CN100344872C - High vacuum cryogenic water vapor catcher - Google Patents
High vacuum cryogenic water vapor catcher Download PDFInfo
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- CN100344872C CN100344872C CNB2004100479366A CN200410047936A CN100344872C CN 100344872 C CN100344872 C CN 100344872C CN B2004100479366 A CNB2004100479366 A CN B2004100479366A CN 200410047936 A CN200410047936 A CN 200410047936A CN 100344872 C CN100344872 C CN 100344872C
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 239000003507 refrigerant Substances 0.000 claims abstract description 8
- 239000000203 mixture Substances 0.000 claims description 42
- 238000005057 refrigeration Methods 0.000 claims description 35
- 239000007789 gas Substances 0.000 claims description 24
- 239000000498 cooling water Substances 0.000 claims description 21
- 238000009833 condensation Methods 0.000 claims description 19
- 230000005494 condensation Effects 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 17
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 14
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 14
- 239000010687 lubricating oil Substances 0.000 claims description 13
- AFABGHUZZDYHJO-UHFFFAOYSA-N dimethyl butane Natural products CCCC(C)C AFABGHUZZDYHJO-UHFFFAOYSA-N 0.000 claims description 12
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 claims description 12
- QWTDNUCVQCZILF-UHFFFAOYSA-N isopentane Chemical compound CCC(C)C QWTDNUCVQCZILF-UHFFFAOYSA-N 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 8
- 239000001294 propane Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 7
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 claims description 6
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 claims description 6
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000001282 iso-butane Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- QYSGYZVSCZSLHT-UHFFFAOYSA-N octafluoropropane Chemical compound FC(F)(F)C(F)(F)C(F)(F)F QYSGYZVSCZSLHT-UHFFFAOYSA-N 0.000 claims description 6
- 229960004065 perflutren Drugs 0.000 claims description 6
- IJDNQMDRQITEOD-UHFFFAOYSA-N sec-butylidene Natural products CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 claims description 6
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 claims description 5
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 4
- IAQRGUVFOMOMEM-UHFFFAOYSA-N butene Natural products CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 claims description 4
- UHCBBWUQDAVSMS-UHFFFAOYSA-N fluoroethane Chemical compound CCF UHCBBWUQDAVSMS-UHFFFAOYSA-N 0.000 claims description 4
- YHQXBTXEYZIYOV-UHFFFAOYSA-N 3-methylbut-1-ene Chemical compound CC(C)C=C YHQXBTXEYZIYOV-UHFFFAOYSA-N 0.000 claims description 3
- PMPVIKIVABFJJI-UHFFFAOYSA-N Cyclobutane Chemical compound C1CCC1 PMPVIKIVABFJJI-UHFFFAOYSA-N 0.000 claims description 3
- LVZWSLJZHVFIQJ-UHFFFAOYSA-N Cyclopropane Chemical compound C1CC1 LVZWSLJZHVFIQJ-UHFFFAOYSA-N 0.000 claims description 3
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 claims description 3
- IYABWNGZIDDRAK-UHFFFAOYSA-N allene Chemical compound C=C=C IYABWNGZIDDRAK-UHFFFAOYSA-N 0.000 claims description 3
- YWAKXRMUMFPDSH-UHFFFAOYSA-N pentene Chemical group CCCC=C YWAKXRMUMFPDSH-UHFFFAOYSA-N 0.000 claims description 3
- 229960004692 perflenapent Drugs 0.000 claims description 3
- NJCBUSHGCBERSK-UHFFFAOYSA-N perfluoropentane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F NJCBUSHGCBERSK-UHFFFAOYSA-N 0.000 claims description 3
- 239000007792 gaseous phase Substances 0.000 claims description 2
- 239000007791 liquid phase Substances 0.000 claims description 2
- 238000005086 pumping Methods 0.000 abstract description 7
- 238000012423 maintenance Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 11
- 239000012530 fluid Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 239000000284 extract Substances 0.000 description 5
- 239000004615 ingredient Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000009835 boiling Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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Abstract
The invention relates to a high-vacuum cryogenic water vapor trap which comprises a high-vacuum water vapor trapping unit, a low-vacuum water vapor trapping unit, a compressor unit, a low vacuum chamber, a vacuum connecting pipeline and a refrigerant conveying pipeline. The arrangement mode is as follows: the high vacuum trapping unit is placed in a high vacuum environment at the connection of the inlet of a high vacuum pump and a high vacuum chamber (A) in a high vacuum system or placed in the high vacuum chamber (A) in the high vacuum system; the low vacuum trapping unit is arranged in a low vacuum chamber, and the low vacuum chamber is simultaneously connected with an outlet of a high vacuum pump and an inlet of a preceding stage vacuum pump (C) in a high vacuum system through a vacuum system connecting pipeline; the working temperature zone of the high vacuum trapping unit is 110-150K. The cryogenic water vapor trap provided by the invention has the characteristics of selective trapping of water vapor, capability of obviously improving pumping speed and ultimate vacuum degree, low manufacturing cost, high reliability, no need of special maintenance and the like.
Description
Technical field
The present invention relates to refrigeration and cryogenic engineering and vacuum technique field, particularly a kind of novel high vacuum deep cooling water trap.
Background technique
When using vacuum environment, hope can reach required degree of vacuum fast usually, especially the occasion of often opening in vacuum system.Owing to have water vapor in the atmosphere environment, and water vapor is to be difficult to take one of gas that mechanical type vacuum pump (as turbomolecular pump etc.) extracts most.Therefore, the existence of water vapor can prolong the time that arrives required degree of vacuum in the vacuum chamber, has promptly reduced the ultimate vacuum that can realize in the time of necessarily bleeding.There are some researches show: when degree of vacuum is higher than 10
-4During Pa, the content of water vapor is up to 65%～95% in the residual gas.And existing vacuum pump (comprising molecular pump, diffusion pump etc.) all is difficult to water vapor is implemented effectively to extract, and promptly pumping speed is very low.And the increase of water vapor also can cause a series of problems in the vacuum background, as can influence quality of product or the like in vacuum coating.In addition, when employing had oil lubrication vacuum pump or oil diffusion pump, usually oil steam also may pollute vacuum chamber.
Adopt the mode of cryogenic condensation can effectively remove water vapor and organic steam, as when temperature during at 110K～150K, the saturation vapour pressure of water vapour can reach 10
-10～10
-7Between the Pa.Fig. 1 has provided all gases saturation vapour pressure at low temperatures.Therefore, the method for traditional experiment chamber solution oil vapor pollution problem is to connect between the vacuum chamber at vacuum pump to install a liquid nitrogen cold trap additional.But this method is because of using the liquid nitrogen can be very inconvenient, and especially in the occasion that lacks the liquid nitrogen supply, and this mode also is not suitable for the system of long-time running, and the past mainly is to adopt during short-term experiment in the laboratory.
Another kind of solution to the problems described above is to adopt cryogenic condensation absorption, promptly provides the condensing surface of a temperature at 15～20K at vacuum chamber by Cryo Refrigerator, simultaneously in conjunction with sorbing material, can condense except that He and section H in low temperature like this
2All gas in addition.There are some researches show that under same pump inlet size condition, cryopump is more than 5 times of turbomolecular pump to the pumping speed of water vapor.But because traditional cryopump working surface temperature very low (20K), not only to water vapor, also simultaneously other gases (as the nitrogen of content maximum in the air, oxygen etc.) are extracted, reduced pumping rate relatively, and, be easy to reach the saturation state of condensation absorption according to the size of vacuum system to water vapor, at this moment need desorption and regeneration, and regenerative process need be to condensation sorbing material heated baking, and is very inconvenient, especially extracting poisonous or during flammable atmosphere.In addition, topmost problem is existing cryopump cost height, and maintenance cost is big, domestic no matured product, dependence on import fully.Cryopump generally adopts Cryo Refrigerator that the low temperature environment of 15-20K is provided, and these refrigerators employings have oil lubricating compressor, need strict filtering separation lubricant oil, and need change the oil purifier core body therefore general every year, and change the Cryo Refrigerator easy-abrasion part, as piston ring etc.And above-mentioned maintenance cost is very big, needs the professional workforce to operate.
In a period of time recently, except that adopting technological schemes such as cryogenic media (as liquid nitrogen) and cryogenic condensation adsorption pump, also developed a kind of deep cooling water trap that adopts the mechanical type refrigeration modes.Its cryogenic condensation surface can be arranged in vacuum chamber interior (for built-in structure) or be arranged in vacuum pump (concrete as turbomolecular pump, diffusion pump etc.) and vacuum chamber joint (for outlet structure), there is the passage that flows for low-temperature refrigerant condensing surface inside, usually the temperature of condensing surface changes between 110K～150K, and concrete numerical value can require to arrange according to vacuum.The water trap (PFC Fast Cycle Water Vapor Cryopump) of a kind of external water trap and the built-in condensing type condenser coil in vacuum chamber is provided as American I GC-Polycold company (seeing http://www.igc.com/polycold/products/), be used to improve pumping speed and reduce in the vacuum chamber steam residual, be widely used in occasions such as vacuum coating, semiconductor devices production.Its main structure is exactly to take a refrigerator to cool off the capture surface that is placed in the high vacuum system, realizes the capture to water vapor in the high vacuum chamber, to improve the performance of high vacuum system.Prior art (U.S. Pat 5901558) has been introduced a kind of low temperature steam cold-trap that adopts integrated type gate valve structure, require in the general high vacuum system between vacuum chamber and vacuum pump inlet, to adopt gate valve to separate, this patented technology is to arrange that on gate valve condensed fluid passage and steam capture the surface, in gate valve, realize the arrangement of catcher simultaneously, so compact structure.
High vacuum deep cooling water trap is a passive capture device, except that water vapor and high boiling point organic compound steam are captured extract, can not extract other gases, can only with other active high vacuum pumps, be used as turbomolecular pump etc., therefore will promote the application of water trap, the simplicity that reduces the water trap cost and improve its reliability and Operation and Maintenance has very important significance.In addition, only paying close attention to the steam of how realizing in the high vacuum environment at present in all high vacuum steam catcher technology captures, but the factor that influences an actual high vacuum system performance has a lot, the drain pressure of high vacuum pump wherein, just rough vacuum fore pump operating pressure is an important factors.Can reduce the fore pump operating pressure simultaneously will have very important significance to the performance that improves high vacuum system.
Summary of the invention
The objective of the invention is to propose a kind of low cost, high reliability, need not the special novel high vacuum deep cooling water trap of safeguarding and reducing the fore pump operating pressure simultaneously.
Be the clear technical solution of the present invention of illustrating, do earlier some necessary explanations: the present invention is the device that a kind of passive type extracts water vapor and higher boiling organic steam in the vacuum environment, can't realize high vacuum separately, must work with other high vacuum systems, but can significantly improve the high vacuum system performance.Therefore be clear expression technological scheme of the present invention, typical high-vacuum system with cooperating of the present invention is described earlier, referring to shown in Figure 2, this high vacuum system is by high vacuum chamber A, high vacuum pump B, preevacuation pump C and partial vacuum connecting tube are formed, high vacuum chamber A can be various high vacuum workplaces, as high vacuum coating chamber etc., high vacuum pump B can be a turbomolecular pump, it also can be oil diffusion pump, preevacuation pump can be a conventional machinery vacuum pump etc., all do not do concrete qualification, above-mentioned this professional domain of explanation technician can can't produce ambiguity in correct understanding.
Technical solution of the present invention is as follows:
High vacuum deep cooling water trap provided by the invention comprises high vacuum steam capture unit 1, vacuum water vapor capture unit 2, compressor unit 3, low vacuum chamber D, vacuum connection tube road 4 and refrigeration agent conveying pipe 5; Its arrangement is: described high vacuum capture unit 1 is placed in the high vacuum environment of high vacuum pump B inlet and high vacuum chamber A joint in the high vacuum system, perhaps is placed among the high vacuum chamber A in the high vacuum system; Described rough vacuum capture unit 2 is placed among the low vacuum chamber D, and low vacuum chamber D is connected with high vacuum pump B outlet and preevacuation pump C inlet in the high vacuum system simultaneously by vacuum system connecting tube 4;
Described each unit Placement is: the relief opening HHO of compressor unit 3 is by the high temperature inlet MHI of refrigeration agent conveying pipe 5 connection rough vacuum capture unit 2, and rough vacuum capture unit 2 low temperature outlet CHO connects high vacuum capture unit 1 refrigerant inlet CIN; High vacuum capture unit 1 refrigerant outlet COUT connects the low temperature inlet CLI of rough vacuum capture unit 2; Rough vacuum capture unit 2 high temperature outlet MLO connects compressor unit 3 low-pressure inlet MLI by refrigeration agent conveying pipe 5;
Described high vacuum capture unit 1 has inner cryogenic refrigeration working medium circulation canal, and outer surface has rib fin shape or hole slot shape structure, increases the area of contact with water vapor; The circuit cryogenic fluid array inner passage of flowing through, and part evaporation provide cold cold-trap device array outer surface, and the power that captures water vapor is provided;
Described rough vacuum capture unit 2 comprises prime contra-flow heat exchanger 21, fractional condensation separator 22 and intergrade throttle element 23, intergrade Recuperative heat exchanger 24, main Recuperative heat exchanger 25 and main throttle element 26 compositions; Its Placement is: prime contra-flow heat exchanger 21 high pressure entries are high temperature inlet MHI of whole rough vacuum capture unit 2, prime contra-flow heat exchanger 21 high-pressure outlets connect fractional condensation separator 22 high pressure entries, fractional condensation separator 22 gaseous phase outlets connect intergrade Recuperative heat exchanger 24 high pressure entries, the liquid phase outlet of fractional condensation separator 22 connects intergrade throttle element 23 inlets, 23 outlets of intergrade throttle element are connected to intergrade Recuperative heat exchanger 24 low-pressure inlets, intergrade Recuperative heat exchanger 24 high-pressure outlets connect main Recuperative heat exchanger 25 high pressure entries, main Recuperative heat exchanger 25 high-pressure outlets connect main throttle element 26, the outlet of main throttle element 26 is low temperature outlet CHO of rough vacuum capture unit 2, the low-pressure inlet of main Recuperative heat exchanger 25 is low temperature inlet CLI of rough vacuum capture unit 2, main Recuperative heat exchanger 25 low tension outlets connect intergrade Recuperative heat exchanger 24 low-pressure inlets, and the low tension outlet of prime contra-flow heat exchanger 21 is high temperature outlet MLO of rough vacuum capture unit 2;
Described compressor unit 3 comprises compressor 31, lubricating oil separator 32 and cooler 33; Its Placement is: compressor 31 high-pressure outlets connect lubricating oil separator 32 inlets, and lubricating oil separator 32 outlets connect cooler 33 inlets, and cooler 33 final outlet are the high-pressure outlet HHO of compressor unit 1.
Described high vacuum catcher unit 1 operating temperature is between 110K-150K, and formation captures the water vapor selectivity efficient.
High vacuum deep cooling water trap of the present invention, employed refrigeration working medium is an efficient multicomponent gas mixture refrigeration working medium, described multicomponent mixture gas refrigeration working medium comprises 6 groups of multicomponent mixture gas refrigeration working medium, and the component and the concentration of these 6 groups of multicomponent mixture gas refrigeration working medium are respectively:
The 1st group of multicomponent mixture gas refrigeration working medium is nitrogen (N
2), argon gas (Ar) or the mixture of the two, its molar concentration scope is 25-50%;
The 2nd group of multicomponent mixture gas refrigeration working medium is methane (CH
4), its molar concentration scope is 10-25%;
The 3rd group of multicomponent mixture gas refrigeration working medium is tetrafluoromethane (CF
4), its molar concentration scope is 5-20%;
The 4th group of multicomponent mixture gas refrigeration working medium is ethene (C
2H
4), ethane (C
2H
6), fluoroform (CHF
3), fluomethane (CH
3F), perfluoroethylene (C
2F
4), PVF (C
2H
3F) or the mixture of being made of any two or multiple material in the above-mentioned substance, its molar concentration scope is 5-20%;
The 5th group of multicomponent mixture gas refrigeration working medium is third rare (C
3H
6), propane (C
3H
8), perfluoropropane (C
3F
8), 1,1,1-HFC-143a (C
2H
3F
3), 1,1 ,-Difluoroethane (1,1 ,-C
2H
4F
2), fluoroethane (C
2H
5F), propadiene (C
3H
4), cyclopropane (C
3H
6), difluoromethane (CH
2F
2) or the mixture formed by any two or multiple material in the above-mentioned substance, its molar concentration scope is 5-20%;
The 6th group of multicomponent mixture gas refrigeration working medium is 1-butylene (1-C
4H
8), isobutane (C
4H
10), isopentane (C
5H
12), 1-amylene (1-C
5H
10), 3-methyl-1-butene (C
5H
10), 2-methylpentane (C
6H
14), 2-butylene (cis C
4H
8), 2-butylene (trans C
4H
8), cyclobutane (C
4H
8), isobutylene (iC
4H
8), normal butane (C
4H
10), perfluorinated butane (C
4F
10), pentane (C
5H
12), perflenapent (C
5F
12) or the mixture formed by any two or multiple material in the above-mentioned substance, its molar concentration scope is 10-25%.
Working principle of the present invention and working procedure are as follows,
High vacuum deep cooling water trap of the present invention, its working method is: high vacuum steam catcher at first of the present invention cooperates with a high vacuum system, referring to Fig. 3, wherein high vacuum capture unit 1 is installed in the inlet of high vacuum pump B and the joint between the high vacuum chamber, be the external layout, and rough vacuum capture unit 2 is installed among the low vacuum chamber D, and low vacuum chamber D is connected with high vacuum pump B outlet and fore vacuum pump intake by connecting tube 4; And compressor unit 3, rough vacuum capture unit 2 and high vacuum capture unit 1 and refrigeration agent conveying pipe 5 constitute a typical mixture throttling refrigerating machine, wherein rough vacuum capture unit 2 is the Recuperative heat exchanger unit of refrigerator, and high vacuum capture unit 1 is the evaporator unit of refrigerator; When fill join high efficient mixed working medium after, (high vacuum pump and the preevacuation pump of high vacuum system also bring into operation simultaneously in refrigerator system start operation, specifically according to the operation of high vacuum system operation rule), after the compressed machine compression of mixed working fluid, be cooled to high-pressure working medium through cooler, the prime heat exchanger that enters in the rough vacuum capture unit through the refrigeration agent conveying pipe further is cooled, and high boiling liquid and the working medium lubricating oil separation of carrying under one's arms is come out through the fractional condensation separator, and after middle throttle element throttling, get back to low-pressure channel and return compressor, guarantee the operation of refrigeration system high efficient and reliable, enter the further cooling of main Recuperative heat exchanger through the isolated gaseous working medium of fractional condensation separator and after main throttle element throttling, enter the coolant channel of high vacuum capture unit then, cooling high vacuum capture unit surface, the power that captures steam is provided, return rough vacuum capture unit cooling incoming flow high pressure then, return compressor at last and finish a circulation; In stable operation stage, the final temperature of the low-temperature end of rough vacuum capture unit can be reduced near high vacuum capture unit surface, therefore has very strong steam trapping ability, by the vacuum connection tube road, can significantly reduce the high vacuum pump back pressure, promptly the preevacuation pump operating pressure finally improves the vacuum system performance, and preevacuation pump provides the vacuum insulation environment for rough vacuum capture unit 2 simultaneously, and Fig. 9 has shown the vacuum performance comparing result that whether adopts the deep cooling water trap.
High vacuum deep cooling water trap of the present invention is primarily aimed at water vapor and carries out the selectivity capture, and other gas molecules can extract with other vacuum pumps such as molecular pump, diffusion pump etc., thereby can effectively shorten the time of bleeding.Simultaneously, the high vacuum deep cooling water trap core that the present invention proposes is actual to be a polybasic mixture throttling refrigerating machine, has that fabricating cost is low, efficient is high, reliability is high, be easy to and characteristics such as vacuum system is integrated, and the Maintenance free of refrigeration system own.
Description of drawings:
Fig. 1 gas with various is saturation temperature and pressure dependence table under vacuum state;
Typical case of Fig. 2 is not with the high vacuum system schematic representation of deep cooling catcher;
Fig. 3 external high vacuum deep cooling water trap is organized schematic representation;
The built-in high vacuum deep cooling of Fig. 4 water trap is organized schematic representation;
Fig. 5 compressor unit 3 Organizational Structure schematic representation;
The another kind of compressor unit 3 Organizational Structure schematic representation of Fig. 6;
Fig. 7 rough vacuum capture unit 2 Organizational Structure schematic representation
The structural representation of a kind of high vacuum capture unit 1 of Fig. 8
The contrast measured result of vacuum performance when Fig. 9 has or not the deep cooling water trap;
Wherein
High vacuum capture unit 1 rough vacuum capture unit 2 compressor units 3
Vacuum connection tube road 4 refrigeration agent conveying pipes, 5 compressors 31
Main Recuperative heat exchanger 25 main throttle element 26 first coolers 331
Second cooler, 332 high vacuum chamber A high vacuum pump B
Prime Roughing pump C compressor unit relief opening HHO low vacuum chamber D
The high temperature outlet CHO of the high temperature inlet MHI rough vacuum capture unit 2 of rough vacuum capture unit 2
The low temperature outlet MLO of the low temperature inlet CLI rough vacuum capture unit 2 of rough vacuum capture unit 2
The refrigerant inlet CIN of the low-pressure inlet MLI high vacuum capture unit 1 of compressor unit 3
High vacuum capture unit 1 refrigerant outlet COUT
Embodiment
As shown in Figure 3, the high vacuum deep cooling water trap of present embodiment comprises high vacuum steam capture unit 1, vacuum water vapor capture unit 2, compressor unit 3, low vacuum chamber D, vacuum connection tube road 4 and refrigeration agent conveying pipe 5;
High vacuum capture unit 1 is installed in high vacuum chamber A and high vacuum pump B joint, capturing the surface sees shown in Figure 8, refrigeration working medium enters catcher unit inner flow passage from CIN, the part evaporation provides cold cold-trap device surface, come out to get back to rough vacuum capture unit 2 from COUT then, capture surperficial outside and have the hole slot shape structure of expansion cooler face, to increase the ability that captures steam; Rough vacuum capture unit 2 is installed in the low vacuum chamber D, is connected with high vacuum pump B outlet and preevacuation pump C inlet by connecting tube 4;
Rough vacuum capture unit 2 comprises prime contra-flow heat exchanger 21, fractional condensation separator 22, intergrade throttle element 23, intergrade Recuperative heat exchanger 24, main Recuperative heat exchanger 25 and main throttle element 26, sees shown in Figure 7;
High vacuum pump is the turbomolecular pump machine, and prime is an oil-sealed rotary pump.Adopt the efficient multicomponent mixed working fluid to see the following form 1 as refrigeration working medium, catcher condensing surface operating temperature is 110K, can reduce and find time in advance more than 60%-90%, and ultimate vacuum also can improve.
Table 1:
| Project | Mix ingredients | Molar concentration % |
| The 1st group | Nitrogen (N 2) | 50 |
| The 2nd group | Methane (CH 4) | 10 |
| The 3rd group | Tetrafluoromethane (CF 4) | 5 |
| The 4th group | Ethene (C 2H 4), ethane (C 2H 6), fluoroform (CHF 3), fluomethane (CH 3F), perfluoroethylene (C 2F 4) mixture formed | 15 (average each 3%) |
| The 5th group | Propane (C 3H 8), perfluoropropane (C 3F 8) mixture formed | 10 (each 5%) |
| The 6th group | Isobutane (C 4H 10), isopentane (C 5H 12) mixture formed | 10 (each 5%) |
2 one external high vacuum of embodiment deep cooling water trap, embodiment 1 sees in its hardware structure, difference is: two coolers are arranged in the compressor unit, its Placement is seen Fig. 6, adopt the efficient multicomponent mixed working fluid to make refrigeration working medium, see the following form 2, catcher condensing surface operating temperature is 120K.Can improve pumping speed and ultimate vacuum.
Table 2
| Project | Mix ingredients | Molar concentration scope % |
| The 1st group | Nitrogen (N 2), the two mixture of argon gas (Ar) | 40 (each 20%) |
| The 2nd group | Methane (CH 4) | 15 |
| The 3rd group | Tetrafluoromethane (CF 4) | 10 |
| The 4th group | Ethane (C 2H 6) | 5 |
| The 5th group | Third rare (C 3H 6), propane (C 3H 8), perfluoropropane (C 3F 8), 1,1,1-HFC-143a (C 2H 3F 3), 1,1 ,-Difluoroethane (1,1 ,-C 2H 4F 2), fluoroethane (C 2H 5F), propadiene (C 3H 4), cyclopropane (C 3H 6), difluoromethane (CH 2F 2) mixture formed | 20 ( |
| The 6th group | 1-butylene (1-C 4H 8), 1-amylene (1-C 5H 10), 3-methyl-1-butene (C 5H 10), 2-methylpentane (C 6H 14), cyclobutane (C 4H 8), isobutylene (iC 4H 8), normal butane (C 4H 10), perfluorinated butane (C 4F 10), pentane (C 5H 12), perflenapent (C 5F 12) mixture formed | 10 (each 1%) |
3 one external high vacuum of embodiment deep cooling water trap, embodiment 1 sees in its hardware structure, adopts the efficient multicomponent mixed working fluid to make refrigeration working medium, sees the following form 3, catcher condensing surface operating temperature is 130K.Can improve pumping speed and ultimate vacuum.
Table 3
| Project | Mix ingredients | Molar concentration scope % |
| The 1st group | Argon gas (Ar) | 35 |
| The 2nd group | Methane (CH 4) | 20 |
| The 3rd group | Tetrafluoromethane (CF 4) | 10 |
| The 4th group | Ethane (C 2H 6), fluoroform (CHF 3), fluomethane (CH 3F), perfluoroethylene (C 2F 4), PVF (C 2H 3F) mixture of Zu Chenging | 5 (each 1%) |
| The 5th group | Perfluoropropane (C 3F 8) | 5 |
| The 6th group | 1-butylene (1-C 4H 8), isobutane (C 4H 10), isopentane (C 5H 12) mixture formed | 25 (isopentane C 5H 125%, all the other are 10% years old) |
Built-in high vacuum deep cooling water trap of embodiment 4 preparation is seen shown in Figure 4ly, is made up of high vacuum steam capture unit 1, vacuum water vapor capture unit 2, compressor unit 3, low vacuum chamber D, vacuum connection tube road 4 and refrigeration agent conveying pipe 5; High vacuum capture unit 1 is installed in the high vacuum chamber, and rough vacuum capture unit 2 is installed in the low vacuum chamber D, is connected with high vacuum pump outlet and fore vacuum pump intake by the vacuum connection tube road; Compressor unit 3 is made up of compressor 31, oil separator 32 and cooler 33, and its Placement is seen shown in Figure 5; Rough vacuum capture unit 2 is made up of prime contra-flow heat exchanger 21, fractional condensation separator 22, intergrade throttle element 23, intergrade Recuperative heat exchanger 24, main Recuperative heat exchanger 25 and main throttle element 26, sees shown in Figure 7; High vacuum pump is the turbomolecular pump machine, and prime is an oil-sealed rotary pump.Adopt the efficient multicomponent mixed working fluid to see the following form 4 as refrigeration working medium, catcher condensing surface operating temperature is 140K, can significantly reduce in advance and find time more than 60%-90%.
Table 4
| Project | Mix ingredients | Molar concentration scope % |
| The 1st group | Nitrogen (N 2), the mixture of argon gas (Ar) | 30 (each 15%) |
| The 2nd group | Methane (CH 4) | 25 |
| The 3rd group | Tetrafluoromethane (CF 4) | 15 |
| The 4th group | Ethene (C
2H
4), ethane (C
2H
6), fluoroform (CHF
3), fluomethane (CH
3F), perfluoroethylene (C
2F
4), PVF (C
2H
3F) or the mixture of forming by any two are formed in the above-mentioned substance mixture or | 10 |
| The 5th group | Propane (C 3H 8), perfluoropropane (C 3F 8), 1,1,1-HFC-143a (C 2H 3F 3), 1,1 ,-Difluoroethane (1,1 ,-C 2H 4F 2), fluoroethane (C 2H 5F) mixture of Zu Chenging | 5 (each 1%) |
| The 6th group | Isobutane (C 4H 10) | 15 |
Built-in deep cooling water trap of embodiment's 5 preparations, its hardware configuration is seen embodiment 4, difference is: two coolers are arranged in the compressor unit, its Placement is seen Fig. 6, adopt the efficient multicomponent mixed working fluid to make refrigeration working medium, see the following form 5, catcher condensing surface operating temperature is 150K, can significantly reduce in advance and find time more than 60%-90%.
Table 5
| Project | Mix ingredients | Molar concentration scope % |
| The 1st group | Nitrogen (N 2) | 25 |
| The 2nd group | Methane (CH 4) | 25 |
| The 3rd group | Tetrafluoromethane (CF 4) | 20 |
| The 4th group | Perfluoroethylene (C 2F 4), PVF (C 2H 3F) mixture | 5(C
2F
43%, |
| The 5th group | Propane (C 3H 8) | 10 |
| The 6th group | 1-butylene (1-C 4H 8), isobutane (C 4H 10), isopentane (C 5H 12) mixture formed | 15 (each 5%) |
Claims (4)
1, a kind of high vacuum deep cooling water trap is characterized in that: comprise high vacuum steam capture unit (1), vacuum water vapor capture unit (2), compressor unit (3), low vacuum chamber (D), vacuum connection tube road (4) and refrigeration agent conveying pipe (5); Its arrangement is: described high vacuum capture unit (1) is placed in the high vacuum environment of high vacuum pump (B) inlet and high vacuum chamber (A) joint in the high vacuum system, perhaps is placed in the high vacuum chamber (A) in the high vacuum system; Described rough vacuum capture unit (2) is placed in the low vacuum chamber (D), and low vacuum chamber (D) is connected with high vacuum pump (B) outlet and preevacuation pump (C) inlet in the high vacuum system simultaneously by vacuum system connecting tube (4);
Described each unit Placement is: the relief opening (HHO) of compressor unit (3) enters the mouth (MHI) by the high temperature that refrigeration agent conveying pipe (5) connects rough vacuum capture unit (2), and rough vacuum capture unit (2) low temperature outlet (CHO) connects high vacuum capture unit (1) refrigerant inlet (CIN); High vacuum capture unit (1) refrigerant outlet (COUT) connects the low temperature inlet (CLI) of rough vacuum capture unit (2); Rough vacuum capture unit (2) high temperature outlet (MLO) connects compressor unit (3) low-pressure inlet (MLI) by refrigeration agent conveying pipe (5);
Described high vacuum capture unit (1) has inner cryogenic refrigeration working medium circulation canal, and outer surface has rib fin shape or hole slot shape structure;
Described rough vacuum capture unit (2) comprises prime contra-flow heat exchanger (21), fractional condensation separator (22) and intergrade throttle element (23), intergrade Recuperative heat exchanger (24), main Recuperative heat exchanger (25) and main throttle element (26); Its Placement is: prime contra-flow heat exchanger (21) high pressure entry is the high temperature inlet (MHI) of whole rough vacuum capture unit (2), prime contra-flow heat exchanger (21) high-pressure outlet connects fractional condensation separator (22) high pressure entry, fractional condensation separator (22) gaseous phase outlet connects intergrade Recuperative heat exchanger (24) high pressure entry, the liquid phase outlet of fractional condensation separator (22) connects intergrade throttle element (23) inlet, intergrade throttle element (23) outlet is connected to intergrade Recuperative heat exchanger (24) low-pressure inlet, intergrade Recuperative heat exchanger (24) high-pressure outlet connects main Recuperative heat exchanger (25) high pressure entry, main Recuperative heat exchanger (25) high-pressure outlet connects main throttle element (26), the outlet of main throttle element (26) is the low temperature outlet (CHO) of rough vacuum capture unit (2), the low-pressure inlet of main Recuperative heat exchanger (25) is the low temperature inlet (CLI) of rough vacuum capture unit (2), main Recuperative heat exchanger (25) low tension outlet connects intergrade Recuperative heat exchanger (24) low-pressure inlet, and the low tension outlet of prime contra-flow heat exchanger (21) is the high temperature outlet (MLO) of rough vacuum capture unit (2);
Described compressor unit (3) comprises compressor (31), lubricating oil separator (32) and cooler (33); Its Placement is: compressor (31) high-pressure outlet connects lubricating oil separator (32) inlet, and lubricating oil separator (32) outlet connects cooler (33) inlet, and cooler (33) final outlet is the high-pressure outlet (HHO) of compressor unit (1).
2, by the described high vacuum deep cooling of claim 1 water trap, it is characterized in that: described high vacuum catcher unit (1) operating temperature is between 110K-150K.
3, by the described high vacuum deep cooling of claim 1 water trap, it is characterized in that: the cooler (33) in the described compressor unit (3) comprises independently cooler of (332) two in first cooler (331) and second cooler; Its Placement is: compressor (31) high-pressure outlet connects first cooler (331) inlet, first cooler (331) outlet connects lubricating oil separator (32) inlet, lubricating oil separator (32) outlet connects second cooler (332) inlet, and second cooler (332) outlet is compressor unit relief opening (HHO).
4, by the described high vacuum deep cooling of claim 1 water trap, it is characterized in that: described high vacuum deep cooling water trap adopts efficiently multicomponent mixture gas to make refrigeration working medium, and its concrete composition and concentration range are as follows:
The 1st group: nitrogen, argon gas or the mixture of the two, its molar concentration scope 25～50%;
The 2nd group: methane, its molar concentration scope 10～25%;
The 3rd group: tetrafluoromethane, its molar concentration scope 5～20%;
The 4th group: ethene, ethane, fluoroform, fluomethane, perfluoroethylene, PVF or the mixture of forming by any two or multiple material in the above-mentioned substance, its molar concentration scope 5～20%;
The 5th group: third rare, propane, perfluoropropane, 1,1,1-HFC-143a, 1,1,-Difluoroethane, fluoroethane, propadiene, cyclopropane, difluoromethane or the mixture of forming by any two or multiple material in the above-mentioned substance, its molar concentration scope 5～20%;
The 6th group: 1-butylene, isobutane, isopentane, 1-amylene, 3-methyl-1-butene, 2-methylpentane, 2-butylene, 2-butylene, cyclobutane, isobutylene, normal butane, perfluorinated butane, pentane, perflenapent or the mixture of forming by any two or multiple material in the above-mentioned substance, its molar concentration scope 10～25%.
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|---|---|---|---|
| CNB2004100479366A CN100344872C (en) | 2004-06-11 | 2004-06-11 | High vacuum cryogenic water vapor catcher |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100479366A CN100344872C (en) | 2004-06-11 | 2004-06-11 | High vacuum cryogenic water vapor catcher |
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| CN100344872C true CN100344872C (en) | 2007-10-24 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102618220B (en) * | 2011-01-26 | 2016-06-15 | 龙志刚 | A kind of mix refrigerant being applicable to 120K～150K Shen Lengwen district |
| CN102719226B (en) * | 2012-06-19 | 2015-10-07 | 中国科学院理化技术研究所 | Multi-element mixed refrigerant suitable for cryogenic temperature zone of-130 to-180 DEG C |
| CN107670454B (en) * | 2017-10-19 | 2023-12-15 | 泉州市天龙环境工程有限公司 | Toluene waste gas vacuum cryogenic recovery system and recovery process thereof |
| CN111043783B (en) * | 2019-12-27 | 2020-10-20 | 浙江大学 | Self-cascade refrigeration system for trapping cryogenic water vapor and control method |
| CN114383788B (en) * | 2022-01-18 | 2024-03-05 | 江苏华安科研仪器有限公司 | Dense shale hydrocarbon cryogenic catcher |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4065278A (en) * | 1976-04-02 | 1977-12-27 | Air Products And Chemicals, Inc. | Process for manufacturing liquefied methane |
| US4539028A (en) * | 1983-05-06 | 1985-09-03 | Compagnie Francaise D'etudes Et De Construction "Technip" | Method and apparatus for cooling and liquefying at least one gas with a low boiling point, such as for example natural gas |
| CN2144268Y (en) * | 1992-12-18 | 1993-10-20 | 西安飞天科工贸总公司上海分公司 | Electronic water curtain type cold-fan |
| US5901558A (en) * | 1997-08-20 | 1999-05-11 | Helix Technology Corporation | Water pump with integral gate valve |
| CN2478039Y (en) * | 2000-12-28 | 2002-02-20 | 中国科学院低温技术实验中心 | Internally overlapped circulating refrigerator utilizing multi-element medium throttle and low temp eddy flow expansion for refrigeration |
| CN1361399A (en) * | 2000-12-28 | 2002-07-31 | 中国科学院低温技术实验中心 | Mixed work medium condensating, separating, throttling and deep cooling circular refrigeration system |
| CN1462861A (en) * | 2002-05-27 | 2003-12-24 | 中国科学院理化技术研究所 | Method for cooling industrial gas from ambient temperature to cryogenic temperature and obtaining liquefaction |
| CN2755311Y (en) * | 2004-06-14 | 2006-02-01 | 中国科学院理化技术研究所 | High vacuum cryogenic water vapor catcher |
-
2004
- 2004-06-11 CN CNB2004100479366A patent/CN100344872C/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4065278A (en) * | 1976-04-02 | 1977-12-27 | Air Products And Chemicals, Inc. | Process for manufacturing liquefied methane |
| US4539028A (en) * | 1983-05-06 | 1985-09-03 | Compagnie Francaise D'etudes Et De Construction "Technip" | Method and apparatus for cooling and liquefying at least one gas with a low boiling point, such as for example natural gas |
| CN2144268Y (en) * | 1992-12-18 | 1993-10-20 | 西安飞天科工贸总公司上海分公司 | Electronic water curtain type cold-fan |
| US5901558A (en) * | 1997-08-20 | 1999-05-11 | Helix Technology Corporation | Water pump with integral gate valve |
| CN2478039Y (en) * | 2000-12-28 | 2002-02-20 | 中国科学院低温技术实验中心 | Internally overlapped circulating refrigerator utilizing multi-element medium throttle and low temp eddy flow expansion for refrigeration |
| CN1361399A (en) * | 2000-12-28 | 2002-07-31 | 中国科学院低温技术实验中心 | Mixed work medium condensating, separating, throttling and deep cooling circular refrigeration system |
| CN1462861A (en) * | 2002-05-27 | 2003-12-24 | 中国科学院理化技术研究所 | Method for cooling industrial gas from ambient temperature to cryogenic temperature and obtaining liquefaction |
| CN2755311Y (en) * | 2004-06-14 | 2006-02-01 | 中国科学院理化技术研究所 | High vacuum cryogenic water vapor catcher |
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