CA2943892C - Method for fragmenting a rod-like material, in particular made of polycrystalline silicon - Google Patents
Method for fragmenting a rod-like material, in particular made of polycrystalline silicon Download PDFInfo
- Publication number
- CA2943892C CA2943892C CA2943892A CA2943892A CA2943892C CA 2943892 C CA2943892 C CA 2943892C CA 2943892 A CA2943892 A CA 2943892A CA 2943892 A CA2943892 A CA 2943892A CA 2943892 C CA2943892 C CA 2943892C
- Authority
- CA
- Canada
- Prior art keywords
- rod
- electrode arrangement
- high voltage
- electrodes
- voltage pulses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 title claims abstract description 194
- 238000000034 method Methods 0.000 title claims abstract description 120
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 10
- 230000008569 process Effects 0.000 claims abstract description 69
- 239000012530 fluid Substances 0.000 claims abstract description 43
- 230000015556 catabolic process Effects 0.000 claims abstract description 32
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- 238000013467 fragmentation Methods 0.000 claims description 23
- 238000006062 fragmentation reaction Methods 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 6
- 239000012634 fragment Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000011010 flushing procedure Methods 0.000 claims description 2
- 238000011109 contamination Methods 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 22
- 239000010703 silicon Substances 0.000 description 22
- 239000013078 crystal Substances 0.000 description 3
- 229920000136 polysorbate Polymers 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- QHGVXILFMXYDRS-UHFFFAOYSA-N pyraclofos Chemical compound C1=C(OP(=O)(OCC)SCCC)C=NN1C1=CC=C(Cl)C=C1 QHGVXILFMXYDRS-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229940000425 combination drug Drugs 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C19/00—Other disintegrating devices or methods
- B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C19/00—Other disintegrating devices or methods
- B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
- B02C2019/183—Crushing by discharge of high electrical energy
Landscapes
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Disintegrating Or Milling (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CH2014/000039 WO2015143572A1 (de) | 2014-03-26 | 2014-03-26 | Verfahren zum fragmentieren eines stangenartigen materials, insbesondere aus polykristallinem silizium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2943892A1 CA2943892A1 (en) | 2015-10-01 |
| CA2943892C true CA2943892C (en) | 2021-11-09 |
Family
ID=50486685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2943892A Active CA2943892C (en) | 2014-03-26 | 2014-03-26 | Method for fragmenting a rod-like material, in particular made of polycrystalline silicon |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP3122463B1 (de) |
| JP (1) | JP6403795B2 (de) |
| KR (1) | KR20160137539A (de) |
| CN (1) | CN106132550B (de) |
| CA (1) | CA2943892C (de) |
| TW (1) | TWI652383B (de) |
| WO (1) | WO2015143572A1 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3354622A1 (de) * | 2017-01-26 | 2018-08-01 | Omya International AG | Prozess zur herstellung von fragmentiertem natürlichen calciumcarbonat mit reduziertem gehalt an verunreinigungen sowie die hierbei erhaltenen produkte |
| CN107350056B (zh) * | 2017-08-24 | 2018-04-24 | 华中科技大学 | 一种用于流水作业的高压电脉冲破碎反应槽 |
| JP6947126B2 (ja) | 2018-06-12 | 2021-10-13 | 株式会社Sumco | シリコンロッドの破砕方法及び装置並びにシリコン塊の製造方法 |
| TWI802721B (zh) * | 2018-07-04 | 2023-05-21 | 日商三菱綜合材料股份有限公司 | 半導體原料之破碎方法或裂痕產生方法及半導體原料塊之製造方法 |
| CN110215984B (zh) * | 2019-07-05 | 2021-04-13 | 东北大学 | 一种强化方铅矿破碎及分选的高压电脉冲预处理方法 |
| JP2021107042A (ja) * | 2019-12-27 | 2021-07-29 | 三菱マテリアル株式会社 | 半導体材料の破砕方法又はクラック発生方法、及び半導体材料塊の製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1207376A (en) * | 1982-05-21 | 1986-07-08 | Uri Andres | Method and apparatus for crushing materials such as minerals |
| CN86104470A (zh) * | 1986-06-27 | 1988-01-06 | Ceee公司 | 脉冲电能发射***物质的方法和设备 |
| DE19534232C2 (de) * | 1995-09-15 | 1998-01-29 | Karlsruhe Forschzent | Verfahren zur Zerkleinerung und Zertrümmerung von aus nichtmetallischen oder teilweise metallischen Bestandteilen konglomerierten Festkörpern und zur Zerkleinerung homogener nichtmetallischer Festkörper |
| DE19543914C1 (de) * | 1995-11-27 | 1997-01-02 | Marcon Immobilien Gmbh | Verfahren und Vorrichtung zur Bearbeitung von Feststoffen |
| JPH09192526A (ja) * | 1996-01-12 | 1997-07-29 | Kobe Steel Ltd | 放電破砕装置 |
| DE19727441A1 (de) * | 1997-06-27 | 1999-01-07 | Wacker Chemie Gmbh | Vorrichtung und Verfahren zum Zerkleinern von Halbleitermaterial |
| DE19727534C2 (de) * | 1997-06-28 | 2002-06-06 | Tzn Forschung & Entwicklung | Verfahren und Vorrichtung zum Reinigen von mineralischen Feststoffen, insbesondere von Kies und Sand |
| DE19736027C2 (de) * | 1997-08-20 | 2000-11-02 | Tzn Forschung & Entwicklung | Verfahren und Vorrichtung zum Aufschluß von Beton, insbesondere von Stahlbetonplatten |
-
2014
- 2014-03-26 JP JP2016559172A patent/JP6403795B2/ja active Active
- 2014-03-26 CA CA2943892A patent/CA2943892C/en active Active
- 2014-03-26 KR KR1020167025960A patent/KR20160137539A/ko not_active Application Discontinuation
- 2014-03-26 WO PCT/CH2014/000039 patent/WO2015143572A1/de active Application Filing
- 2014-03-26 CN CN201480077501.8A patent/CN106132550B/zh active Active
- 2014-03-26 EP EP14717391.8A patent/EP3122463B1/de active Active
- 2014-12-03 TW TW103142023A patent/TWI652383B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3122463B1 (de) | 2018-06-27 |
| EP3122463A1 (de) | 2017-02-01 |
| CA2943892A1 (en) | 2015-10-01 |
| TW201538813A (zh) | 2015-10-16 |
| KR20160137539A (ko) | 2016-11-30 |
| WO2015143572A1 (de) | 2015-10-01 |
| JP6403795B2 (ja) | 2018-10-10 |
| CN106132550A (zh) | 2016-11-16 |
| TWI652383B (zh) | 2019-03-01 |
| JP2017515774A (ja) | 2017-06-15 |
| CN106132550B (zh) | 2020-02-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20190214 |