CH491659A - Verfahren und Vorrichtung zum Kristallziehen aus einer Schmelze - Google Patents
Verfahren und Vorrichtung zum Kristallziehen aus einer SchmelzeInfo
- Publication number
- CH491659A CH491659A CH1423566A CH1423566A CH491659A CH 491659 A CH491659 A CH 491659A CH 1423566 A CH1423566 A CH 1423566A CH 1423566 A CH1423566 A CH 1423566A CH 491659 A CH491659 A CH 491659A
- Authority
- CH
- Switzerland
- Prior art keywords
- melt
- pulling crystals
- crystals
- pulling
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1012—Apparatus with means for measuring, testing, or sensing with a window or port for visual observation or examination
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6512921A NL6512921A (de) | 1965-10-06 | 1965-10-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH491659A true CH491659A (de) | 1970-06-15 |
Family
ID=19794316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1423566A CH491659A (de) | 1965-10-06 | 1966-10-03 | Verfahren und Vorrichtung zum Kristallziehen aus einer Schmelze |
Country Status (9)
Country | Link |
---|---|
US (1) | US3499736A (de) |
AT (1) | AT296388B (de) |
BE (1) | BE687917A (de) |
CH (1) | CH491659A (de) |
DE (1) | DE1519850C3 (de) |
FR (1) | FR1509967A (de) |
GB (1) | GB1154240A (de) |
NL (1) | NL6512921A (de) |
SE (1) | SE328851B (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3870477A (en) * | 1972-07-10 | 1975-03-11 | Tyco Laboratories Inc | Optical control of crystal growth |
US3998598A (en) * | 1973-11-23 | 1976-12-21 | Semimetals, Inc. | Automatic diameter control for crystal growing facilities |
US4080172A (en) * | 1975-12-29 | 1978-03-21 | Monsanto Company | Zone refiner automatic control |
US4239583A (en) * | 1979-06-07 | 1980-12-16 | Mobil Tyco Solar Energy Corporation | Method and apparatus for crystal growth control |
US4396824A (en) * | 1979-10-09 | 1983-08-02 | Siltec Corporation | Conduit for high temperature transfer of molten semiconductor crystalline material |
US4352785A (en) * | 1982-01-04 | 1982-10-05 | Western Electric Co., Inc. | Crystal grower with torque supportive collapsible pulling mechanism |
JPS60112695A (ja) * | 1983-11-22 | 1985-06-19 | Sumitomo Electric Ind Ltd | 化合物単結晶の引上方法 |
JPS60131900A (ja) * | 1983-12-16 | 1985-07-13 | Sumitomo Electric Ind Ltd | 単結晶の製造方法 |
US4618975A (en) * | 1984-12-21 | 1986-10-21 | At&T Technologies, Inc. | Method and apparatus for analyzing a porous nonhomogeneous cylindrical object |
US5078830A (en) * | 1989-04-10 | 1992-01-07 | Mitsubishi Metal Corporation | Method for growing single crystal |
JPH06102590B2 (ja) * | 1990-02-28 | 1994-12-14 | 信越半導体株式会社 | Cz法による単結晶ネック部育成自動制御方法 |
US5589690A (en) * | 1995-03-21 | 1996-12-31 | National Institute Of Standards And Technology | Apparatus and method for monitoring casting process |
US5746828A (en) * | 1996-01-16 | 1998-05-05 | General Signal Corporation | Temperature control system for growing high-purity monocrystals |
JP4020313B2 (ja) * | 2003-03-28 | 2007-12-12 | ステラケミファ株式会社 | フッ化物中の不純物及び色中心分析方法及び単結晶育成用材料の製造方法 |
US7118626B2 (en) * | 2003-08-29 | 2006-10-10 | University Of Alabama In Huntsville | Crystallization cassette for the growth and analysis of macromolecular crystals and an associated method |
CN105350072A (zh) * | 2015-11-06 | 2016-02-24 | 南京晶升能源设备有限公司 | 泡生法晶体生长单晶炉脱锅方法、温控方法和控制方法 |
CN112705590B (zh) * | 2020-12-11 | 2023-02-07 | 山东新升光电科技有限责任公司 | 一种蓝宝石单晶炉提拉杆矫直装置及方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3011055A (en) * | 1954-06-03 | 1961-11-28 | J J Maguire | Method and means for gauging fine strands |
US3001070A (en) * | 1956-02-09 | 1961-09-19 | Jr William H Davis | Method of gaging filling heights in closed containers |
BE594105A (de) * | 1959-08-17 | |||
GB904100A (en) * | 1959-09-11 | 1962-08-22 | Siemens Ag | A process for zone-by-zone melting of a rod of semi-conductor material using an induction coil as the heating means and an automatic arrangement for controlling the current through the coil |
NL253106A (de) * | 1960-06-25 | |||
US2992311A (en) * | 1960-09-28 | 1961-07-11 | Siemens Ag | Method and apparatus for floatingzone melting of semiconductor rods |
US3372276A (en) * | 1965-05-21 | 1968-03-05 | Atomic Energy Commission Usa | Method and system for the non-destructive inspection of variable density plates |
-
1965
- 1965-10-06 NL NL6512921A patent/NL6512921A/xx unknown
-
1966
- 1966-10-03 CH CH1423566A patent/CH491659A/de not_active IP Right Cessation
- 1966-10-03 AT AT922466A patent/AT296388B/de active
- 1966-10-03 GB GB44103/66A patent/GB1154240A/en not_active Expired
- 1966-10-03 SE SE13326/66A patent/SE328851B/xx unknown
- 1966-10-04 DE DE1519850A patent/DE1519850C3/de not_active Expired
- 1966-10-05 US US584584A patent/US3499736A/en not_active Expired - Lifetime
- 1966-10-06 BE BE687917D patent/BE687917A/xx unknown
- 1966-10-06 FR FR79040A patent/FR1509967A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1519850A1 (de) | 1969-03-20 |
DE1519850B2 (de) | 1974-12-12 |
FR1509967A (fr) | 1968-01-19 |
GB1154240A (en) | 1969-06-04 |
NL6512921A (de) | 1967-04-07 |
DE1519850C3 (de) | 1975-07-31 |
US3499736A (en) | 1970-03-10 |
SE328851B (de) | 1970-09-28 |
AT296388B (de) | 1972-02-10 |
BE687917A (de) | 1967-04-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |