CN100351632C - Array type micro-piezoresistive acceleration transducer - Google Patents
Array type micro-piezoresistive acceleration transducer Download PDFInfo
- Publication number
- CN100351632C CN100351632C CNB2004100408750A CN200410040875A CN100351632C CN 100351632 C CN100351632 C CN 100351632C CN B2004100408750 A CNB2004100408750 A CN B2004100408750A CN 200410040875 A CN200410040875 A CN 200410040875A CN 100351632 C CN100351632 C CN 100351632C
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- Prior art keywords
- acceleration sensor
- little
- type acceleration
- piezoresistance type
- sensing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2004100408750A CN100351632C (en) | 2004-10-21 | 2004-10-21 | Array type micro-piezoresistive acceleration transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2004100408750A CN100351632C (en) | 2004-10-21 | 2004-10-21 | Array type micro-piezoresistive acceleration transducer |
Publications (2)
Publication Number | Publication Date |
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CN1763549A CN1763549A (en) | 2006-04-26 |
CN100351632C true CN100351632C (en) | 2007-11-28 |
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Family Applications (1)
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CNB2004100408750A Expired - Fee Related CN100351632C (en) | 2004-10-21 | 2004-10-21 | Array type micro-piezoresistive acceleration transducer |
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CN (1) | CN100351632C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102193002A (en) * | 2010-03-11 | 2011-09-21 | 苏州敏芯微电子技术有限公司 | Acceleration sensor and manufacturing method thereof |
CN103184862B (en) * | 2011-12-30 | 2017-12-19 | 国家纳米技术与工程研究院 | A kind of measuring part of three-dimensional MEMS accelerometer for oil well logging and preparation method thereof |
CN108507425B (en) * | 2018-03-26 | 2019-10-25 | 西安工业大学 | A kind of magnetic susceptibility layer metering device for penetration fuse |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5866817A (en) * | 1995-07-26 | 1999-02-02 | Akebono Brake Industry Co. | Acceleration sensor |
CN1281986A (en) * | 2000-08-25 | 2001-01-31 | 华北工学院微米纳米技术研究中心 | Integrated silicon microresistance type acceleration sensor and its manufacturing method |
-
2004
- 2004-10-21 CN CNB2004100408750A patent/CN100351632C/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5866817A (en) * | 1995-07-26 | 1999-02-02 | Akebono Brake Industry Co. | Acceleration sensor |
CN1281986A (en) * | 2000-08-25 | 2001-01-31 | 华北工学院微米纳米技术研究中心 | Integrated silicon microresistance type acceleration sensor and its manufacturing method |
Non-Patent Citations (1)
Title |
---|
测试10~5g微阵列式加速度传感器 刘晓明.中国机械工程,第14卷第5期 2003 * |
Also Published As
Publication number | Publication date |
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CN1763549A (en) | 2006-04-26 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Zhongshan Hongmao Electronics Co., Ltd. Assignor: University of Electronic Science and Technology of China Contract fulfillment period: 2007.11.30 to 2012.11.30 contract change Contract record no.: 2008440000504 Denomination of invention: Array type micro-piezoresistive acceleration transducer Granted publication date: 20071128 License type: Exclusive license Record date: 20081211 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.11.30 TO 2012.11.30; CHANGE OF CONTRACT Name of requester: ZHONGSHAN CITY HONGMAO ELECTRONICS CO., LTD. Effective date: 20081211 |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071128 Termination date: 20101021 |