CH469816A - Verfahren zur Herstellung von harten, haftfesten, praktisch absorptionsfreien dünnen Schichten - Google Patents

Verfahren zur Herstellung von harten, haftfesten, praktisch absorptionsfreien dünnen Schichten

Info

Publication number
CH469816A
CH469816A CH1575366A CH1575366A CH469816A CH 469816 A CH469816 A CH 469816A CH 1575366 A CH1575366 A CH 1575366A CH 1575366 A CH1575366 A CH 1575366A CH 469816 A CH469816 A CH 469816A
Authority
CH
Switzerland
Prior art keywords
hard
strong
production
thin layers
free thin
Prior art date
Application number
CH1575366A
Other languages
English (en)
Inventor
Rheinberger Peter
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1575366A priority Critical patent/CH469816A/de
Priority to NL6700423A priority patent/NL6700423A/xx
Priority to DE19671621214 priority patent/DE1621214A1/de
Priority to GB43240/67A priority patent/GB1183979A/en
Priority to FR126079A priority patent/FR1541986A/fr
Publication of CH469816A publication Critical patent/CH469816A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
CH1575366A 1966-10-29 1966-10-29 Verfahren zur Herstellung von harten, haftfesten, praktisch absorptionsfreien dünnen Schichten CH469816A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1575366A CH469816A (de) 1966-10-29 1966-10-29 Verfahren zur Herstellung von harten, haftfesten, praktisch absorptionsfreien dünnen Schichten
NL6700423A NL6700423A (de) 1966-10-29 1967-01-11
DE19671621214 DE1621214A1 (de) 1966-10-29 1967-09-21 Verfahren zur Herstellung von harten,haftfesten,praktisch absorptionsfreien duennen Schichten
GB43240/67A GB1183979A (en) 1966-10-29 1967-09-22 Improvements in or relating to Hard, Well Adhering and Practically Non-Absorbent Thin Layers
FR126079A FR1541986A (fr) 1966-10-29 1967-10-27 Procédé de préparation de couches minces, dures, fortement adhérentes et pratiquement non absorbantes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1575366A CH469816A (de) 1966-10-29 1966-10-29 Verfahren zur Herstellung von harten, haftfesten, praktisch absorptionsfreien dünnen Schichten

Publications (1)

Publication Number Publication Date
CH469816A true CH469816A (de) 1969-03-15

Family

ID=4411653

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1575366A CH469816A (de) 1966-10-29 1966-10-29 Verfahren zur Herstellung von harten, haftfesten, praktisch absorptionsfreien dünnen Schichten

Country Status (4)

Country Link
CH (1) CH469816A (de)
DE (1) DE1621214A1 (de)
GB (1) GB1183979A (de)
NL (1) NL6700423A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60317926T2 (de) 2002-11-21 2008-10-16 Ciba Holding Inc. Interferenzpigmente mit einer asymmetrischen schichtstruktur
KR20070051345A (ko) 2004-08-23 2007-05-17 시바 스페셜티 케미칼스 홀딩 인크. 알루미늄 및 ＳｉＯＺ(Ｚ=0.7-2.0)를 기본으로 하는플레이크형 안료의 제조방법

Also Published As

Publication number Publication date
NL6700423A (de) 1968-05-01
GB1183979A (en) 1970-03-11
DE1621214A1 (de) 1971-04-29

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