CH481726A - Haltevorrichtung für flächige Werkstücke - Google Patents
Haltevorrichtung für flächige WerkstückeInfo
- Publication number
- CH481726A CH481726A CH821669A CH821669A CH481726A CH 481726 A CH481726 A CH 481726A CH 821669 A CH821669 A CH 821669A CH 821669 A CH821669 A CH 821669A CH 481726 A CH481726 A CH 481726A
- Authority
- CH
- Switzerland
- Prior art keywords
- holding device
- flat workpieces
- workpieces
- flat
- holding
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
- B25B11/007—Vacuum work holders portable, e.g. handheld
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US73768068A | 1968-06-17 | 1968-06-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH481726A true CH481726A (de) | 1969-11-30 |
Family
ID=24964865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH821669A CH481726A (de) | 1968-06-17 | 1969-05-30 | Haltevorrichtung für flächige Werkstücke |
Country Status (5)
Country | Link |
---|---|
US (1) | US3517958A (de) |
CH (1) | CH481726A (de) |
DE (1) | DE1928203B2 (de) |
FR (1) | FR2011034A1 (de) |
GB (1) | GB1255410A (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19806306A1 (de) * | 1998-02-16 | 1999-09-09 | Siemens Ag | Vorrichtung zum berührungslosen Greifen und Halten eines Gegenstandes und Anwendungen der Vorrichtung |
DE19842797C1 (de) * | 1998-09-18 | 2000-01-27 | Max Planck Gesellschaft | Probenhalterung für eine partikelförmige flüssigkeitshaltige Materialprobe |
DE19929617A1 (de) * | 1999-06-28 | 2001-01-25 | Siemens Ag | Vorrichtung und Verfahren zum Haltern eines Werkstücks sowie Anwendung des Verfahrens |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3841628A (en) * | 1972-01-31 | 1974-10-15 | A Goldfarb | Game apparatus and method |
DE2429421C2 (de) * | 1974-06-19 | 1981-12-10 | Vits-Maschinenbau Gmbh, 4018 Langenfeld | Vorrichtung zum Anheben des oberen Bogens eines Stapels mit Blasluft |
US4050729A (en) * | 1976-04-20 | 1977-09-27 | Hutson Clifford L | Apparatus for handling delicate articles such as silicon wafers |
US4029351A (en) * | 1976-06-02 | 1977-06-14 | International Business Machines Corporation | Bernoulli pickup head with self-restoring anti-tilt improvement |
DE3036829A1 (de) * | 1980-09-30 | 1982-05-13 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zum aufnehmen von kristallscheiben |
US4682928A (en) * | 1982-05-24 | 1987-07-28 | Proconics International, Inc. | Wafer transfer apparatus |
DE3686781D1 (de) * | 1985-05-04 | 1992-10-29 | Seibu Giken Kk | Vorrichtung zum halten und/oder foerdern einer platte mittels eines fluids ohne koerperliche beruehrung. |
JPS6387831U (de) * | 1986-11-26 | 1988-06-08 | ||
US4773687A (en) * | 1987-05-22 | 1988-09-27 | American Telephone And Telegraph Company, At&T Technologies, Inc. | Wafer handler |
GB2256184A (en) * | 1991-05-29 | 1992-12-02 | Chen Ming Yang | A delicate operating tool assembly |
ATE171306T1 (de) * | 1993-02-08 | 1998-10-15 | Sez Semiconduct Equip Zubehoer | Träger für scheibenförmige gegenstände |
US5636887A (en) * | 1995-03-20 | 1997-06-10 | Chrysler Corporation | Apparatus for lifting objects by suction and releasing them by gas pressure |
US6099056A (en) * | 1996-05-31 | 2000-08-08 | Ipec Precision, Inc. | Non-contact holder for wafer-like articles |
US5928537A (en) * | 1997-03-14 | 1999-07-27 | Fortune; William S. | Pneumatic pickup tool for small parts |
US6244641B1 (en) * | 1999-12-02 | 2001-06-12 | M.E.C. Technology, Inc. | Wafer transfer arm |
US6517130B1 (en) * | 2000-03-14 | 2003-02-11 | Applied Materials, Inc. | Self positioning vacuum chuck |
US20030062734A1 (en) * | 2001-10-02 | 2003-04-03 | Faris Sadeg M. | Device and method for handling fragile objects, and manufacturing method thereof |
TWI274393B (en) * | 2002-04-08 | 2007-02-21 | Acm Res Inc | Electropolishing and/or electroplating apparatus and methods |
US6893070B2 (en) * | 2002-10-17 | 2005-05-17 | Delaware Capital Formation, Inc. | Integrated end effector |
AU2005262191A1 (en) * | 2004-07-09 | 2006-01-19 | Oc Oerllikon Balzers Ag | Gas bearing substrate-loading mechanism process |
KR100604098B1 (ko) * | 2005-04-20 | 2006-07-24 | 한미반도체 주식회사 | 반도체 패키지 픽업장치 |
ITUD20090214A1 (it) * | 2009-11-24 | 2011-05-25 | Applied Materials Inc | Effettore d'estremita' per la manipolazione di substrati |
CN112922952B (zh) * | 2021-01-22 | 2021-12-14 | 宁波云德半导体材料有限公司 | 一种具有泄压功能的石英真空吸附装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2905768A (en) * | 1954-09-24 | 1959-09-22 | Ibm | Air head |
US3220723A (en) * | 1963-09-25 | 1965-11-30 | Control Data Corp | Suction pick up with air bearing |
US3223443A (en) * | 1963-10-17 | 1965-12-14 | Pittsburgh Plate Glass Co | Handling of sheet material |
US3438668A (en) * | 1965-08-26 | 1969-04-15 | Gen Electric | Contactless lifter |
US3425736A (en) * | 1966-03-25 | 1969-02-04 | Bell Telephone Labor Inc | Pneumatic probe for handling flat objects |
US3431009A (en) * | 1967-01-06 | 1969-03-04 | Western Electric Co | Pickup device for supporting workpieces on a layer of fluid |
-
1968
- 1968-06-17 US US737680A patent/US3517958A/en not_active Expired - Lifetime
-
1969
- 1969-04-17 FR FR6910808A patent/FR2011034A1/fr not_active Withdrawn
- 1969-05-27 GB GB26706/69A patent/GB1255410A/en not_active Expired
- 1969-05-30 CH CH821669A patent/CH481726A/de not_active IP Right Cessation
- 1969-06-03 DE DE19691928203 patent/DE1928203B2/de not_active Withdrawn
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19806306A1 (de) * | 1998-02-16 | 1999-09-09 | Siemens Ag | Vorrichtung zum berührungslosen Greifen und Halten eines Gegenstandes und Anwendungen der Vorrichtung |
DE19842797C1 (de) * | 1998-09-18 | 2000-01-27 | Max Planck Gesellschaft | Probenhalterung für eine partikelförmige flüssigkeitshaltige Materialprobe |
US6355217B1 (en) | 1998-09-18 | 2002-03-12 | Max-Planck-Gesellschaft, Zur Forderung Der Wissenschaften E.V. | Holding device for particulate samples |
DE19929617A1 (de) * | 1999-06-28 | 2001-01-25 | Siemens Ag | Vorrichtung und Verfahren zum Haltern eines Werkstücks sowie Anwendung des Verfahrens |
Also Published As
Publication number | Publication date |
---|---|
DE1928203B2 (de) | 1972-04-06 |
GB1255410A (en) | 1971-12-01 |
FR2011034A1 (de) | 1970-02-27 |
DE1928203A1 (de) | 1971-02-25 |
US3517958A (en) | 1970-06-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |