CH404842A - Ionic sputtering vacuum pump device and method of operating this device - Google Patents
Ionic sputtering vacuum pump device and method of operating this deviceInfo
- Publication number
- CH404842A CH404842A CH715963A CH715963A CH404842A CH 404842 A CH404842 A CH 404842A CH 715963 A CH715963 A CH 715963A CH 715963 A CH715963 A CH 715963A CH 404842 A CH404842 A CH 404842A
- Authority
- CH
- Switzerland
- Prior art keywords
- operating
- vacuum pump
- sputtering vacuum
- pump device
- ionic sputtering
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US200837A US3150819A (en) | 1962-06-07 | 1962-06-07 | High vacuum apparatus and method |
Publications (1)
Publication Number | Publication Date |
---|---|
CH404842A true CH404842A (en) | 1965-12-31 |
Family
ID=22743418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH715963A CH404842A (en) | 1962-06-07 | 1963-06-07 | Ionic sputtering vacuum pump device and method of operating this device |
Country Status (4)
Country | Link |
---|---|
US (1) | US3150819A (en) |
CH (1) | CH404842A (en) |
DE (1) | DE1489221A1 (en) |
GB (1) | GB1031426A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3313474A (en) * | 1964-08-04 | 1967-04-11 | Cons Vacuum Corp | Vaporized material source |
US3515171A (en) * | 1968-07-23 | 1970-06-02 | Sloan Instr Corp | Side pumped vacuum collar |
ITUB20160885A1 (en) * | 2016-02-19 | 2017-08-19 | Getters Spa | Non-porous sintered cathodes and ion vacuum pumps containing the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB797232A (en) * | 1955-07-11 | 1958-06-25 | Manfred Von Ardenne | Improvements in or relating to high vacuum ion pumps |
US2850225A (en) * | 1955-11-10 | 1958-09-02 | Wisconsin Alumni Res Found | Pump |
-
1962
- 1962-06-07 US US200837A patent/US3150819A/en not_active Expired - Lifetime
-
1963
- 1963-05-29 GB GB21548/63A patent/GB1031426A/en not_active Expired
- 1963-05-31 DE DE19631489221 patent/DE1489221A1/en active Pending
- 1963-06-07 CH CH715963A patent/CH404842A/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB1031426A (en) | 1966-06-02 |
DE1489221A1 (en) | 1969-03-13 |
US3150819A (en) | 1964-09-29 |
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