CA834582A - Pump with auxiliary vacuum pumping stage - Google Patents

Pump with auxiliary vacuum pumping stage

Info

Publication number
CA834582A
CA834582A CA834582A CA834582DA CA834582A CA 834582 A CA834582 A CA 834582A CA 834582 A CA834582 A CA 834582A CA 834582D A CA834582D A CA 834582DA CA 834582 A CA834582 A CA 834582A
Authority
CA
Canada
Prior art keywords
pump
vacuum pumping
pumping stage
auxiliary vacuum
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA834582A
Inventor
Andriulis Vytautas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cenco Instruments Corp
Original Assignee
Cenco Instruments Corp
Publication date
Application granted granted Critical
Publication of CA834582A publication Critical patent/CA834582A/en
Expired legal-status Critical Current

Links

CA834582A Pump with auxiliary vacuum pumping stage Expired CA834582A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA834582T

Publications (1)

Publication Number Publication Date
CA834582A true CA834582A (en) 1970-02-17

Family

ID=36312040

Family Applications (1)

Application Number Title Priority Date Filing Date
CA834582A Expired CA834582A (en) Pump with auxiliary vacuum pumping stage

Country Status (1)

Country Link
CA (1) CA834582A (en)

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