CH339297A - Stigmator - Google Patents
StigmatorInfo
- Publication number
- CH339297A CH339297A CH339297DA CH339297A CH 339297 A CH339297 A CH 339297A CH 339297D A CH339297D A CH 339297DA CH 339297 A CH339297 A CH 339297A
- Authority
- CH
- Switzerland
- Prior art keywords
- stigmator
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL339297X | 1955-03-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH339297A true CH339297A (de) | 1959-06-30 |
Family
ID=19784647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH339297D CH339297A (de) | 1955-03-15 | 1956-03-13 | Stigmator |
Country Status (7)
Country | Link |
---|---|
US (1) | US2914675A (de) |
BE (1) | BE546040A (de) |
CH (1) | CH339297A (de) |
DE (1) | DE1098634B (de) |
FR (1) | FR1148643A (de) |
GB (1) | GB793664A (de) |
NL (2) | NL97470C (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3046397A (en) * | 1959-06-17 | 1962-07-24 | Tesla Np | Device for compensating axial astigmatism of electron-optical systems |
NL271119A (de) * | 1961-07-10 | |||
US3223871A (en) * | 1961-08-22 | 1965-12-14 | Gen Electric | Electron optical system |
US3287558A (en) * | 1961-09-08 | 1966-11-22 | High Voltage Engineering Corp | Charged particle deflecting device consisting of sequentially positioned uniform and non-uniform magnetic field sectors |
US3150258A (en) * | 1962-07-05 | 1964-09-22 | Philips Electronic Pharma | Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments |
US3221133A (en) * | 1963-04-02 | 1965-11-30 | Japan Electron Optics Lab Co L | Electron microscope with means for treating and observing specimens |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB504802A (en) * | 1937-11-01 | 1939-05-01 | Frederick Hermes Nicoll | Improvements in or relating to permanent magnet devices for producing axially symmetrical magnetic fields |
GB665094A (en) * | 1947-04-12 | 1952-01-16 | Ass Elect Ind | Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses |
BE481554A (de) * | 1947-06-26 | |||
US2520813A (en) * | 1947-12-10 | 1950-08-29 | Rudenberg Reinhold | Electron optical system |
GB680300A (en) * | 1950-02-23 | 1952-10-01 | Vickers Electrical Co Ltd | Improvements relating to magnetic electron lenses |
-
0
- BE BE546040D patent/BE546040A/xx unknown
- NL NL195609D patent/NL195609A/xx unknown
- NL NL97470D patent/NL97470C/xx active
-
1956
- 1956-03-10 DE DEN11947A patent/DE1098634B/de active Pending
- 1956-03-12 GB GB7644/56A patent/GB793664A/en not_active Expired
- 1956-03-13 FR FR1148643D patent/FR1148643A/fr not_active Expired
- 1956-03-13 CH CH339297D patent/CH339297A/de unknown
- 1956-03-14 US US571458A patent/US2914675A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
NL195609A (de) | |
NL97470C (de) | |
BE546040A (de) | |
US2914675A (en) | 1959-11-24 |
GB793664A (en) | 1958-04-23 |
DE1098634B (de) | 1961-02-02 |
FR1148643A (fr) | 1957-12-12 |
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