CH547487A - Verfahren zur beruehrungslosen und materialunabhaengigen temperaturmessung an oberflaechen mittels infrarot-pyrometer. - Google Patents
Verfahren zur beruehrungslosen und materialunabhaengigen temperaturmessung an oberflaechen mittels infrarot-pyrometer.Info
- Publication number
- CH547487A CH547487A CH1117672A CH547487DA CH547487A CH 547487 A CH547487 A CH 547487A CH 1117672 A CH1117672 A CH 1117672A CH 547487D A CH547487D A CH 547487DA CH 547487 A CH547487 A CH 547487A
- Authority
- CH
- Switzerland
- Prior art keywords
- contactless
- procedure
- temperature measurement
- independent temperature
- infrared pyrometers
- Prior art date
Links
- 238000009529 body temperature measurement Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
- G01J5/0805—Means for chopping radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1117672 | 1972-07-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH547487A true CH547487A (de) | 1974-03-29 |
Family
ID=4370830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1117672A CH547487A (de) | 1972-07-27 | 1972-07-27 | Verfahren zur beruehrungslosen und materialunabhaengigen temperaturmessung an oberflaechen mittels infrarot-pyrometer. |
Country Status (8)
Country | Link |
---|---|
US (1) | US3916690A (de) |
JP (1) | JPS4954081A (de) |
AT (1) | AT344420B (de) |
CH (1) | CH547487A (de) |
DE (1) | DE2241310A1 (de) |
FR (1) | FR2194960B1 (de) |
GB (1) | GB1436180A (de) |
SE (1) | SE394029B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3226145A1 (de) * | 1981-08-04 | 1983-03-24 | VEB Meßgerätewerk "Erich Weinert" Magdeburg, DDR 3011 Magdeburg | Einrichtung zur beruehrungslosen temperaturmessung |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4005605A (en) * | 1974-07-22 | 1977-02-01 | Mikron Instrument Company, Inc. | Remote reading infrared thermometer |
DE2627254C3 (de) * | 1976-06-18 | 1981-08-13 | Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen | Verfahren zur Messung oder Regelung der Temperatur eines Graphitrohres |
FR2391466A1 (fr) * | 1977-05-20 | 1978-12-15 | Centre Nat Etd Spatiales | Procede et appareil de mesure du facteur d'absorptivite ou d'emissivite infrarouge de materiaux |
JPS56501138A (de) * | 1979-09-12 | 1981-08-13 | ||
EP0168120A3 (de) * | 1984-02-18 | 1987-05-27 | Admiral Design and Research Limited | Radiometer |
US4823291A (en) * | 1987-09-10 | 1989-04-18 | Sensor Control, Inc. | Radiometric measurement of wafer temperatures during deposition |
DE3914709C1 (de) * | 1989-05-04 | 1990-10-25 | Deutsche Forschungsanstalt Fuer Luft- Und Raumfahrt Ev, 5300 Bonn, De | |
US5145257A (en) * | 1990-03-29 | 1992-09-08 | The United States Of America As Represented By The Secretary Of The Navy | Infrared fiber-optical temperature sensor |
US5769540A (en) * | 1990-04-10 | 1998-06-23 | Luxtron Corporation | Non-contact optical techniques for measuring surface conditions |
NL9001200A (nl) * | 1990-05-23 | 1991-12-16 | Imec Inter Uni Micro Electr | Werkwijze en inrichting voor het met behulp van een pyrometer meten van temperatuurstraling waarbij compensatielampen worden toegepast. |
US5271084A (en) * | 1990-05-23 | 1993-12-14 | Interuniversitair Micro Elektronica Centrum Vzw | Method and device for measuring temperature radiation using a pyrometer wherein compensation lamps are used |
US5127742A (en) * | 1991-04-19 | 1992-07-07 | Thermoscan Inc. | Apparatus and method for temperature measurement by radiation |
US5246292A (en) * | 1992-05-28 | 1993-09-21 | Eli Gal | Temperature measurement apparatus |
US5326172A (en) * | 1992-12-14 | 1994-07-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Multiwavelength pyrometer for gray and non-gray surfaces in the presence of interfering radiation |
DE69312894T2 (de) * | 1992-12-29 | 1998-02-12 | Philips Electronics Nv | Pyrometer mit Emissionsmesser |
DE4309762C2 (de) * | 1993-03-25 | 1995-11-16 | Raytek Sensorik Gmbh | Meßgerät |
US5573339A (en) * | 1994-01-14 | 1996-11-12 | Electro-Pyrolysis, Inc. | Active radiometer for self-calibrated furnace temperature measurements |
US5785426A (en) * | 1994-01-14 | 1998-07-28 | Massachusetts Institute Of Technology | Self-calibrated active pyrometer for furnace temperature measurements |
DE19644097C1 (de) * | 1996-10-31 | 1998-01-02 | Fraunhofer Ges Forschung | Verfahren zum Lokalisieren von Schallbrücken |
DE19913672A1 (de) * | 1999-03-25 | 2000-11-02 | Braun Gmbh | Infrarot-Thermometer mit einer beheizbaren Meßspitze und Schutzkappe |
DE19919961B4 (de) * | 1999-04-30 | 2008-04-30 | BSH Bosch und Siemens Hausgeräte GmbH | Pyrometer mit Ausgleichsheizeinrichtung |
GB0005925D0 (en) * | 2000-03-10 | 2000-05-03 | Univ Glasgow | Radiometer antenna cavities |
DE10217586A1 (de) * | 2002-04-19 | 2003-11-20 | Giesecke & Devrient Gmbh | Verfahren und Vorrichtung zur Erkennung von Fremdmaterial auf Banknoten |
US20040076217A1 (en) * | 2002-10-10 | 2004-04-22 | Kevin Lin | Wave-collecting device of non-contact type thermometer |
CN101287974B (zh) * | 2006-04-12 | 2010-09-22 | 大塚电子株式会社 | 总光通量测量装置 |
US7604399B2 (en) * | 2007-05-31 | 2009-10-20 | Siemens Energy, Inc. | Temperature monitor for bus structure flex connector |
JP4452737B2 (ja) * | 2007-10-25 | 2010-04-21 | 大塚電子株式会社 | 光束計および測定方法 |
US8096676B2 (en) * | 2008-10-21 | 2012-01-17 | Mitutoyo Corporation | High intensity pulsed light source configurations |
US8142050B2 (en) * | 2010-06-24 | 2012-03-27 | Mitutoyo Corporation | Phosphor wheel configuration for high intensity point source |
US8317347B2 (en) | 2010-12-22 | 2012-11-27 | Mitutoyo Corporation | High intensity point source system for high spectral stability |
JP5479543B2 (ja) | 2012-07-19 | 2014-04-23 | 大塚電子株式会社 | 光学特性測定装置 |
CN107830934A (zh) * | 2017-11-02 | 2018-03-23 | 天津柯基科技有限公司 | 一种植物测温装置 |
CN112420473B (zh) * | 2020-10-26 | 2023-11-14 | 北京北方华创微电子装备有限公司 | 外延设备及其测温装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2785860A (en) * | 1949-05-14 | 1957-03-19 | Honeywell Regulator Co | Measuring and controlling apparatus using a radiation pyrometer |
US2611541A (en) * | 1950-02-07 | 1952-09-23 | Leeds & Northrup Co | Radiation pyrometer with illuminator |
US2837917A (en) * | 1950-02-07 | 1958-06-10 | Leeds & Northrup Co | Radiation systems for measuring temperature |
US2978589A (en) * | 1956-01-16 | 1961-04-04 | Servo Corp Of America | Optical pyrometer |
US3091693A (en) * | 1959-09-16 | 1963-05-28 | Barnes Eng Co | Selective radiation detector and free-air thermometer |
US3097300A (en) * | 1960-10-06 | 1963-07-09 | Barnes Eng Co | Thermal detector and reference source |
US3264931A (en) * | 1961-07-10 | 1966-08-09 | Kollmorgen Corp | Automatic brightness pyrometers |
US3392282A (en) * | 1964-12-10 | 1968-07-09 | Barnes Eng Co | Automatic method of compensating radiometers for emissivity of the optics |
US3492869A (en) * | 1966-09-03 | 1970-02-03 | Hiromichi Toyota | Means of measuring surface temperature by reflection |
CH472667A (de) * | 1966-12-20 | 1969-05-15 | Bbc Brown Boveri & Cie | Einrichtung zur berührungslosen Messung der Temperatur bewegter Fäden oder Drähte |
US3519352A (en) * | 1967-06-23 | 1970-07-07 | Barnes Eng Co | Null-system radiometer |
JPS5234230B2 (de) * | 1971-12-27 | 1977-09-02 |
-
1972
- 1972-07-27 CH CH1117672A patent/CH547487A/de not_active IP Right Cessation
- 1972-08-23 DE DE2241310A patent/DE2241310A1/de active Pending
-
1973
- 1973-06-13 AT AT519773A patent/AT344420B/de not_active IP Right Cessation
- 1973-07-03 JP JP48074491A patent/JPS4954081A/ja active Pending
- 1973-07-19 US US380572A patent/US3916690A/en not_active Expired - Lifetime
- 1973-07-23 SE SE7310231A patent/SE394029B/xx unknown
- 1973-07-25 GB GB3547973A patent/GB1436180A/en not_active Expired
- 1973-07-25 FR FR7327165A patent/FR2194960B1/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3226145A1 (de) * | 1981-08-04 | 1983-03-24 | VEB Meßgerätewerk "Erich Weinert" Magdeburg, DDR 3011 Magdeburg | Einrichtung zur beruehrungslosen temperaturmessung |
Also Published As
Publication number | Publication date |
---|---|
US3916690A (en) | 1975-11-04 |
JPS4954081A (de) | 1974-05-25 |
AT344420B (de) | 1978-07-25 |
DE2241310A1 (de) | 1974-02-14 |
FR2194960A1 (de) | 1974-03-01 |
GB1436180A (en) | 1976-05-19 |
FR2194960B1 (de) | 1977-05-27 |
ATA519773A (de) | 1977-11-15 |
SE394029B (sv) | 1977-05-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |