CA808604A - Manufacture of semiconductor devices by epitaxial deposition - Google Patents

Manufacture of semiconductor devices by epitaxial deposition

Info

Publication number
CA808604A
CA808604A CA808604A CA808604DA CA808604A CA 808604 A CA808604 A CA 808604A CA 808604 A CA808604 A CA 808604A CA 808604D A CA808604D A CA 808604DA CA 808604 A CA808604 A CA 808604A
Authority
CA
Canada
Prior art keywords
manufacture
semiconductor devices
epitaxial deposition
epitaxial
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA808604A
Inventor
Schluter Kurt
Kappelmeyer Rudolf
Steggewentz Hermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Publication date
Application granted granted Critical
Publication of CA808604A publication Critical patent/CA808604A/en
Expired legal-status Critical Current

Links

CA808604A Manufacture of semiconductor devices by epitaxial deposition Expired CA808604A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA808604T

Publications (1)

Publication Number Publication Date
CA808604A true CA808604A (en) 1969-03-18

Family

ID=36279114

Family Applications (1)

Application Number Title Priority Date Filing Date
CA808604A Expired CA808604A (en) Manufacture of semiconductor devices by epitaxial deposition

Country Status (1)

Country Link
CA (1) CA808604A (en)

Similar Documents

Publication Publication Date Title
CA926036A (en) Fabrication of semiconductor devices
CA937337A (en) Fabrication of semiconductor devices
CA921370A (en) Apparatus for the epitaxial deposition of semiconductor material
CA950334A (en) Manufacture of epitaxially crown layers of semiconductor compounds
CA920720A (en) Fabrication of semiconductor devices
CA937495A (en) Production of semiconductor arrangements
CA808604A (en) Manufacture of semiconductor devices by epitaxial deposition
IL42260A0 (en) The manufacture of semiconductor devices by film deposition
CA816667A (en) Epitaxial deposition of semiconductor material
CA825350A (en) Manufacture of semiconductor elements
CA830691A (en) Manufacture of semiconductor devices
AU440658B2 (en) Dopant sources for use inthe manufacture of semiconductor devices
CA934483A (en) Fabrication of complementary semiconductor devices
CA811344A (en) Manufacture of epitaxially grown layers of semiconductor compounds
AU1255070A (en) Dopant sources for use inthe manufacture of semiconductor devices
CA819340A (en) Manufacture of semiconductor arrangements
CA833195A (en) Manufacture of semiconductor devices
CA808605A (en) Epitaxial deposition of crystalline layers
CA804567A (en) Epitaxial deposition of crystalline layers
CA840048A (en) Manufacture of semiconductor systems
CA840396A (en) Manufacture of semiconductor systems
CA816340A (en) Fabrication of semiconductor devices
CA829545A (en) Fabrication of semiconductor devices
CA794997A (en) Production of semiconductor devices
CA826619A (en) Process for the monocrystalline deposition of compound semiconductors