CH339297A - Stigmator - Google Patents

Stigmator

Info

Publication number
CH339297A
CH339297A CH339297DA CH339297A CH 339297 A CH339297 A CH 339297A CH 339297D A CH339297D A CH 339297DA CH 339297 A CH339297 A CH 339297A
Authority
CH
Switzerland
Prior art keywords
stigmator
Prior art date
Application number
Other languages
English (en)
Inventor
Cornelis Van Dorsten Adrianus
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH339297A publication Critical patent/CH339297A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
CH339297D 1955-03-15 1956-03-13 Stigmator CH339297A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL339297X 1955-03-15

Publications (1)

Publication Number Publication Date
CH339297A true CH339297A (de) 1959-06-30

Family

ID=19784647

Family Applications (1)

Application Number Title Priority Date Filing Date
CH339297D CH339297A (de) 1955-03-15 1956-03-13 Stigmator

Country Status (7)

Country Link
US (1) US2914675A (de)
BE (1) BE546040A (de)
CH (1) CH339297A (de)
DE (1) DE1098634B (de)
FR (1) FR1148643A (de)
GB (1) GB793664A (de)
NL (2) NL97470C (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046397A (en) * 1959-06-17 1962-07-24 Tesla Np Device for compensating axial astigmatism of electron-optical systems
NL271119A (de) * 1961-07-10
US3223871A (en) * 1961-08-22 1965-12-14 Gen Electric Electron optical system
US3287558A (en) * 1961-09-08 1966-11-22 High Voltage Engineering Corp Charged particle deflecting device consisting of sequentially positioned uniform and non-uniform magnetic field sectors
US3150258A (en) * 1962-07-05 1964-09-22 Philips Electronic Pharma Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments
US3221133A (en) * 1963-04-02 1965-11-30 Japan Electron Optics Lab Co L Electron microscope with means for treating and observing specimens

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB504802A (en) * 1937-11-01 1939-05-01 Frederick Hermes Nicoll Improvements in or relating to permanent magnet devices for producing axially symmetrical magnetic fields
GB665094A (en) * 1947-04-12 1952-01-16 Ass Elect Ind Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses
BE481554A (de) * 1947-06-26
US2520813A (en) * 1947-12-10 1950-08-29 Rudenberg Reinhold Electron optical system
GB680300A (en) * 1950-02-23 1952-10-01 Vickers Electrical Co Ltd Improvements relating to magnetic electron lenses

Also Published As

Publication number Publication date
NL195609A (de)
NL97470C (de)
BE546040A (de)
US2914675A (en) 1959-11-24
GB793664A (en) 1958-04-23
DE1098634B (de) 1961-02-02
FR1148643A (fr) 1957-12-12

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