CA702672A - Deposition of metal layers on insulating substrates in an inert atmosphere - Google Patents

Deposition of metal layers on insulating substrates in an inert atmosphere

Info

Publication number
CA702672A
CA702672A CA702672A CA702672DA CA702672A CA 702672 A CA702672 A CA 702672A CA 702672 A CA702672 A CA 702672A CA 702672D A CA702672D A CA 702672DA CA 702672 A CA702672 A CA 702672A
Authority
CA
Canada
Prior art keywords
deposition
metal layers
inert atmosphere
insulating substrates
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA702672A
Inventor
G. Simmons John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Space Systems Loral LLC
Original Assignee
Philco Ford Corp
Publication date
Application granted granted Critical
Publication of CA702672A publication Critical patent/CA702672A/en
Expired legal-status Critical Current

Links

CA702672A Deposition of metal layers on insulating substrates in an inert atmosphere Expired CA702672A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA702672T

Publications (1)

Publication Number Publication Date
CA702672A true CA702672A (en) 1965-01-26

Family

ID=36016334

Family Applications (1)

Application Number Title Priority Date Filing Date
CA702672A Expired CA702672A (en) Deposition of metal layers on insulating substrates in an inert atmosphere

Country Status (1)

Country Link
CA (1) CA702672A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528906A (en) * 1967-06-05 1970-09-15 Texas Instruments Inc Rf sputtering method and system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528906A (en) * 1967-06-05 1970-09-15 Texas Instruments Inc Rf sputtering method and system

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