode framework 3 of knowing clearly as line electrode.And, by the initial position that cooperate determine minute yardstick line electrode 4 and high-aspect-ratio workpiece of screw 14, guarantee that line electrode is parallel with the width of workpiece with locating hole, vertical with the depth direction of processing.In addition, can not directly couple together the negative pole of the minute yardstick line electrode 4 and the pulse power 12 by plain conductor, so two electric conductivity favorable conductive screws 19 are adopted at the two ends up and down of the online electrode framework 3 of the present invention, both can be effectively fixing minute yardstick line electrode 4, can be connected to the negative pole of pulse power supply 12 on the minute yardstick line electrode 4 again.
When removing the Electrolyzed Processing suitable to fine structure with high depth-width ratio with minute yardstick line electrode 4, because the side clearance narrows down to micron order or even submicron order usually, if the electrolysate in the processing can not be discharged smoothly, new electrochemical reaction ions can't in time be replenished, then frequent appearance short circuit phenomenon makes processing can't continue to carry out.Utilize the piezo-electric effect of piezoelectric ceramic piece 10 produce one with the vertical all the time micro breadth oscillation in feeding plane, can obviously improve the flow field the processing district in, what assurance was processed carries out smoothly, and has also improved working (machining) efficiency.
Below in conjunction with Fig. 1, Fig. 2 and Fig. 3 method of the present invention is described, implementation process is passed through following step successively:
1, with reference to figure 2, make line electrode framework 3 with insulating materials such as lucite, groove 16, breach structure 17 and locating hole 18 are arranged on this structure.Tungsten filament or platinum filament about 1 micron to 10 microns are made minute yardstick line electrode 4, it is wrapped in 16 li of the grooves of line electrode framework 3,, and make minute yardstick line electrode 4 maintenance certain force of strain with the fixing minute yardstick line electrode 4 in two contact screw 19 two ends up and down.Active line electrode part when that part of minute yardstick line electrode 4 that is in breach structure 17 is exactly Electrolyzed Processing.
2, with reference to figure 1, the line electrode framework 3 that will have minute yardstick line electrode 4 is fixed on the pitman 2 by screw 14 and locating hole 18.
3, with reference to figure 1, workpiece 5 is fixed on the work piece holder 6, work piece holder 6 is fixed in the electrolytic bath 8, in electrolytic bath 8, be full of electrolyte 7 submergence workpiece 5.Again whole electrolytic bath 8 is lain on the XY bidimensional numerical control table, NC table 9.
4, with reference to figure 1, the pulse power 12 is set to the tool setting parameter, link to each other with contact screw 19 with the negative pole of lead the pulse power 12, the positive pole of the pulse power 12 is linked to each other with workpiece 5.Drive pitman 2 motions, take place up to the edge shorting phenomenon that makes that part of line minute yardstick line electrode 4 that is in breach structure 17 with workpiece 5, this computer-chronograph 13 collects the sudden change of electric current by current sensor 11, be that control connection rod 2 stops the tool setting campaign, and the rollback number micron primary clearance as the minute yardstick Electrolyzed Processing.
5, the graphic file of establishment part to be processed is mended out a series of line electrodes and workpiece relative movement orbit data point coordinate figure with the calculating machine transplanting of rice, preserves into the data point coordinate file.
6, with reference to figure 1 and Fig. 3, the pulse power 12 is set to machined parameters, computer 13 is read the data point coordinate figure of minute yardstick line electrode 4 and workpiece 5 relative motions successively from the track data file, the motion of control XYZ axle, the electrochemistry anodic solution takes place in workpiece 5 in electrolyte 7, minute yardstick line electrode 4 is with the work piece cut moulding.
7, with reference to figure 1 and Fig. 3, in the process, the pulse voltage of computer 13 control voltage amplifiers 15 output certain frequencies drives the double vibrations that piezoelectric ceramic piece 10 produces small amplitude.By the transmission of line electrode framework 3, minute yardstick line electrode 4 adds and the vertical all the time micro breadth oscillation in feeding plane in the process of processing feeding.
8, with reference to figure 1, the current signal in the processing collects in the computer 13 in real time by current sensor 11, and the foundation as servo feed control can prevent the generation of short circuit phenomenon effectively.
9, machine after, computer 13 control XYZ Shaft and NC Machining Test motion platforms make minute yardstick line electrode 4 withdraw from workpiece 5 according to the reverse interpolation orbiting motion of institute's cutting pattern file, promptly obtain required fine structure.
Claims (2)
1. little vibration line electrode system of a minute yardstick line electrode Electrolyzed Processing, it comprises the little vibrating device that is installed on the Digit Control Machine Tool, wherein little vibrating device is made up of voltage amplifier (15) and piezoelectric ceramic piece (10), this little vibration line electrode system also comprises by pitman (2) and is installed in line electrode framework (3) on the above-mentioned piezoelectric ceramic piece (10), be installed in the minute yardstick line electrode (4) on the line electrode framework (3), wherein voltage amplifier (15) links to each other with computer (13) and receives control signal from computer (13), piezoelectric ceramic piece (10) links to each other with voltage amplifier (15) and receives pulse voltage from voltage amplifier output to produce little vibration, line electrode framework (3) passes to minute yardstick line electrode (4) with little vibration that piezoelectric ceramic piece (10) is produced, it is characterized in that: described piezoelectric ceramic piece (10) is rigidly connected by pitman (2) and line electrode framework (3), and little direction of vibration that little vibrating device produces minute yardstick line electrode (4) is vertical with minute yardstick line electrode (4) direction of feed.
2. little vibration line electrode system of minute yardstick line electrode Electrolyzed Processing according to claim 1, it is characterized in that: there is a groove (16) that is used for limiting minute yardstick line electrode (4) position described line electrode framework (3) lower end, has a processing can hold the breach structure (17) of workpiece at groove (16) middle part, online electrode framework (3) two sides have a contact screw (19) that is used for fixing minute yardstick line electrode (4) respectively, also are useful on a line electrode framework (3) on the online electrode framework (3) and navigate to locating hole (18) on the pitman (2).
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4436976A (en) * | 1980-10-27 | 1984-03-13 | Inoue-Japax Research Incorporated | Electroerosion machining method and apparatus with automatic vibrations-sensing electrode wear compensation |
| CN1126645A (en) * | 1994-10-17 | 1996-07-17 | 松下电器产业株式会社 | Electric discharging working apparatus |
| CN2286439Y (en) * | 1997-04-08 | 1998-07-22 | 哈尔滨工业大学 | Miniature electric spark working apparatus directly driven by ultrasonic transducer |
| CN1400077A (en) * | 2001-07-27 | 2003-03-05 | 株式会社三协精机制作所 | Electrolytic machining process, dynamic pressure bearing and its machining process |
| US6835299B1 (en) * | 1999-10-23 | 2004-12-28 | Ultra Systems Limited | Electrochemical machining method and apparatus |
-
2006
- 2006-04-30 CN CNB2006100400546A patent/CN100411793C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4436976A (en) * | 1980-10-27 | 1984-03-13 | Inoue-Japax Research Incorporated | Electroerosion machining method and apparatus with automatic vibrations-sensing electrode wear compensation |
| CN1126645A (en) * | 1994-10-17 | 1996-07-17 | 松下电器产业株式会社 | Electric discharging working apparatus |
| CN2286439Y (en) * | 1997-04-08 | 1998-07-22 | 哈尔滨工业大学 | Miniature electric spark working apparatus directly driven by ultrasonic transducer |
| US6835299B1 (en) * | 1999-10-23 | 2004-12-28 | Ultra Systems Limited | Electrochemical machining method and apparatus |
| CN1400077A (en) * | 2001-07-27 | 2003-03-05 | 株式会社三协精机制作所 | Electrolytic machining process, dynamic pressure bearing and its machining process |
Non-Patent Citations (4)
| Title |
|---|
| 制作微器件的超声电解复合微细加工试验研究. 朱永伟，云乃彰，吴冰杰.第11届全国特种加工学术会议专辑. 2005 |
| 制作微器件的超声电解复合微细加工试验研究. 朱永伟，云乃彰，吴冰杰.第11届全国特种加工学术会议专辑. 2005 * |
| 微细电化学加工技术. 朱荻，王明环，明平美，张朝阳.纳米技术与精密工程，第3卷第2期. 2005 |
| 微细电化学加工技术. 朱荻，王明环，明平美，张朝阳.纳米技术与精密工程，第3卷第2期. 2005 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104439574A (en) * | 2014-11-10 | 2015-03-25 | 中国兵器工业第五九研究所 | Numerical-control electrolytic machining method for closed curve groove in inner wall of tubular workpiece and clamping tool for numerical-control electrolytic machining method |
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