CH542772A - Device for transporting substrates to be coated through a vacuum system - Google Patents

Device for transporting substrates to be coated through a vacuum system

Info

Publication number
CH542772A
CH542772A CH1382271A CH1382271A CH542772A CH 542772 A CH542772 A CH 542772A CH 1382271 A CH1382271 A CH 1382271A CH 1382271 A CH1382271 A CH 1382271A CH 542772 A CH542772 A CH 542772A
Authority
CH
Switzerland
Prior art keywords
coated
vacuum system
transporting substrates
transporting
substrates
Prior art date
Application number
CH1382271A
Other languages
German (de)
Inventor
Wagner Rudolf
Schertler Roman
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1382271A priority Critical patent/CH542772A/en
Priority to NL717116671A priority patent/NL150167B/en
Priority to FR7230718A priority patent/FR2153241B1/fr
Priority to DE2242916A priority patent/DE2242916C3/en
Priority to GB4122272A priority patent/GB1360934A/en
Priority to US00289066A priority patent/US3787312A/en
Publication of CH542772A publication Critical patent/CH542772A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1382271A 1971-09-21 1971-09-21 Device for transporting substrates to be coated through a vacuum system CH542772A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH1382271A CH542772A (en) 1971-09-21 1971-09-21 Device for transporting substrates to be coated through a vacuum system
NL717116671A NL150167B (en) 1971-09-21 1971-12-03 DEVICE FOR TRANSPORTING OBJECTS THROUGH A VACUUM CHAMBER, IN WHICH THOSE OBJECTS MAY BE COATED BY VAPORIZATION OR CATHOD SPRAYING.
FR7230718A FR2153241B1 (en) 1971-09-21 1972-08-30
DE2242916A DE2242916C3 (en) 1971-09-21 1972-08-31 Device for transporting substrates to be coated through a vacuum system
GB4122272A GB1360934A (en) 1971-09-21 1972-09-06 Device for transporting substrate to be deposited upon through a vacuum plant
US00289066A US3787312A (en) 1971-09-21 1972-09-14 Device for passing substrates through a vapor deposition zone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1382271A CH542772A (en) 1971-09-21 1971-09-21 Device for transporting substrates to be coated through a vacuum system

Publications (1)

Publication Number Publication Date
CH542772A true CH542772A (en) 1973-10-15

Family

ID=4395631

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1382271A CH542772A (en) 1971-09-21 1971-09-21 Device for transporting substrates to be coated through a vacuum system

Country Status (6)

Country Link
US (1) US3787312A (en)
CH (1) CH542772A (en)
DE (1) DE2242916C3 (en)
FR (1) FR2153241B1 (en)
GB (1) GB1360934A (en)
NL (1) NL150167B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385153A (en) * 1977-01-06 1978-07-27 Mitsubishi Electric Corp Forming method for light reflective metallic film and heat absorbent material film on face panel inside and its unit
DE2950997C2 (en) * 1979-12-18 1986-10-09 Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa Device for coating
JPS6037188B2 (en) * 1981-08-27 1985-08-24 三菱マテリアル株式会社 sputtering equipment
US4423701A (en) * 1982-03-29 1984-01-03 Energy Conversion Devices, Inc. Glow discharge deposition apparatus including a non-horizontally disposed cathode
US4389295A (en) * 1982-05-06 1983-06-21 Gte Products Corporation Thin film phosphor sputtering process
US4576830A (en) * 1984-11-05 1986-03-18 Chronar Corp. Deposition of materials
DE3623970A1 (en) * 1986-07-16 1988-01-28 Leybold Heraeus Gmbh & Co Kg TRANSPORTATION DEVICE WITH ROLLER SYSTEMS FOR VACUUM COATING SYSTEMS
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
WO1992017621A1 (en) * 1991-04-04 1992-10-15 Conner Peripherals, Inc. Apparatus and method for high throughput sputtering
DE4139549A1 (en) * 1991-11-30 1993-06-03 Leybold Ag DEVICE FOR THE TRANSPORT OF SUBSTRATES
EP0572151A3 (en) * 1992-05-28 1995-01-18 Avx Corp Varistors with sputtered terminations and a method of applying sputtered teminations to varistors and the like.
US5565838A (en) * 1992-05-28 1996-10-15 Avx Corporation Varistors with sputtered terminations
JPH07508617A (en) 1992-06-26 1995-09-21 マティリアルズ　リサーチ　コーポレイション Transport equipment for wafer processing line
DE4301189C2 (en) * 1993-01-19 2000-12-14 Leybold Ag Device for coating substrates
DE4428136A1 (en) * 1994-08-09 1996-02-15 Leybold Ag In-line vacuum coating plant,
DE19630290C2 (en) * 1996-07-26 2000-08-10 Audi Ag System for the surface treatment of objects, in particular vehicle bodies
AU2003234484A1 (en) * 2002-05-06 2003-11-11 Guardian Industries Corp. Sputter coating apparatus including ion beam source(s), and corresponding method
KR20100045124A (en) * 2008-10-23 2010-05-03 삼성전자주식회사 Sputter tray moving system
CN102061449B (en) * 2009-11-16 2013-06-05 鸿富锦精密工业（深圳）有限公司 Vacuum coater
DE102010017896A1 (en) * 2010-04-21 2011-10-27 Ald Vacuum Technologies Gmbh Apparatus and method for coating substrates according to the EB / PVD method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1758531A (en) * 1926-10-22 1930-05-13 Elektrodenzerstaubung M B H Ge Vacuum dispersion coating process
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
US3288700A (en) * 1963-10-23 1966-11-29 Northern Electric Co Sputtering apparatus including a folded flexible conveyor

Also Published As

Publication number Publication date
NL7116671A (en) 1973-03-23
DE2242916A1 (en) 1973-03-22
US3787312A (en) 1974-01-22
GB1360934A (en) 1974-07-24
FR2153241A1 (en) 1973-05-04
DE2242916C3 (en) 1975-05-15
FR2153241B1 (en) 1976-08-13
DE2242916B2 (en) 1974-10-03
NL150167B (en) 1976-07-15

Similar Documents

Publication Publication Date Title
CH542772A (en) Device for transporting substrates to be coated through a vacuum system
CH558276A (en) DEVICE FOR STRAPPING PACKAGES.
AT329458B (en) DEVICE FOR TRANSFERRING LABELS TO OBJECTS
CH540715A (en) Process for the encapsulation of a substance finely divided in a liquid
AT358885B (en) CIRCUIT ARRANGEMENT FOR DETECTING IRREGULARITIES IN A PIPELINE TRANSPORTING A LIQUID
CH493282A (en) Process for applying magnetizable, binder-containing layers to a carrier film
CH512383A (en) Device for handling piece goods
ATA306271A (en) SEMI-AUTOMATIC DEVICE FOR APPLYING LATCHES
AT298217B (en) Device for suspending particles in a liquid
CH544659A (en) Device for vacuum transfer dyeing of, in particular, textile substrates
AT316444B (en) Device for concentrating solids present in a liquid
CH529854A (en) Gripper for pulling off full packages
AT349800B (en) DEVICE FOR DETERMINING EXCEPTIONAL PARTICLES IN A LIQUID
AT312451B (en) Device for emptying liquid from a bottle
CH502846A (en) Device for transferring a resin from a carrier film to a fiber layer
AT327837B (en) PROCESS FOR CRYSTALLIZING FRUCTOSE
AT314314B (en) Clamping device for clamping workpieces
CH535700A (en) Stacking device for packages
ATA445472A (en) CARRYING DEVICE FOR FASTENING KOKILLEN INSERT PLATES
SE400922B (en) GOODS HANDLING DEVICE
IT947915B (en) DEVICE FOR CONNECTING A TANK TO THE ATMOSPHERE
SU456390A1 (en) Device for transporting chip substrates
AT345472B (en) DEVICE FOR COATING OBJECTS
DE2166840A1 (en) DRIVE DEVICE FOR INTERMITTING TRANSPORT OF PART TANKS TO A PROCESSING POINT
CH542754A (en) Device for labeling objects fed one after the other

Legal Events

Date Code Title Description
PL Patent ceased