CH529991A - Vorrichtung zum Messen der Verschiebung eines Gegenstandes - Google Patents
Vorrichtung zum Messen der Verschiebung eines GegenstandesInfo
- Publication number
- CH529991A CH529991A CH167571A CH167571A CH529991A CH 529991 A CH529991 A CH 529991A CH 167571 A CH167571 A CH 167571A CH 167571 A CH167571 A CH 167571A CH 529991 A CH529991 A CH 529991A
- Authority
- CH
- Switzerland
- Prior art keywords
- displacement
- measuring
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7001770A NL7001770A (de) | 1970-02-07 | 1970-02-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH529991A true CH529991A (de) | 1972-10-31 |
Family
ID=19809274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH167571A CH529991A (de) | 1970-02-07 | 1971-02-04 | Vorrichtung zum Messen der Verschiebung eines Gegenstandes |
Country Status (6)
Country | Link |
---|---|
US (1) | US3666371A (de) |
CA (1) | CA923694A (de) |
CH (1) | CH529991A (de) |
DE (1) | DE2104837A1 (de) |
FR (1) | FR2078261A5 (de) |
NL (1) | NL7001770A (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS567006A (en) * | 1979-06-22 | 1981-01-24 | Ibm | Method of extending measurement range of interference |
JPS61219802A (ja) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | 変位の光学的測定装置 |
JPS6288902A (ja) * | 1985-10-16 | 1987-04-23 | Hitachi Ltd | 変位の光学的測定方法および測定装置 |
-
1970
- 1970-02-07 NL NL7001770A patent/NL7001770A/xx unknown
-
1971
- 1971-02-02 DE DE19712104837 patent/DE2104837A1/de active Pending
- 1971-02-03 CA CA104356A patent/CA923694A/en not_active Expired
- 1971-02-04 US US112722A patent/US3666371A/en not_active Expired - Lifetime
- 1971-02-04 CH CH167571A patent/CH529991A/de not_active IP Right Cessation
- 1971-02-05 FR FR7103939A patent/FR2078261A5/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3666371A (en) | 1972-05-30 |
FR2078261A5 (de) | 1971-11-05 |
CA923694A (en) | 1973-04-03 |
NL7001770A (de) | 1971-08-10 |
DE2104837A1 (de) | 1971-08-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |