CH511501A - Dünnschicht-Widerstand - Google Patents

Dünnschicht-Widerstand

Info

Publication number
CH511501A
CH511501A CH992966A CH992966A CH511501A CH 511501 A CH511501 A CH 511501A CH 992966 A CH992966 A CH 992966A CH 992966 A CH992966 A CH 992966A CH 511501 A CH511501 A CH 511501A
Authority
CH
Switzerland
Prior art keywords
resistance
tantalum
beta
film
thin
Prior art date
Application number
CH992966A
Other languages
German (de)
English (en)
Inventor
Altman Carl
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of CH511501A publication Critical patent/CH511501A/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Electronic Switches (AREA)
  • Electron Beam Exposure (AREA)
  • Liquid Crystal (AREA)
CH992966A 1965-07-12 1966-07-08 Dünnschicht-Widerstand CH511501A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US470981A US3391373A (en) 1965-07-12 1965-07-12 Beta tantalum resistors

Publications (1)

Publication Number Publication Date
CH511501A true CH511501A (de) 1971-08-15

Family

ID=23869822

Family Applications (1)

Application Number Title Priority Date Filing Date
CH992966A CH511501A (de) 1965-07-12 1966-07-08 Dünnschicht-Widerstand

Country Status (10)

Country Link
US (1) US3391373A (fr)
AT (1) AT263942B (fr)
BE (1) BE683045A (fr)
CH (1) CH511501A (fr)
DE (1) DE1615051A1 (fr)
ES (1) ES328726A1 (fr)
FR (1) FR1484134A (fr)
GB (1) GB1153485A (fr)
NL (1) NL6609533A (fr)
SE (1) SE341422B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3473146A (en) * 1967-10-10 1969-10-14 Trw Inc Electrical resistor having low resistance values
US3805210A (en) * 1969-12-04 1974-04-16 M Croset Integrated circuit resistor and a method for the manufacture thereof
JPS5535843B2 (fr) * 1972-12-28 1980-09-17
US4713529A (en) * 1986-09-15 1987-12-15 Gte Products Corporation Electroceramic heating devices with welded leads
JP4207951B2 (ja) * 2005-12-06 2009-01-14 Tdk株式会社 β相Ta薄膜抵抗体及び該薄膜抵抗体を備えた薄膜磁気ヘッド

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275915A (en) * 1966-09-27 Beta tantalum thin-film capacitors
NL286998A (fr) * 1961-12-27

Also Published As

Publication number Publication date
NL6609533A (fr) 1967-01-13
FR1484134A (fr) 1967-06-09
GB1153485A (en) 1969-05-29
US3391373A (en) 1968-07-02
SE341422B (fr) 1971-12-27
DE1615051A1 (de) 1970-05-27
BE683045A (fr) 1966-12-01
ES328726A1 (es) 1967-04-01
AT263942B (de) 1968-08-12

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Legal Events

Date Code Title Description
PL Patent ceased