CA953099A - Rotational mechanism - Google Patents

Rotational mechanism

Info

Publication number
CA953099A
CA953099A CA120,462A CA120462A CA953099A CA 953099 A CA953099 A CA 953099A CA 120462 A CA120462 A CA 120462A CA 953099 A CA953099 A CA 953099A
Authority
CA
Canada
Prior art keywords
rotational mechanism
rotational
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA120,462A
Other versions
CA120462S (en
Inventor
Richard R. Phinney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA953099A publication Critical patent/CA953099A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H33/00Gearings based on repeated accumulation and delivery of energy
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00Chucks or sockets
    • Y10T279/17Socket type
    • Y10T279/17923Transverse pin
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00Chucks or sockets
    • Y10T279/17Socket type
    • Y10T279/17931Screw threaded

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
CA120,462A 1970-08-13 1971-08-11 Rotational mechanism Expired CA953099A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6335170A 1970-08-13 1970-08-13

Publications (1)

Publication Number Publication Date
CA953099A true CA953099A (en) 1974-08-20

Family

ID=22048614

Family Applications (1)

Application Number Title Priority Date Filing Date
CA120,462A Expired CA953099A (en) 1970-08-13 1971-08-11 Rotational mechanism

Country Status (6)

Country Link
US (1) US3645229A (en)
JP (1) JPS5035627B1 (en)
CA (1) CA953099A (en)
DE (1) DE2135564C3 (en)
FR (1) FR2101512A5 (en)
GB (1) GB1348708A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4246996A (en) * 1978-11-20 1981-01-27 Borg-Warner Corporation Screw operated coupling
US4583488A (en) * 1984-03-23 1986-04-22 International Business Machines Corporation Variable axis rotary drive vacuum deposition system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2885232A (en) * 1958-02-05 1959-05-05 Sperry Rand Corp Coupling
US2960344A (en) * 1959-09-23 1960-11-15 Ettco Tool & Machine Co Inc Adjustable collet-type chuck
US3286776A (en) * 1964-06-23 1966-11-22 Kenneth Conklin Combination power hand tool

Also Published As

Publication number Publication date
US3645229A (en) 1972-02-29
DE2135564C3 (en) 1974-09-19
GB1348708A (en) 1974-03-20
JPS5035627B1 (en) 1975-11-18
DE2135564A1 (en) 1972-02-17
FR2101512A5 (en) 1972-03-31
DE2135564B2 (en) 1974-02-07

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