CH349247A - Method and device for carrying out glow discharge processes - Google Patents

Method and device for carrying out glow discharge processes

Info

Publication number
CH349247A
CH349247A CH349247DA CH349247A CH 349247 A CH349247 A CH 349247A CH 349247D A CH349247D A CH 349247DA CH 349247 A CH349247 A CH 349247A
Authority
CH
Switzerland
Prior art keywords
carrying
glow discharge
discharge processes
out glow
processes
Prior art date
Application number
Other languages
German (de)
Inventor
Berghaus Bernhard
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Publication of CH349247A publication Critical patent/CH349247A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
CH349247D 1956-07-14 1956-07-14 Method and device for carrying out glow discharge processes CH349247A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH865455X 1956-07-14

Publications (1)

Publication Number Publication Date
CH349247A true CH349247A (en) 1960-10-15

Family

ID=4543585

Family Applications (1)

Application Number Title Priority Date Filing Date
CH349247D CH349247A (en) 1956-07-14 1956-07-14 Method and device for carrying out glow discharge processes

Country Status (5)

Country Link
US (1) US2969475A (en)
CH (1) CH349247A (en)
DE (1) DE1054427B (en)
FR (1) FR1178871A (en)
GB (1) GB865455A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1421049B1 (en) * 1958-05-16 1970-01-29 Berghaus Elektrophysik Anst Device for carrying out reactions under electrical influence
US3143851A (en) * 1960-03-23 1964-08-11 Alwac International Inc Method and apparatus for mixing combustible fluids
US3156090A (en) * 1961-09-18 1964-11-10 Harold R Kaufman Ion rocket
US3414702A (en) * 1965-05-28 1968-12-03 Gen Electric Nonthermionic electron beam apparatus
US3603088A (en) * 1970-05-18 1971-09-07 Nasa Ion thruster cathode
SE364520B (en) * 1972-06-29 1974-02-25 Aga Ab
US7929138B1 (en) * 2008-02-15 2011-04-19 The United States Of America As Represented By The United States Department Of Energy Ambient-atmosphere glow discharge for determination of elemental concentration in solutions in a high-throughput or transient fashion

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1004170A (en) * 1910-03-12 1911-09-26 Felice Jacoviello Device for producing high-frequency oscillatory currents.
US2059257A (en) * 1934-10-15 1936-11-03 William E Letterman Spark plug
US2540256A (en) * 1948-04-09 1951-02-06 Gretener Edgar Ventilated arc
US2668260A (en) * 1951-02-07 1954-02-02 Clarence F Barnett Ion source
US2724787A (en) * 1952-08-07 1955-11-22 Gretener Edgar Arc lamps
US2704817A (en) * 1952-10-13 1955-03-22 Genarco Inc High temperature arc with method and means for preventing carbon accumulation
US2753479A (en) * 1953-04-08 1956-07-03 Du Pont Spark cell assembly
US2690515A (en) * 1953-07-22 1954-09-28 Mack Julian Ellis Method and apparatus for producing ions
BE538618A (en) * 1954-05-11
US2826708A (en) * 1955-06-02 1958-03-11 Jr John S Foster Plasma generator
US2819423A (en) * 1957-03-11 1958-01-07 Gen Electric Plasma transmitter

Also Published As

Publication number Publication date
FR1178871A (en) 1959-05-15
GB865455A (en) 1961-04-19
US2969475A (en) 1961-01-24
DE1054427B (en) 1959-04-09

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