CA623761A - Purification of gases used in the production of silicon - Google Patents

Purification of gases used in the production of silicon

Info

Publication number
CA623761A
CA623761A CA623761A CA623761DA CA623761A CA 623761 A CA623761 A CA 623761A CA 623761 A CA623761 A CA 623761A CA 623761D A CA623761D A CA 623761DA CA 623761 A CA623761 A CA 623761A
Authority
CA
Canada
Prior art keywords
purification
silicon
production
gases used
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA623761A
Inventor
L. Bush Eric
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Standard Telephone and Cables Manufacturing Canada Ltd
Original Assignee
Standard Telephone and Cables Manufacturing Canada Ltd
Publication date
Application granted granted Critical
Publication of CA623761A publication Critical patent/CA623761A/en
Expired legal-status Critical Current

Links

CA623761A Purification of gases used in the production of silicon Expired CA623761A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA623761T

Publications (1)

Publication Number Publication Date
CA623761A true CA623761A (en) 1961-07-11

Family

ID=35878940

Family Applications (1)

Application Number Title Priority Date Filing Date
CA623761A Expired CA623761A (en) Purification of gases used in the production of silicon

Country Status (1)

Country Link
CA (1) CA623761A (en)

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