CH382364A - Ionenpumpe - Google Patents

Ionenpumpe

Info

Publication number
CH382364A
CH382364A CH7619059A CH7619059A CH382364A CH 382364 A CH382364 A CH 382364A CH 7619059 A CH7619059 A CH 7619059A CH 7619059 A CH7619059 A CH 7619059A CH 382364 A CH382364 A CH 382364A
Authority
CH
Switzerland
Prior art keywords
ion pump
ion
pump
Prior art date
Application number
CH7619059A
Other languages
English (en)
Inventor
Arthur Lloyd William
Andrew Huffman Glen
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH382364A publication Critical patent/CH382364A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH7619059A 1958-08-01 1959-07-24 Ionenpumpe CH382364A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US752591A US2983433A (en) 1958-08-01 1958-08-01 Getter ion vacuum pump apparatus

Publications (1)

Publication Number Publication Date
CH382364A true CH382364A (de) 1964-09-30

Family

ID=25026948

Family Applications (1)

Application Number Title Priority Date Filing Date
CH7619059A CH382364A (de) 1958-08-01 1959-07-24 Ionenpumpe

Country Status (6)

Country Link
US (1) US2983433A (de)
CH (1) CH382364A (de)
DE (1) DE1096539B (de)
FR (1) FR1230921A (de)
GB (2) GB910608A (de)
NL (2) NL302901A (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
US3228589A (en) * 1963-10-16 1966-01-11 Gen Electric Ion pump having encapsulated internal magnet assemblies
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
DE1302292B (de) * 1964-03-10 Varian Associates
US3376455A (en) * 1966-02-28 1968-04-02 Varian Associates Ionic vacuum pump having multiple externally mounted magnetic circuits
WO1996018204A1 (en) * 1994-12-05 1996-06-13 Color Planar Displays, Inc. Support structure for flat panel displays
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
JP2001332209A (ja) * 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636664A (en) * 1949-01-28 1953-04-28 Hertzler Elmer Afton High vacuum pumping method, apparatus, and techniques
US2726805A (en) * 1953-01-29 1955-12-13 Ernest O Lawrence Ion pump

Also Published As

Publication number Publication date
NL111716C (de)
GB910607A (de)
NL302901A (de)
US2983433A (en) 1961-05-09
DE1096539B (de) 1961-01-05
GB910608A (en) 1962-11-14
FR1230921A (fr) 1960-09-21

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