CH485867A - Method and device for depositing a refractory metal on a substrate - Google Patents
Method and device for depositing a refractory metal on a substrateInfo
- Publication number
- CH485867A CH485867A CH874767A CH874767A CH485867A CH 485867 A CH485867 A CH 485867A CH 874767 A CH874767 A CH 874767A CH 874767 A CH874767 A CH 874767A CH 485867 A CH485867 A CH 485867A
- Authority
- CH
- Switzerland
- Prior art keywords
- depositing
- substrate
- refractory metal
- refractory
- metal
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4089566 | 1966-06-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH485867A true CH485867A (en) | 1970-02-15 |
Family
ID=12593229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH874767A CH485867A (en) | 1966-06-20 | 1967-06-20 | Method and device for depositing a refractory metal on a substrate |
Country Status (4)
Country | Link |
---|---|
BE (1) | BE700185A (en) |
CH (1) | CH485867A (en) |
GB (1) | GB1189344A (en) |
NL (1) | NL149232B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0241155A1 (en) * | 1986-03-31 | 1987-10-14 | Unisys Corporation | Depositing vanadium underlayer for magnetic films |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2196019A (en) * | 1986-10-07 | 1988-04-20 | Cambridge Instr Ltd | Metalorganic chemical vapour deposition |
US4997677A (en) * | 1987-08-31 | 1991-03-05 | Massachusetts Institute Of Technology | Vapor phase reactor for making multilayer structures |
WO1990010092A1 (en) * | 1989-02-24 | 1990-09-07 | Massachusetts Institute Of Technology | A modified stagnation flow apparatus for chemical vapor deposition providing excellent control of the deposition |
-
1967
- 1967-06-12 GB GB2705667A patent/GB1189344A/en not_active Expired
- 1967-06-13 NL NL6708168A patent/NL149232B/en unknown
- 1967-06-19 BE BE700185D patent/BE700185A/xx unknown
- 1967-06-20 CH CH874767A patent/CH485867A/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0241155A1 (en) * | 1986-03-31 | 1987-10-14 | Unisys Corporation | Depositing vanadium underlayer for magnetic films |
Also Published As
Publication number | Publication date |
---|---|
NL6708168A (en) | 1967-12-21 |
GB1189344A (en) | 1970-04-22 |
NL149232B (en) | 1976-04-15 |
BE700185A (en) | 1967-12-01 |
DE1621289A1 (en) | 1971-05-13 |
DE1621289B2 (en) | 1972-08-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |