CN100397604C

CN100397604C - Method and apparatus for connecting the conductor convex to the corresponding cushion of the chip

Info

Publication number: CN100397604C
Application number: CNB2005101270494A
Authority: CN
Inventors: 吉良秀彦; 马场俊二; 海沼则夫; 冈田徹; 山上高丰; 佐佐木康则; 小宫山武司; 小八重健二; 小林弘
Original assignee: Fujitsu Ltd
Current assignee: Fujitsu Ltd
Priority date: 1999-05-28
Filing date: 2000-04-28
Publication date: 2008-06-25
Anticipated expiration: 2020-04-28
Also published as: CN100411159C; CN1797748A; CN1797729A; CN101404262A

Abstract

The invention provides an apparatus for connecting the conductor convex of a semiconductor chip to the corresponding cushion of a chip through ultrasonic vibration, which includes a receiving platform, the receiving surface thereof is used for receiving the first surface of a chip opposite to the second surface of a chip having a cushion, a connecting device, the end face thereof is used for keeping the first surface of a semiconductor chip opposite to the second surface of a semiconductor chip with a conductor convex, an enclosing element having an enclosed surface. The end face attaches to the first surface of the semiconductor chip through the attracting force of an opening hole of the end face, the enclosing element can be moved to the attracting hole of the enclosed end face, thereby the enclosed surface and the end face form a simple plane. A method of connecting the conductor convex of a semiconductor chip to the corresponding cushion of a chip through ultrasonic vibration is also provided.

Description

Conductor convex is connected to connection device and the method on the corresponding mat on the substrate

Technical field

The present invention relates to the conductor convex on the semiconductor chip is connected to connection device and the method on the corresponding mat on the substrate with ultrasonic vibration.

Background technology

Hard disk unit is to be made by the housing with hermetically-sealed construction.Inside at housing has hard disk usually, and it also has head stack with high speed rotating, and it is installed in the front end of support arm, is driven by actuator.Head stack has head slider and magnetic head integrated circuit (IC) chip, and chip is installed on the cantilever.Head slider has the magnetic head with the thin-film technique moulding.Magnetic head comprises an induction magnetic head and a magnetoresistive head.Head slider is suspended in the hard disk top of high speed rotating, and distance is a submicron order.Induction magnetic head is used in hard disk recording information, and magnetoresistive head is used to read the information that writes down on the hard disk.The function that the magnetic head integrated circuit (IC) chip has is to handle the input and/or the output signal of magnetic head, for example amplifies the weak signal of being read by magnetoresistive head.

Because head slider is suspended in the hard disk top of high speed rotating apart from submicron order, wishes to prevent that foreign particle such as dust etc. from sticking on hard disk and the head slider, because foreign particle can cause the magnetic head breakage.

Therefore require to make and have the head stack that is difficult for producing the foreign particle structure.

Figure 1A illustrates the perspective view of common head stack, and Figure 1B is the profile of the part A of head stack circle shown in Figure 1A.

In the head stack shown in Figure 1A 10, head slider 20 is installed on the gimbals parts 12, and the gimbals parts are arranged on the front end of cantilever 11.Shown in Figure 1B, magnetic head integrated circuit (IC) chip 30 faces down and is installed on the magnetic head integrated circuit installation part 15, and the latter is positioned at the middle part of cantilever 11.Magnetic head integrated circuit (IC) chip 30 is a supports chip, and its master chip body 31 is made by silicon, for what expose.

Magnetic head integrated circuit (IC) chip 30 normally used substrate materials are silicon and GaAs, and they are fragility, are easy to cracking and broken, because these materials have crystal orientation and high modulus of elasticity, make material very hard.Therefore, when chip suffered external force, for example when wafer is cut into chip size, when chip operation is installed, and chip all can produce foreign particle (or powder) when chip being installed producing ultrasonic connection stress.

Even magnetic head integrated circuit (IC) chip 30 is cleaned in process subsequently, but still the superfine little foreign particle of 1 micron of impossible removing or littler grade.In addition, in cleaning process, might produce additional foreign particle.

This shows that when making the magnetic head integrated circuit (IC) chip disperse to become foreign particle owing to the air-flow that vibrates or disk work causes, these foreign particles can cause the magnetic head fragmentation, thereby reduce the reliability of disk set.

Summary of the invention

Therefore, general purpose of the present invention provides the conductor convex with on the semiconductor chip that has solved prior art the problems referred to above and is connected to connection device and the method on the corresponding mat on the substrate.

One aspect of the present invention provides the conductive ledge on a kind of semiconductor chip to be connected to the ultrasonic vibration connection device on the corresponding mat on the substrate; it has the platform of band receiving surface; in order to receive the first surface of basic unit; first surface is relative with the second surface that has mat; it also has the jockey of band edge face; first surface in order to the protection semiconductor chip; first surface is relative with the second surface that has conductor convex; and this jockey also comprises the closure elements with band confining surface; here end face attracts the first surface of semiconductor chip by the suction in the suction hole of its unlatching; and closure elements is movably; can be when producing ultrasonic vibration the suction hole on the Closed End; thereby when sealing described suction hole, closure elements make confining surface and end face form single plane; according to connection device of the present invention, the damage of semiconductor chip first surface in the time of might successfully preventing to operate semiconductor chip.

Preferably, above-mentioned connection device has: transport establishment, it is transported to semiconductor chip the position of platform top.

Preferably, above-mentioned connection device also has: pressing mechanism, and it is pressed on semiconductor chip on the substrate that is placed on the platform, and the hole is inhaled in closure elements sealing at this moment.

Preferably, above-mentioned connection device also has: be arranged on the ultrasonic radiator on the pressing mechanism, it applies ultrasonic vibration to semiconductor chip during protruding on connecting corresponding mat.

Preferably, above-mentioned transport establishment and above-mentioned pressing mechanism are mechanism independently.

Preferably, above-mentioned transport establishment and above-mentioned pressing mechanism are made single mechanism.

Preferably, above-mentioned connection device also has: be arranged on the ultrasonic radiator on the platform, during protruding on connecting corresponding mat substrate applied ultrasonic vibration.

Preferably, the area of end face is greater than the area of semiconductor chip first surface.

Another aspect of the present invention provides a kind of conductive ledge on the semiconductor chip is connected to the ultrasonic vibration method of attachment on the corresponding mat on the substrate, this method has following steps: (a) substrate is placed on the platform of band receiving surface, in order to receive the first surface of substrate, first surface is relative with the second surface that has mat, (b) keep by jockey and transport the link position of semiconductor chip above the platform, jockey has end face in order to keep the first surface of semiconductor chip, first surface is relative with the second surface that has conductor convex, maintenance is that the described first surface of suction adsorption by the suction hole of opening on end face carries out, it also has movable closing, closure elements has sealing surface, closure elements can move the suction hole on the deblocking end face when producing ultrasonic vibration, thereby when closure elements seals described suction hole, confining surface and end face form single plane, (c) be closed under the situation of element sealing in the suction hole, push semiconductor chip with end face facing to substrate, and (d) conductor convex is connected on the corresponding mat by ultrasonic vibration.According to method of the present invention, the damage of semiconductor chip first surface in the time of might successfully preventing to operate semiconductor chip.

Preferably, step (d) is to make one in semiconductor chip and the substrate to be subjected to ultrasonic vibration when the bonding conductor projection is on corresponding mat.

Description of drawings

Read following detailed description the in detail in conjunction with the accompanying drawings, other purposes of the present invention and characteristics will be apparent, in the accompanying drawing:

Figure 1A illustrates the perspective view of common head stack;

Figure 1B is the profile of head stack circle part A shown in Figure 1;

Fig. 2 A is the perspective view by head stack first embodiment of the present invention;

Fig. 2 B is the profile of the part of head stack circle shown in Fig. 2 A B;

Fig. 2 C is the perspective view of the portion C of head stack circle shown in Fig. 2 A;

Fig. 2 D is the profile of the part of head stack circle shown in Fig. 2 A D;

Fig. 3 A and 3B are the profile of explanation installation of integrated circuit (IC) chip magnetic head in first embodiment;

Fig. 4 A to 4D is the key-drawing of Au flange moulding;

Fig. 5 A is the perspective view by first embodiment of disk set of the present invention;

Fig. 5 B is the end view of the pith of disk set shown in the presentation graphs 5A;

Fig. 6 A is the schematic diagram of moulding Parylene protective layer equipment;

Fig. 6 B is the profile of the E of circle part shown in Fig. 6 A;

Fig. 7 A is the perspective view by head stack second embodiment of the present invention;

Fig. 7 B is the profile of the part of head stack circle shown in Fig. 7 A F;

Fig. 8 A and 8B are for installing the profile of the magnetic head integrated circuit (IC) chip with first structure in explanation second embodiment;

Fig. 9 A to 9E is the profile of manufacturing magnetic head integrated circuit (IC) chip first method of explanation second embodiment;

Figure 10 A to 10G is the profile of manufacturing magnetic head integrated circuit (IC) chip second method of explanation second embodiment;

Figure 11 A to 11F is the profile of the manufacturing magnetic head integrated circuit (IC) chip third party method of explanation second embodiment;

Figure 12 A to 12F is the profile of the cubic method of manufacturing magnetic head integrated circuit (IC) chip of explanation second embodiment;

Figure 13 is the schematic diagram of protective layer former;

Figure 14 A to 14C is the profile of protective layer former shown in Figure 13, in order to explain the forming process of protective layer;

Figure 15 A to 15B is a profile, in order to the forming process of the protective layer of explaining Figure 13 apparatus shown;

Figure 16 is the profile of the magnetic head integrated circuit (IC) chip with second structure that may use of second embodiment;

Figure 17 A to 17D makes the profile of first method of magnetic head integrated circuit (IC) chip shown in Figure 16 for explanation;

Figure 18 A to 18D makes the profile of second method of magnetic head integrated circuit (IC) chip shown in Figure 16 for explanation;

Figure 19 A～19D makes the profile of third party's method of magnetic head integrated circuit (IC) chip shown in Figure 16 for explanation;

Figure 20 A to 20D makes the profile of the cubic method of magnetic head integrated circuit (IC) chip shown in Figure 16 for explanation;

Figure 21 A to 21D makes the profile of the 5th method of magnetic head integrated circuit (IC) chip shown in Figure 16 for explanation;

Figure 22 A to 22D makes the profile of the 6th method of magnetic head integrated circuit (IC) chip shown in Figure 16 for explanation;

Figure 23 A to 23B makes the profile of the 7th method of magnetic head integrated circuit (IC) chip shown in Figure 16 for explanation;

Figure 24 A to 24D is the profile of the another kind of manufacture method of head stack shown in the explanation shop drawings 7A;

Figure 25 is the profile of second embodiment magnetic head integrated circuit with the 3rd structure that may use;

Figure 26 A to 26E makes the profile of the method for magnetic head integrated circuit (IC) chip shown in Figure 25 for explanation;

Figure 27 is the profile of the magnetic head integrated circuit (IC) chip with the 4th structure that may use of second embodiment;

Figure 28 A to 28E is the key-drawing of the method for manufacturing magnetic head integrated circuit (IC) chip shown in Figure 27;

Figure 29 is the profile of the magnetic head integrated circuit (IC) chip with the 5th structure that may use of second embodiment;

Figure 30 A to 30F makes the profile of the method for magnetic head integrated circuit (IC) chip shown in Figure 29 for explanation;

Figure 31 is the profile of the magnetic head integrated circuit (IC) chip with the 6th structure that may use of second embodiment.

Figure 32 A to 32F makes the profile of the method for magnetic head integrated circuit (IC) chip shown in Figure 31 for explanation;

Figure 33 is the profile of the magnetic head integrated circuit (IC) chip with the 7th structure that may use of second embodiment;

Figure 34 A and 34B are the profile and the bottom view of the magnetic head integrated circuit (IC) chip with the 8th structure that may use of second embodiment;

Figure 35 A and 35B prevent the profile of the method that the magnetic head integrated circuit (IC) chip moves when chip architecture is cut into the magnetic head integrated circuit (IC) chip for explanation;

Figure 36 A is the perspective view by head stack the 3rd embodiment of the present invention;

Figure 36 B is the profile of the part of head stack circle shown in Figure 36 A G;

Figure 36 C is the perspective view of the section H of head stack circle shown in Figure 36 A;

Figure 37 is the perspective view of magnetic head integrated circuit (IC) chip shown in Figure 36 A and the 36B;

Figure 38 is the key-drawing of ultraviolet curable resin layer forming method shown in Figure 36 B;

Figure 39 A and 39B are front view and the end view of first embodiment of connection device of the present invention;

Figure 40 A, 40B and 40C are the working explain figure of the closure elements of connection device first embodiment;

Figure 41 is the key-drawing of semiconductor chip transportation in connection device first embodiment;

Figure 42 is the key-drawing of semiconductor chip location in connection device first embodiment;

Figure 43 is the key-drawing of ultrasonic connection in connection device first embodiment;

Figure 44 is the key-drawing of the closure elements work of connection device first embodiment;

Figure 45 is the time chart of the explanation connection device first embodiment work;

Figure 46 is the front view by connection device second embodiment of the present invention;

Figure 47 is for catching the front view of semiconductor chip among explanation connection device second embodiment;

Figure 48 is the front view of transportation semiconductor chip among explanation connection device second embodiment;

The front view of Figure 49 among explanation connection device second embodiment semiconductor chip being pressurizeed;

Figure 50 is the front view of ultrasonic connection among explanation connection device second embodiment;

Figure 51 is for connecting the front view of back fastening means work among explanation connection device second embodiment;

Figure 52 is the front view by connection device the 3rd embodiment of the present invention;

Figure 53 is the work front view of connector among explanation connection device the 3rd embodiment;

The front view of Figure 54 among explanation connection device the 3rd embodiment semiconductor chip being pressurizeed;

Figure 55 is the front view of ultrasonic connection among explanation connection device the 3rd embodiment; And

Figure 56 is for connecting the front view of back fastening means work among explanation attached device the 3rd embodiment.

Embodiment

(first embodiment)

Fig. 2 A illustrates the perspective view by head stack first embodiment of the present invention.Fig. 2 B illustrates the drawing in side sectional elevation of the part of head stack circle shown in Fig. 2 A B.Fig. 2 C illustrates the perspective view of the portion C of head stack circle shown in Fig. 2 A, and Fig. 2 D illustrates the profile of the part of head stack circle shown in Fig. 2 A D.

Shown in Fig. 2 A to 2D, head stack 50 has head slider 70, and it is installed on the gimbals 52.Gimbals 52 are arranged on cantilever 51 along direction X ₁Front end.The magnetic head integrated circuit (IC) chip is installed the middle part that part 53 is arranged on cantilever 51, and the magnetic head integrated circuit (IC) chip 80 that exposes faces down and is installed in the magnetic head integrated circuit (IC) chip and installs in the part 53.In addition, the magnetic head integrated circuit (IC) chip 80 of exposure coats the parylene polymer evaporation layer 110 of one deck evaporation technology moulding.Magnetic head integrated circuit (IC) chip 80 is that what to expose is because restricted by the height of cantilever 51 projectioies.

Shown in Fig. 2 B, cantilever 51 has one group of copper conductor figure 55 that forms on corrosion resistant plate end face as thin as a wafer.

Copper wire figure 55 is to form on the polyimide insulative layer 56 that coats corrosion resistant plate 54.57 protections of copper conductor figure 55 usefulness polyimide insulative layer.

Shown in Fig. 2 C, head slider 70 has side end face 71, and it has magnetic head 72, wire pattern (not shown) and 4 electrodes 73.On end face 74, be provided with track 75.Magnetic head 72 is to use the thin-film technique moulding, and it has the structure (not shown) of the induction magnetic head and the magnetoresistive head of overlap joint.Head slider 70 is connected on the gimbals 52.76 usefulness gold goal (Au) hot pressing are connected the technology connection to the electrode 73 of wire pattern 55 ends with electrode.

Fig. 3 A and 3B are for installing the profile of magnetic head integrated circuit (IC) chip among explanation first embodiment.

Shown in Fig. 2 D, in the magnetic head integrated circuit (IC) chip was installed part 53, electrode 58 was arranged on the end of wire pattern 55.As shown in Figure 3A, each electrode 58 has nickel dam (Ni) 60 and gold (Au layer 61 be overlapped on the copper base part 59, and metal exposed from the teeth outwards.

Magnetic head integrated circuit (IC) chip 80 has integrated circuit 82, and it is to go up moulding at the lower surface 81a of silicon (Si) the master chip body 81 shown in Fig. 3 A.In addition, magnetic head integrated circuit (IC) chip 80 has gold (Au) projection 84 of moulding on aluminium (Al) electrode 83, and gold bump is located on the lower surface 81a.

The installation of magnetic head integrated circuit (IC) chip 80 is shown in Fig. 3 B.In other words, cantilever 51 is fixed on the platform 110, and its state is magnetic head integrated circuit (IC) chip 80 orientation that faces down, the location of each gold bump 84 and corresponding electrode 58 couplings.Magnetic head integrated circuit (IC) chip 80 is pressurized at room temperature in this position, and applies the ultrasonic wave several seconds, makes the gold layer 61 of each gold bump 84 and respective electrode 58 realize ultrasonic connections.The gold layer 61 of gold bump 84 and respective electrode 58 withstands the other side mutually at the interface and rubs, and is finally connected together by ultrasonic connection.

Shown in Fig. 2 D, the connection reliability of magnetic head integrated circuit (IC) chip 80 and cantilever 51 is because bottom filling bed 85 improves, and the bottom filling bed is filled in the lower face side of magnetic head integrated circuit (IC) chip 80 and the space between chip 80 and the cantilever 51.And integrated circuit 82 also is subjected to the protection of bottom filling bed 85.

With the upper surface 81b of the parylene layer 110 coating master chip bodies 81 that evaporate moulding, whole side 81c, and the peripheral side 85a of bottom filling bed 85.As following parylene layer 110 be with chemical vapor deposition method (CVD) moulding with extremely thin.Therefore, make the increase of magnetic head integrated circuit (IC) chip 80 height very little owing to coat parylene layer, and the height of magnetic head integrated circuit (IC) chip 80 can not surpass the height of head slider 70 upper surfaces that coat parylene layer 110.In addition, make the increase of magnetic head integrated circuit (IC) chip 80 weight insignificant owing to coat parylene layer 110, because parylene layer 110 is extremely thin.And,,, also can not influence the elasticity of cantilever 51 even parylene layer 110 is coated on the peripheral part of magnetic head integrated circuit (IC) chip because parylene layer is extremely thin.

The forming method of parylene layer 110 will be explained below.

Parylene layer 110 has following characteristic.That is to say that the impurity content of parylene layer 110 is low, therefore the gas that produces is few.In addition, parylene layer 110 is good with the connectivity of silicon, and the intensity of parylene layer 110 can stand to clean.

Fig. 4 A to 4D is the key-drawing of gold bump 84 moulding.

Gold bump 84 is pressed mode moulding shown in Fig. 4 A to 4D, and situation about being connected with lead is similar.An end that makes spun gold 91 is stretched out by the front end of connector capillary 90, form the gold bead 92 shown in Fig. 4 A, capillary 90 descends from promoting the electrode 82 that gold bead 92 withstands magnetic head integrated circuit (IC) chip 80 then, shown in Fig. 4 B, and applies ultrasonic wave and heating is connected on the electrode 82 gold bead 92.Upper end and capillary 90 that the clamping of silk folder (not shown) is exposed to the spun gold 91 of capillary 90 outsides are pulled to the top, thereby pull out and cut spun gold 91, shown in Fig. 4 C.After this, the tip 83a of gold bump 84 is flattened by glass plate 93, shown in Fig. 4 D.

Fig. 5 A is the perspective view according to disk set first embodiment of the present invention.Fig. 5 B is the end view of disk set pith shown in Fig. 5 A.Disk set first embodiment uses first embodiment of head stack shown in Fig. 2 A to 2D.In first embodiment of disk set, the present invention is applied to hard disk assembly.

The assembly of disk set 100 generally includes the housing 101 shown in Fig. 5 A, rotatable hard disc 102, and actuator 103, and be arranged on arm 104 in the housing 101 by what actuator 103 rotated.For example, shown in Fig. 5 B, 2 disks 102 can be set.Actuator 103 has coil and permanent magnet, and actuator is an Electromagnetic Drive.Head stack 50 is installed in the front end of each arm 104.The partition (not shown) is along Fig. 2 A direction X ₂Be fixed on the bottom surface of cantilever 51, and partition is fixed on the arm 104.When disk 102 rotates and actuator 103 makes when rotating before and after the arm, head stack 50 moves radially along disk 103, can touch predetermined track so that planned orbit writes down and/or read relevant information relatively.

Parylene layer 110 coats the upper surface 81b and the whole side surface 81c of master chip body 81.Therefore, prevented to isolate foreign particles such as silicon grain or powder by master chip body 81, consequently the reliability of disk set 100 has big improvement than prior art, can not produce the magnetic head fragmentation.

On the other hand, the peripheral side 85a of bottom filling bed 85 also coats parylene layer 110, has therefore also prevented to isolate foreign particle by the peripheral side of bottom filling bed 85.Therefore, the situation that coats parylene layer 110 with the magnetic head integrated circuit (IC) chip 80 of having only exposure compares, and disk set 100 has increased reliability greatly, can not produce the magnetic head fragmentation that causes owing to foreign particle, because prevented the generation of foreign particle.

Below, coat the forming method of the parylene layer 110 of master chip body 81 and bottom filling bed 85 peripheral side 85a with reference to figure 6A and 6B explanation.Fig. 6 A is the former figure of parylene layer 110, and Fig. 6 B is the profile of the E of circle part shown in Fig. 6 A.

As shown in Figure 6A, parylene layer 110 is to use chemical vapour deposition technique (CVD) moulding.Chemical vapour deposition technique forms metal compound layer such as metal, alloy and carbide lamella by metal halide or similar compound thermal decomposition at high temperature or hydrogen reduction on body surface.

Chemical vapor depsotition equipment 120 comprises vaporization chamber 121, thermal decomposition chamber 122 and vacuum deposition chamber 123, and they are pressed shown in Fig. 6 A and sequentially arrange.Vacuum pump 124 is connected with vacuum deposition chamber 123.Parylene 125 is as raw material supply vaporization chamber 121.

Half-finished head stack 50X is placed on the platform 123a in the vacuum deposition chamber 123.Half-finished head stack 50X has head slider 70 and the magnetic head integrated circuit (IC) chip 80 that is installed on the cantilever 51, and under this state the part of semi-finished product head stack 50X, comprise corresponding to the part of magnetic head integrated circuit (IC) chip 80 and sheltering with masking layer 130 by shown in Fig. 6 B.

The Parylene particle 126 that is evaporated in vaporization chamber 121 is arrived thermal decomposition chamber 122 by vacuum pump 124 suctions, carries out the thermal decomposition of Parylene particle 126 therein, to form free radical monomer 127.Free radical monomer 127 is shifted to vacuum deposition chamber 123 and is deposited on the semi-finished product head stack 50X, thereby forms parylene layer 110.

At last, take out semi-finished product head stack 50X, remove masking layer 130 and finish the head stack 50 shown in Fig. 2 A by vacuum deposition chamber.The head stack of finishing 50 has the upper surface 81b that parylene layer 110 coats master chip body 81.Whole side 81c, and the peripheral side 85a of bottom filling bed 85.

(second embodiment)

Fig. 7 A is the perspective view by head stack second embodiment of the present invention, and Fig. 7 B is the profile of the part of head stack circle shown in Fig. 7 A F.

Head stack 50 is basic identical shown in the structure of head stack 50A shown in Fig. 7 A and Fig. 2 A, but except the parylene layer 110 that coats.

Part identical with corresponding part in Fig. 2 A and the 2D in Fig. 7 A and 7B uses same label, so its explanation is omitted.

Shown in Fig. 7 B magnification ratio, the parylene layer 110 of this embodiment coats the upper surface 81b of master chip 81, whole side 81c, lower surface 81a, and the periphery of gold bump 84.

Particularly because the upper surface 81b of master chip body 81, and whole side 81c coats parylene layer 110, prevented that silicon grain from isolating from the magnetic head integrated circuit (IC) chip 80A that exposes, thereby prevented the generation of foreign particle or powder.

Fig. 8 A and 8B are the profile that the installation of the magnetic head integrated circuit (IC) chip 80A that has first structure among second embodiment is described.In this scheme, the moulding of the parylene layer 110 of relevant magnetic head integrated circuit (IC) chip 81A was carried out before magnetic head integrated circuit (IC) chip 80A is installed on the cantilever 51.Parylene layer 110 is magnetic head integrated circuit (IC) chip 80A to be placed in the vacuum deposition chamber shown in Fig. 6 A 123 and moulding.Magnetic head integrated circuit (IC) chip 80A coats and to be installed in behind the parylene layer 110 on the cantilever 51 and to be connected the technology connection with ultrasonic, shown in Fig. 8 B.The above-mentioned friction that parylene layer 110 parts on gold bump 84 front ends are caused by ultrasonic connection and removing, can the carrying out ultrasonic connection of gold bump 84 and gold layer 61 with normal mode.

Below, with the various manufacture methods of magnetic head integrated circuit (IC) chip shown in key diagram 8A and the 8B.

In the described below method, be before wafer cuts into independent chip, on wafer, to form the protective layer that prevents that foreign particle from disperseing, rather than after the wafer cutting, on each chip, form protective layer.

Fig. 9 A to 9E makes the profile of magnetic head integrated circuit (IC) chip 80A first method for explanation.

In Fig. 9 A, make chip architecture 160 with wafer 161 and one group of gold bump 84.82 one-tenth arrays of a large amount of integrated circuits are located at the lower surface 161a of wafer 161.In addition, a large amount of projectioies 84 also are located on the respective electrode 83 of wafer 161 lower surface 161a.

At first, shown in Fig. 9 A, carry out chemical vapor deposition method.The lower surface 161a of the band projection 84 of chip architecture 160 faced down to be placed on the pallet 170, carries out chemical vapour deposition (CVD) at this state.The result forms parylene layer 110 on the upper surface 161a of wafer 161 and lower surface 161b and each protruding 84 surface, shown in Fig. 9 B.

Then, film 171 is connected to the upper surface of chip architecture 161, and shown in Fig. 9 C, upset faces down on the chip architecture 161.Chip architecture 161 is placed on the cutting bed 172, cuts into a core assembly sheet 162 with the cast-cutting saw 173 of high speed rotating.Fig. 9 D illustrates the chip architecture 161 that is in after the cutting.Cutting groove 163 in the formation of cutting shown in Fig. 9 D.Cutting is carried out like this, make film 171 keep hemisect or cut half state, and the chip of cutting is unlikely branch in flakes, and in other words, the chip 162 of cutting still remains on the state of proper alignment on the film 171.

Carry out the chemical vapour deposition (CVD) second time subsequently, promptly carry out a chemical vapour deposition (CVD) again.Chemical vapour deposition (CVD) for the second time mainly is to form parylene layer 110 on chip 162 whole sides.The result of chemical vapour deposition (CVD) for the second time is shown in Fig. 9 E, has formed parylene layer 110a effectively on the whole side 162a of each chip 162, and it overlaps on the established parylene layer 110.

Like this, made magnetic head integrated circuit (IC) chip group 165.In magnetic head integrated circuit (IC) chip group 165, (shown in Fig. 8 A and 8B), a large amount of magnetic head integrated circuit (IC) chip 80A is arranged in rows and is connected on the film 171.This magnetic head integrated circuit (IC) chip group 165 is supplied to next manufacture process, for example is placed in the conveying tray and transports.

The advantage of first method can be summarized as follows.The hydatogenesis process of parylene layer is to advance before wafer cuts into independent chip, therefore can form parylene layer to a large amount of chips simultaneously.With wafer cut into behind the independent chip each independent chip is formed parylene layer situation relatively, productivity ratio shop drawings 8A that first method can be quite high and the magnetic head integrated circuit (IC) chip 80A shown in the 8B.

Figure 10 A to 10G makes the profile of magnetic head integrated circuit (IC) chip 80A second method for explanation.Process shown in Figure 10 A to 10D is described identical with Fig. 9 A to 9D.After the process shown in Figure 10 D, carry out the process shown in Figure 10 E or Figure 10 F, promptly remove issuable fragment or exfoliation layer 164 in Figure 10 D cutting process.

In Figure 10 E, laser beam 174 is radiated to the edge of grooving 163 and along boundary scan after cutting.Therefore, laser beam 174 is radiated on fragment or the exfoliation layer 164, and the result makes fragment or exfoliation layer by laser beam 174 heat fused, thereby they are disposed.

On the other hand, in Figure 10 F, wafer is immersed in the chemical scavenging that carries out fragment or exfoliation layer 164 in the hydrochloric acid.Soak time is controlled at only can remove fragment or exfoliation layer 164.After removing fragment or exfoliation layer 164, wafer cleans the hydrochloric acid that keeps on the wafer to remove.

Afterwards, after process shown in Figure 10 E or the 10F, carry out the chemical vapour deposition (CVD) second time shown in Figure 10 G, identical with the chemical vapour deposition (CVD) on Fig. 9 E.The result of chemical vapour deposition (CVD) for the second time is shown in Figure 10 E, forms parylene layer 110a effectively on the whole side 162a of each chip 162, overlaps on the established parylene layer 110.Like this, make and have a large amount of magnetic head integrated circuit (IC) chip 80A arranged arrays shown in Fig. 8 A and 8B and be connected magnetic head integrated circuit (IC) chip group 165 on the film 171.

Second method can obtain the advantage same with above-mentioned first method.In addition, though cutting generation fragment or exfoliation layer can cause the generation of foreign particle, can remove these fragments or exfoliation layer 164 effectively by second method.Therefore, the parylene layer 110 and the 110a of formation have high-quality, produce the foreign particle problem by magnetic head integrated circuit (IC) chip 80A and are prevented effectively.

Figure 11 A to 11F makes the profile of the third method of magnetic head integrated circuit (IC) chip 80A for explanation.Figure 11 A is described identical with Fig. 9 A and 9B with the process shown in the 11B.After process shown in Figure 11 B,

laser beam

180 and 181 is radiated to the surperficial 161a and the 161b of the wafer 161 shown in Figure 11 C respectively, thereby scans wafer 161 along the path similar to above-mentioned cast-cutting saw 173 cutting paths with embarking on journey.Therefore width is W ₁Parylene layer 110 a part 166 by

laser beam

180 and 181 the heating and fusing dispose.Remove the width W of the part 166 of parylene layer 110 ₁Width W than the cutting groove 163 that forms subsequently ₂Go out a width W at two hem widths ₃Because part 166 is heated when parylene layer 110 and melts removing, can not produce the fragment and the exfoliation layer of parylene layer 110.

Afterwards, shown in Figure 11 D, wafer 161 is cut saw 173 and is cut into array, thereby forms a core assembly sheet 162 shown in Figure 11 E.Cutting groove 163 is positioned at the center of the part 166 of removing parylene layer 110, therefore not can with form overlapping of parylene layer 110.In other words, shown in Figure 11 E, the edge of parylene layer 110 is W at width ₂The both sides of cutting groove 163 width W of having dropped back ₃Therefore, parylene layer 110 can not be cut saw 173 cuttings, and the fragment and the exfoliation layer that can not produce parylene layer 110 because of cutting.

After this, shown in Figure 11 F, carry out the chemical vapour deposition (CVD) second time, similar to the described chemical vapour deposition (CVD) of Fig. 9 E.The result of chemical vapour deposition (CVD) for the second time forms parylene layer 110a effectively on the whole side 162a of each chip 162, shown in Figure 11 F, overlap on the established parylene layer 110.So, have that a large amount of magnetic head integrated circuit (IC) chip 80A shown in Fig. 8 A and 8B lines up array and the magnetic head integrated circuit (IC) chip group 165 that is connected on the film 171 is made.

According to the third method, can obtain and above-mentioned first and second kinds of advantages that method is identical.

Figure 12 A to 12F makes the profile of the 4th kind of method of magnetic head integrated circuit (IC) chip 80A for explanation.

As shown in Figure 12, has width W ₁Masking layer 190 and 191 form in proper order at the upper and lower surface 161a and the 161b of wafer 161 respectively.Carry out the chemical vapour deposition (CVD) first time at this state, form the parylene layer 110 shown in Figure 12 B.Parylene layer 110 is formed on the upper and lower surface 161b and the 161a of wafer 161, masking

layer

190 and 191, and on the surface of each projection 84.

Subsequently, masking

layer

190 and 191 is eliminated.Therefore, parylene layer 110 is eliminated width W 1 (shown in Figure 12 C).Can not produce the fragment or the exfoliation layer of parylene layer 110.

After this, Figure 12 D, the process shown in 12E and the 12F and Figure 11 D, 11E is described similar with 11F, for example cut crystal 161 and carry out the chemical vapour deposition (CVD) second time.The result makes to be had a large amount of magnetic head integrated circuit (IC) chip 80A shown in Fig. 8 A and 8B and lines up array and be connected magnetic head integrated circuit (IC) chip group 165 (shown in Figure 12 F) on the film 171.

According to the 4th kind of method, can obtain and above-mentioned first and second kinds of advantages that method is identical.

The another kind of forming method of protective layer below is described, it coats the master chip body 81 of the supporting of the head stack 50A shown in Fig. 7 B.

According to this method, the protective layer that coats master chip body 81 forms with coating process.Because the thickness of hard disk assembly significantly reduces in recent years, magnetic head integrated circuit (IC) chip 80A is also restricted from the height of cantilever 51 projectioies.Therefore, the thickness of the protective layer of coating master chip body 81 is necessary for 50 microns or littler.

This shows that the above-mentioned height that the method that form to coat master chip body 81 protective layers with coating process is particularly suitable for satisfying magnetic head integrated circuit (IC) chip 80A reduces.

In addition, use coating process to form the method that coats master chip body 81 protective layers, head stack 50A can carry out the chip installation procedure in proper order, bottom filling molding procedure, and coating operation and moulding.

Figure 13 is the schematic diagram of protective layer former.Protective layer former 200 shown in Figure 13 has a platform 201; one elevating mechanism 203 can move at Z1 and Z2 direction along column upright on the platform 202; the support arm 204 that stretches out by elevating mechanism 203 levels; laser displacement measurement device 205; the nozzle 206 of integral installation on support arm 204; ultraviolet radiation device 210; the positioner 207 that is connected with laser displacement measurement device 205 with elevating mechanism 203; the pump 208 that is connected with nozzle 206, and the control circuit 209 of control protective layer former 200.

The protective layer forming process of protective layer former 200 is seen Figure 14 A to 14C and Figure 15 A and 15B.

At first, the assembly shown in the set-up dirgram 14A 220.In this assembly 220, the projection 84 on the master chip body 81 usefulness lower surface 81a is installed on the cantilever 51, and bottom filling bed 85 is filled in the gap of master chip body 81 lower face side.Projection 84 not protected seam coats, and therefore, projection 84 on the master chip body 81 and the electrode 58 on the cantilever can connect satisfactorily, partly do not have interference with intermediate protective layer.In other words, projection 84 has high reliability with being connected of electrode 58.

Assembly 220 is placed on the platform 201 of protective layer former 200, and shown in Figure 14 A, and laser displacement measurement device 205 is used for the front end of gaging nozzle 206 and the distance between master chip body 81 end faces.

Afterwards, as shown in Figure 14B, the ultraviolet curing acrylic resin 221 of scheduled volume is conducted on the end face of master chip body 81 by nozzle 206.When using ultraviolet radiation, ultraviolet ray is solidified acrylic resin 221.The scheduled volume of resin 221 is greater than coating the amount that master chip body 81 finally needs fully.The characteristics of resin 221 are the infiltration power of its surface tension less than relative silicon master chip body 81.

Below, shown in Figure 14 C, nozzle 206 shifts near the end face of master chip body 81, and nozzle 206 correctly moves in the horizontal direction, makes resin 221 be distributed on the end face of master chip body 81 and bonds to the periphery of master chip body 81.In this case, the resin 221 on master chip body 81 end faces core since surface tension have the projection 222, and the thickness of resin 221 as yet control.

Afterwards, shown in Figure 15 A, nozzle 206 moves to the center of master chip body 81 end faces, and the distance " a " that the height of nozzle 206 is controlled between the end face of the front end that makes nozzle 206 and master chip body 81 is 50 microns.Distance " a " can be regulated with reference to the distance measure that begins to obtain with the laser displacement measurement device.Start pump 208 afterwards and aspirate and remove excessive resin 221.

The suction of nozzle 206 is adjusted to the infiltration power less than 221 pairs of silicon master chips of resin body 81.Regulate the relation of the suction and the power of infiltration by this way, might prevent that the end face of master chip body 81 from exposing, and the resin bed 223 that might form 50 microns of thickness at the end face of master chip body 81 effectively.

At last, shown in Figure 15 B, ultraviolet radiation device 210 makes its curing to ultraviolet radiation to resin bed 223.As a result of, the end face of master chip body 81 and peripheral side coat the about 50 microns curing resin layer 224 of thickness.

If surface tension is greater than infiltration power, then resin 221 is similar to water droplet and drop with formation, then is difficult to resin 221 is scatter.In addition, if suction greater than infiltration power, then the end face of master chip body 81 will become part and expose the coverage rate that can not obtain to wish in case soak into.

This shows, on master chip body 81, form the resin bed 224 that solidifies and may further comprise the steps:

1) supplies with the resin 221 more than resin bed 224 aequums of the curing that forms about 50 micron thickness of scheduled volume;

2) determine the model or the kind of resin 221, make its surface tension less than infiltration power to master chip body 81;

3) determine the model or the kind of the suction and the resin 221 of pump 208, the suction that makes pump 208 is less than the infiltration power to master chip body 81; And

4) when aspirating and remove resin 221 unnecessary on the master chip body 81, control the thickness of the resin bed 224 that solidifies with controlling nozzle 206 method highly.

Certainly, can use other resins, replace the acrylic resin 221 of ultraviolet curing as thermosetting epoxy resin.Use the heating of Figure 15 B to replace the solidified by ultraviolet ray radiation thermosetting epoxy resin in this case.

In a second embodiment, the magnetic head integrated circuit (IC) chip 80B as shown in figure 16 with improved first kind of structure might be installed on cantilever 51, to replace the magnetic head integrated circuit (IC) chip 80A shown in Fig. 8 A and the 8B.Magnetic head integrated circuit (IC) chip 80B shown in Figure 16 does not have the parylene layer 110 in fore-end 140 formation of projection 84, thereby the fore-end 140 of projection 84 is exposed.

When on cantilever 51, magnetic head integrated circuit (IC) chip 80B being installed with ultrasonic connection method, do not need as under the situation of magnetic head integrated circuit (IC) chip 80A, go part broken and removing parylene layer 110.Therefore, ultrasonic connection magnetic head integrated circuit (IC) chip 80B effective than magnetic head integrated circuit (IC) chip 80A on cantilever 51.

Magnetic head integrated circuit (IC) chip 80B can make in order to the below method: the first method shown in Figure 17 A to 17D, second method shown in Figure 18 A to 18D, the third method shown in Figure 19 A to 19D, the 4th kind of method shown in Figure 20 A to 20D, the 5th kind of method shown in Figure 21 A to 21D, the 6th kind of method shown in Figure 22 A to 22D, or the 7th kind of method shown in Figure 23 A and the 23B.

First method shown in Figure 17 A to 17D is used the film 150 that is easy to puncture.At first, shown in Figure 17 A and 17B, magnetic head integrated circuit (IC) chip 80 is placed on above the film 150 and is urged withstands film 150, makes the fore-end of film 150 distortion and projection 84 charge into film 150.The result is that the fore-end of projection 84 is sheltered by film 150.In this case, structure shown in Figure 17 B is inserted in the vacuum deposition chamber 123 shown in Fig. 6 A, so that form the parylene layer 110 of the evaporation shown in Figure 17 C.When magnetic head integrated circuit (IC) chip 80 shifts out, obtain magnetic head integrated circuit (IC) chip 80B (shown in Figure 17 D) from film 150.

Second method shown in Figure 18 A to 18D is used the thin slice 153 with adhesive layer 152, and adhesive layer is that adhesive coated is made on thin slice main body 151.At first, shown in Figure 18 A and 18B, magnetic head integrated circuit (IC) chip 80 is placed on and is subjected to pushing to withstand thin slice 153 above the thin slice 153, makes the fore-end of projection 84 charge into film 153.The result is that the fore-end of projection is sheltered by thin slice 153.In this case, the structure shown in Figure 18 B is inserted shown in Fig. 6 A in the vacuum deposition chamber 123, so that form the parylene layer 110 of the evaporation shown in Figure 18 C.When magnetic head integrated circuit (IC) chip 80 is shifted out by cushion compound 153 (shown in Figure 18 D), obtain magnetic head integrated circuit (IC) chip 80B.

The third method shown in Figure 19 A to Figure 19 D is used the framework 240 with groove 241.The size of groove 241 is 10 to 50 microns greater than magnetic head integrated circuit (IC) chip 80, and the only about half of of magnetic head integrated circuit (IC) chip can be placed in the groove 241.

At first, shown in Figure 19 A and 19B, magnetic head integrated circuit (IC) chip 80 faces down in the groove 241 that places pallet 240.Along on the direction of magnetic head integrated circuit (IC) chip 80 height, the only about half of of magnetic head integrated circuit (IC) chip 80 is placed in the groove 21.In addition, the gap between the peripheral side of groove inwall and magnetic head integrated circuit (IC) chip 80 is about 10 to 50 microns.

Afterwards, shown in Figure 19 C, carry out chemical vapour deposition (CVD) to form parylene layer 110.Because the peripheral side and the gap g between the groove inwall of magnetic head integrated circuit (IC) chip 80 are minimum, only are 10 to 50 microns, the free radical monomer 127 shown in Fig. 6 A is not easy to enter in the groove 241.Therefore, form at the end face of the exposure of master chip body 81 and peripheral side and to wish that thickness is 2 microns parylene layer 110, and the thickness that is positioned at the parylene layer 110b that forms on the surface of projection 84 of groove 241 reduces to 1.4 microns, and it is 2 microns parylene layer 110 thin approximately 30% than thickness.Shown in Figure 19 D, from the groove 241 of pallet 240, take out magnetic head integrated circuit (IC) chip 80, obtain magnetic head integrated circuit (IC) chip 80B.

Be installed in the magnetic head integrated circuit (IC) chip under the situation on the cantilever 51 of head stack 50A, the projection 84 that it has has the parylene layer of 2 micron thickness that form from the teeth outwards, then each protruding shear strength is 25 grams, on the other hand, be installed at magnetic head integrated circuit (IC) chip 80B on the cantilever 51 of head stack 50A, and on projection 84 surface, form the parylene layer 110b of 1.4 micron thickness.As shown in this embodiment, then each protruding shear strength is 40 grams, has improved 60% than above situation.

In the 4th kind of method shown in Figure 20 A to 20D, preparation magnetic head integrated circuit (IC) chip 80 has the be not squeezed projection 84 (as Figure 20 A) of tip 84a of band.Magnetic head integrated circuit (IC) chip 80 faces down and is placed on the glass plate 250.Carry out chemical vapour deposition (CVD) at this state, form the parylene layer 110 shown in Figure 20 B.Then, magnetic head integrated circuit (IC) chip 80 is withstood glass plate 250 by pressure head 251 pushings of forcing press, shown in Figure 20 C.When glass plate 250 was withstood in 80 pushings of magnetic head integrated circuit (IC) chip, the tip 84a of projection 84 was driven plain, thereby has destroyed parylene layer 110 parts that form at protruding 84 tip 84a.

When glass plate 250 takes off magnetic head integrated circuit (IC) chip 80, obtain magnetic head integrated circuit (IC) chip 80B shown in Figure 20 D.In this magnetic head integrated circuit (IC) chip 80B, master chip body 81 and projection 84 coat parylene layer 110, and the most advanced and sophisticated 84b of the pressing of projection 84 does not coat parylene layer 110, and raised material is exposed to most advanced and sophisticated 84b.

Certainly, chemical vapour deposition (CVD) for the first time can obtain to obtain the little parylene layer 110 of thickness than final hope, and chemical vapour deposition (CVD) is for the second time carried out behind the tip 84a that flattens projection 84 to obtain to wish the parylene layer 110 of thickness.

In the 5th method shown in Figure 21 A to 21D, prepared shown in Figure 21 A, to scribble the platform 260 of release agent 261.In the present embodiment, use perfluoro polyether oil as release agent 261.This perfluoro polyether oil contains a kind of of fluorocarbon oil for the polymer that vacuum deposition chamber shown in Fig. 6 A 123 uses.Magnetic head integrated circuit (IC) chip 80 faces down and is placed on the platform 260, separates down from platform 260 subsequently, makes releasing agent layer 261a transfer on the surface at protruding 84 tips.

Afterwards, shown in Figure 21 B, magnetic head integrated circuit (IC) chip 80 faces down and is placed on the platform 262, carries out chemical vapour deposition (CVD) to form parylene layer 110.In projection 84 tip, parylene layer 110 is to be coated on the releasing agent layer 261a, and the adhesive strength of parylene layer 110 on release agent 261a is very weak, therefore uses adhesive tape to be easy to remove parylene layer 110 on release agent.

Shown in Figure 21 C, the hold mode of magnetic head integrated circuit (IC) chip 80 is that master chip body 81 is bonded on the adhesive tape 263, and the tip of projection 84 is bonded on another adhesive tape 264.

At last, shown in Figure 21 D, peel off adhesive tape 264.The result is that the parylene layer 110 in protruding 84 tips is eliminated with releasing agent layer 261a, thus the tip of exposed raised 84.The same like this, obtain magnetic head integrated circuit (IC) chip 80B.

In the 6th kind of method shown in Figure 22 A to 22DD, with hard resin as retinal with isopropanol solvent dissolving be coated in and form the rosin oil reservoir 271 shown in Figure 22 A on the platform 270.As aftermentioned, rosin oil reservoir 271 can be removed with ablution.Magnetic head integrated circuit (IC) chip 80 faces down and is placed on the platform 270, makes rosin oil reservoir 271 transfer to the tip of projection 84.

Afterwards, magnetic head integrated circuit (IC) chip 80 faces down and is placed on the platform 272, shown in Figure 22 B, and carries out chemical vapour deposition (CVD) to form parylene layer 110.

When magnetic head integrated circuit (IC) chip 80 is left platform 272 shown in Figure 22 C, on projection 84, cover rosin oil reservoir 271a.In addition, the tip rosin oil reservoir 271a in projection 84 exposes.

At last, magnetic head integrated circuit (IC) chip 80 is cleaned towards last placement with ethanol.The result who cleans is the dissolved and removing of rosin oil reservoir 271a, shown in Figure 22 D, thus the tip of exposed raised 84.So, obtain magnetic head integrated circuit (IC) chip 80B.

In the 7th kind of method shown in Figure 23 A and the 23B, the process shown in Figure 23 A is being carried out after the process shown in above Fig. 9 E.Shown in Figure 23 A, flatten glass plate 280 and be urged the projection 84 of withstanding magnetic head integrated circuit (IC) chip group 165.Therefore, the tip of projection 84 is driven plain, thereby has destroyed parylene layer 110 parts on the protruding 84 tip 84a.

When flattening glass plate 280 risings, obtain magnetic head integrated circuit (IC) chip group 1660 shown in Figure 23 B.The tip 84b of the projection 84 of each the magnetic head integrated circuit (IC) chip 80B that arranges on magnetic head integrated circuit (IC) chip group 1660 does not coat parylene layer 110, and raised material is exposed to tip 84b.

Figure 24 A to 24D makes the profile of head stack another kind method for explanation.

Shown in Figure 24 A and 24B, magnetic head integrated circuit (IC) chip 80C has second structure, the aluminium electrode 83 that it has integrated circuit 82 and forms on the lower surface 81a of silicon master chip body 81.In addition, whole master chip body 81 is coating parylene layer 110.

According to this method, gold bump 84A is arranged on the cantilever 51, rather than on master chip body 81.Shown in Figure 24 C, protruding 84A is arranged on the respective electrode 58 of cantilever 51.Each protruding 84A has tip 84Aa.

Shown in Figure 24 D, 80C applies ultrasonic wave to the magnetic head integrated circuit (IC) chip, the tip 84a of protruding 84A is crushed, and electrode 83 is connected corresponding protruding 84A.In ultrasonic connection procedure, parylene layer 110 parts of jacketed electrode 83 are eliminated.Because tip 84a is arranged on the front end of projection, the parylene layer 110 of jacketed electrode 83 is more effectively removed.

In a second embodiment, also might use the magnetic head integrated circuit (IC) chip 80D with the 3rd structure shown in Figure 25 to replace magnetic head integrated circuit (IC) chip 80A shown in Fig. 7 B.

In magnetic head integrated circuit (IC) chip 80D shown in Figure 25, parylene layer 110 parts are eliminated on the upper surface 81b of the master chip body 81 relative with lower surface 81a.In other words, the upper surface 81b of master chip body 81 partly exposes.

The expose portion 145 of upper surface 81b can form with plasma process, for example, after forming parylene layer 110 on the whole surface of master chip body 81 upper surface 81b is treated that expose portion carries out plasma process.

When magnetic head integrated circuit (IC) chip 80D processing with produce when hot, heat can directly be released in the ambient air by the expose portion 145 of the upper surface 81b that exposes on the master chip body 81.Therefore, compare with the situation that on the whole surface of master chip body 81, forms parylene layer 110, the situation that is the 80A of magnetic head integrated circuit (IC) chip shown in Fig. 8 A compares, and might improve hot release characteristics, particularly because parylene layer 110 is to be made by the bad resin material of heat conductivity.

As mentioned above, foreign particle is mainly due to cracking or fall the corner that piece is created in master chip body 81 and partly locate.Therefore, even, also can not produce the problem of foreign particle if do not have parylene layer 110 at the middle part of the upper surface 81b of master chip body 81.In addition, the fin that also might be provided with as thin as a wafer at the expose portion 145 of master chip body 81.

Figure 26 A to 26E makes the profile of magnetic head integrated circuit (IC) chip 80D method shown in Figure 25 for explanation.

Shown in Figure 26 A and 26B, film 171 be bonded in chip architecture 160 with band projection 84 surperficial facing surfaces on.Afterwards, shown in Figure 26 C, chip architecture 160 is placed on the cutting bed 172, makes projection 84 towards last.Wafer 161 is cut into a core assembly sheet 162 of lining up array from the cast-cutting saw 173 of high speed rotating.The chip of each cutting is connected with film 171 in keeping being expert at.

Next step, the wafer 161 of cutting is fixed on the set film suction device 290 of chemical vapor depsotition equipment, and film 171 has been attracted by the operation of pump 291, shown in Figure 26 D.Film suction device 290 has support plate element 292.Support plate element 292 comprises that is inhaled a hole 292a, and cylinder 292b.Each cylinder 292b supporting is lined up in the core assembly sheet 162 of array corresponding one.

When pump 291 work, film 171 parts between the each several part of cylinder 292b supporting are separated from chip 162, shown in Figure 26 D.In other words, during by top observation, film 171 still remains attached to the middle part of chip 162 square surface 162b, but film 171 separates with the peripheral part of square surface 162b.Consequently the peripheral part at square surface 162b forms space 293, and space 293 is communicated with cutting groove 163.

Under state shown in Figure 26, carry out chemical vapour deposition (CVD).Gas is by cutting groove 163 and reach space 293, thereby forms the parylene layer 110 shown in Figure 26 E.For the square surface 162b of chip 162, form parylene layer 110 at peripheral part, but the middle part that is connected with film 171 does not form corresponding to space 193.So, make magnetic head integrated circuit (IC) chip 80D shown in Figure 25.

In a second embodiment, also might use the magnetic head integrated circuit (IC) chip 80E with the 4th kind of structure shown in Figure 27, to replace the magnetic head integrated circuit (IC) chip 80A shown in Fig. 7 B.

In magnetic head integrated circuit (IC) chip 80E shown in Figure 27, on the upper surface 81b of master chip body 81 and peripheral side 81c, form parylene layer 110, but on the lower surface 81a of projection 84, do not form.

Figure 28 A to 28E makes the schematic diagram of magnetic head integrated circuit (IC) chip 80E method shown in Figure 27 for explanation.

Shown in Figure 28 A and 28B, film 300 is bonded on the surface of the chip architecture 160 that has projection 84.Film 300 has corrugated, makes to coat projection 84, will be cut the part 301 that sawing is cut on the chip architecture 160 but also bond to.In other words, each part integral body behind cutting process of film 300 coating wafers becomes chip, so film 300 bonds to the whole peripheral part 301 of chip architecture 160 this parts.Shown in Figure 28 B, by bottom view as seen, the each several part that will become the chip architecture 160 of a chip 162 behind cutting process has film 300 and is bonded in its whole peripheral part 301.In addition, film 300 is bonded on another flat film 302, shown in Figure 28 A.

Afterwards, wafer 161 and film 300 are cut into array, to obtain the core assembly sheet 162 shown in Figure 28 C with cast-cutting saw.The chip 162 of cutting remains attached on the film 302.In addition, the lower surface 81a of each chip 162 coats film 300.

Under state shown in Figure 28 C, carry out chemical vapour deposition (CVD), consequently form the parylene layer 110 shown in Figure 28 D.Parylene layer 110 coats the upper surface 81b and the peripheral side 81c of each master chip body 81, does not coat lower surface 81a, as Figure 27 finding.

At last, shown in Figure 28 E, remove film 302.Along with the removing of film 302, the film 300 on each chip 162 lower surface 81a also is eliminated.Like this, obtain magnetic head integrated circuit (IC) chip 80E.

In a second embodiment, also might use the magnetic head integrated circuit (IC) chip 80F with the 5th kind of structure shown in Figure 29, to replace the magnetic head integrated circuit (IC) chip 80A shown in Fig. 7 B.

In magnetic head integrated circuit (IC) chip 80F shown in Figure 29, on the lower surface 81a of master chip body 81, form bottom filling bed 301.The tip 84b of the pressing of projection 84 is exposed on the flat lower surface 310a of bottom filling bed 310.And, forming parylene layer 110 on the upper surface 81b of master chip body 81 and the peripheral side 81c and on the peripheral side 310a of bottom filling bed 310.

According to this magnetic head integrated circuit (IC) chip 80F, integrated circuit 82 is subjected to the protection of bottom filling bed 310.In addition, when magnetic head integrated circuit (IC) chip 80F is installed on the cantilever 51, do not need to inject the process of bottom filling bed, thereby improved the productivity ratio of head stack.

Figure 30 A to 30F makes the profile of the method for magnetic head chip 80F shown in Figure 29 for explanation.

Shown in Figure 30 A and 30B, the bottom filler is the B grade resins, be coated on spin-coating method on the surface of the chip architecture 160 of being with projection 84, and the bottom filler solidifies the bottom filling bed 311 that the back forms coating projection fully 84.With the B grade resins is for the ease of later process.If the bottom filler is to be formed by thermosetting resin, then the B level is treated to and applies predetermined heat, if the bottom filler is to be made by light-cured resin, then the processing of B level is the predetermined light quantity of radiation, moreover, if the bottom filler is to be made by thermoplastic resin, it can dissolve in solvent, and then the B level is treated to evaporating solvent.

Afterwards, shown in Figure 30 C,, will have the bottom filling bed of handling through the B level 311 and face down and be placed on the cutting bed 172 chip architecture 160 reversing.Cast-cutting saw 173 with high speed rotating cuts into a core assembly sheet 162 with wafer 161.Be cut to the interior thickness of the bottom filling bed of handling through the B level 311.Therefore, can prevent cast-cutting saw 173 cut wound cutting beds 172 and fall piece, prevent that also independent diced chip 162 from separating.Through cutting process, in bottom filling bed 311, form grooving 312.

After this, shown in Figure 30 D, the wafer 161 of cutting and cutting bed 172 are sent into the vaporization chamber of chemical vapor depsotition equipment together, carry out chemical vapour deposition (CVD) therein to form parylene layer 110.This parylene layer 110 is formed on the end face and the peripheral side of each chip 162, in the grooving 312 of the bottom filling bed of handling through the B level 311, and on the peripheral side.

Subsequently, 160 reversings of entire wafer structure are put on the polishing block 313 of polissoir, shown in Figure 30 E.Because each chip 162 is stood bottom filling bed 311 connections that the B level is handled, when wafer 160 reversings, all chip 162 reverses simultaneously.In addition, chip architecture 160 is held and is remained on the polishing block 313 by the suction hole 313a vacuum in the polishing block 313.

At last, use the polishing element 314 shown in Figure 30 F, available if desired clear water cleans, so that the bottom filling bed 311 that polishing is handled through the B level.Be polished to the degree of depth and reach grooving 312 bottoms and exposed raised 84.The result obtains magnetic head integrated circuit (IC) chip 80F shown in Figure 29.

Suction hole 313a in the polishing block is corresponding with each chip 162, and therefore, each chip 162 is stably remained on the polishing block 313 by suction, has prevented independent chip 162 undesirable moving.

In a second embodiment, also might use the magnetic head integrated circuit (IC) chip 80G with the 6th kind of structure shown in Figure 31, to replace the magnetic head integrated circuit (IC) chip 80A shown in Fig. 7 B.

Magnetic head integrated circuit (IC) chip 80G shown in Figure 31 uses the 6th kind of structure, its 5th kind of structure that to be the third structure of using of magnetic head integrated circuit (IC) chip 80D shown in Figure 25 use with magnetic head integrated circuit (IC) chip 80F shown in Figure 29 comprehensively.

Magnetic head integrated circuit (IC) chip 80G has the retrofilling layer 310 on master chip body 81 lower surface 81a, and the most advanced and sophisticated 84b that projection 84 flattens is exposed on the flat lower surface 310a of bottom filling bed 310.In addition, at the peripheral part of the upper surface 81b of master chip body 81, form parylene layer 110 on the peripheral side of peripheral side 81c and bottom filling bed 310.The middle part that exposes at the upper surface 81b of master chip body 81 is provided with expose portion 145.

When magnetic head integrated circuit (IC) chip 80G work with when producing heat, the expose portion 145 of the master chip body 81 that heat can expose by upper surface 81b is directly released in the ambient air.Therefore compare with the situation that on master chip body 81 whole surfaces, except that the side that forms projection 84, forms parylene layer 110, the situation that is magnetic head integrated circuit (IC) chip 80F shown in Figure 29 compares, might improve hot release performance, particularly because parylene layer 110 is to be made by the bad resin material of common heat conductivity.

As mentioned above, foreign particle is mainly by cracking or fall the corner part that piece is created in master chip body 81, according to this reason, even if do not have parylene layer 110 at the middle part of the upper surface 81b of master chip body 81, also can not produce the problem of foreign particle.

Figure 32 A to 32F makes the profile of the method for magnetic head integrated circuit (IC) chip 80G shown in Figure 31 for explanation.Process shown in Figure 32 to 32F is identical with the process shown in Figure 30 A to 30F basically, but the chemical vapor deposition processes exception.Shown in Figure 32 D, chip architecture 160 is withstood in chip 161 pushing downwards that anchor clamps 320 clamp cutting when carrying out chemical vapour deposition (CVD).Each projection 321 of anchor clamps 320 contacts with the middle part of respective chip 162 end faces, thereby does not form parylene layer 110 at the end face at chip 162 middle parts.After chemical vapor deposition processes carries out, remove anchor clamps 320.

Even when chip architecture 160 was withstood in anchor clamps 320 downward pushings, projection 84 can not be damaged, because be provided with bottom filling bed 311.

In a second embodiment, also might use the magnetic head integrated circuit (IC) chip 80H with the 7th kind of structure shown in Figure 33, to replace the magnetic head integrated circuit (IC) chip 80A shown in Fig. 7 B.

Magnetic head integrated circuit (IC) chip 80H shown in Figure 33 is similar to the magnetic head chip 80G with the 6th kind of structure shown in Figure 31, but radiant element 330 exceptions, it is to be made by the heat conductivity good metal, uses bonding agent 331 to be connected on the expose portion 145 of middle part upper surface 81b of master chip body 81.Bonding agent 331 has inorganic filler or the metallic stuffing that is dispersed in the resin, therefore has good heat conductivity.

Compare with magnetic head integrated circuit (IC) chip 80G shown in Figure 31, magnetic head integrated circuit (IC) chip 80H has improved hot release characteristics.

In a second embodiment, also might use the magnetic head integrated circuit (IC) chip 80I that has the 8th kind of structure shown in Figure 34 A and the 34B, to replace the magnetic head integrated circuit (IC) chip 80A shown in Fig. 7 B.

Figure 34 A is the profile of magnetic head integrated circuit (IC) chip 80I, and Figure 34 B is the bottom view of magnetic head integrated circuit (IC) chip 80I.Basically magnetic head integrated circuit (IC) chip 80I is the remodeling of magnetic head integrated circuit (IC) chip 80F shown in Figure 29.In magnetic head integrated circuit (IC) chip 80I, make collimating marks 340 and 341 at the lower surface 81a of master chip body 81.Outer surface and integrated circuit 82 that collimating marks 340 and 341 is positioned at integrated circuit 82 are diagonal positions.Be provided with

hole

342 and 343 in the bottom filling bed 310 corresponding to the position of collimating marks 340 and 341 on the lower surface 81a of master chip body.For example, when making bottom filling bed 310, use the method for sheltering to make

hole

342 and 343.

When the lower surface 81a by master chip body 81 observes, can see collimating marks 340 by hole 342, and see collimating marks 341 by hole 343.Therefore, magnetic head integrated circuit (IC) chip 80I reference calibrations mark 340 and 341 is aimed at, and on cantilever 51, located with high accuracy.

Certainly, also collimating marks can be set directly on the gram packing course 310 of bottom.In addition, the aligning of magnetic head integrated circuit (IC) chip 80I also can use the x-ray imaging method.

Figure 35 A and 35B are the explanation profile of another kind of method, and when the chip architecture with projection 84 was cut into magnetic head integrated circuit (IC) chip 81, this method can prevent magnetic head integrated circuit (IC) chip 81 undesirable moving.

In Figure 35 A, make adhering film 350 by main thin-film body 351, form adhesive linkage 354 at the end face formation adhesive linkage 352 of main thin-film body 351 with in the bottom surface of main thin-film body 351.Main thin-film body 351 is being made groove 353 corresponding to the position of projection 84.The size of each groove 353 is a bit larger tham corresponding protruding 84 size.The inwall of groove 353 does not form adhesive linkage 352.

Shown in Figure 35 B, each projection 84 is placed in the corresponding grooves 353, and the lower surface bonds of wafer 161 is on adhering film 350.Because each projection 84 is placed in the corresponding grooves 353, projection 84 can not interfered the lower surface of wafer 161 and being connected of adhering film 350.Adhering film 350 is bonded on the platform 360.

At the state shown in Figure 35 B, wafer 161 is cut into the yoke integrated circuit (IC) chip 81 of lining up array with cast-cutting saw 173.When cut crystal 161, because stress impels independent magnetic head integrated circuit (IC) chip 81 to move, yet because independent magnetic head integrated circuit (IC) chip 81 is adhesively fixed on the adhering film 350 and keeps adhering state, the independent magnetic head integrated circuit (IC) chip 81 in the present embodiment can not move.

Cutting process takes out magnetic head integrated circuit (IC) chip 81 one by one by adhering film, and it is installed on the cantilever 51 after finishing.Because projection 84 is not bonded on the adhering film 350, magnetic head integrated circuit (IC) chip 81 is easy to separate with adhering film 350, and when being separated by adhering film 350, projection 84 can unexpectedly not fallen down by magnetic head integrated circuit (IC) chip 81.

Certainly, cutting equipment can compress the location with chip architecture 160 with the anchor clamps of chip architecture 160.In this case, can prevent that the magnetic head integrated circuit (IC) chip 81 of cutting in the cutting process from moving with respect to wafer 161.

(the 3rd embodiment)

Figure 36 A is the perspective view according to head stack the 3rd embodiment of the present invention, and Figure 36 B is the profile of the part of head stack circle shown in Figure 36 A G, and Figure 36 C is the perspective view of the section H of head stack circle shown in Figure 36 A.

In the head stack 50B shown in Figure 36 A, magnetic head integrated circuit (IC) chip 80C has structure shown in Figure 37.Figure 37 is the perspective view of the magnetic head integrated circuit (IC) chip 80C shown in Figure 36 A and the 36B.Shown in Figure 36 B, the magnetic head integrated circuit (IC) chip 80C of head stack 50B has master chip body 81C.As Figure 37 finding, the upper surface 81Cb of master chip body 81C rectangle is the band oblique angle, so formed inclined-plane 81Cd between the upper surface 81Cb of master chip body 81C and each side 81Cc.

Replace using the parylene layer 110 shown in Fig. 2 D, present embodiment uses the low viscosity ultraviolet curable resin layer 160 shown in Figure 36 B.In other respects, head stack 50B is basic identical with the head stack 50 shown in Fig. 2 A.In Figure 36 A to 36C, part is also identical with the corresponding part shown in Fig. 2 A to 2D, and has identical label, therefore omits its explanation.

As described below, low viscosity ultraviolet curable resin layer 160 distributes the low viscosity ultraviolet curable resin to form by distributor, shown in Figure 36 B enlarged drawing, low viscosity ultraviolet curing layer 160 coats the upper surface 81Cb of master chip body 81C, all skewed surface 81Cd and all side surface 81Cc, and the peripheral side of bottom filling bed 85.The thickness of low viscosity ultraviolet curable resin layer 160 is less than 50 microns on master chip body 81C upper surface 81Cb, and the apparent height H of low viscosity ultraviolet curable resin layer 160 ₁Be lower than the height H of head slider 70 end faces ₂So, head stack 50B goes for hard disk assembly, can not be because magnetic head integrated circuit (IC) chip 80C damage hard disc.

Because low viscosity ultraviolet curable resin layer 160 coats the upper surface 81Cb of master chip body 81C; all skewed surface 81Cd and all side surface 81Cc; prevented that silicon grain or powder from separating down from master chip body 81C, thereby prevented the generation of foreign particle effectively.

Low viscosity ultraviolet curable resin layer 160 used low viscosity ultraviolet curable resins have following characteristic in the present embodiment, promptly the viscosity of this low viscosity ultraviolet curable resin is 700 centipoises (CPS) and lower, and, the low viscosity ultraviolet curable resin is good to the wettability of silicon, and low viscosity ultraviolet curable resin layer 160 has enough intensity, can stand to clean.On the other hand, the low viscosity ultraviolet curable resin is bad to stainless wettability.In addition, the low viscosity ultraviolet curable resin has high purity, and impurity content is low, and therefore the gas that produces is few.

More particularly, what the low viscosity ultraviolet curable resin used is acrylic resin, as urethane acrylate, and methacrylate.

Figure 38 is the schematic diagram that explanation forms ultraviolet curable resin layer 160 methods shown in Figure 36 B.At first, with high accuracy distributor 170 shown in Figure 38 the low viscosity ultraviolet curable resin is assigned to the middle part of the magnetic head integrated circuit (IC) chip 80C that is installed on the cantilever 51.For example, the low viscosity that the low viscosity ultraviolet curable resin has is 700 centipoises, and the sendout of distributor 170 is High Accuracy Control.Because the viscosity of low viscosity ultraviolet curable resin is 700 centipoises or lower, the low viscosity ultraviolet curable resin in the distribution of the upper surface 81Cb of master chip body 81 shown in arrow in Figure 38 171, be downward through inclined-plane 81Cd, shown in arrow 172 and be distributed to side 81Cc.The result is the upper surface 81Cb that the low viscosity ultraviolet curable resin has coated master chip body 81C, inclined-plane 81Cd and side 81Cc, and the low viscosity ultraviolet curable resin that flows finally coats the peripheral side 85a of bottom filling bed 85.Owing to be provided with the inclined-plane 81Cd of master chip body 81C, promoted flowing of low viscosity ultraviolet curable resin.After this, to the low viscosity ultraviolet curable resin, make it solidify to form low viscosity ultraviolet curable resin layer 160 with ultraviolet radiation.Therefore, process that might be easy to use forms low viscosity ultraviolet curable resin layer 160, can prevent to produce foreign particle by magnetic head integrated circuit (IC) chip 80C.

Head stack 50B shown in head stack 50A shown in Fig. 7 A and Figure 36 A can be assembled on the disk set shown in Fig. 5 A and the 5B, and its method is similar to the head stack 50 shown in Fig. 2 A.

In each above-mentioned embodiment, can use thermosetting resin to replace light or ultraviolet curable resin.For example, can use epoxy resin as thermosetting resin.

In addition, magnetic head integrated circuit (IC)

chip

80,80A, the master chip body 81 of 80B and 80C, 81A, 81B, 81C can use the made beyond the silicon, for example Ga As.

Below, other importance of the present invention is illustrated.

(1) when according to the magnetic head integrated circuit (IC) chip 80A shown in the 7B of process shop drawings shown in Figure 10 A to 10G, the magnetic head integrated circuit (IC) chip is handled the information and the formation of reading and/or being recorded on the recording media and is installed in head stack top, and its manufacture method wishes to have following steps:

Have on the upper surface of wafer of projection and the lower surface at one of upper surface and lower surface and to form ground floor;

Wafer is cut into a core assembly sheet;

Remove falling piece or peeling off part of ground floor that cutting produces; And

The peripheral side of each chip of arranging after cutting forms the second layer.

According to this method of making the magnetic head integrated circuit (IC) chip, might on each chip peripheral side, form and have the high-quality second layer, because the second layer is to form after removing the falling piece and peel off part of ground floor.

(2) when according to the magnetic head integrated circuit (IC) chip 80A shown in the process shop drawings 7B shown in Figure 11 A to 11F, the magnetic head integrated circuit (IC) chip is handled the information and the formation of reading and/or being recorded on the recording media and is installed in head stack top, and its manufacture method wishes to have following steps:

Remove ground floor to the first width on the wafer with laser beam;

Wafer is cut into a core assembly sheet, and cutting is to carry out in the part that has first width and do not form ground floor less than second width of first width; And

On the peripheral side of each chip of arranging after the cutting, form the second layer.

According to this method of making the magnetic head integrated circuit (IC) chip, might on the peripheral side of each chip, form and have the high-quality second layer, because can not produce falling piece or peeling off part of ground floor.

(3) when according to the magnetic head integrated circuit (IC) chip 80A shown in the process shop drawings 7B shown in Figure 11 A to 11F, the magnetic head integrated circuit (IC) chip is handled the information and the formation of reading and/or being recorded on the recording media and is installed in head stack top, and its manufacture method wishes to have following steps:

Have to form on the upper surface of wafer of projection and the lower surface at one of upper surface and lower surface and have sheltering of first width;

On the upper surface of sheltering of wafer and lower surface, form ground floor;

Removing is sheltered to remove ground floor to the first width;

This method according to making the magnetic head integrated circuit (IC) chip might be formed on each chip peripheral side and have the high-quality second layer, because can not produce falling piece and peeling off part of ground floor.

(4) when according to the process cut crystal 161 shown in Figure 35 A and the 35B, employed cutting equipment wishes to have:

Holding element, its pushing wafer keeps wafer to getting off when wafer being cut into a core assembly sheet.

According to this cutting equipment, it can prevent that the chip that cuts in the cutting process from moving.

(5) when according to the process cut crystal 161 shown in Figure 35 A and the 35B, cutting has the method for the wafer of projection and wishes to have following steps:

Preparation has the adhering film of groove, and the size of groove and position are corresponding with projection, and the inwall of groove have adhesive linkage and

Be bonded on the adhering film in projection, and projection places cut crystal under the state in the corresponding recesses of adhering film.

According to the method for this cut crystal, independent chip keeps being bonded on the adhering film securely when cutting and after the cutting, thereby has prevented that chip is undesirable mobile.

(6) semiconductor device (magnetic head integrated circuit (IC) chip) that has integrated circuit and form projection on the lower surface of master chip body shown in Figure 31 wishes to have:

The bottom filling bed that forms on master chip body lower surface makes the lower surface exposure of the front end of flange by the bottom filling bed; And

The peripheral part of the upper surface of protective layer coating master chip body and the peripheral side of bottom filling bed expose the middle part of master chip body upper surface.

According to this semiconductor device (magnetic head integrated circuit (IC) chip), the situation that coats protective layer with the whole surface of master chip body compares, and might reach improved hot release characteristics.

(7) semiconductor device (magnetic head integrated circuit (IC) chip) that has integrated circuit and form projection on the lower surface of master chip body shown in Figure 33 wishes to have:

The bottom filling bed that forms on master chip body lower surface makes the lower surface exposure of the front end of projection by the bottom filling bed;

The peripheral part of the upper surface of protective layer coating master chip body and the peripheral side of bottom filling bed expose the middle part of master chip body upper surface; And

Middle part at master chip body upper surface is provided with radiant element.

Compare according to this semiconductor (magnetic head integrated circuit (IC) chip) even with a part of situation about exposing of master chip body upper surface, it might reach further improved heat release characteristic.

(8) when according to the magnetic head integrated circuit (IC) chip 80 shown in the process shop drawings 2D shown in Figure 19 A to 190D, the processing of magnetic head integrated circuit (IC) chip is read and/or is write down information and the formation of storage on recording media and is installed in head stack top, and its manufacture method wishes to have following steps:

Preparation has the framework of groove, and the size of groove is corresponding with the magnetic head integrated circuit (IC) chip;

The magnetic head integrated circuit (IC) chip faced down to be placed in the groove, and the projection of magnetic head integrated circuit (IC) chip is placed in the groove; And

Under being positioned over state in the groove, the magnetic head integrated circuit (IC) chip on the magnetic head integrated circuit (IC) chip, forms protective layer with evaporation.

According to the method for this manufacturing magnetic head integrated circuit (IC) chip, the free radical monomer is difficult for entering in the groove, thereby might form thin protective layer on convex surfaces.

(9) when according to the magnetic head integrated circuit (IC) chip 80 shown in the process shop drawings 2D shown in Figure 22 A to 22D, the processing of magnetic head integrated circuit (IC) chip is read and/or is write down information and the formation of storage on recording media and is installed in head stack top, and its manufacture method wishes to have following steps:

Soluble bonding agent is bonded in the front end of magnetic head integrated circuit (IC) chip projection;

On whole magnetic head integrated circuit (IC) chip, form protective layer with evaporation; And

Dissolving and remove the front end of the soluble bonding agent of protruding front end with exposed raised.

According to this method of making the magnetic head integrated circuit (IC) chip, might use simple process to produce that the master chip body coats protective layer and protruding front end not have the magnetic head integrated circuit (IC) chip of coating.

(10) when according to the manufacturing head stack 80C shown in Figure 24 A to 24D, the magnetic head integrated circuit (IC) chip is handled and is read and/or write down the information of storage on recording media, and its manufacture method wishes to have step:

Projection is set on cantilever; And

The master chip body is placed on the cantilever, and the master chip body has the lower surface of band integrated circuit and electrode, and whole master chip body coats protective layer; And

With ultrasonic connection method electrode is connected on the projection.

According to this method of making head stack, might under the situation of removing partial protection layer corresponding to the connecting portion office, the magnetic head integrated circuit (IC) chip be installed on the cantilever.

Below, method of attachment is described and is fit to and make semiconductor, as the equipment of above-mentioned magnetic head integrated circuit (IC) chip.In other words, be connected the equipment of semiconductor chip on method of attachment being described and being adapted at wiring plate or substrate with ultrasonic connection method, particularly work as semi-conductive surface portion and be supported and be coated with protective layer.

The background material of interconnection technique at first is described for the ease of the embodiment that understands following method of attachment and equipment.

When semiconductor chip being connected on wiring plate or the substrate, generally use a kind of no conductor wire connecting method, it is so-called inversion chip connection method, for example, projection is arranged on the electrode of semiconductor chip, and the semiconductor chip connection that faces down, so that the compatible portion of projection is aimed at the respective electrode (or mat) on the ceramic wiring substrate.

When using inversion chip connection method, the projection that is provided with on semi-conducting electrode normally uses the basic solder of SnPb (tin lead) to make.With after the respective electrode on the distribution substrate is aimed at, projection is heated and melts so that be connected corresponding projection and electrode in projection.When using little semiconductor bag, being inverted the chip connection method is a kind of effective ways that connect semiconductor chip.

For example, semiconductor chip is used under the situation of disk set, and it is installed in and reads/and write down printed circuit or support and need to reduce the inductance and the electric capacity of signal transmission passage, to increase the frequency of switching signal on the cantilever that head slider uses.Therefore, magnetic head integrated circuit (IC) chip that hope is provided with and head slider adjoin each other and arrange compactness, and therefore being inverted the chip connection method is a kind of suitable method that reaches required connection request.

Usually, be inverted chip and connect to be provided with and has transport establishment, in order to holding and to transport semiconductor chip to link position, and bindiny mechanism, with the fusing projection it is connected in order to heating with electrode.Generally, transport establishment and bindiny mechanism are mechanisms independently.In addition, bindiny mechanism is used to heat from the heat of thermal source.

Yet, when jockey uses thermal source, can cause from the thermal stress of thermal source to produce stress rupture in the solder.The stress rupture of solder causes that the reliability of connection is impaired, and the material that solder uses is restricted.

Therefore, in order to eliminate these inconvenience, Japanese patent application No.59-208844 has announced prone method of attachment.According to this method of attachment that faces down, prone jockey (or connector) uses ultrasonic vibration to replace the thermal source heating.Apply ultrasonic vibration and connect being placed on on-chip semiconductor chip.For example, ultrasonic vibration can apply by vacuum slot, and suction nozzle is installed in the front end of the horn that is provided with ultrasonic radiator.

But when as the connection method that faces down that will advise of above-mentioned situation be used in connection when coating the semiconductor chip of protective layer fully, partial protection layer is owing to contact and may separate with semiconductor chip when ultrasonic the connection with vacuum slot.Ultrasonic vibration is consistent with vacuum slot to be carried out though semiconductor chip makes; the exposed edge part of vacuum slot is slightly different with the vibration that the surface portion that the semiconductor chip protective layer contacts with vacuum slot stands; consequently the marginal portion that exposed by vacuum slot of the surface element branch that contacts with vacuum slot of semiconductor chip scratches and damages, thereby protective layer is partly separated by semiconductor chip when making ultrasonic connections.

So, in the embodiment of following method of attachment and equipment, take measures to prevent that the protective layer that coats semiconductor chip from separating with semiconductor chip.

First embodiment according to A to 44 pair of connection device of the present invention of Figure 39 is illustrated.First embodiment of connection device uses first embodiment according to method of attachment of the present invention.

Figure 39 A and 39B are respectively front view and the end view of connection device first embodiment.Figure 40 A, 40B and 40C are respectively the schematic diagram of the explanation connection device first embodiment closure elements work.Figure 41 is the key-drawing of the semiconductor chip transportation of connection device first embodiment.Figure 42 is the key-drawing of semiconductor chip location among connection device first embodiment.Figure 43 is the key-drawing of the ultrasonic connection of connection device first embodiment.Figure 44 is the key-drawing of the connection device first embodiment closure elements work.Figure 45 is the explanation time diagram of the connection device first embodiment work.For convenience's sake, in Figure 40 A to 44, only illustrate and be used to the connection device part of explaining that corresponding work is required.

Shown in Figure 39 A and 39B, connection device (being inverted the chip junctor) 510 has platform 512, jockey 514 and control device 516 usually.

As shown in figure 41, platform 512 has the hole 513 of suction.The substrate of placing on platform 512 542 is kept by the gravitation of inhaling hole 513.

Jockey 514 has connector 518 fastening meanss 520, and it is stretched out by connector 518, and ultrasonic radiator 522, and it is integrally formed on the fastening means 520.Jockey 514 engages with the framework of attached device 510 is movable.

Connector 518 has loading and pressing mechanism 524, and it is connected (not shown) with power supply, and vacuum valve 526, and it is connected (not shown) with vacuum source formula pump.Load and function that pressing mechanism 524 has is lifting fastening means 520 and is applied to extruding force on the semiconductor chip 550 in fastening means 520 declines measurement when contacting with semiconductor chip 550.

As shown in figure 41, inhale hole 528 and be communicated with, inhale hole 528 and be arranged in the fastening means 520 of box-like with vacuum valve 526.Be provided with end face 530 in the lower end of fastening means 520 and on this end face 530, have and inhale hole 528.As hereinafter described, semiconductor chip 550 is attracted on the end face 530.

As shown in figure 41, semiconductor chip 550 has substrate 547, and the projection 546 that forms on substrate 547, and the protective layer 548 that coats whole substrate 547 comprise the surface of the substrate 547 with projection 546.Substrate 547 is to be made by silicon (Si) and GaAs (GaAs) material, but these materials are easy to crack and fall piece, and therefore, substrate 547 coats goes up protective layer 548 to prevent the substrate cracking and to fall piece and produce foreign particle.

Certainly, protective layer 548 does not need to coat whole substrate 547, and for example, protective layer 548 can only coat the surface of the substrate 547 of the instrument of being connected 520 supports.As above-mentioned, protective layer 548 can be made by Parylene, and for example, protective layer 548 can form with evaporation.In addition, the projection 546 that on semiconductor chip 550, forms, and the mat 544 that forms on distribution substrate shown in Figure 41 is made by Au (gold) in this embodiment.In addition, above-mentioned any magnetic head integrated circuit (IC) chip all can be used as semiconductor chip 550.

Shown in Figure 40 A and 40B, closure elements 532 inserts to be inhaled in the hole 528, and closure elements 532 driven devices 534 drive and move up and down, and driving element is arranged on the side of fastening means 520.The work of the drive unit 534 of closure elements 532 and closure elements sees aftermentioned for details.

Ultrasonic radiator 522 is fixed on the fastening means 520.Make ultrasonic radiator 522 vibration, fastening means 520 produces and carries out ultrasonic vibration.

Control device 516 has central controller 516a, the controller 522a loading of ultrasonic radiator 522 and controller 524a, the controller 526a of vacuum valve 526 and the controller 534a of closure elements drive unit 534 of pressing mechanism 524.Central controller

516a control controller

522a, 524a, 526a and 534a, and the overall work of control connection equipment 510.

Below, referring to the work of Figure 40 A to 40C explanation closure elements 532 and closure elements drive unit 534.

As mentioned above, inhale hole 528 and be communicated with vacuum source, and be arranged in the fastening means 520 by the vacuum valve 526 shown in Figure 39 A and the 39B.Inhaling hole 528 is opened on the end face 530 of fastening means 520 lower ends.Being inserted in the closure elements of inhaling in the hole 528 532 moves up and down when the motor (not shown) driving cam 536 of closure elements drive unit 534 rotates.When closure elements 532 was in raised position shown in Figure 40 A, the opening on end face 530 was opened, and when closure elements 532 was in down position shown in Figure 40 B, opening was closed.

The end face of closure elements 532 is a planar-shaped, and therefore having formed in end face 530 and the end that is in down position closure elements 532 does not have the single plane that rises and falls.The guide wheel 538 that a pair of curved surface is set guides closure elements 532 gapless slips.In addition, motor and cam 536 are arranged in the overcoat, and the side of fastening means 520 is sealed.The size of end face 530 is enough big, thereby the bottom surface of semiconductor chip 550 is coated by end face 530 fully, shown in Figure 40 C.

The connection operation of present embodiment below is described.

At first, substrate 542 is arranged on the platform 512, and the side of mat 544 is made progress, as shown in figure 42.Then, start vacuum source, open vacuum valve 526 and make vacuum source and inhale hole 528 connections.Therefore, the time T in Figure 45 ₁Produce vacuum.The semiconductor chip 550 that coats protective layer 548 fully is in time T shown in Figure 45 ₂Be attracted on the fastening means 520.More particularly, the end face 530 of the surface of the semiconductor chip 550 of band projection 546 contact fastening means 520 under the effect of inhaling hole 528 suction.Under this kind state, jockey 524 is moved mechanism's (not shown) and moves horizontally, and semiconductor chip 550 is transported to predetermined link position, and semiconductor chip 550 is connected on the substrate 542 that is placed on the platform 512, as shown in figure 41 herein.

When semiconductor chip 550 is transported to predetermined link position, in the time T of Figure 45 ₃Activate to load and pressing mechanism 524, fall fastening means 520 and semiconductor chip 550 loadings.After this, the corresponding mat 544 on the projection 546 contact substrates 542 of semiconductor chip 550, and make semiconductor chip 550 location.Under this kind state, substrate 542 is attracted on the platform 512 by the suction of inhaling hole 513.

After this, loading and pressing mechanism 524 begin semiconductor chip 550 is exerted pressure, and as shown in figure 42, are time T in Figure 45 ₄When loading and pressing mechanism 524 detects semiconductor chip 550 applied pressures are reached predetermined value, the central controller 516a of loading and 524 pairs of control device 516 of pressing mechanism sends the pressure detectable signal.In Figure 45, in time T ₅Reach predetermined pressure.Response pressure detectable signal, central controller 526a send and drive the controller 534a of commencing signal to closure elements drive unit 534, make the cam 536 inhour rotation as shown in figure 43 of closure elements drive unit 534.Consequently the opening of closure elements 532 on lower slider and fastening means 520 end faces 530 is closed element 532 and closes, and is time T in Figure 45 ₆Before the opening on the end face 530 was closed, vacuum source was in time T ₅Stop, so that discharge vacuum.

Close when the opening that detects on the end face 530, under this state, semiconductor chip 550 is exerted pressure, close detectable signal for one and deliver to central controller 516a.Respond this and close detectable signal, central controller 516a sends the controller 522a of starting of oscillation signal to ultrasonic radiator 522, and the time T of ultrasonic radiator 522 in Figure 45 ₇Starting oscillation.Consequently fastening means 520 and semiconductor chip 550 stand ultrasonic vibration in the horizontal direction of Figure 43, thereby melt projection 546 and be connected on the corresponding mat 544.Ultrasonic radiator 522 continues the vibration preset time, is by time T in Figure 45 ₇To time T ₈In time T ₈, send stop signal to controller 522a by central controller 516a, make ultrasonic radiator 522 failures of oscillations.

When corresponding protruding 546 with after being connected of mat 544 finishes, load and the time T of pressing mechanism 524 in Figure 45 ₉Stop, and fastening means 520 rises.

Meanwhile, cam 536 clockwises of closure elements drive unit 534 rotate (Figure 44), thereby closure elements 532 is risen, as shown in the figure.The result is the time T of opening in Figure 45 on fastening means 520 end faces 530 ₁₀Close, and jockey 514 is moved mechanism and is back to predetermined starting position shown in Figure 41, wait for connecting operation next time.

According to connection device 510, the opening on fastening means 520 end faces 530 is closed the end of element 532 and closes, and when fastening means 520 compresses semiconductor chip 550 surperficial, forms simple plane.Therefore; if even the contact-making surface of fastening means 520 and semiconductor chip 550 slides mutually slightly; when both stood ultrasonic vibration when them, the protective layer 548 of semiconductor chip 550 contacted with the end face 530 of fastening means 520 also and can not scratched or damage by the edge of end face 530 upper sheds.Therefore, prevented that protective layer 548 from separating down from semiconductor chip 550.

Below, second embodiment according to connection device of the present invention shown in Figure 46 to 51 is described.Second embodiment of connection device uses second embodiment according to method of attachment of the present invention.The explanation of connection device second embodiment part and function is identical with function with the corresponding part of above-mentioned connection device first embodiment, is omitted.

Figure 46 is the front view of connection device second embodiment.Figure 47 is for catching the front view of semiconductor chip among explanation connection device second embodiment.Figure 48 is the front view of transportation semiconductor chip among explanation connection device second embodiment.Figure 49 is the front view of extruding semiconductor chip among explanation connection device second embodiment.Figure 50 is the front view of ultrasonic connection among explanation connection device second embodiment, and Figure 51 is for connecting the front view of back fastening means work among explanation connection device second embodiment.

As shown in figure 46, connection device 560 has a pair of

platform

562a and 562b, jockey 564 and control device 565.

To prepare in advance to be placed on the platform 562a at the semiconductor chip 586 of absorption on the fastening means 572 and transportation.On the other hand, platform 562b is corresponding to the platform 512 of connection device first embodiment with have the hole 513 of suction.Substrate 582 is placed on the platform 562b.

Different with first embodiment of connection device, the connector 566 that provides separately is provided jockey 564, chip absorption and means of transportation 568.Connector 566 flexibly connects with the framework 70a of connection device 560, and the framework 70b of chip absorption and means of transportation 568 and connection device 560 flexibly connects.

Connector 566 has the pressing mechanism 571 of loading, and it is connected (not shown) with power supply.In addition, stretch out box-like fastening means 572 by connector 572.It has planar end surface 572a in the lower end.At fastening means 572 ultrasonic radiator 574 is set.

Chip absorption and means of transportation 568 have vacuum valve 576 and are communicated with (not shown) with vacuum source or vacuum pump.In the lower surface of chip absorption and means of transportation 568 attraction part 577 is set, is attracting to have suction hole 578 on the part 577.An end of inhaling hole 578 is communicated with vacuum valve 576, and the other end in suction hole 578 is open on the end face 580 of adsorbent parts 577, as shown in figure 47.Therefore, present embodiment does not use closure elements and closure elements drive unit.

The structure of control device 565 is identical with first embodiment of connection device, is provided with and the corresponding controller of connection device 560 each element.

Below, the connection operation of present embodiment is described.

At first, substrate 582 is placed on the platform 562b, and the side of band mat 584 upwards.Semiconductor chip 586 has projection 588, and protective layer 585 coats whole semiconductor chip 586.Semiconductor chip 586 is placed on the platform 562a, and the side with projection 588 is downward, as shown in figure 47.Under this state, connector 566 is recalled by substrate 582 loading positions and is waited in the precalculated position, and chip absorption at this moment and means of transportation 568 generally are positioned the contiguous top of the loading position of semiconductor chip 586.

The tuck pointing material of being made by epoxy resin etc. 590 is arranged on the substrate 582, as shown in figure 47.Use tuck pointing material 590 semiconductor chip 586 and substrate 582 can be adhered to and maintain, thereby make semiconductor chip 586 and substrate 582 when temporarily being positioned on the substrate 582, rise and with fastening means 572 contact semiconductor chips 586 it can not moved till when substrate 582 is located under means of transportation 568 separates from semiconductor chip 586 to chip absorption by semiconductor chip 586.Tuck pointing material 590 can be heating and curing after connection procedure, and tuck pointing material 590 can be used as the bottom filling bed like this.When on substrate 582 tuck pointing material 590 being set, it should avoid mat 584 positions, in order to avoid being connected of interference protrusion 588 and mat 584.

When substrate 582 and semiconductor chip 586 ready, chip absorption and means of transportation 568 are fallen by the elevating mechanism (not shown), and vacuum source or vacuum pump startup, semiconductor chip 586 is adsorbed on the end face 580 that attracts part 577, as shown in figure 47.

Afterwards, chip absorption and means of transportation 568 are risen and are moved mechanism's (not shown) and move horizontally by elevating mechanism.So, semiconductor chip 586 is transported to the predetermined link position in platform 562b top, and platform 562b goes up and places substrate 582.After this, chip absorption and means of transportation 568 are fallen by elevating mechanism, and semiconductor chip 586 temporarily is placed on the substrate 582.Under this state, the corresponding mat 584 on the projection 588 contact substrates 582 on the semiconductor chip 586, as shown in figure 48.In addition, semiconductor chip 586 and substrate 582 are adhered to together by tuck pointing material 590, thereby have prevented moving mutually between semiconductor chip 586 and the substrate 582.

After this, vacuum source or vacuum pump stop, and chip absorption and means of transportation 568 are risen by elevating mechanism.After this, chip absorption and means of transportation 568 are moved mechanism and move horizontally, thereby are recalled and be back to the precalculated position of platform 562a top by semiconductor chip 586 top positions.Meanwhile, connector 566 is moved the position that mechanism's (not shown) is moved horizontally to platform 562b semiconductor-on-insulator chip 586 contiguous tops.Load and pressing mechanism 571 also starts, falling fastening means 572, and the planar end surface 572a of fastening means 572 and semiconductor chip 586 be with protruding 588 surperficial facing surfaces to contact, as shown in figure 49.End face 572a has enough big size, can coat the surface of the semiconductor chip 586 that is in contact with it fully.

Loading and 571 pairs of semiconductor chips 586 of pressing mechanism are exerted pressure, and reach predetermined value until applied pressure.After this, the starting of oscillation of ultrasonic radiator.The result is that projection 588 and corresponding mat 584 melt and connect together, and as shown in figure 50, the vibration of ultrasonic radiator 574 causes the ultrasonic vibration of horizontal direction.

After connection was finished, loading and pressing mechanism 571 stopped, and fastening means 572 rises, shown in Figure 51.Afterwards, connector 566 is back to predetermined original position, waits for connecting operation next time.

According to connection device 560, the planar end surface 572a of fastening means 572 compresses the surface of semiconductor chip 586.Therefore; if even the contact-making surface of fastening means 572 and semiconductor chip 586 slides mutually slightly; when both stood ultrasonic vibration when them, the protective layer 585 of semiconductor chip 586 contacted also with the end face 572a of fastening means 572 and can not scratched or damage by end face 572a.Therefore, protective layer 585 has prevented to separate from semiconductor chip 586.

Below, the 3rd embodiment according to connection device of the present invention is described, referring to Figure 52 to 56.The 3rd embodiment of connection device uses the 3rd embodiment according to method of attachment of the present invention.The part of connection device the 3rd embodiment is identical with corresponding part and the function declaration of above-mentioned connection device second embodiment with function declaration, is omitted.

Figure 52 is the front view of connection device the 3rd embodiment.Figure 53 is the key-drawing of connector work among connection device the 3rd embodiment.Figure 54 is the front view of semiconductor chip extruding among explanation connection device the 3rd embodiment.Figure 55 is the front view of ultrasonic connection among explanation connection device the 3rd embodiment.And Figure 56 is for connecting the front view of back fastening means work among explanation connection device the 3rd embodiment.

Shown in Figure 52, connection device 600 has base 612, apparatus for placing 602, connector 604 and control device 606.

Apparatus for placing 602 has the platform 608 of placing substrate 626, vacuum valve 610, and supporting member 614, it is bearing in platform 608 on the base 612 of connection device 600, and is fixed on the ultrasonic radiator 616 on the supporting member 614.The inlet of vacuum valve 610 is connected (not shown) with vacuum source or vacuum pump, and the outlet of vacuum valve 610 is connected with an end of pipe 618.The other end of pipe 618 is imbedded in the platform 608, and opens at upper surface open 618a place, platform 108 middle part.

Connector 604 flexibly connects with the framework 620 of connection device 600, and moves (not shown) by travel mechanism.Connector 604 has loading and pressing mechanism 622, is connected (not shown) with power supply.In addition, box-like fastening means 624 hangs down from connector 604.Placement part 624a is set in the lower end of fastening means 624, is placing formation groove 624b on the part 624a.Groove 624b has flat, and its size is slightly greater than semiconductor chip 632, thereby semiconductor chip 632 can be placed in the groove 624b.Semiconductor chip 632 is under the situation in the groove 624b that places part 624a, has limited moving of horizontal direction.

The structure of control device 606 is similar to first embodiment of connection device, and has and the corresponding controller of connection device 600 each element.

Below, the connection work of present embodiment is described.

At first, substrate 626 is placed on the platform 608, the side with mat 628 makes progress.Start vacuum source or vacuum pump (not shown) and valve 610 unlatchings in this state.Therefore the suction adsorption of opening 618a is passed through on platform 608 in the bottom surface of substrate 626.The adsorbed state of substrate 626 is retained to connect always and finishes.

On the other hand, semiconductor chip 632 has projection 634 and the protective layer 630 that coats whole semiconductor chip 632.Semiconductor chip 632 is placed and is limited in the groove 624b of fastening means 624, and the side with projection 634 is downward, shown in Figure 53.Under this kind state, connector 604 is moved the position that mechanism's (not shown) is moved horizontally to platform 608 tops, thereby makes semiconductor chip 632 be transported to the loading position of substrate 626 tops.

Afterwards, when loading and pressing mechanism 622 starts, fastening means 624 declines, and the projection on the semiconductor chip 632 634 contacts with corresponding mat 628 on the substrate 626.In addition, the positioning states of semiconductor chip 632 when loading and 622 pairs of semiconductor chips 632 of pressing mechanism are exerted pressure is shown in Figure 54.

When semiconductor chip 632 applied pressures are reached predetermined value, the starting of oscillation of ultrasonic radiator 616.The result is that projection 634 is melted and connects together with corresponding mat 628, and shown in Figure 55, the vibration of ultrasonic radiator 616 causes the ultrasonic vibration of horizontal direction.In this state, substrate 626 is positioned on the platform 608 securely by the suction by opening 618a.On the other hand, semiconductor chip 632 is connected instrument 624 and locatees securely and keep.So, semiconductor chip 632 and substrate 626 can not move mutually when connecting.

After connection was finished, loading and pressing mechanism 622 stopped, and fastening means 624 rises, shown in Figure 56.Therefore, connection device 600 is back to predetermined initial state, and shown in Figure 52, and wait connects operation next time.

According to connection device 600, semiconductor chip 632 is placed and is fixed in the groove 624b of fastening means 624, and semiconductor chip 632 does not directly stand ultrasonic vibration.According to this reason, when substrate 626 stood ultrasonic vibration, the protective layer 630 of semiconductor chip 632 can not be scratched or damage.Therefore, prevented that effectively protective layer 630 from separating with semiconductor chip 632.

In each embodiment of connection device, not shown various travel mechanisms and elevating mechanism are because can use well-known mechanism.Similarly, vacuum source or vacuum pump are also not shown.

In addition, the present invention should not be limited to these embodiment, under the condition that does not break away from the scope of the invention, can make various changes and improvement.

Claims

1. one kind is connected on the substrate connection device on the corresponding mat with ultrasonic vibration with the conductor convex on the semiconductor chip, and it has:

One receiving platform, its receiving surface are used to receive the first surface of the substrate relative with the second surface of the substrate that has mat, and

The first surface of the semiconductor chip that one jockey, its end face are used to keep relative with the second surface of the semiconductor chip that has conductor convex, and this jockey also comprises the closure elements with confining surface,

Above-mentioned end face is by the first surface of the suction adsorption semiconductor chip in the suction hole of opening on end face, above-mentioned closure elements can move the suction hole on the deblocking end face when producing ultrasonic vibration, thereby when closure elements sealed described suction hole, confining surface and end face formed single plane.

2. connection device according to claim 1 is characterized in that above-mentioned connection device has:

Transport establishment, it is transported to semiconductor chip the position of platform top.

3. connection device according to claim 2 is characterized in that above-mentioned connection device also has:

Pressing mechanism, it is pressed on semiconductor chip on the substrate that is placed on the platform, and the hole is inhaled in closure elements sealing at this moment.

4. connection device according to claim 3, it also has:

Be arranged on the ultrasonic radiator on the pressing mechanism, it applies ultrasonic vibration to semiconductor chip when connection bump is to corresponding mat.

5. connection device according to claim 3 is characterized in that above-mentioned transport establishment and above-mentioned pressing mechanism are mechanism independently.

6. connection device according to claim 3 is characterized in that above-mentioned transport establishment and above-mentioned pressing mechanism make single mechanism.

7. connection device according to claim 3, it also has:

Be arranged on the ultrasonic radiator on the platform, when connection bump is to corresponding mat, substrate applied ultrasonic vibration.

8. connection device according to claim 1 is characterized in that the area of the area of end face greater than the semiconductor chip first surface.

9. connection device according to claim 3 also comprises:

Control device is provided for controlling described jockey,

Wherein when described pressing mechanism detected predetermined pressure and is applied on the described semiconductor chip, described control device received pressure detecting signal from described pressing mechanism, and responds this pressure detecting signal, and the control closure elements seals described suction hole.

10. connection device according to claim 9 also comprises:

Be arranged on the ultrasonic radiator on the described receiving platform, when projection was linked to each other with corresponding mat, this ultrasonic radiator applied ultrasonic vibration to described substrate.

11. connection device according to claim 10 is characterized in that described control device controls described ultrasonic radiator and come to produce ultrasonic vibration when closure elements seals described suction hole.

12. the method for attachment with corresponding mat on conductor convex on the ultrasonic vibration connection semiconductor chip and the substrate, it has following steps:

(a) substrate is placed on the platform with receiving plane, this receiving plane be used to receive substrate with the second surface opposite first that has mat;

(b) with jockey semiconductor chip is kept and is transported to the link position of platform top, above-mentioned jockey has end face, be used to keep have the first surface of the relative semiconductor chip of the second surface of conductor convex with semiconductor chip, maintenance is that the described first surface of suction adsorption by the suction hole of opening on end face carries out, above-mentioned jockey also has closure elements, this closure elements has confining surface, closure elements can move the suction hole on the deblocking end face when producing ultrasonic vibration, thereby when closure elements sealed described suction hole, confining surface and end face formed single plane;

(c) under being closed the state of element sealing, the suction hole on the end face withstands substrate with end face pushing semiconductor chip; And

(d) with ultrasonic vibration bonding conductor projection and corresponding mat.

13. method of attachment according to claim 12 is characterized in that step (d) is to make one in semiconductor chip and the substrate to be subjected to ultrasonic vibration when the bonding conductor projection is to corresponding mat.