CN100392514C - Parallel Fs laser double photon photopolymerization micro-nano processing method and apparatus thereof - Google Patents
Parallel Fs laser double photon photopolymerization micro-nano processing method and apparatus thereof Download PDFInfo
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- CN100392514C CN100392514C CNB2006100853495A CN200610085349A CN100392514C CN 100392514 C CN100392514 C CN 100392514C CN B2006100853495 A CNB2006100853495 A CN B2006100853495A CN 200610085349 A CN200610085349 A CN 200610085349A CN 100392514 C CN100392514 C CN 100392514C
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CNB2006100853495A CN100392514C (en) | 2006-06-12 | 2006-06-12 | Parallel Fs laser double photon photopolymerization micro-nano processing method and apparatus thereof |
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CNB2006100853495A CN100392514C (en) | 2006-06-12 | 2006-06-12 | Parallel Fs laser double photon photopolymerization micro-nano processing method and apparatus thereof |
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CN1862354A CN1862354A (en) | 2006-11-15 |
CN100392514C true CN100392514C (en) | 2008-06-04 |
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Families Citing this family (9)
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CN101220332B (en) * | 2007-11-28 | 2012-03-21 | 江苏大学 | Method and device for nervus damnification and regeneration renovation by using femtosecond laser |
CN101458451B (en) * | 2008-12-31 | 2012-01-11 | 北京航空航天大学 | Light path structure suitable for femtosecond laser two-photon mirco-nano processing system |
JP5814371B2 (en) | 2010-09-21 | 2015-11-17 | 中国科学院理化技術研究所 | Laser micro / nano processing method |
CN102909477A (en) * | 2012-10-31 | 2013-02-06 | 北京工业大学 | Method and device for preparing large area of micro gratings on surface of target material by utilizing ultra-fast laser |
CN104155851B (en) | 2014-08-01 | 2017-11-07 | 南方科技大学 | A kind of Fs laser double photon polymerization micro/nano processing system and method |
CN105671628B (en) * | 2016-02-01 | 2018-04-20 | 昝涵今 | A kind of laser heats the device and its growing method of the big thin slice of growing by zone melting or Special-shaped warp monocrystalline |
CN108123011A (en) * | 2018-01-11 | 2018-06-05 | 温州大学激光与光电智能制造研究院 | Laser making herbs into wool equipment and its method |
CN112846487A (en) * | 2021-01-11 | 2021-05-28 | 浙江师范大学 | Ultrafast laser multi-focus large-space parallel processing device and method |
CN113031149B (en) * | 2021-04-06 | 2022-03-18 | 上海大学 | Ultra-long three-dimensional nano optical fiber preparation system and method based on micro-fluidic control type two-photon laser direct writing technology |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US6030266A (en) * | 1996-07-29 | 2000-02-29 | Commissariat A L'energie Atomique | Process and apparatus for the formation of patterns in a photoresist by continuous laser irradiation, application to the production of microtips emissive cathode electron sources and flat display screens |
US6713772B2 (en) * | 1998-04-21 | 2004-03-30 | The University Of Connecticut | Free-form fabrication using multi-photon excitation |
US20050232116A1 (en) * | 2002-10-03 | 2005-10-20 | Hiroaki Misawa | 3-D holographic recording method and 3-D holographic recording system |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6030266A (en) * | 1996-07-29 | 2000-02-29 | Commissariat A L'energie Atomique | Process and apparatus for the formation of patterns in a photoresist by continuous laser irradiation, application to the production of microtips emissive cathode electron sources and flat display screens |
US6713772B2 (en) * | 1998-04-21 | 2004-03-30 | The University Of Connecticut | Free-form fabrication using multi-photon excitation |
US20050232116A1 (en) * | 2002-10-03 | 2005-10-20 | Hiroaki Misawa | 3-D holographic recording method and 3-D holographic recording system |
Non-Patent Citations (4)
Title |
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Multiple-spot parallel processing for laser micronanofabrication. Jun-ichi Kato,Nobuyuki Takeyasu,et al.APPLIED PHYSICS LETTERS,Vol.86 . 2005 |
Multiple-spot parallel processing for laser micronanofabrication. Jun-ichi Kato,Nobuyuki Takeyasu,et al.APPLIED PHYSICS LETTERS,Vol.86 . 2005 * |
飞秒激光三维微细加工技术. 刘立鹏,周明,戴起勋,潘传鹏,蔡兰.光电工程,第32卷第4期. 2005 |
飞秒激光三维微细加工技术. 刘立鹏,周明,戴起勋,潘传鹏,蔡兰.光电工程,第32卷第4期. 2005 * |
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CN1862354A (en) | 2006-11-15 |
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Assignee: Nantong Johnson Photoelectric Technology Co., Ltd. Assignor: Jiangsu University Contract record no.: 2010320000557 Denomination of invention: Parallel Fs laser double photon photopolymerization micro-nano processing method and apparatus thereof Granted publication date: 20080604 License type: Exclusive License Open date: 20061115 Record date: 20100507 |
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