CA936398A - High resolution contact printing - Google Patents

High resolution contact printing

Info

Publication number
CA936398A
CA936398A CA082978A CA82978A CA936398A CA 936398 A CA936398 A CA 936398A CA 082978 A CA082978 A CA 082978A CA 82978 A CA82978 A CA 82978A CA 936398 A CA936398 A CA 936398A
Authority
CA
Canada
Prior art keywords
high resolution
contact printing
resolution contact
printing
resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA082978A
Other versions
CA82978S (en
Inventor
C. Kammerzell Robert
G. Jordan Joseph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA936398A publication Critical patent/CA936398A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA082978A 1969-06-23 1970-05-19 High resolution contact printing Expired CA936398A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83532169A 1969-06-23 1969-06-23

Publications (1)

Publication Number Publication Date
CA936398A true CA936398A (en) 1973-11-06

Family

ID=25269209

Family Applications (1)

Application Number Title Priority Date Filing Date
CA082978A Expired CA936398A (en) 1969-06-23 1970-05-19 High resolution contact printing

Country Status (6)

Country Link
US (1) US3604800A (en)
JP (1) JPS4938726B1 (en)
CA (1) CA936398A (en)
DE (1) DE2028181A1 (en)
FR (1) FR2052373A5 (en)
GB (1) GB1287340A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3834815A (en) * 1973-07-06 1974-09-10 Ipt Corp Photocopying apparatus with vacuum means
GB1511332A (en) * 1974-04-30 1978-05-17 Hoechst Ag Printing frame
JPS51105012U (en) * 1975-02-18 1976-08-23
US4007987A (en) * 1976-01-12 1977-02-15 Tamarack Scientific Co. Inc. Vacuum contact printing system and process for electronic circuit photomask replication
US4054383A (en) * 1976-02-02 1977-10-18 International Business Machines Corporation Jig and process for contact printing
DE3577929D1 (en) * 1985-12-17 1990-06-28 Agfa Gevaert Nv VACUUM CONTACT EXPOSURE DEVICE.
CS263521B1 (en) * 1987-04-24 1989-04-14 Slavata Bohumil Chuck frame of contact copying machine for working masks copying
FR2667957B1 (en) * 1990-10-15 1993-10-22 Albert Visage DEVICE FOR REPRODUCING IMAGES, BY CONTACT, ON A BLANK PHOTOGRAPHIC FILM FROM A TRANSPARENT ORIGINAL.
CN113391525A (en) * 2021-06-08 2021-09-14 吉林华微电子股份有限公司 Photoetching plate copying machine and photoetching plate copying system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521953A (en) * 1968-03-13 1970-07-28 Kulicke & Soffa Ind Inc Adjustable separation wafer clamp

Also Published As

Publication number Publication date
FR2052373A5 (en) 1971-04-09
US3604800A (en) 1971-09-14
DE2028181A1 (en) 1970-12-23
GB1287340A (en) 1972-08-31
JPS4938726B1 (en) 1974-10-19

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