CH524690A - New process for the deposition by cathodic sputtering of metals or oxides on a metal support and application of said process - Google Patents

New process for the deposition by cathodic sputtering of metals or oxides on a metal support and application of said process

Info

Publication number
CH524690A
CH524690A CH372571A CH372571A CH524690A CH 524690 A CH524690 A CH 524690A CH 372571 A CH372571 A CH 372571A CH 372571 A CH372571 A CH 372571A CH 524690 A CH524690 A CH 524690A
Authority
CH
Switzerland
Prior art keywords
oxides
metals
deposition
application
metal support
Prior art date
Application number
CH372571A
Other languages
French (fr)
Inventor
Masotti Robert
Original Assignee
Progil
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Progil filed Critical Progil
Publication of CH524690A publication Critical patent/CH524690A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
    • C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
    • C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C25B11/075—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound
    • C25B11/081—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound the element being a noble metal
CH372571A 1970-04-21 1971-03-15 New process for the deposition by cathodic sputtering of metals or oxides on a metal support and application of said process CH524690A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7014327A FR2088659A5 (en) 1970-04-21 1970-04-21

Publications (1)

Publication Number Publication Date
CH524690A true CH524690A (en) 1972-06-30

Family

ID=9054289

Family Applications (1)

Application Number Title Priority Date Filing Date
CH372571A CH524690A (en) 1970-04-21 1971-03-15 New process for the deposition by cathodic sputtering of metals or oxides on a metal support and application of said process

Country Status (17)

Country Link
US (1) US3773639A (en)
JP (1) JPS5324914B1 (en)
AT (1) AT304990B (en)
BE (1) BE766023A (en)
BR (1) BR7102391D0 (en)
CA (1) CA933881A (en)
CH (1) CH524690A (en)
DE (1) DE2119066A1 (en)
ES (1) ES390345A1 (en)
FR (1) FR2088659A5 (en)
GB (1) GB1307956A (en)
IL (1) IL36656A (en)
LU (1) LU63024A1 (en)
NL (1) NL7105157A (en)
PL (1) PL83268B1 (en)
RO (1) RO61059A (en)
SE (1) SE366345B (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2320565A1 (en) * 1973-04-12 1977-03-04 Radiotechnique Compelec SELECTIVE TRANSPARENCY PLATE AND ITS MANUFACTURING PROCESS
AU507748B2 (en) * 1976-06-10 1980-02-28 University Of Sydney, The Reactive sputtering
DE2630883C2 (en) * 1976-07-09 1985-02-07 Basf Ag, 6700 Ludwigshafen Use of a layer containing porous inorganic oxides applied to a metallic support by the plasma or flame spraying process as a diaphragm in an electrolysis cell
AU5889880A (en) * 1979-07-02 1981-01-15 Olin Corporation Manufacture of low overvoltage electrodes by cathodic sputtering
US4400255A (en) * 1981-06-29 1983-08-23 General Motors Corporation Control of electron bombardment of the exhaust oxygen sensor during electrode sputtering
US4420385A (en) * 1983-04-15 1983-12-13 Gryphon Products Apparatus and process for sputter deposition of reacted thin films
US5202008A (en) * 1990-03-02 1993-04-13 Applied Materials, Inc. Method for preparing a shield to reduce particles in a physical vapor deposition chamber
US5391275A (en) * 1990-03-02 1995-02-21 Applied Materials, Inc. Method for preparing a shield to reduce particles in a physical vapor deposition chamber
EP0446657B1 (en) * 1990-03-02 1995-07-26 Applied Materials, Inc. Method for preparing a shield to reduce particles in a physical vapor deposition chamber
WO1993010275A1 (en) * 1991-11-21 1993-05-27 Nisshin Steel Co., Ltd. Method of forming layer of evaporation coating
EP0593372B1 (en) * 1992-10-14 2001-09-19 Daiki Engineering Co., Ltd. Highly durable electrodes for eletrolysis and a method for preparation thereof
CA2154428C (en) * 1995-07-21 2005-03-22 Robert Schulz Ti, ru, fe and o alloys; use thereof for producing cathodes used for electrochemically synthesizing sodium chlorate
FR2861219B1 (en) * 2003-10-15 2006-04-07 Commissariat Energie Atomique ALKALINE FUEL CELL COMPRISING AN ANODE COMPRISING ALUMINUM AND ZINC AND METHOD OF MANUFACTURING THE ANODE
US20050205415A1 (en) * 2004-03-19 2005-09-22 Belousov Igor V Multi-component deposition
ITMI20091621A1 (en) * 2009-09-23 2011-03-24 Industrie De Nora Spa ELECTRODE FOR ELECTROLYTIC PROCESSES WITH CONTROLLED CRYSTALLINE STRUCTURE
JP4734664B1 (en) * 2010-09-17 2011-07-27 田中貴金属工業株式会社 Electrode for electrolysis, anode for electrolysis of ozone, anode for electrolysis of persulfate, and anode for chromium electrooxidation
US10654034B2 (en) 2014-05-30 2020-05-19 At Energy Llc Method of preparing platinum-based catalyst and platinum-based catalyst
RU2562462C1 (en) * 2014-05-30 2015-09-10 Общество с ограниченной ответственностью "Эй Ти Энерджи", ООО "Эй Ти Энерджи" Method of producing platinum-based catalyst and platinum-based catalyst

Also Published As

Publication number Publication date
FR2088659A5 (en) 1972-01-07
IL36656A (en) 1974-01-14
US3773639A (en) 1973-11-20
BR7102391D0 (en) 1973-05-03
JPS5324914B1 (en) 1978-07-24
CA933881A (en) 1973-09-18
DE2119066A1 (en) 1971-11-04
RO61059A (en) 1976-10-15
BE766023A (en) 1971-10-20
GB1307956A (en) 1973-02-21
AT304990B (en) 1973-02-12
IL36656A0 (en) 1971-06-23
PL83268B1 (en) 1975-12-31
LU63024A1 (en) 1972-12-11
ES390345A1 (en) 1973-06-01
SE366345B (en) 1974-04-22
NL7105157A (en) 1971-10-25

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Legal Events

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