CN100380666C - 薄膜存储器、阵列及其操作方法和制造方法 - Google Patents
薄膜存储器、阵列及其操作方法和制造方法 Download PDFInfo
- Publication number
- CN100380666C CN100380666C CNB031307892A CN03130789A CN100380666C CN 100380666 C CN100380666 C CN 100380666C CN B031307892 A CNB031307892 A CN B031307892A CN 03130789 A CN03130789 A CN 03130789A CN 100380666 C CN100380666 C CN 100380666C
- Authority
- CN
- China
- Prior art keywords
- semiconductor region
- thin film
- film
- raceway groove
- semiconductive thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 222
- 238000000034 method Methods 0.000 title claims description 29
- 238000011017 operating method Methods 0.000 title claims description 4
- 239000004065 semiconductor Substances 0.000 claims abstract description 236
- 239000010408 film Substances 0.000 claims abstract description 193
- 239000002800 charge carrier Substances 0.000 claims description 57
- 230000015572 biosynthetic process Effects 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 29
- 239000012535 impurity Substances 0.000 claims description 28
- 239000012528 membrane Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000009413 insulation Methods 0.000 claims description 8
- 238000007254 oxidation reaction Methods 0.000 claims description 7
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000013507 mapping Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 abstract description 5
- 230000008859 change Effects 0.000 abstract description 5
- 239000000969 carrier Substances 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 229910052710 silicon Inorganic materials 0.000 description 26
- 239000010703 silicon Substances 0.000 description 26
- 230000014509 gene expression Effects 0.000 description 20
- 229910052581 Si3N4 Inorganic materials 0.000 description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 229910052814 silicon oxide Inorganic materials 0.000 description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 230000005684 electric field Effects 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000001259 photo etching Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- PDKGWPFVRLGFBG-UHFFFAOYSA-N hafnium(4+) oxygen(2-) silicon(4+) Chemical compound [O-2].[Hf+4].[Si+4].[O-2].[O-2].[O-2] PDKGWPFVRLGFBG-UHFFFAOYSA-N 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/20—DRAM devices comprising floating-body transistors, e.g. floating-body cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/908—Dram configuration with transistors and capacitors of pairs of cells along a straight line between adjacent bit lines
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Dram (AREA)
- Read Only Memory (AREA)
Abstract
Description
Claims (41)
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP108423/2002 | 2002-04-10 | ||
JP108423/02 | 2002-04-10 | ||
JP2002108423 | 2002-04-10 | ||
JP2002230397 | 2002-08-07 | ||
JP230397/2002 | 2002-08-07 | ||
JP230397/02 | 2002-08-07 | ||
JP86898/03 | 2003-03-27 | ||
JP86898/2003 | 2003-03-27 | ||
JP2003086898A JP4880867B2 (ja) | 2002-04-10 | 2003-03-27 | 薄膜メモリ、アレイとその動作方法および製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1453874A CN1453874A (zh) | 2003-11-05 |
CN100380666C true CN100380666C (zh) | 2008-04-09 |
Family
ID=28678744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031307892A Expired - Fee Related CN100380666C (zh) | 2002-04-10 | 2003-04-10 | 薄膜存储器、阵列及其操作方法和制造方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20030213994A1 (zh) |
EP (2) | EP1355358B1 (zh) |
JP (1) | JP4880867B2 (zh) |
KR (1) | KR100983408B1 (zh) |
CN (1) | CN100380666C (zh) |
TW (1) | TWI264116B (zh) |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040228168A1 (en) * | 2003-05-13 | 2004-11-18 | Richard Ferrant | Semiconductor memory device and method of operating same |
US7085153B2 (en) * | 2003-05-13 | 2006-08-01 | Innovative Silicon S.A. | Semiconductor memory cell, array, architecture and device, and method of operating same |
US7335934B2 (en) | 2003-07-22 | 2008-02-26 | Innovative Silicon S.A. | Integrated circuit device, and method of fabricating same |
US7184298B2 (en) * | 2003-09-24 | 2007-02-27 | Innovative Silicon S.A. | Low power programming technique for a floating body memory transistor, memory cell, and memory array |
US7301803B2 (en) * | 2004-12-22 | 2007-11-27 | Innovative Silicon S.A. | Bipolar reading technique for a memory cell having an electrically floating body transistor |
FR2880710B1 (fr) * | 2005-01-11 | 2007-04-20 | St Microelectronics Sa | Procede et dispositif de caracterisation d'une cellule destinee a etre realisee dans une technologie cmos du type silicium sur isolant partiellement appauvri |
KR100673228B1 (ko) * | 2005-06-30 | 2007-01-22 | 주식회사 하이닉스반도체 | 낸드 플래쉬 메모리 소자의 제조방법 |
US20070023833A1 (en) * | 2005-07-28 | 2007-02-01 | Serguei Okhonin | Method for reading a memory cell having an electrically floating body transistor, and memory cell and array implementing same |
US7606066B2 (en) | 2005-09-07 | 2009-10-20 | Innovative Silicon Isi Sa | Memory cell and memory cell array having an electrically floating body transistor, and methods of operating same |
US7683430B2 (en) * | 2005-12-19 | 2010-03-23 | Innovative Silicon Isi Sa | Electrically floating body memory cell and array, and method of operating or controlling same |
US7542345B2 (en) * | 2006-02-16 | 2009-06-02 | Innovative Silicon Isi Sa | Multi-bit memory cell having electrically floating body transistor, and method of programming and reading same |
US7492632B2 (en) | 2006-04-07 | 2009-02-17 | Innovative Silicon Isi Sa | Memory array having a programmable word length, and method of operating same |
WO2007128738A1 (en) | 2006-05-02 | 2007-11-15 | Innovative Silicon Sa | Semiconductor memory cell and array using punch-through to program and read same |
US8069377B2 (en) | 2006-06-26 | 2011-11-29 | Micron Technology, Inc. | Integrated circuit having memory array including ECC and column redundancy and method of operating the same |
US7542340B2 (en) * | 2006-07-11 | 2009-06-02 | Innovative Silicon Isi Sa | Integrated circuit including memory array having a segmented bit line architecture and method of controlling and/or operating same |
US7893475B2 (en) * | 2007-01-24 | 2011-02-22 | Macronix International Co., Ltd. | Dynamic random access memory cell and manufacturing method thereof |
WO2008090475A2 (en) | 2007-01-26 | 2008-07-31 | Innovative Silicon S.A. | Floating-body dram transistor comprising source/drain regions separated from the gated body region |
US7919800B2 (en) | 2007-02-26 | 2011-04-05 | Micron Technology, Inc. | Capacitor-less memory cells and cell arrays |
WO2009031052A2 (en) | 2007-03-29 | 2009-03-12 | Innovative Silicon S.A. | Zero-capacitor (floating body) random access memory circuits with polycide word lines and manufacturing methods therefor |
US8064274B2 (en) | 2007-05-30 | 2011-11-22 | Micron Technology, Inc. | Integrated circuit having voltage generation circuitry for memory cell array, and method of operating and/or controlling same |
US8085594B2 (en) * | 2007-06-01 | 2011-12-27 | Micron Technology, Inc. | Reading technique for memory cell with electrically floating body transistor |
US8194487B2 (en) | 2007-09-17 | 2012-06-05 | Micron Technology, Inc. | Refreshing data of memory cells with electrically floating body transistors |
JP2009088440A (ja) * | 2007-10-03 | 2009-04-23 | Oki Semiconductor Co Ltd | 半導体装置及びその製造方法 |
US8536628B2 (en) | 2007-11-29 | 2013-09-17 | Micron Technology, Inc. | Integrated circuit having memory cell array including barriers, and method of manufacturing same |
US8349662B2 (en) * | 2007-12-11 | 2013-01-08 | Micron Technology, Inc. | Integrated circuit having memory cell array, and method of manufacturing same |
JP2009169071A (ja) * | 2008-01-16 | 2009-07-30 | Sony Corp | 表示装置 |
US8773933B2 (en) | 2012-03-16 | 2014-07-08 | Micron Technology, Inc. | Techniques for accessing memory cells |
US8014195B2 (en) | 2008-02-06 | 2011-09-06 | Micron Technology, Inc. | Single transistor memory cell |
US8189376B2 (en) * | 2008-02-08 | 2012-05-29 | Micron Technology, Inc. | Integrated circuit having memory cells including gate material having high work function, and method of manufacturing same |
US7957206B2 (en) * | 2008-04-04 | 2011-06-07 | Micron Technology, Inc. | Read circuitry for an integrated circuit having memory cells and/or a memory cell array, and method of operating same |
KR101505494B1 (ko) * | 2008-04-30 | 2015-03-24 | 한양대학교 산학협력단 | 무 커패시터 메모리 소자 |
US7947543B2 (en) * | 2008-09-25 | 2011-05-24 | Micron Technology, Inc. | Recessed gate silicon-on-insulator floating body device with self-aligned lateral isolation |
US7933140B2 (en) | 2008-10-02 | 2011-04-26 | Micron Technology, Inc. | Techniques for reducing a voltage swing |
US7924630B2 (en) * | 2008-10-15 | 2011-04-12 | Micron Technology, Inc. | Techniques for simultaneously driving a plurality of source lines |
US8223574B2 (en) * | 2008-11-05 | 2012-07-17 | Micron Technology, Inc. | Techniques for block refreshing a semiconductor memory device |
KR101570178B1 (ko) * | 2008-11-07 | 2015-11-18 | 삼성전자주식회사 | 커패시터 없는 디램 소자 |
US8213226B2 (en) * | 2008-12-05 | 2012-07-03 | Micron Technology, Inc. | Vertical transistor memory cell and array |
US8278167B2 (en) * | 2008-12-18 | 2012-10-02 | Micron Technology, Inc. | Method and structure for integrating capacitor-less memory cell with logic |
US8319294B2 (en) * | 2009-02-18 | 2012-11-27 | Micron Technology, Inc. | Techniques for providing a source line plane |
WO2010102106A2 (en) | 2009-03-04 | 2010-09-10 | Innovative Silicon Isi Sa | Techniques for forming a contact to a buried diffusion layer in a semiconductor memory device |
KR20120006516A (ko) * | 2009-03-31 | 2012-01-18 | 마이크론 테크놀로지, 인크. | 반도체 메모리 디바이스를 제공하기 위한 기술들 |
US8139418B2 (en) | 2009-04-27 | 2012-03-20 | Micron Technology, Inc. | Techniques for controlling a direct injection semiconductor memory device |
US8508994B2 (en) | 2009-04-30 | 2013-08-13 | Micron Technology, Inc. | Semiconductor device with floating gate and electrically floating body |
US8498157B2 (en) | 2009-05-22 | 2013-07-30 | Micron Technology, Inc. | Techniques for providing a direct injection semiconductor memory device |
US8537610B2 (en) | 2009-07-10 | 2013-09-17 | Micron Technology, Inc. | Techniques for providing a semiconductor memory device |
US9076543B2 (en) | 2009-07-27 | 2015-07-07 | Micron Technology, Inc. | Techniques for providing a direct injection semiconductor memory device |
US8199595B2 (en) * | 2009-09-04 | 2012-06-12 | Micron Technology, Inc. | Techniques for sensing a semiconductor memory device |
US8174881B2 (en) | 2009-11-24 | 2012-05-08 | Micron Technology, Inc. | Techniques for reducing disturbance in a semiconductor device |
US8310893B2 (en) * | 2009-12-16 | 2012-11-13 | Micron Technology, Inc. | Techniques for reducing impact of array disturbs in a semiconductor memory device |
KR102480794B1 (ko) | 2009-12-28 | 2022-12-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 기억 장치와 반도체 장치 |
US8416636B2 (en) | 2010-02-12 | 2013-04-09 | Micron Technology, Inc. | Techniques for controlling a semiconductor memory device |
US8411513B2 (en) * | 2010-03-04 | 2013-04-02 | Micron Technology, Inc. | Techniques for providing a semiconductor memory device having hierarchical bit lines |
US8576631B2 (en) * | 2010-03-04 | 2013-11-05 | Micron Technology, Inc. | Techniques for sensing a semiconductor memory device |
US8369177B2 (en) * | 2010-03-05 | 2013-02-05 | Micron Technology, Inc. | Techniques for reading from and/or writing to a semiconductor memory device |
WO2011115893A2 (en) | 2010-03-15 | 2011-09-22 | Micron Technology, Inc. | Techniques for providing a semiconductor memory device |
WO2011115926A1 (en) | 2010-03-16 | 2011-09-22 | Sandisk 3D, Llc | Bottom electrodes for use with metal oxide resistivity switching layers |
US8411524B2 (en) | 2010-05-06 | 2013-04-02 | Micron Technology, Inc. | Techniques for refreshing a semiconductor memory device |
US8389971B2 (en) | 2010-10-14 | 2013-03-05 | Sandisk 3D Llc | Memory cells having storage elements that share material layers with steering elements and methods of forming the same |
US8841648B2 (en) | 2010-10-14 | 2014-09-23 | Sandisk 3D Llc | Multi-level memory arrays with memory cells that employ bipolar storage elements and methods of forming the same |
US8531878B2 (en) | 2011-05-17 | 2013-09-10 | Micron Technology, Inc. | Techniques for providing a semiconductor memory device |
US9559216B2 (en) | 2011-06-06 | 2017-01-31 | Micron Technology, Inc. | Semiconductor memory device and method for biasing same |
WO2015085093A1 (en) | 2013-12-06 | 2015-06-11 | Rambus Inc. | 2t-1r architecture for resistive ram |
WO2018052760A1 (en) * | 2016-09-13 | 2018-03-22 | Applied Materials, Inc. | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application |
US11088140B2 (en) * | 2019-08-27 | 2021-08-10 | Nanya Technology Corporation | Multiple semiconductor elements with different threshold voltages |
US11821936B2 (en) * | 2022-01-10 | 2023-11-21 | Nxp Usa, Inc. | In situ threshold voltage determination of a semiconductor device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893370A (ja) * | 1981-11-30 | 1983-06-03 | Nec Corp | Mosデバイス |
US5283457A (en) * | 1989-10-02 | 1994-02-01 | Texas Instruments Incorporated | Semiconductor on insulator transistor |
EP0601590A2 (en) * | 1992-12-10 | 1994-06-15 | Sony Corporation | Semiconductor memory cell |
US5784311A (en) * | 1997-06-13 | 1998-07-21 | International Business Machines Corporation | Two-device memory cell on SOI for merged logic and memory applications |
WO2001054199A1 (fr) * | 2000-01-24 | 2001-07-26 | Sony Corporation | Dispositif a semiconducteur et procede de fabrication correspondant |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4118693A (en) * | 1977-05-09 | 1978-10-03 | Knogo Corporation | Method and apparatus for producing uniform electromagnetic fields in an article detection system |
JPS586234B2 (ja) * | 1977-11-17 | 1983-02-03 | 富士通株式会社 | 半導体記憶装置 |
JPS6235559A (ja) * | 1985-08-09 | 1987-02-16 | Agency Of Ind Science & Technol | 半導体記憶装置 |
GB9401924D0 (en) * | 1994-02-01 | 1994-03-30 | Jonhig Ltd | System for road toll payment |
JPH11224906A (ja) * | 1998-02-05 | 1999-08-17 | Sony Corp | 半導体メモリセル |
US6225665B1 (en) * | 1999-01-11 | 2001-05-01 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having multiple source regions |
US6111778A (en) * | 1999-05-10 | 2000-08-29 | International Business Machines Corporation | Body contacted dynamic memory |
JP3485091B2 (ja) * | 2001-01-19 | 2004-01-13 | セイコーエプソン株式会社 | 半導体装置およびその製造方法 |
US6793127B2 (en) * | 2001-04-04 | 2004-09-21 | Koninklijke Philips Electronics N.V. | Internet enabled resource constrained terminal for processing tags |
US8321302B2 (en) * | 2002-01-23 | 2012-11-27 | Sensormatic Electronics, LLC | Inventory management system |
-
2003
- 2003-03-27 JP JP2003086898A patent/JP4880867B2/ja not_active Expired - Fee Related
- 2003-04-04 TW TW092107778A patent/TWI264116B/zh not_active IP Right Cessation
- 2003-04-09 EP EP03252253A patent/EP1355358B1/en not_active Expired - Fee Related
- 2003-04-09 US US10/410,239 patent/US20030213994A1/en not_active Abandoned
- 2003-04-09 EP EP09166746.9A patent/EP2113943B1/en not_active Expired - Fee Related
- 2003-04-10 CN CNB031307892A patent/CN100380666C/zh not_active Expired - Fee Related
- 2003-04-10 KR KR1020030022660A patent/KR100983408B1/ko active IP Right Grant
-
2004
- 2004-06-28 US US10/879,938 patent/US7211867B2/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893370A (ja) * | 1981-11-30 | 1983-06-03 | Nec Corp | Mosデバイス |
US5283457A (en) * | 1989-10-02 | 1994-02-01 | Texas Instruments Incorporated | Semiconductor on insulator transistor |
EP0601590A2 (en) * | 1992-12-10 | 1994-06-15 | Sony Corporation | Semiconductor memory cell |
US5784311A (en) * | 1997-06-13 | 1998-07-21 | International Business Machines Corporation | Two-device memory cell on SOI for merged logic and memory applications |
WO2001054199A1 (fr) * | 2000-01-24 | 2001-07-26 | Sony Corporation | Dispositif a semiconducteur et procede de fabrication correspondant |
Also Published As
Publication number | Publication date |
---|---|
US20050001269A1 (en) | 2005-01-06 |
KR20030081142A (ko) | 2003-10-17 |
US7211867B2 (en) | 2007-05-01 |
EP1355358A2 (en) | 2003-10-22 |
EP2113943B1 (en) | 2013-07-31 |
EP2113943A3 (en) | 2010-10-13 |
EP2113943A2 (en) | 2009-11-04 |
US20030213994A1 (en) | 2003-11-20 |
EP1355358B1 (en) | 2013-03-13 |
EP1355358A3 (en) | 2004-08-04 |
CN1453874A (zh) | 2003-11-05 |
JP4880867B2 (ja) | 2012-02-22 |
JP2004128446A (ja) | 2004-04-22 |
TW200308082A (en) | 2003-12-16 |
KR100983408B1 (ko) | 2010-09-20 |
TWI264116B (en) | 2006-10-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100380666C (zh) | 薄膜存储器、阵列及其操作方法和制造方法 | |
JP3744938B2 (ja) | 自己増幅ダイナミックmosトランジスタメモリセルを有する装置の製法 | |
EP1191596A2 (en) | Semiconductor memory device and its manufacturing method | |
US7795658B2 (en) | Semiconductor memory device and manufacturing method thereof | |
US20060138558A1 (en) | Semiconductor memory device and method of fabricating the same | |
JP2001028443A (ja) | 半導体装置およびその製造方法 | |
TWI502586B (zh) | 記憶體單元、記憶體裝置及包含有該記憶體裝置的積體電路 | |
TW200845300A (en) | Semiconductor memory devices and methods for fabricating the same | |
JP2851968B2 (ja) | 改良された絶縁ゲート型トランジスタを有する半導体装置及びその製造方法 | |
US7132751B2 (en) | Memory cell using silicon carbide | |
JPH10256507A (ja) | 半導体装置 | |
US20040095795A1 (en) | Method to prevent bit line capacitive coupling | |
JPH05136374A (ja) | 半導体装置及びその製造方法 | |
US7894255B1 (en) | Thyristor based memory cell | |
JP2003158195A (ja) | 半導体集積回路装置の製造方法 | |
US11894039B2 (en) | Fft-dram | |
US7894256B1 (en) | Thyristor based memory cell | |
US8525248B2 (en) | Memory cell comprising a floating body, a channel region, and a diode | |
WO2000079597A1 (fr) | Dispositif de memoire a semi-conducteur et procede de fabrication de celui-ci | |
JPH11168202A (ja) | メモリセルおよび該メモリセルを形成する方法 | |
JPH05283641A (ja) | 半導体記憶装置 | |
JPS6281750A (ja) | 半導体集積回路装置 | |
JPS62120067A (ja) | ダイナミツクランダムアクセスメモリセル | |
JPH07193140A (ja) | 半導体記憶装置 | |
JP2000091517A (ja) | 半導体記憶装置およびそれを用いたシステムlsi |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160328 Address after: Chiba County, Japan Patentee after: SEIKO INSTR INC Patentee after: Lin Feng Address before: Chiba, Chiba, Japan Patentee before: Seiko Instruments Inc. Patentee before: Lin Feng |
|
CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Co-patentee after: Lin Feng Patentee after: EPPs Lingke Co. Ltd. Address before: Chiba County, Japan Co-patentee before: Lin Feng Patentee before: SEIKO INSTR INC |
|
CP01 | Change in the name or title of a patent holder | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080409 Termination date: 20210410 |
|
CF01 | Termination of patent right due to non-payment of annual fee |