CH404842A - Ionic sputtering vacuum pump device and method of operating this device - Google Patents

Ionic sputtering vacuum pump device and method of operating this device

Info

Publication number
CH404842A
CH404842A CH715963A CH715963A CH404842A CH 404842 A CH404842 A CH 404842A CH 715963 A CH715963 A CH 715963A CH 715963 A CH715963 A CH 715963A CH 404842 A CH404842 A CH 404842A
Authority
CH
Switzerland
Prior art keywords
operating
vacuum pump
sputtering vacuum
pump device
ionic sputtering
Prior art date
Application number
CH715963A
Other languages
German (de)
Inventor
L Abrams Irwin
J Harra David
Alto Palo
Rivera Michael
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH404842A publication Critical patent/CH404842A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
CH715963A 1962-06-07 1963-06-07 Ionic sputtering vacuum pump device and method of operating this device CH404842A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US200837A US3150819A (en) 1962-06-07 1962-06-07 High vacuum apparatus and method

Publications (1)

Publication Number Publication Date
CH404842A true CH404842A (en) 1965-12-31

Family

ID=22743418

Family Applications (1)

Application Number Title Priority Date Filing Date
CH715963A CH404842A (en) 1962-06-07 1963-06-07 Ionic sputtering vacuum pump device and method of operating this device

Country Status (4)

Country Link
US (1) US3150819A (en)
CH (1) CH404842A (en)
DE (1) DE1489221A1 (en)
GB (1) GB1031426A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3313474A (en) * 1964-08-04 1967-04-11 Cons Vacuum Corp Vaporized material source
US3515171A (en) * 1968-07-23 1970-06-02 Sloan Instr Corp Side pumped vacuum collar
ITUB20160885A1 (en) * 2016-02-19 2017-08-19 Getters Spa Non-porous sintered cathodes and ion vacuum pumps containing the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
US2850225A (en) * 1955-11-10 1958-09-02 Wisconsin Alumni Res Found Pump

Also Published As

Publication number Publication date
GB1031426A (en) 1966-06-02
DE1489221A1 (en) 1969-03-13
US3150819A (en) 1964-09-29

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