CN100403556C

CN100403556C - Making method of organic luminous diode panel

Info

Publication number: CN100403556C
Application number: CNB031216005A
Authority: CN
Inventors: 萧调宏
Original assignee: AU Optronics Corp
Current assignee: AU Optronics Corp
Priority date: 2003-04-01
Filing date: 2003-04-01
Publication date: 2008-07-16
Anticipated expiration: 2023-04-01
Also published as: CN1534806A

Abstract

The present invention relates to a processing method of an organic luminous diode panel, aiming at the problem of shadow mask cleaning. In the method, plasma dry-cleaning steps are added in the processing method; because the plasma has the cleaning function, the plasma cleaning is carried out on the shadow mask by the plasma before evaporation plating and after the evaporation plating of an organic membrane with particular colors. The present invention has the advantages that the shadow mask cleaning is completed within short time, reliability and quality of the products in the manufacturing process are ensured, in-place shadow mask cleaning by the plasma can not only lower the absorption phenomenon of micro-particles and the repeated defects, but also reduce the probability of dark spots, and blocking of holes of the shadow mask can be reduced.

Description

The manufacture method of organic LED panel

Technical field

The present invention relates to a kind of Organic Light Emitting Diode (Organic Light Emitting Diode, OLED) manufacture method of panel, especially refer to the mask cleaning step in a kind of organic LED panel manufacturing process, it can improve the microparticle absorption problem that existing method is produced, and the repeated defective of avoiding panel, thereby the acceptance rate of raising OLED product.

Background technology

Applied voltage since conjugacy macromolecule (conjugated polymer) can make macromolecular material luminous since discovering, the development of the Display Technique of Organic Light Emitting Diode is very quick.For Organic Light Emitting Diode, in the making of full-color element, be still stepping (side by side) the displacement Red on evaporation in the substrate respectively that utilizes so-called mask (shadow mask), form full-color element.Fig. 1 and Fig. 2 show that respectively existing initiatively panel and passive panel carry out the generalized section of Red pixel evaporation with mask, and wherein Fig. 1 has shown simultaneously with the step-by-step system of mask and carries out the Red evaporation on the active panel surface.As shown in Figures 1 and 2, by hot evaporation, the organic electroluminescent material is plated on transparency electrode (being generally the ITO electrode) 121 surfaces of substrate 10 via the perforate on the mask 101.Generally speaking, 101 sizes of the perforate on the mask are about about 100 to 200 microns.Mask is extracted out behind the evaporation that carries out several batches of products usually and is renewed, and perhaps off-line carries out wet-cleaned, very inconvenient (this measure also reduces production efficiency).

In addition, as shown in Figure 3, the manufacture method of existing oled panel can produce microparticle and be adsorbed on the mask, and microparticle also may cause the obstruction of mask.If microparticle sticks on the mask, when displacement, can produce repeated defective (shown in circled).As shown in Figure 4, this repeated defective is at O) become a guiding path between LED two electrodes, cause electrical short circuit phenomenon, and then cause element downright bad or do not work.If mask blocks, then can produce the situation of organic membrane evaporation inequality.

As from the foregoing, existing oled panel manufacturing technology obviously still has the defective in the actual enforcement, and still treats further improvement.Given this, the applicant is that concentrated the observation and research proposed the present invention of improvement according to above-mentioned shortcoming and according to being engaged in the correlation experience of making this series products for many years, and it can reduce production costs, and increases production efficiency and acceptance rate.

Summary of the invention

The task that the present invention will finish is to provide a kind of manufacture method of organic LED panel, can avoid shortcomings such as microparticle absorption that existing manufacture method brings and repeated defective.

A kind of manufacture method of organic LED panel includes: a transparent substrates is provided, has a transparent electrode layer in this substrate; See through perforate on the mask with the primary importance of the hot evaporation one first organic electroluminescent material membrane of step-by-step system on this transparent electrode layer; Utilize a plasma to clean this mask; And see through this through the perforate on the mask that plasma clean is crossed with step-by-step system the second place of hot evaporation one second organic electroluminescent material membrane on this transparent electrode layer.

Wherein this transparent substrates can be a substrate of glass, active matrix substrate or passive type array substrate, and this plasma can be oxygen gas plasma or nitrogen gas plasma, and this transparent electrode layer can be an ITO conductive glass electrode layer.

For reaching above-mentioned purpose, the present invention is directed to the cleaning problems of the mask in the manufacture method of organic LED panel, in manufacture craft, insert plasma dry cleaning step.In view of plasma itself just has the function of cleaning, so propose to utilize plasma that mask is carried out plasma cleaning respectively at before the evaporation and behind the organic membrane evaporation of individual colors.Its advantage is to finish the cleaning of mask at short notice, guarantees manufacturing process reliability and product fine rate.Clean the adsorption phenomena that mask not only can significantly reduce microparticle so that plasma is on-the-spot, with and the repeated defects that caused, and can reduce the probability that dim spot takes place, also can reduce the phenomenon that the hole of mask gets clogged simultaneously.

In order to make those skilled in the art can further understand feature of the present invention and technology contents, see also following about detailed description of the present invention and accompanying drawing.Yet appended graphic only for reference and explanation usefulness is not to be used for the present invention is limited.

Description of drawings

Fig. 1 is for carrying out the schematic diagram of Red evaporation with the step-by-step system of mask in the existing method.

Fig. 2 shows that existing passive panel carries out the generalized section of Red pixel evaporation with mask.

Fig. 3 is that the manufacture method generation microparticle of existing oled panel is adsorbed on the schematic diagram on the mask.

Fig. 4 becomes the schematic diagram of a guiding path between OLED two electrodes for existing repeated defective.

Fig. 5 is the manufacture method figure of organic LED panel of the present invention.

Description of reference numerals

10 masks

12 substrates

101 perforates

121 transparency electrodes

Embodiment

As previously mentioned, the manufacture method of existing oled panel can produce microparticle and be adsorbed on the mask, and microparticle also may cause the obstruction of mask.If microparticle sticks on the mask, when displacement, can produce repeated defective.This repeated defective becomes a guiding path between OLED two electrodes, cause electrical short circuit phenomenon, and then causes element downright bad or do not work.This mask is extracted out behind the evaporation that carries out several batches of products usually and is renewed, and perhaps needs off-line to carry out wet-cleaned, and this measure is very inconvenient, also reduces production efficiency.

Be to solve existing issue, the invention provides a kind of manufacture method of organic LED panel of improvement, can avoid shortcomings such as microparticle absorption that above-mentioned existing manufacture method brings and repeated defective.See also Fig. 5, Fig. 5 is the manufacture method figure of organic LED panel of the present invention.As shown in Figure 5, the present invention carries out before the organic membrane evaporation at the beginning, and mask is promptly with plasma, and for example oxygen gas plasma or nitrogen gas plasma etc. (but being not limited thereto) are carried out the surface clean of mask metal materials such as (be generally constitute) stainless steels.Plasma clean can the scene or offline mode carry out, keep high efficiency for asking, the power of plasma and plasma temperature can be adjusted to higher relatively, to promote cleaning efficiency.Then, carry out the evaporation of organic membrane.Carrying out the evaporation of redness (G) film in the present embodiment earlier, is illustration only, is not limited to this order.Subsequently, carrying out mask surface equally again cleans.Similarly, plasma clean can the scene or offline mode carry out, keep high efficiency for asking, the power of plasma and plasma temperature can be adjusted to higher relatively, to promote cleaning efficiency.Subsequently, carry out the evaporation of organic membrane R, and connect with the plasma repeated washing.At last, carry out the evaporation of organic membrane B, and connect equally with the plasma repeated washing.

Compared with prior art, the present invention is by the mask in the manufacture method of plasma clean organic LED panel, reach the purpose that promotes production efficiency and acceptance rate, can solve the shortcomings such as microparticle absorption, repeated defective and electrical short circuit that existing manufacture method is produced, it serves to show the progress that it is obvious.

The above only is the preferred embodiments of the present invention, allly changes and improves according to claims of the present invention being equal to of doing, and all should belong to the covering scope of patent of the present invention.

Claims

1. the manufacture method of an organic LED panel includes:

One transparent substrates is provided, has a transparent electrode layer in this substrate;

See through perforate on the mask with the primary importance of the hot evaporation one first organic electroluminescent material membrane of step-by-step system on this transparent electrode layer; And

Utilize a plasma to clean this mask; And

See through this through the perforate on the mask that plasma clean is crossed with step-by-step system the second place of hot evaporation one second organic electroluminescent material membrane on this transparent electrode layer.

2. manufacture method as claimed in claim 1, wherein this transparent substrates is a substrate of glass.

3. the described manufacture method of claim 1, wherein this plasma is oxygen gas plasma or nitrogen gas plasma.

4. manufacture method as claimed in claim 1, wherein this transparent electrode layer is an indium tin oxide-coated glass electrode layer.

5. manufacture method as claimed in claim 1, wherein this first and second organic electroluminescent material membrane is respectively one in the R/G/B three primary colors.

6. manufacture method as claimed in claim 1, wherein this substrate can be active matrix substrate or passive type array substrate person.

7. manufacture method as claimed in claim 1, after the second place of this second organic electroluminescent material membrane of wherein hot evaporation on this transparent electrode layer, this method also includes:

This mask of recycling plasma clean.