CA964842A - Defluorination of phosphoric acid - Google Patents
Defluorination of phosphoric acidInfo
- Publication number
- CA964842A CA964842A CA142,474A CA142474A CA964842A CA 964842 A CA964842 A CA 964842A CA 142474 A CA142474 A CA 142474A CA 964842 A CA964842 A CA 964842A
- Authority
- CA
- Canada
- Prior art keywords
- defluorination
- phosphoric acid
- phosphoric
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15131071A | 1971-06-09 | 1971-06-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA964842A true CA964842A (en) | 1975-03-25 |
Family
ID=22538179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA142,474A Expired CA964842A (en) | 1971-06-09 | 1972-05-18 | Defluorination of phosphoric acid |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA964842A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110857913A (en) * | 2018-08-24 | 2020-03-03 | 株式会社东芝 | Measuring device, etching system, silicon concentration measuring method, and silicon concentration measuring program |
-
1972
- 1972-05-18 CA CA142,474A patent/CA964842A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110857913A (en) * | 2018-08-24 | 2020-03-03 | 株式会社东芝 | Measuring device, etching system, silicon concentration measuring method, and silicon concentration measuring program |
CN110857913B (en) * | 2018-08-24 | 2022-08-12 | 株式会社东芝 | Measuring device, etching system, silicon concentration measuring method, and silicon concentration measuring program |
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