CN100376014C - Automatic tracking monitoring system for products processing catalog of semiconductor manufacturing factory - Google Patents

Automatic tracking monitoring system for products processing catalog of semiconductor manufacturing factory Download PDF

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Publication number
CN100376014C
CN100376014C CNB2004100679428A CN200410067942A CN100376014C CN 100376014 C CN100376014 C CN 100376014C CN B2004100679428 A CNB2004100679428 A CN B2004100679428A CN 200410067942 A CN200410067942 A CN 200410067942A CN 100376014 C CN100376014 C CN 100376014C
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client
production
product
workpiece
processing
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CN1773667A (en
Inventor
俞晓华
向玉坤
施南全
刘慧甄
彭久晏
陈鼎崴
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Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Shanghai Corp
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Abstract

The present invention discloses an automatic tracking monitoring system for product processing catalogs of a semiconductor manufacturing factory, which comprises a product manufacturing information storing device taking clients as a unit, manufacturing ability monitoring device of each machine table in a production line, a tracking monitoring device (MTS) of the client product manufacturing catalogs, a client product manufacturing dispatching centre and a predication and publishing device for client product good export information.

Description

Automatic tracking monitoring system for products processing catalog of semiconductor manufacturing factory
Technical field
The present invention relates to the automated system that semiconductor device manufactory uses, particularly semiconductor device manufacturing works products processing catalog automation tracking and monitoring system.
Background technology
In general, in the current semiconductor manufacturing, in order to enhance productivity, reduce production costs, the designing unit and the manufacturer of semiconductor device separate, that is to say that the designing unit of semiconductor device carries out the circuit and the structural design of semiconductor device specially, and the circuit and the structure of the semiconductor device that the manufacturer of semiconductor device designs according to semiconductor device design unit are made semiconductor device specially.
Therefore, semiconductor device manufactory produces the different semiconductor device of quantity of a great variety simultaneously, and the time cycle difference of the processing technology difference of various types of semiconductor device, processing, the quantity difference of processing, the delivery date and the delivery quantity of classes of semiconductors device customer requirement also have nothing in common with each other.Under the condition of this complexity, how to make full use of expensive semiconductor board production capacity, effectively tissue is produced, and is that can semiconductor enterprise dominate the market to client's delivery in high quality on schedule, the key point of existence and development in fierce commercial competition.
Arranging production in real time, each Related product runs goods order in the line, and it is extremely complicated and important particularly rationally arranging the Very Important Person On-line Product to run work such as flow of goods journey.
Current semiconductor device product on production line staff planners, customer service personnel and sales force can not rationally apply for the worker that sends of particular customer product at any time according to the product on production line running status to manufacturing sector.The operating state of each board on the production line changes at any time, and the actual online workpiece of production line distributes and changes at any time, and the processing sequence of workpiece is also changing at any time, and the classes of semiconductors device is also different with processing quantity in the process time of relevant board.In this complex environment, the product plan personnel, customer service personnel and sales force can not fully understand and digest each side's information owing to can not monitor the machining state of product on production line by real-time tracking, can not give the client prediction at delivery date more accurately..
For can be according to produce superior in quality semiconductor device the delivery date of customer requirement according to quantity on time, and give full play to the ability to work of the various manufacturing boards on the semiconductor device production line, must adopt the monitoring of automation mode real-time tracking and calculate the on-line machining distribution of workpiece to be processed each board position on production line of each client's product exactly, the operating state of decorrelation board, rationally arrange the workpiece to be processed of classes of semiconductors device to deliver goods to the client in high quality in proper order process time on production line on schedule.
Summary of the invention
In order to overcome product plan personnel in the above-mentioned semiconductor device manufactory, customer service personnel and sales force can not monitor the on-line machining state of client's product on production line by real-time tracking, with the work state information that can not fully understand and digest each relevant board, can not reasonably make the various product workpiece in order process time of each relevant board, can not organize production most effectively, propose the present invention to shortcomings such as client's delivery in high quality on schedule.
The objective of the invention is, a kind of semiconductor device client of manufactory product machining state automatic tracking monitoring system is proposed, with client's product machining state automatic tracking monitoring system of the present invention, specific client product machining state on the dynamic real-time tracking and monitoring production line, dynamic random is gathered the abundance of specific client product each processing station on production line in real time.The ability to work and the state of the relevant board of the last operation of each product workpiece are unit prediction and the completion of supervising the product order with client.
According to an aspect of the present invention, provide a kind of semiconductor manufacturing factory client products processing catalog automatic monitoring system, it is characterized in that this system comprises: product manufacturing information storage device (1.) is used to store the various product information data that will produce; The production capacity supervising device (2.) of each board in the production line is used for adjusting the processing capacity of Related product at any time according to producing needs; Products processing catalog tracking and monitoring device (MTS) is 3.), be used for dynamic real-time and gather production information; Client's production control centre (4.) is used for according to rationally the arrange production production task of each processing website on the line of the production information that described products processing catalog tracking and monitoring device (3.) is gathered; Effectively tissue is produced; And information prediction of client's product turnout and distributing device (5.) are used for the practical production status release product state information according to associated production line;
Wherein, described product manufacturing information storage device (1.) is connected with described production capacity supervising device (2.), client's production control centre (4.); Described products processing catalog tracking and monitoring device (3.) is connected with described client's production control centre (4.); The information prediction of described client's product turnout is connected with described products processing catalog tracking and monitoring device (3.) or described client's production control centre (4.) with distributing device (5.).
Preferably, described product manufacturing information storage device (1.) the various product information data that will produce of storing comprise following information at least: the catalogue of the various products that produce; The type of the various products of producing and quantity; And, the delivery date of the various products that produce.
Preferably, described product manufacturing information storage device (1.) is the various product information data that will produce of unit storage with client.
Preferably, the production capacity supervising device (2.) of each board also is used for adjusting at any time according to the operating state of each relevant board the processing capacity of Related product in the described production line.
Preferably, described products processing catalog tracking and monitoring device (3.) production information of gathering comprises any in the following information at least: the abundance of client's product workpiece to be processed each processing station on production line; Each board is the online amount retained of workpiece of key machine particularly; Each workpiece is in relevant board needed process time; The ability to work of each relevant board and operating state that whether can operate as normal; And, need be in the workpiece quantity of relevant board processing, the qualification rate of workpiece.
Preferably, the Product Status information issued of information prediction of described client's product turnout and distributing device (5.) with client be unit and with the shipment date be unit.
Description of drawings
The following description of carrying out in conjunction with the drawings the present invention may be better understood purpose and advantage of the present invention, accompanying drawing is a part of specification, accompanying drawing illustrates principle of the present invention and feature with the word segment of specification, demonstrates the embodiment that represents the principle of the invention and feature in the accompanying drawing.Wherein,
Fig. 1 is according to semiconductor manufacturing factory client automatic tracking monitoring system for products processing catalog block diagram of the present invention.
Label declaration:
1. with client the product manufacturing information storage device of unit
2. the production capacity supervising device of each board in the production line
3. client's products processing catalog tracking and monitoring device
4. client's production control centre
5. information prediction of client's product turnout and distributing device
Embodiment
Describe the ruuning situation of pressing semiconductor manufacturing factory client automatic tracking monitoring system for products processing catalog of the present invention in detail below in conjunction with accompanying drawing.Illustrate according to semiconductor manufacturing factory client automatic tracking monitoring system for products processing catalog of the present invention with this.
Monitor tracking system according to client's products processing catalog that the semiconductor manufacturing factory of one embodiment of the present of invention is used, comprise: the product manufacturing information storage device that 1. is unit with client, the catalogue that storage will be produced in this device, the data such as delivery date of the type of the various products that produce and quantity and various products; 2. the production capacity supervising device of each board in the production line is adjusted the processing capacity of Related product at any time according to the operating state of producing needs and each relevant board; 3. client's products processing catalog tracking and monitoring device (MTS), dynamic real-time is gathered the abundance of client's product workpiece to be processed each processing station on production line, each board is the online amount retained of workpiece of key machine particularly, each workpiece is in relevant board needed process time, the ability to work of each relevant board and operating state that whether can operate as normal, need be in the workpiece quantity of relevant board processing, related datas such as the qualification rate of workpiece are according to the type delivery quantity and the delivery date of product, required cycle process time of workpiece carries out production status and calculates and analyze; 4. rationally arrange production each the client's product workpiece quantity of each processing website on the line of client's production scheduling center, the various information of being gathered according to client's products processing catalog tracking and monitoring device (MTS), the working ability of the relevant board of allotment, effectively tissue is produced; 5. information prediction of client's product turnout and distributing device are the Product Status information of unit with client and are the Product Status information of unit with the shipment date according to the practical production status issue of each client's product workpiece on the production line.
Client's products processing catalog monitoring tracking system operation of using according to the semiconductor manufacturing factory of one embodiment of the present of invention may further comprise the steps: step 1, with client be unit product manufacturing information storage device 1. in the client's catalogue that will produce of storage, the data such as delivery date of the type of the various products of producing and quantity and various products, by corporate lan with the production capacity supervising device of each board in these data input production lines 2. with client's production scheduling center 4.; Step 2,1. 2. the production capacity supervising device of each board adjust the processing capacity of Related product at any time in the production line by the operating state of producing needs and each relevant board by the data of corporate lan input according to client's product manufacturing information storage device; Step 3,3. client's products processing catalog tracking and monitoring device (MTS), dynamic real-time is gathered the abundance of each client's product workpiece to be processed each processing station on production line, each workpiece is in relevant board needed process time, the ability to work of each relevant board and state, need be in the workpiece quantity of relevant board processing, related datas such as the qualification rate of workpiece, according to the type delivery quantity and the delivery date of product, required cycle process time of workpiece carries out production status calculating and analyzes, and by corporate lan 4. Calculation results is imported client's production scheduling center; Step 4,4. client's production scheduling center, rationally the arrange production processing work quantity of each processing website on the line of the various information of being gathered according to the product machining state tracking and monitoring device (MTS) that receives by corporate lan, the working ability of the relevant board of allotment, effectively tissue is produced; With step 5,5. information prediction of client's product turnout and distributing device are the Product Status information of background with client by the corporate lan issue and are the Product Status information of background with the shipment date according to the practical production status of processing work on the production line.
The technical staff of the industry should be appreciated that under the prerequisite that does not break away from spirit of the present invention or principal character, the present invention can also implement with other specific forms.Therefore, by whole technical schemes of the present invention, cited execution mode just is used to illustrate the present invention rather than restriction the present invention, and the present invention is not limited to the details of describing herein.The scope of protection of present invention is defined by appending claims.

Claims (9)

1. semiconductor manufacturing factory client automatic tracking monitoring system for products processing catalog is characterized in that, this system comprises: product manufacturing information storage device (1.) is used to store the various product information data that will produce; The production capacity supervising device (2.) of each board in the production line is used for adjusting the processing capacity of Related product at any time according to producing needs; Products processing catalog tracking and monitoring device (3.) is used for dynamic real-time and gathers production information; Client's production control centre (4.) is used for according to rationally the arrange production production task of each processing website on the line of the production information that described products processing catalog tracking and monitoring device (3.) is collected, and effectively tissue is produced; And information prediction of client's product turnout and distributing device (5.) are used for the practical production status release product state information according to associated production line;
Wherein, described product manufacturing information storage device (1.) is connected with described production capacity supervising device (2.), client's production control centre (4.); Described products processing catalog tracking and monitoring device (3.) is connected with described client's production control centre (4.); The information prediction of described client's product turnout is connected with described products processing catalog tracking and monitoring device (3.) or described client's production control centre (4.) with distributing device (5.).
2. automatic tracking monitoring system according to claim 1, wherein, described product manufacturing information storage device (1.) the various product information data that will produce of storing comprise following information at least:
The catalogue of-various the products that produce;
The type and the quantity of-the various products that produce; And
The delivery date of-various the products that produce.
3. automatic tracking monitoring system according to claim 1 and 2, wherein, described product manufacturing information storage device (1.) is the various product information data that will produce of unit storage with client.
4. automatic tracking monitoring system according to claim 1, wherein, the production capacity supervising device (2.) of each board also is used for adjusting at any time according to the operating state of each relevant board the processing capacity of Related product in the described production line.
5. according to claim 1 or 4 described automatic tracking monitoring systems, wherein, described products processing catalog tracking and monitoring device (3.) production information of gathering comprises any in the following information at least:
The abundance of-client product workpiece to be processed each processing station on production line;
-each board is the online amount retained of workpiece of key machine particularly;
-each workpiece is in relevant board needed process time;
The ability to work of-each relevant board and operating state that whether can operate as normal; And
-need be in the workpiece quantity of relevant board processing, the qualification rate of workpiece.
6. automatic tracking monitoring system according to claim 5, wherein, the Product Status information that information prediction of described client's product turnout and distributing device (5.) are issued with client be unit and with the shipment date be unit.
7. according to claim 1 or 2 described automatic tracking monitoring systems, it is characterized in that the operation of described system may further comprise the steps:
Step 1: client's catalogue that storage will be produced in the product manufacturing information storage device (1.), the data such as delivery date of the type of the various products of producing and quantity and various products are by production capacity supervising device (2.) and the client production control centre (4.) of corporate lan with each board in these data input production lines;
Step 2: the production capacity control device (2.) of each board needs adjust at any time with the operating state of each relevant board the processing capacity of relevant board in the production line by production by the data of corporate lan input according to product manufacturing information storage device (1.);
Step 3: client's products processing catalog tracking and monitoring device (3.), dynamic random is gathered the abundance of client's workpiece to be processed each processing station on production line in real time, each workpiece is in relevant board needed process time, the ability to work of each relevant board and operating state that whether can operate as normal, need be in the workpiece quantity of relevant board processing, related datas such as the qualification rate of workpiece, according to the type delivery quantity and the delivery date of product, required cycle process time of workpiece carries out production status calculating and analyzes, and by corporate lan Calculation results is imported client's production control centre (4.);
Step 4: client's production control centre (4.), rationally arrange production each the client's product workpiece quantity of each processing website on the line of the various information of being gathered according to the client's products processing catalog tracking and monitoring device (3.) that receives by corporate lan, the working ability of the relevant board of allotment is unit prediction and the completion of supervising the product order with client;
Step 5: information prediction of client's product turnout and distributing device (5.) are the Product Status information of background with client by the corporate lan issue and are the Product Status information of background with the shipment date according to the practical production status of processing work on the production line.
8. automatic tracking monitoring system as claimed in claim 3 is characterized in that, the operation of described system may further comprise the steps:
Step 1: client's catalogue that storage will be produced in the product manufacturing information storage device (1.), the data such as delivery date of the type of the various products of producing and quantity and various products are by production capacity supervising device (2.) and the client production control centre (4.) of corporate lan with each board in these data input production lines;
Step 2: the production capacity control device (2.) of each board needs adjust at any time with the operating state of each relevant board the processing capacity of relevant board in the production line by production by the data of corporate lan input according to product manufacturing information storage device (1.);
Step 3: client's products processing catalog tracking and monitoring device (3.), dynamic random is gathered the abundance of client's workpiece to be processed each processing station on production line in real time, each workpiece is in relevant board needed process time, the ability to work of each relevant board and operating state that whether can operate as normal, need be in the workpiece quantity of relevant board processing, related datas such as the qualification rate of workpiece, according to the type delivery quantity and the delivery date of product, required cycle process time of workpiece carries out production status calculating and analyzes, and by corporate lan Calculation results is imported client's production control centre (4.);
Step 4: client's production control centre (4.), rationally arrange production each the client's product workpiece quantity of each processing website on the line of the various information of being gathered according to the client's products processing catalog tracking and monitoring device (3.) that receives by corporate lan, the working ability of the relevant board of allotment is unit prediction and the completion of supervising the product order with client;
Step 5: information prediction of client's product turnout and distributing device (5.) are the Product Status information of background with client by the corporate lan issue and are the Product Status information of background with the shipment date according to the practical production status of processing work on the production line.
9. automatic tracking monitoring system as claimed in claim 5 is characterized in that, the operation of described system may further comprise the steps:
Step 1: client's catalogue that storage will be produced in the product manufacturing information storage device (1.), the data such as delivery date of the type of the various products of producing and quantity and various products are by production capacity supervising device (2.) and the client production control centre (4.) of corporate lan with each board in these data input production lines;
Step 2: the production capacity control device (2.) of each board needs adjust at any time with the operating state of each relevant board the processing capacity of relevant board in the production line by production by the data of corporate lan input according to product manufacturing information storage device (1.);
Step 3: client's products processing catalog tracking and monitoring device (3.), dynamic random is gathered the abundance of client's workpiece to be processed each processing station on production line in real time, each workpiece is in relevant board needed process time, the ability to work of each relevant board and operating state that whether can operate as normal, need be in the workpiece quantity of relevant board processing, related datas such as the qualification rate of workpiece, according to the type delivery quantity and the delivery date of product, required cycle process time of workpiece carries out production status calculating and analyzes, and by corporate lan Calculation results is imported client's production control centre (4.);
Step 4: client's production control centre (4.), rationally arrange production each the client's product workpiece quantity of each processing website on the line of the various information of being gathered according to the client's products processing catalog tracking and monitoring device (3.) that receives by corporate lan, the working ability of the relevant board of allotment is unit prediction and the completion of supervising the product order with client;
Step 5: information prediction of client's product turnout and distributing device (5.) are the Product Status information of background with client by the corporate lan issue and are the Product Status information of background with the shipment date according to the practical production status of processing work on the production line.
CNB2004100679428A 2004-11-08 2004-11-08 Automatic tracking monitoring system for products processing catalog of semiconductor manufacturing factory Expired - Fee Related CN100376014C (en)

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CN102937802B (en) * 2012-11-02 2015-05-20 上海华力微电子有限公司 System and method for monitoring operating state of device
CN104423331B (en) * 2013-08-20 2017-06-16 中芯国际集成电路制造(上海)有限公司 Wafer manufacture dispatching method and scheduling system in semiconductor integrated circuit production
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CN104808597B (en) * 2014-01-24 2018-07-03 中芯国际集成电路制造(上海)有限公司 Produce the method and apparatus for sending work
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CN109634229A (en) * 2018-11-19 2019-04-16 东莞理工学院 A kind of intelligent plant manufacturing management system based on big data
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