CH485328A - Apparatus for manufacturing a photoresist machine - Google Patents
Apparatus for manufacturing a photoresist machineInfo
- Publication number
- CH485328A CH485328A CH1595468A CH1595468A CH485328A CH 485328 A CH485328 A CH 485328A CH 1595468 A CH1595468 A CH 1595468A CH 1595468 A CH1595468 A CH 1595468A CH 485328 A CH485328 A CH 485328A
- Authority
- CH
- Switzerland
- Prior art keywords
- manufacturing
- photoresist
- machine
- photoresist machine
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229920002120 photoresistant polymer Polymers 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0112621 | 1967-10-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH485328A true CH485328A (en) | 1970-01-31 |
Family
ID=7531908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1595468A CH485328A (en) | 1967-10-27 | 1968-10-25 | Apparatus for manufacturing a photoresist machine |
Country Status (5)
Country | Link |
---|---|
CH (1) | CH485328A (en) |
DE (1) | DE1614644A1 (en) |
FR (1) | FR1587048A (en) |
GB (1) | GB1250464A (en) |
NL (1) | NL6811808A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0134268A1 (en) * | 1983-08-09 | 1985-03-20 | Siemens Aktiengesellschaft | Positioning and adjusting table and method of manufacture |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4580892A (en) * | 1983-06-29 | 1986-04-08 | Dainippon Screen Mfg. Co., Ltd. | Contact printing apparatus |
US5459546A (en) * | 1992-08-28 | 1995-10-17 | Penn; Randy J. | Method and apparatus for accurate alignment of semiconductor wafers in photo printers |
JP2002170765A (en) * | 2000-12-04 | 2002-06-14 | Nikon Corp | Stage system and exposure system |
CN113843636A (en) * | 2021-10-22 | 2021-12-28 | 王德胜 | Device and method for precisely and quickly adjusting angle during workpiece machining |
-
1967
- 1967-10-27 DE DE19671614644 patent/DE1614644A1/en active Pending
-
1968
- 1968-08-19 NL NL6811808A patent/NL6811808A/xx unknown
- 1968-10-24 FR FR1587048D patent/FR1587048A/fr not_active Expired
- 1968-10-25 CH CH1595468A patent/CH485328A/en not_active IP Right Cessation
- 1968-10-28 GB GB1250464D patent/GB1250464A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0134268A1 (en) * | 1983-08-09 | 1985-03-20 | Siemens Aktiengesellschaft | Positioning and adjusting table and method of manufacture |
Also Published As
Publication number | Publication date |
---|---|
NL6811808A (en) | 1969-04-29 |
GB1250464A (en) | 1971-10-20 |
FR1587048A (en) | 1970-03-06 |
DE1614644A1 (en) | 1970-02-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CH469336A (en) | Method for producing a dielectric arrangement | |
CH523541A (en) | Device for controlling a machine | |
CH489826A (en) | Method for producing a photosensitive material | |
AT287018B (en) | Method for producing a planographic printing form | |
CH514087A (en) | Device for supporting a machine | |
CH434953A (en) | Device for producing a package | |
CH483726A (en) | Method for dismantling a semiconductor wafer | |
AT288988B (en) | Device for operating the sinkers of a jacquard machine | |
AT306554B (en) | DEVICE FOR MANUFACTURING TIRES | |
CH485328A (en) | Apparatus for manufacturing a photoresist machine | |
AT293162B (en) | Device for focusing a camera | |
CH436156A (en) | Device for producing a fabric edge | |
CH490092A (en) | Device for performing a medicinal injection | |
CH481694A (en) | Method for operating a die casting machine | |
CH483928A (en) | Method for manufacturing a type drum | |
CH463955A (en) | Device for making copies | |
CH461247A (en) | Device for producing a folding box | |
CH494101A (en) | Device for heating a rotating mold | |
CH479163A (en) | Method for manufacturing a semiconductor component | |
CH470997A (en) | Device for manufacturing packs | |
CH496386A (en) | Device for exposing a cylinder surface | |
AT278692B (en) | Process for making a patterned laminate | |
CH440061A (en) | Device for drawing a fiber structure | |
CH528689A (en) | Device for moving a machine part | |
AT305013B (en) | Device on a paper machine for the production of flat structures |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |